Vacuum coating machine

Abstract

The utility model discloses a vacuum coating machine, which belongs to the technical field of vacuum coating, and comprises an annular main cavity consisting of an inner wall and an outer wall, a rectangular groove body is arranged on the outer wall of the annular main cavity, and a plugging piece is arranged on one side of the rectangular groove body; a rotating assembly is arranged in the annular main cavity; the device comprises an annular main cavity, a plurality of target material modules are installed in the annular main cavity, the exterior of the annular main cavity is connected with a molecular pump through an installation plate, an ICP module is installed outside the annular main cavity, and the molecular pump and the ICP module are both communicated with the interior of the annular main cavity through pipelines; according to the utility model, the molecular pump and the target material module are connected inside the annular main cavity through the pipeline, so that the vacuum degree control and the structure compactness are facilitated, the production flexibility can be improved, different materials are allowed to be deposited simultaneously or alternately, and a product placed on the jig is driven by the rotating stand to rotate; therefore, the automatic coating process is facilitated, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating machine. Background Art

[0002] Vacuum coating technology has been booming since the 21st century. The continuous innovation of vacuum coating technology has made it widely used in many industries. In recent years, vacuum coating technology has made great progress in semiconductors, optics, materials science and other fields.

[0003] Generally speaking, vacuum coating machines are mainly divided into two types: evaporation and sputtering according to the physical state of target material deposition. The coating process needs to be carried out under a relatively high vacuum degree, including many process technologies, such as resistance heating evaporation, electromagnetic heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, etc. Each coating technology direction will produce a variety of specific coating processes according to the actual coating needs, and then customize the coating machine for the corresponding process.

[0004] Existing coating machines are often only suitable for specific types of film surface treatment, which limits the diversity of products. In addition, existing coating machines are complicated to operate and have high requirements for operators, which increases the difficulty of operation and the error rate. Therefore, a vacuum coating machine is proposed.

[0005] The above information disclosed in the background technology is only used to increase the understanding of the background technology of the utility model, therefore, it may include prior art that is not known to ordinary technicians in the field. Utility Model Content

[0006] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the utility model is to provide a vacuum coating machine.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] A vacuum coating machine, comprising: an annular main cavity composed of an inner wall and an outer wall, wherein the outer wall of the annular main cavity is provided with a rectangular groove, and a sealing member is installed on one side of the rectangular groove;

[0009] A rotating assembly is provided inside the annular main cavity;

[0010] A plurality of target modules are installed inside the annular main cavity, a molecular pump is connected to the outside of the annular main cavity via a mounting plate, an ICP module is installed outside the annular main cavity, and both the molecular pump and the ICP module are connected to the inside of the annular main cavity via a pipeline.

[0011] As a further optimization solution of the present application, the blocking piece is a second door body.

[0012] As a further optimization solution of the present application, the number of rectangular troughs is at least two, and the two blocking members are one of plug valves or flap valves.

[0013] As a further optimization solution of the present application, the number of rectangular trough bodies is at least two, one blocking member is a plug valve, and the other blocking member is a flap valve.

[0014] As a further optimization scheme of the present application, the side of the gate valve away from the annular main cavity is connected to an atmospheric transition vacuum cavity, two groups of cassettes are symmetrically installed inside the atmospheric transition vacuum cavity, a plurality of jigs are arrayed on the cassettes, a grabbing arm for picking up the jigs is installed on the inner bottom wall of the atmospheric transition vacuum cavity, and a first door body is installed inside the atmospheric transition vacuum cavity through a hinge.

[0015] As a further optimization solution of the present application, the rotating assembly includes two upper and lower rotating frames, which are symmetrically installed inside the annular main cavity. A track is installed on the rotating frame, and the fixture is fixed on the track.

[0016] As a further optimization scheme of the present application, the interiors of the annular main cavity and the atmospheric transition vacuum cavity are both connected to vacuum components, and the vacuum components include a rough pump, and the rough pump is connected to the interiors of the annular main cavity and the atmospheric transition vacuum cavity through a vacuum pipe, and the interior of the annular main cavity is connected to a maintenance pump through a vacuum pipe.

[0017] As a further optimization solution of the present application, a pulse bias module and a plurality of inspection doors are installed on the outer wall of the annular main cavity.

[0018] As a further optimization solution of the present application, a base frame is installed at the bottom of the annular main cavity and the atmospheric transition vacuum cavity.

