Target tube cooling balancing structure
By setting the mandrel and magnet in the target cartridge of the vacuum magnetron sputtering coating equipment, and installing fillers on the outside of the mandrel to form a cooling water flow gap, the problems of high temperature of the target cartridge and unbalanced cooling are solved, and the rapid cooling of magnet and stable operation of the equipment are achieved.
Patent Information
- Application Number
- CN202421677957.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-15
- Publication Date
- 2025-04-29
- Estimated Expiration
- 2034-07-15
AI Technical Summary
When the existing vacuum magnetron sputtering coating equipment is working, the target cartridge temperature is high and the uneven cooling is caused by unstable magnet temperature, affecting the coating effect.
A target cartridge cooling equalization structure is designed. By setting the mandrel and magnetic steel in the target cartridge and installing fillers on the outside of the mandrel, a gap for cooling water flow is formed to accelerate the flow rate of cooling water and achieve rapid cooling of magnetic steel.
Through this structure, the magnet can maintain a stable temperature of less than 60°C during the working process, ensuring the stable operation of the vacuum magnetron sputtering coating equipment.
Smart Images
Figure CN222809532U_ABST
Abstract
Description
[Technical field]
[0001] The utility model relates to a target barrel cooling balance structure. [Background Technology]
[0002] When the existing vacuum magnetron sputtering coating equipment is working, the temperature of the target barrel is very high, and the heat must be dissipated in time. At the same time, the temperature of the magnetic steel in the target barrel must not exceed 60°C. The magnetic field strength of the magnetic steel will change, and the vacuum sputtering will be unstable, affecting the coating effect. Therefore, during the operation of the vacuum magnetron sputtering coating equipment, the target barrel and the magnetic steel need to be cooled. The existing cooling method is generally to input cooling water into the target barrel and cool it down by cooling water. However, in the existing structure, the magnetic steel is generally set in the target barrel and close to the inner wall of the target barrel. At the same time, when the cooling water flows in the target barrel, the cooling water flows slowly near the edge of the inner wall of the target barrel, so the cooling effect of the magnetic steel is poor. [Contents of the utility model]
[0003] The utility model overcomes the shortcomings of the prior art and provides a target barrel cooling balance structure.
[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:
[0005] A target barrel cooling and balancing structure, characterized in that: it includes a target barrel, a core shaft arranged along the length direction and connected to the target barrel for inputting cooling water into the target barrel is provided in the target barrel, a magnet arranged along the length direction and connected to the core shaft is provided in the target barrel, a filling piece is sleeved on the outside of the core shaft in the target barrel, a first filling piece groove is provided on the filling piece for the magnet to be installed, and gaps for cooling water to flow are respectively provided between the outer side surface of the filling piece and the inner side surface of the target barrel, and between the magnet and the inner side surface of the target barrel.
[0006] The target barrel cooling and balancing structure as described above is characterized in that the magnetic steel includes a yoke which is arranged in the target barrel along the length direction and connected to the core shaft, and a plurality of magnets are arranged on the yoke, and the yoke is arranged in the groove of the first filling piece.
[0007] The target barrel cooling and balancing structure as described above is characterized in that a stainless steel shell is provided outside the magnet.
[0008] The target barrel cooling and balancing structure as described above is characterized in that: a plurality of yoke positioning grooves arranged along the length direction are provided on the upper side surface of the yoke, and the magnets are respectively installed in the yoke positioning grooves.
[0009] A target barrel cooling and balancing structure as described above is characterized in that: the yoke is a convex yoke, the yoke positioning grooves are respectively arranged on the top side and the shoulder sides of the convex yoke, and gaps for cooling water to flow are respectively provided between the side of the first filling piece groove and the magnets installed on the shoulder sides, and between the magnets installed on the top side and the magnets installed on the shoulder sides.
[0010] The target barrel cooling and balancing structure as described above is characterized in that two magnets arranged side by side are arranged in the yoke positioning groove on the top side of the convex shaped yoke.
[0011] The target barrel cooling and balancing structure as described above is characterized in that the magnets arranged on the top side of the convex-shaped magnetic yoke have opposite polarities to the magnets arranged on the shoulder side of the convex-shaped magnetic yoke.
