Furnace bottom of single crystal growth furnace and single crystal growth furnace

Abstract

The utility model provides a furnace bottom of a single crystal growth furnace and the single crystal growth furnace, and relates to the technical field of crystal growth furnaces, the furnace bottom of the single crystal growth furnace comprises a first furnace bottom plate and a second furnace bottom plate, the first furnace bottom plate and the second furnace bottom plate are arranged to define a cavity, and a central partition plate is arranged at the central position between the first furnace bottom plate and the second furnace bottom plate; the center partition plate is used for dividing the cavity into two cooling cavities in a half-to-half mode, a plurality of outer side partition plates are arranged in each cooling cavity, the multiple outer side partition plates are sequentially arranged in the direction away from the center partition plate and can form a turn-back and roundabout flow channel in the cooling cavity, and a liquid inlet is formed in the position, close to the center partition plate, in the flow channel. A liquid outlet is formed in the runner far away from the central partition plate; according to the furnace bottom provided by the invention, heat at the central position of the furnace bottom can be timely and effectively conducted out, and the problems of deformation, cracking and even collapse caused by the fact that the central position of the furnace bottom is in contact with a crucible stand column and cannot be effectively cooled for a long time are avoided.

Description

Technical Field

[0001] The present disclosure relates to the technical field of crystal growth furnaces, and in particular to a furnace bottom of a single crystal growth furnace and a single crystal growth furnace. Background Art

[0002] A single crystal growth furnace (also called a single crystal furnace) is a device that can melt polycrystalline materials and grow non-dislocated single crystals through the Czochralski method. The device includes a furnace bottom, a furnace body, and a crucible. The furnace body is arranged on the furnace bottom, and the crucible is arranged in the furnace body and supported on the furnace bottom through the crucible column. After the polycrystalline material is melted in the crucible, a single crystal is grown through the Czochralski method. During the use of the single crystal growth furnace, due to the strong heat conduction capacity of the metal crucible column, the center position of the furnace bottom in contact with its bottom has a very high temperature. Although the furnace bottom of the existing single crystal growth furnace has been provided with a corresponding cooling structure, the cooling effect is limited. When used for a long time, there is still a problem that the center position of the furnace bottom is deformed, cracked, or even collapsed due to excessive temperature, which seriously affects the service life of the single crystal growth furnace. Utility Model Content

[0003] A technical problem to be solved by the present disclosure is that the existing single crystal growth furnace is prone to excessively high center temperature of the furnace bottom when used for a long time, resulting in deformation, cracking, or even collapse of the furnace bottom.

[0004] In order to solve the above technical problems, the embodiment of the present disclosure provides a furnace bottom of a single crystal growth furnace, including a first furnace bottom plate and a second furnace bottom plate arranged from top to bottom, the first furnace bottom plate and the second furnace bottom plate are arranged to be able to enclose a chamber and a central partition is arranged at the center position between the two, the central partition is used to divide the chamber into two halves to form two cooling chambers, each cooling chamber is provided with a plurality of outer partitions, the plurality of outer partitions are arranged in sequence in a direction away from the central partition and can form a winding flow channel in the cooling chamber, a liquid inlet is provided in the flow channel close to the central partition for the cooling medium to flow in, and a liquid outlet is provided in the flow channel away from the central partition for the cooling medium to flow out.

[0005] In some embodiments, a first groove is provided on the lower side surface of the first furnace bottom plate, and a step portion is provided on the groove wall of the first groove to stop the second furnace bottom plate and form a cavity between the first furnace bottom plate and the second furnace bottom plate.

[0006] In some embodiments, the groove wall of the first groove below the step portion is configured to be flared; and / or

[0007] A welding groove is arranged on the side of the second furnace bottom plate so as to be welded to the groove wall of the first groove when the second furnace bottom plate stops at the step portion.

[0008] In some embodiments, a second groove is formed at the center of the upper side plate surface of the first furnace bottom plate, and the second groove is used to position the bottom end of the crucible column.