[0019] Compared with the prior art, the beneficial effects of the utility model are:

[0020] The utility model connects the molecular pump and the target material module to the inner side of the annular main cavity through a pipeline, so that the coating machine has a compact structure, which is beneficial to the control of the vacuum degree and the isolation control of the doping gas components, and can also improve the flexibility and efficiency of production, allowing different materials to be deposited alternately at the same time without interfering with each other. The setting of the sealing piece can quickly switch the pressure state of the atmospheric transition vacuum cavity and the main cavity, and is convenient for loading and unloading of products. The products placed on the fixture rotate under the drive of the turntable, which helps to automate the coating process and improve production efficiency.

[0021] This utility model adopts a brand-new coating machine cavity design structure, which is suitable for the surface treatment of most optical films, color films, super-hard films, anti-fingerprint films, conductive films and other films on the market. This design greatly reduces the design size of the coating machine, the consumption of various gases, the number of vacuum pumps used and the energy consumption, while improving the production capacity and product quality of the vacuum coating machine, thereby greatly reducing the operating cost of the vacuum coating machine.

[0022] The above summary is for the purpose of description only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the utility model will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the external three-dimensional structure of the utility model;

[0024] Figure 2 It is a schematic diagram of the external three-dimensional structure of the utility model from another viewing angle;

[0025] Figure 3 It is a schematic diagram of the internal three-dimensional structure of the utility model;

[0026] Figure 4 This is a schematic diagram of the internal three-dimensional structure of the annular main cavity of the utility model;

[0027] Figure 5 It is a structural schematic diagram of the second door body and the annular main cavity of the utility model;

[0028] Figure 6 It is a structural schematic diagram of the plug valve and the annular main cavity of the utility model.

[0029] In the figure: 10, annular main cavity; 11, target module; 12, molecular pump; 13, mounting plate; 14, ICP module; 15, pulse bias module; 16, turntable; 1601, track; 17, fixture; 18, inspection door; 19, base frame; 20, plug valve; 30, atmospheric transition vacuum cavity; 31, first door body; 32, cassette; 33, grab arm; 40, roughing pump; 41, vacuum pipe; 42, maintenance pump; 50, second door body. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] See also Figure 1-Figure 6 , the utility model provides a technical solution:

[0032] Embodiment 1

[0033] A vacuum coating machine, comprising: an annular main cavity 10 composed of an inner wall and an outer wall, the outer wall of the annular main cavity 10 is provided with a rectangular groove, and a sealing member is installed on one side of the rectangular groove;

[0034] A pulse bias module 15 and a plurality of inspection doors 18 are installed on the outer wall of the annular main cavity 10 .

[0035] Specifically, the inner wall and the outer wall of the annular main cavity 10 include but are not limited to a circle, an ellipse, an arc, a symmetrical or asymmetrical polygon, and a curved surface structure mixed with an arc and a polygon;

[0036] A plurality of target modules 11 are installed inside the annular main cavity 10, a molecular pump 12 is connected to the outside of the annular main cavity 10 via a mounting plate 13, an ICP module 14 is installed outside the annular main cavity 10, and both the molecular pump 12 and the ICP module 14 are connected to the inside of the annular main cavity 10 via pipelines.

[0037] Specifically, the molecular pump 12 can work in the annular main cavity 10 to effectively extract gas molecules and maintain a high vacuum degree inside the annular main cavity 10 .

[0038] The blocking member is a second door body 50 .

[0039] Specifically, the staff opens the second door 50 and places the product on the fixture 17 .

[0040] A rotating assembly is disposed inside the annular main cavity 10 , and the rotating assembly includes two upper and lower rotating racks 16 . The rotating racks 16 are symmetrically installed inside the annular main cavity 10 . A track 1601 is installed on the rotating rack 16 , and a fixture 17 is fixed on the track 1601 .

[0041] The rotating frame 16 is a planar bearing structure, a magnetic suspension structure or a wire-controlled slideway structure, which is a prior art and will not be described in detail here.

[0042] The interior of the annular main cavity 10 is connected to a vacuum assembly, which includes a roughing pump 40 . The roughing pump 40 is connected to the interior of the annular main cavity 10 and the atmospheric transition vacuum cavity 30 via a vacuum pipe 41 . The interior of the annular main cavity 10 is connected to a maintenance pump 42 via a vacuum pipe 41 .

[0043] A base frame 19 is installed at the bottom of the annular main cavity 10 .