[0012] The target barrel cooling and balancing structure as described above is characterized in that the core shaft and the magnetic yoke are connected by screws.
[0013] The target barrel cooling and balancing structure as described above is characterized in that a second filling member groove for inserting the core shaft and a third filling member groove for inserting the screw are provided on the filling member.
[0014] The target barrel cooling and balancing structure as described above is characterized in that the filling piece is a plastic filler.
[0015] The beneficial effects of the utility model are:
[0016] The utility model sleeves a filling piece on the outer side of the core shaft, so that gaps for cooling water to flow are formed between the outer side surface of the filling piece and the inner side surface of the target barrel, and between the magnetic steel and the inner side surface of the target barrel. By reducing the flow space of the cooling water, the flow speed of the cooling water around the magnetic steel is accelerated, and the magnetic steel is quickly cooled and cooled, so that the magnetic steel maintains a stable working state temperature of less than 60°C during the working process, thereby enabling the vacuum magnetron sputtering coating equipment to work stably. [Drawings]
[0017] Figure 1 This is a cross-sectional view of the target barrel structure of the utility model;
[0018] Figure 2 This is an exploded view of the internal structure of the target tube of the utility model. [Specific implementation method]
[0019] The technical solutions in the embodiments of the present utility model will be described clearly and completely below in conjunction with the accompanying drawings.
[0020] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly. In addition, the descriptions of "preferred", "sub-preferred", etc. in the present invention are only used for descriptive purposes, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "preferred" or "sub-preferred" may explicitly or implicitly include at least one of the features.
[0021] like Figure 1-2 As shown, a target barrel cooling balance structure includes a target barrel 1, a core shaft 2 arranged along the length direction and connected to the target barrel 1 for inputting cooling water into the target barrel 1 is provided in the target barrel 1, a magnetic steel 3 arranged along the length direction and connected to the core shaft 2 is provided in the target barrel 1, a filling piece 4 is sleeved on the outside of the core shaft 2 in the target barrel 1, a first filling piece groove 41 for the magnetic steel 3 to be loaded is provided on the filling piece 4, and gaps 5 for cooling water to flow are respectively provided between the outer side surface of the filling piece 4 and the inner side surface of the target barrel 1, and between the magnetic steel 3 and the inner side surface of the target barrel 1. By providing the filling piece 4, the flow space of the cooling water in the target barrel 1 is reduced, thereby accelerating the flow speed of the cooling water around the magnetic steel 3, thereby enhancing the cooling effect on the magnetic steel 3, so that the magnetic steel maintains a stable working state temperature of less than 60°C during the working process, and the vacuum magnetron sputtering coating equipment works stably.
[0022] like Figure 1-2 As shown, the mandrel 2 and the yoke 31 are connected by screws 6, so that the magnetic steel 3 and the mandrel 2 are quickly connected and fixed; the filling piece 4 is provided with a second filling piece groove 42 for the mandrel 2 to be installed and a third filling piece groove 43 for the screw 6 to be installed. During installation, the assembled mandrel 2, the magnetic steel 3 and the screw 6 are installed from one end of the filling piece 4 into the first filling piece groove 41, the second filling piece groove 42 and the third filling piece groove 43. On the other hand, a screw hole is provided on the side of the filling piece 4, and the screw is threadedly connected with the screw hole and the screw end is pressed against the outer surface of the mandrel 2, so that the filling piece 4 and the mandrel 2 are fixedly connected.
[0023] like Figure 1-2 As shown, in this case, the target barrel 1, the core shaft 2 and the filling member 3 are concentrically arranged; the filling member 4 is a plastic filler, which is light in weight and has strong plasticity, and is easy to produce and assemble.
[0024] like Figure 1-2As shown, the magnetic steel 3 includes a yoke 31 which is arranged along the length direction in the target tube 1 and connected to the core shaft 2. A plurality of magnets 32 are arranged on the yoke 31, and the yoke 31 is arranged in the first filling member groove 41. A stainless steel shell 33 is provided on the outer side of the magnet 32 to protect the magnet 32 and prevent the cooling water from directly contacting the magnet 32 and being corroded.