[0009] In some embodiments, the upper side plate surface of the first furnace bottom plate is provided with a first annular convex rib, and the first annular convex rib is provided with a plurality of first positioning holes for inserting the bottom ends of the positioning pins of the insulation layer; and / or

[0010] An annular groove is provided on the upper side plate surface of the first furnace bottom plate for placing a sealing ring that can form a sealing fit with the bottom surface of the furnace body.

[0011] In some embodiments, a flange is disposed on a side of the first furnace bottom plate for connecting to the furnace body.

[0012] In some embodiments, the flange is provided with a plurality of second positioning holes for inserting the bottom end of the furnace body positioning pin, the second positioning hole comprises a large diameter section and a small diameter section arranged in sequence from top to bottom, and the furnace body positioning pin is inserted into the large diameter section.

[0013] In some embodiments, a plurality of concentrically arranged through holes are provided on the first furnace bottom plate and the second furnace bottom plate, and the through holes are used for arranging electrode sleeves.

[0014] In some embodiments, a plurality of support columns are disposed at the center of the second furnace bottom plate, and the other ends of the plurality of support columns are extended in a direction toward the first furnace bottom plate to support the first furnace bottom plate.

[0015] The disclosed embodiment also provides a single crystal growth furnace, comprising a furnace body and a furnace bottom arranged at the bottom of the furnace body, wherein the furnace bottom is the furnace bottom of the above-mentioned single crystal growth furnace.

[0016] Through the above technical scheme, the furnace bottom of the single crystal growth furnace provided by the present invention forms a chamber through the first furnace bottom plate and the second furnace bottom plate, and a central partition is arranged at the center position between the two, and the chamber is divided into two halves by the central partition to form two cooling chambers. The multiple outer partitions arranged in each cooling chamber are used to form a returning and circuitous flow channel in the corresponding cooling chamber. A liquid inlet is arranged in the flow channel close to the central partition for the cooling medium to flow in, and a liquid outlet is arranged in the flow channel away from the central partition for the cooling medium to flow out, thereby forming a double-channel cooling structure in the chamber between the first furnace bottom plate and the second furnace bottom plate, and the double-channel cooling structure can make the cooling medium pass through the center position of the furnace bottom preferentially, which is beneficial to timely and effectively conduct the heat at the center position of the furnace bottom, and avoid the center position of the furnace bottom from contacting the crucible column and not being effectively cooled for a long time, so as to avoid deformation, cracking, or even collapse. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 It is a structural schematic diagram of a furnace bottom of a single crystal growth furnace disclosed in an embodiment of the present disclosure;

[0019] Figure 2 yes Figure 1 A cross-sectional view of the middle furnace bottom along the radial direction;

[0020] Figure 3 yes Figure 2 A magnified schematic diagram of position A in the middle;

[0021] Figure 4 yes Figure 1 Schematic diagram of the structure inside the middle furnace bottom;

[0022] Figure 5 It is a cross-sectional view of the furnace bottom of a single crystal growth furnace disclosed in an embodiment of the present disclosure.

[0023] Description of reference numerals:

[0024] 1. Crucible column; 2. Insulation layer positioning pin; 3. Furnace body; 4. Sealing ring; 5. Furnace body positioning pin; 6. Electrode sleeve; 7. Insulation layer; 10. First furnace bottom plate; 11. First groove; 111. Step portion; 12. Second groove; 13. First annular convex rib; 131. First positioning hole; 14. Annular groove; 15. Flange; 16. Second positioning hole; 161. Large diameter section; 162. Small diameter section; 17. Second annular convex rib; 20. Second furnace bottom plate; 21. Welding groove; 30. Center partition; 301. Cooling chamber; 302. Flow channel; 31. Outer partition; 32. Liquid inlet; 33. Liquid outlet; 40. Through hole; 50. Support column. DETAILED DESCRIPTION

[0025] The following is a further detailed description of the embodiments of the present disclosure in conjunction with the accompanying drawings and examples. The detailed description of the following embodiments and the accompanying drawings are used to exemplarily illustrate the principles of the present disclosure, but cannot be used to limit the scope of the present disclosure. The present disclosure can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

[0026] The present disclosure provides these embodiments to make the present disclosure thorough and complete, and to fully express the scope of the present disclosure to those skilled in the art. It should be noted that unless otherwise specifically stated, the relative arrangement of the parts and steps, the composition of the materials, the numerical expressions and the numerical values ​​set forth in these embodiments should be interpreted as being merely exemplary, and not as limiting.