[0044] Embodiment 2: The difference between Embodiment 2 and Embodiment 1 is that:

[0045] The number of the rectangular trough bodies is at least two, and the two blocking members are both one of the plug valves 20 or flap valves. The plug valve 20 or flap valve is a prior art and will not be described in detail here.

[0046] Among them, the side of the gate valve 20 away from the annular main cavity 10 is connected to the atmospheric transition vacuum cavity 30, two groups of cassettes 32 are symmetrically installed inside the atmospheric transition vacuum cavity 30, and a plurality of fixtures 17 are arrayed on the cassettes 32. A grabbing arm 33 for picking up the fixture 17 is installed on the inner bottom wall of the atmospheric transition vacuum cavity 30, and a first door body 31 is installed inside the atmospheric transition vacuum cavity 30 through a hinge.

[0047] The interiors of the annular main cavity 10 and the atmospheric transition vacuum cavity 30 are both connected to a vacuum assembly, and the vacuum assembly includes a roughing pump 40, which is connected to the interiors of the annular main cavity 10 and the atmospheric transition vacuum cavity 30 through a vacuum pipe 41, and the interior of the annular main cavity 10 is connected to a maintenance pump 42 through the vacuum pipe 41.

[0048] Embodiment 3: The difference between Embodiment 3 and Embodiment 1 and Embodiment 2 is that:

[0049] The number of the rectangular trough bodies is at least two, one blocking member is a plug valve 20, and the other blocking member is a sealing plate.

[0050] Among them, the side of the gate valve 20 away from the annular main cavity 10 is connected to the atmospheric transition vacuum cavity 30, two groups of cassettes 32 are symmetrically installed inside the atmospheric transition vacuum cavity 30, and a plurality of fixtures 17 are arrayed on the cassettes 32. A grabbing arm 33 for picking up the fixture 17 is installed on the inner bottom wall of the atmospheric transition vacuum cavity 30, and a first door body 31 is installed inside the atmospheric transition vacuum cavity 30 through a hinge.

[0051] The interiors of the annular main cavity 10 and the atmospheric transition vacuum cavity 30 are both connected to a vacuum assembly, and the vacuum assembly includes a roughing pump 40, which is connected to the interiors of the annular main cavity 10 and the atmospheric transition vacuum cavity 30 through a vacuum pipe 41, and the interior of the annular main cavity 10 is connected to a maintenance pump 42 through the vacuum pipe 41.

[0052] Among them, the roughing pump 40, the maintaining pump 42, the gate valve 20, the molecular pump 12, the ICP module 14, the target module 11, the grab arm 33, and the turntable 16 are all connected to an external power supply, and the outside of the annular main cavity 10 and the atmospheric transition vacuum cavity 30 are provided with switches for controlling opening and closing.

[0053] According to the above technical solution, the working steps of this solution are summarized and sorted out:

[0054] The staff holds the first door body 31 and enters the atmosphere transition vacuum chamber 30, places the product to be coated on the jig 17, places the jig 17 on the track 1601 through the grabbing arm 33, starts the rotating frame 16 through an external power supply, starts the plug valve 20, and inserts the plug inside the plug valve 20 into the plug frame.

[0055] First, the roughing pump 40 is started to quickly reduce the pressure inside the annular main cavity 10. When the pressure is reduced to a level where the molecular pump 12 can be safely started, the molecular pump 12 is started. After running at full speed, the flap valve or plug valve connecting the molecular pump 12 and the cavity is opened, and the molecular pump 12 takes over the air extraction work to further reduce the pressure inside the annular main cavity 10 and the atmospheric transition vacuum cavity 30 to a high vacuum range. Then, the coating process begins. During the operation of the molecular pump 12, the maintenance pump 42 is started to take over the work of the roughing pump 40, thereby reducing the energy consumption of the entire equipment.

[0056] When the vacuum coating process is completed, the flap valve or plug valve connecting the molecular pump 12 to the chamber is closed first, and the pump 42 is kept working. The plug valve 20 is opened, and the rotating frame 16 is switched to step-by-step rotation. The grab arm 33 takes the fixture 17 out of the track 1601 and places it on the internal cassette 32 of the atmospheric transition vacuum chamber 30. At the same time, the fixture 17 is taken out from the cassette 32 and placed on the track 1601. Then the rotating frame 16 switches to the next fixture 17 facing the plug valve 20, and the same picking and placing operation is repeated until all the fixtures 17 are picked up and placed. Then the plug valve 20 is closed, and the flap valve connecting the molecular pump 12 to the chamber is closed. Or the gate valve is opened until the vacuum degree and other conditions meet the standards before coating is started. When the gate valve 20 is closed, the vacuum pump pre-valve corresponding to the atmospheric transition vacuum chamber 30 is closed, and the roughing pump 40 starts to deflate the atmospheric transition vacuum chamber 30 until the pressure inside the atmospheric transition vacuum chamber 30 is consistent with the atmospheric pressure. At this time, the first door 31 can be opened, the jig 17 that has been coated is taken out, and the product on the jig 17 is removed, and the above steps are repeated to complete the coating work of all products.