[0025] like Figure 1-2 As shown, a plurality of yoke positioning grooves 34 are provided on the upper side surface of the yoke 31 along the length direction, and the magnets 32 are respectively installed in the yoke positioning grooves 34 to achieve rapid positioning and installation of the magnets 32 .
[0026] like Figure 1-2 As shown, the yoke 31 is a convex yoke, and the yoke positioning grooves 34 are respectively arranged on the top side surface and the shoulder sides of the convex yoke. Two magnets 32 are arranged side by side in the yoke positioning groove 34 on the top side surface of the convex yoke; the magnets 32 arranged on the top side surface of the convex yoke and the magnets 32 arranged on the shoulder sides of the convex yoke have opposite polarities; gaps 5 for cooling water to flow are respectively provided between the side surface of the first filling member groove 41 and the magnets 32 installed on the shoulder sides, and between the magnets 32 installed on the top side surface and the magnets 32 installed on the shoulder sides, so as to increase the contact area between the magnetic steel 3 and the cooling water and further enhance the cooling effect.
[0027] The above are only preferred embodiments of the present invention, and are not intended to limit the patent scope of the present invention. All equivalent structural changes made using the contents of the present invention specification and drawings under the utility model concept, or directly or indirectly applied in other related technical fields are included in the patent protection scope of the present invention.
Claims
1. A target barrel cooling balance structure, characterized in that: The invention comprises a target barrel (1), wherein a core shaft (2) is arranged along the length direction and connected to the target barrel (1) for inputting cooling water into the target barrel (1), wherein a magnetic steel (3) is arranged along the length direction and connected to the core shaft (2), wherein a filling piece (4) is sleeved on the outer side of the core shaft (2) in the target barrel (1), wherein a first filling piece groove (41) is provided on the filling piece (4) for inserting the magnetic steel (3), and gaps (5) for cooling water to flow are respectively provided between the outer side surface of the filling piece (4) and the inner side surface of the target barrel (1), and between the magnetic steel (3) and the inner side surface of the target barrel (1).
2. A target barrel cooling and balancing structure according to claim 1, characterized in that: The magnetic steel (3) comprises a yoke (31) which is arranged in the target barrel (1) along the length direction and connected to the core shaft (2); a plurality of magnets (32) are arranged on the yoke (31); and the yoke (31) is arranged in a first filling member groove (41).
3. A target barrel cooling and balancing structure according to claim 2, characterized in that: A stainless steel housing (33) is provided outside the magnet (32).
4. A target barrel cooling and balancing structure according to claim 2, characterized in that: A plurality of yoke positioning grooves (34) arranged along the length direction are provided on the upper side surface of the yoke (31), and the magnets (32) are respectively installed in the yoke positioning grooves (34).
5. A target barrel cooling and balancing structure according to claim 4, characterized in that: The yoke (31) is a convex yoke, and the yoke positioning grooves (34) are respectively arranged on the top side surface and the shoulder side surfaces of the convex yoke, and gaps (5) for cooling water to flow are respectively arranged between the side surface of the first filling member groove (41) and the magnets (32) installed on the shoulder side surfaces on both sides, and between the magnets (32) installed on the top side surface and the magnets (32) installed on the shoulder side surfaces on both sides.
6. A target barrel cooling and balancing structure according to claim 5, characterized in that: Two magnets (32) arranged side by side are arranged in a yoke positioning groove (34) on the top side of the convex shaped yoke.
7. A target barrel cooling and balancing structure according to claim 5, characterized in that: The magnet (32) arranged on the top side of the convex-shaped magnetic yoke has opposite polarity to the magnet (32) arranged on the shoulder side of the convex-shaped magnetic yoke.
8. A target barrel cooling and balancing structure according to claim 2, characterized in that: The core shaft (2) and the magnetic yoke (31) are connected via screws (6).
9. A target barrel cooling and balancing structure according to claim 8, characterized in that: The filling piece (4) is provided with a second filling piece groove (42) for the core shaft (2) to be installed, and a third filling piece groove (43) for the screw (6) to be installed.
10. A target barrel cooling and balancing structure according to claim 1, characterized in that: The filling piece (4) is a plastic filler.