[0027] It should be noted that, in the description of the present disclosure, unless otherwise specified, the meaning of "multiple" is greater than or equal to two; the terms "upper", "lower", "left", "right", "inner", "outer", etc., indicating the orientation or positional relationship, are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present disclosure. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0028] In addition, the words "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different parts. "Vertical" does not mean vertical in the strict sense, but is within the tolerance range. "Parallel" does not mean parallel in the strict sense, but is within the tolerance range. "Include" or "comprising" and similar words mean that the elements before the word include the elements listed after the word, and do not exclude the possibility of including other elements.

[0029] It should also be noted that in the description of the present disclosure, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to the specific circumstances. When a specific device is described as being located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device.

[0030] All terms used in the present disclosure have the same meanings as those understood by those of ordinary skill in the art to which the present disclosure belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries, for example, should be interpreted as having meanings consistent with their meanings in the context of the relevant technology, and should not be interpreted in an idealized or extremely formal sense, unless explicitly defined as such herein.

[0031] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0032] like Figure 1 , Figure 2 and Figure 4 As shown, the first aspect of the present disclosure discloses a furnace bottom of a single crystal growth furnace, which includes a first furnace bottom plate 10 and a second furnace bottom plate 20 arranged from top to bottom, the first furnace bottom plate 10 and the second furnace bottom plate 20 are arranged to be able to enclose a chamber and a central partition 30 is arranged at the center position therebetween, the central partition 30 is used to divide the chamber into two halves to form two cooling chambers 301, each cooling chamber 301 is provided with a plurality of outer partitions 31, the plurality of outer partitions 31 are arranged in sequence in a direction away from the central partition 30 and can form a folding and circuitous flow channel 302 in the cooling chamber 301, the flow channel 302 close to the central partition 30 is provided with a liquid inlet 32 ​​for the cooling medium to flow in, and the flow channel 302 away from the central partition 30 is provided with a liquid outlet 33 for the cooling medium to flow out.

[0033] In the technical solution provided in the present disclosure, a chamber is formed by the first furnace bottom plate 10 and the second furnace bottom plate 20, and a central partition plate 30 is arranged at the center position therebetween. The central partition plate 30 is used to divide the chamber into two halves to form two cooling chambers 301. The multiple outer partition plates 31 arranged in each cooling chamber 301 are used to form a winding flow channel 302 in the corresponding cooling chamber 301. A liquid inlet 32 ​​is arranged in the flow channel 302 close to the central partition plate 30 for the cooling medium to flow in, and a liquid outlet 33 is arranged in the flow channel 302 away from the central partition plate 30 for the cooling medium to flow out, thereby forming a double-channel cooling structure in the chamber between the first furnace bottom plate 10 and the second furnace bottom plate 20. The double-channel cooling structure enables the cooling medium to pass through the center position of the furnace bottom first, which is beneficial to timely and effectively conduct the heat at the center position of the furnace bottom, and avoids the problem of deformation, cracking, or even collapse of the center position of the furnace bottom due to contact with the crucible column 1 and lack of effective cooling for a long time.

[0034] The furnace bottom of the single crystal growth furnace provided by the present disclosure effectively reduces the temperature at the center of the furnace bottom and prolongs the service life of the furnace bottom.

[0035] The present disclosure does not specifically limit the specific composition of the cooling medium. For example, in order to reduce the cost of use, in some embodiments, the cooling medium is water.

[0036] In the present disclosure, the chamber between the first furnace bottom plate 10 and the second furnace bottom plate 20 can be formed in any appropriate form. In some embodiments, the chamber between the first furnace bottom plate 10 and the second furnace bottom plate 20 can be formed in any appropriate form. Figure 2 As shown, a first groove 11 is provided on the lower side surface of the first furnace bottom plate 10 , and a step portion 111 is provided on the groove wall of the first groove 11 to stop the second furnace bottom plate 20 and form a cavity located between the first furnace bottom plate 10 and the second furnace bottom plate 20 .