[0057] The ICP module 14 ionizes the doping gas through a high-frequency electromagnetic field to generate a high-density plasma, which undergoes an oxidation reaction with the coating layer of the product placed on the fast-moving fixture 17 to generate the desired coating layer. The target module 11 is placed in the annular main cavity 10 and is connected to an external power source. After being started, coating can be performed under appropriate conditions. The high ionization rate plasma generated by the ICP module 14, under the action of bias, ions collide with the coating layer of the product placed on the fixture 17, which can also clean the product surface and improve the adhesion of the film.

[0058] The standard parts used in this utility model can be purchased from the market, and the special-shaped parts can be customized according to the description and the drawings. The specific connection methods of each part adopt the conventional means such as mature bolts, rivets, welding, etc. in the prior art. The machinery, parts and equipment all adopt the conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be described in detail here. The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0059] Parts not involved in the present utility model are the same as the prior art or can be implemented by the prior art. Although the embodiments of the present utility model have been marked and described, it is understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present utility model, and the scope of the present utility model is defined by the attached claims and their equivalents.

Claims

1. A vacuum coating machine, characterized in that: It comprises: an annular main cavity (10) composed of an inner wall and an outer wall, wherein the outer wall of the annular main cavity (10) is provided with a rectangular groove, and a sealing member is installed on one side of the rectangular groove; A rotating assembly is provided inside the annular main cavity (10); A plurality of target material modules (11) are installed inside the annular main cavity (10); a molecular pump (12) is connected to the outside of the annular main cavity (10) via a mounting plate (13); an ICP module (14) is installed outside the annular main cavity (10); and both the molecular pump (12) and the ICP module (14) are connected to the inside of the annular main cavity (10) via a pipeline.

2. The vacuum coating machine according to claim 1, characterized in that: The blocking member is a second door body (50).

3. The vacuum coating machine according to claim 1, characterized in that: The number of the rectangular trough bodies is at least two, and the two blocking members are plug valves (20).

4. The vacuum coating machine according to claim 1, characterized in that: The number of the rectangular trough bodies is at least two, one of the blocking pieces is a plug valve (20), and the other blocking piece is a flap valve.

5. The vacuum coating machine according to claim 3 or 4, characterized in that: The side of the gate valve (20) away from the annular main cavity (10) is connected to an atmospheric transition vacuum cavity (30), two groups of cartridges (32) are symmetrically installed inside the atmospheric transition vacuum cavity (30), a plurality of jigs (17) are arranged in an array on the cartridges (32), a grabbing arm (33) for picking up the jigs (17) is installed on the inner bottom wall of the atmospheric transition vacuum cavity (30), and a first door body (31) is installed inside the atmospheric transition vacuum cavity (30) via a hinge.

6. The vacuum coating machine according to claim 5, characterized in that: The rotating assembly comprises an upper and lower rotating frame (16), wherein the rotating frame (16) is symmetrically installed inside the annular main cavity (10), a track (1601) is installed on the rotating frame (16), and the fixture (17) is fixed on the track (1601).

7. The vacuum coating machine according to claim 5, characterized in that: The interiors of the annular main cavity (10) and the atmospheric transition vacuum cavity (30) are both connected to a vacuum assembly, the vacuum assembly comprising a roughing pump (40), the roughing pump (40) being connected to the interiors of the annular main cavity (10) and the atmospheric transition vacuum cavity (30) via a vacuum pipe (41), and the interior of the annular main cavity (10) is connected to a maintenance pump (42) via a vacuum pipe (41).

8. The vacuum coating machine according to claim 1, characterized in that: A pulse bias module (15) and a plurality of inspection doors (18) are installed on the outer wall of the annular main cavity (10).

9. The vacuum coating machine according to claim 1, characterized in that: A base frame (19) is installed at the bottom of the annular main cavity (10) and the atmosphere transition vacuum cavity (30).

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