[0037] It can be understood that in the embodiment of the present disclosure, when the second furnace bottom plate 20 stops at the step portion 111, the side of the second furnace bottom plate 20 is welded and fixed to the groove wall of the first groove 11 to form a chamber located between the first furnace bottom plate 10 and the second furnace bottom plate 20.

[0038] See also Figure 2 In some embodiments, in order to facilitate the welding and fixing of the second furnace bottom plate 20 to the first furnace bottom plate 10, the groove wall of the first groove 11 located below the step portion 111 is set to be flared; and / or the side of the second furnace bottom plate 20 is provided with a welding groove 21 so that it can be welded to the groove wall of the first groove 11 when the second furnace bottom plate 20 stops at the step portion 111.

[0039] In some embodiments, a second groove 12 is formed at the center of the upper side surface of the first furnace bottom plate 10 , and the second groove 12 is used to position the bottom end of the crucible column 1 .

[0040] It should be noted that, in the present disclosure, the second groove 12 located at the center of the upper side plate surface of the first furnace bottom plate 10 can be formed in any appropriate manner, for example, directly sinking the upper side plate surface of the first furnace bottom plate 10 to form the second groove 12. In some embodiments, a second annular convex rib 17 is provided on the upper side plate surface of the first furnace bottom plate 10, and the area within the second annular convex rib 17 is formed as the second groove 12.

[0041] It is understandable that in order to avoid affecting the size of the cavity between the first furnace bottom plate 10 and the second furnace bottom plate 20, the plate body of the first furnace bottom plate 10 has to be thinned when the upper side plate surface of the first furnace bottom plate 10 sinks to form the second groove 12, which in turn affects the structural strength of the first furnace bottom plate 10. This problem can be well solved by providing a second annular convex rib 17 to form the second groove 12. In addition, the provision of the second annular convex rib 17 can also improve the strength of the first furnace bottom plate 10 to a certain extent, thereby preventing it from deforming, cracking, or even collapsing under long-term high-temperature use.

[0042] In some embodiments, in combination Figure 2 and Figure 3As shown, the upper side plate surface of the first furnace bottom plate 10 is provided with a first annular convex rib 13, and the first annular convex rib 13 is provided with a plurality of first positioning holes 131 for the bottom end of the thermal insulation layer positioning pin 2 to be inserted. It should be noted that in the single crystal growth furnace involved in the present disclosure, in order to prevent the multi-layer thermal insulation layer 7 arranged above the furnace bottom from being misaligned, it is necessary to provide a thermal insulation layer positioning pin 2, and the thermal insulation layer positioning pin 2 passes through the multi-layer thermal insulation layer 7 to achieve positioning. In the embodiment of the present disclosure, by providing the first annular convex rib 13 and providing the first positioning hole 131 for arranging the thermal insulation layer positioning pin 2 on the first annular convex rib 13, the influence of the first positioning hole 131 directly provided on the first furnace bottom plate 10 on its structural strength is avoided; in addition, the first annular convex rib 13 can also be used as a reinforcing rib to improve the structural strength of the first furnace bottom plate 10.

[0043] It should be noted that the single crystal growth furnace of the present invention needs to be controlled in a vacuum environment when in use. Therefore, when the furnace body 3 is arranged above the furnace bottom of the present invention, the sealing between the two should be considered. Figure 3 As shown, an annular groove 14 is provided on the upper side surface of the first furnace bottom plate 10 for receiving a sealing ring 4 that can form a sealing fit with the bottom surface of the furnace body 3 .

[0044] In some embodiments, in combination Figure 5 As shown, in order to facilitate the connection between the furnace bottom and the furnace body 3 of the present disclosure, a flange 15 is provided on the side of the first furnace bottom plate 10 for connecting the furnace body 3. Exemplarily, a connecting portion is provided at the bottom of the furnace body 3, and a connecting hole is provided on the connecting portion so that it can be fastened to the flange 15 by bolts.

[0045] In some embodiments, in combination Figure 3 As shown, in order to facilitate the connection and fixation with the furnace body 3 through the flange 15, a plurality of second positioning holes 16 are provided on the flange 15 for the bottom end of the furnace body positioning pin 5 to be inserted, and the second positioning hole 16 includes a large diameter section 161 and a small diameter section 162 arranged in sequence from top to bottom, and the furnace body positioning pin 5 is inserted in the large diameter section 161.

[0046] In specific use, the bottom end of the furnace body positioning pin 5 is first inserted into the large diameter section 161 of the second positioning hole 16, and the upper end of the furnace body positioning pin 5 can protrude from the flange 15 for insertion into the connection part at the bottom of the furnace body 3, thereby realizing the positioning of the furnace body 3, so that the connection hole on the connection part at the bottom of the furnace body 3 corresponds to the connection hole on the flange 15, and then it is convenient to connect and fix by bolts. When disassembly is required, since the second positioning hole 16 is arranged to be composed of the large diameter section 161 and the small diameter section 162 from top to bottom, it does not affect the arrangement of the furnace body positioning pin 5, and can also conveniently blow the furnace body positioning pin 5 in the large diameter section 161 upward through the small diameter section 162, that is, the structural design of the second positioning hole 16 is convenient for use.

[0047] It should be noted that the single crystal growth furnace of the present disclosure also includes a plurality of electrodes, which need to pass through the furnace bottom in the embodiment of the present disclosure and extend into the interior of the furnace body 3. To this end, in some embodiments, combined with Figure 2 and Figure 5 As shown, a plurality of concentrically arranged through holes 40 are provided on the first furnace bottom plate 10 and the second furnace bottom plate 20 , and the through holes 40 are used for arranging the electrode sleeves 6 .

[0048] In the present disclosure, Figure 2 As shown, a plurality of support columns 50 are arranged at the center of the second furnace bottom plate 20, and the other ends of the plurality of support columns 50 are extended in the direction toward the first furnace bottom plate 10 to support the first furnace bottom plate 10. The plurality of support columns 50 arranged at the center of the second furnace bottom plate 20 support the center of the first furnace bottom plate 10, thereby preventing the center of the first furnace bottom plate 10 in contact with the bottom end of the crucible column 1 from being deformed or even collapsed due to overheating.

[0049] The furnace bottom of the single crystal growth furnace provided by the present invention can be specifically manufactured by first welding and fixing the central partition 30, the outer partition 31 and the plurality of support columns 50 to the second furnace bottom plate 20 respectively, and then the side of the second furnace bottom plate 20 welded with the central partition 30, the outer partition 31 and the plurality of support columns 50 is oriented toward the first groove 11 of the first furnace bottom plate 10. When the second furnace bottom plate 20 stops at the step 111 on the groove wall of the first groove 11, the side of the second furnace bottom plate 20 is welded and fixed to the groove wall of the first groove 11, so that a chamber located between the first furnace bottom plate 10 and the second furnace bottom plate 20 can be formed, and at this time, the central partition 30 can separate the two cooling chambers 301 in the chamber, and the outer partition 31 can form a flow channel 302 in the corresponding cooling chamber 301.

[0050] A second aspect of the present disclosure provides a single crystal growth furnace, which includes a furnace body 3 and a furnace bottom arranged at the bottom of the furnace body 3, and the furnace bottom is the furnace bottom of the above-mentioned single crystal growth furnace.

[0051] The furnace bottom of the single crystal growth furnace provided by the present invention has an obvious cooling effect, especially a good cooling effect on the center of the furnace bottom, which effectively avoids the overheating problem of the center of the furnace bottom. The inventors of the present invention found that the single crystal growth furnace with the furnace bottom provided by the present invention did not experience cracking, deformation, or even collapse of the furnace bottom after multiple crystal growth cycles.

[0052] So far, various embodiments of the present disclosure have been described in detail. In order to avoid obscuring the concept of the present disclosure, some details known in the art are not described. Based on the above description, those skilled in the art can fully understand how to implement the technical solution disclosed here.

[0053] Although some specific embodiments of the present disclosure have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present disclosure. It should be understood by those skilled in the art that the above embodiments may be modified or some technical features may be replaced by equivalents without departing from the scope and spirit of the present disclosure. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict.

Claims

1. A furnace bottom of a single crystal growth furnace, characterized in that: The invention comprises a first furnace bottom plate (10) and a second furnace bottom plate (20) which are arranged from top to bottom. The first furnace bottom plate (10) and the second furnace bottom plate (20) are arranged to enclose a chamber and a central partition plate (30) is arranged at a central position between the first furnace bottom plate (10) and the second furnace bottom plate (20). The central partition plate (30) is used to divide the chamber into two halves to form two cooling chambers (301). A plurality of outer partition plates (31) are arranged in each cooling chamber (301). The plurality of outer partition plates (31) are arranged in sequence in a direction away from the central partition plate (30) and can form a folding and circuitous flow channel (302) in the cooling chamber (301). A liquid inlet (32) is arranged in the flow channel (302) close to the central partition plate (30) for the cooling medium to flow in, and a liquid outlet (33) is arranged in the flow channel (302) away from the central partition plate (30) for the cooling medium to flow out.

2. The furnace bottom of the single crystal growth furnace according to claim 1, characterized in that: A first groove (11) is arranged on the lower side plate surface of the first furnace bottom plate (10), and a step portion (111) is arranged on the groove wall of the first groove (11) for stopping the second furnace bottom plate (20) and forming the chamber located between the first furnace bottom plate (10) and the second furnace bottom plate (20).

3. The furnace bottom of the single crystal growth furnace according to claim 2, characterized in that: The groove wall of the first groove (11) below the step portion (111) is configured to be flared; and / or A welding groove (21) is provided on the side of the second furnace bottom plate (20) so as to be welded to the groove wall of the first groove (11) when the second furnace bottom plate (20) stops at the step portion (111).

4. The furnace bottom of the single crystal growth furnace according to claim 1, characterized in that: A second groove (12) is formed at the center of the upper plate surface of the first furnace bottom plate (10), and the second groove (12) is used to position the bottom end of the crucible column (1).

5. The furnace bottom of the single crystal growth furnace according to claim 1, characterized in that: The upper side plate surface of the first furnace bottom plate (10) is provided with a first annular convex rib (13), and the first annular convex rib (13) is provided with a plurality of first positioning holes (131) for inserting the bottom ends of the thermal insulation layer positioning pins (2); and / or An annular groove (14) is provided on the upper side surface of the first furnace bottom plate (10) for receiving a sealing ring (4) capable of forming a sealing fit with the bottom surface of the furnace body (3).

6. The furnace bottom of the single crystal growth furnace according to claim 1, characterized in that: A flange (15) is provided on the side of the first furnace bottom plate (10) for connecting to the furnace body (3).

7. The furnace bottom of the single crystal growth furnace according to claim 6, characterized in that: The flange (15) is provided with a plurality of second positioning holes (16) for inserting the bottom end of the furnace body positioning pin (5), the second positioning hole (16) comprising a large diameter section (161) and a small diameter section (162) arranged in sequence from top to bottom, and the furnace body positioning pin (5) is inserted into the large diameter section (161).

8. The furnace bottom of the single crystal growth furnace according to claim 1, characterized in that: The first furnace bottom plate (10) and the second furnace bottom plate (20) are provided with a plurality of concentrically arranged through holes (40), and the through holes (40) are used for arranging electrode sleeves (6).

9. The furnace bottom of a single crystal growth furnace according to any one of claims 1 to 8, characterized in that: A plurality of support columns (50) are arranged at the center of the second furnace bottom plate (20), and the other ends of the plurality of support columns (50) are extended in a direction toward the first furnace bottom plate (10) so as to support the first furnace bottom plate (10).

10. A single crystal growth furnace, comprising a furnace body (3) and a furnace bottom arranged at the bottom of the furnace body (3), characterized in that: The furnace bottom is the furnace bottom of the single crystal growth furnace according to any one of claims 1 to 9.

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