Sample injection cabinet suitable for sampling high-purity electronic-grade chemicals

Abstract

The utility model relates to the field of material detection equipment, in particular to a sample injection cabinet suitable for sampling high-purity electronic-grade chemicals, which comprises a cabinet body, an air supply unit, an air exhaust unit, a pressure difference detection unit, a pollution discharge unit and an electric control unit, an inner door is arranged between the secondary bin and the main bin, an outer door is arranged between the secondary bin and the outside, and an air curtain pipe is arranged on the peripheral side of the outer door; the two groups of pressure difference detection units are respectively arranged between the main box bin and the two secondary box bins; the air supply unit is arranged at the top of the cabinet body and used for conveying high-cleanliness air into all the bins, and the air supply unit can further pressurize the main bin so that the air pressure in the main bin can be higher than the air pressure in the two secondary bins. And the exhaust unit is arranged at the lower part of the cabinet body. According to the utility model, the sample injection cabinet is improved, so that the main box bin can always keep high purity, and chemicals sampled in the main box bin are not polluted, so that the accuracy of a detection result is improved.

Description

Technical Field

[0001] The utility model relates to the field of material detection equipment, in particular to a sampling box cabinet suitable for sampling high-purity electronic-grade chemicals. Background Art

[0002] High-purity electronic-grade chemicals are widely used in the production process of semiconductor components. Due to the ultra-high precision property requirements of semiconductor products, the impurity content of the chemicals directly used will directly affect the final product quality. Therefore, in the entire semiconductor process, it is necessary to regularly sample all chemicals used on the production site and send them to professional laboratories for analysis and testing. The sampling of chemicals needs to be carried out in a closed operation in an ultra-high cleanliness sampling cabinet, but whether it is a semi-automatic or fully automatic sampling operation, the sampling cabinet needs to be equipped with an openable and closable outer door to facilitate the provision of sampling devices for filling chemicals into the cabinet and the removal of samples. When the outer door is opened and closed, the external unclean air can easily enter the operating chamber of the cabinet, affecting the cleanliness of the air in the operating chamber, thereby affecting the composition of the sampled chemicals, and ultimately affecting the accuracy of the test results. Although the unclean air mixed in when the door is opened can be improved by extending the replacement time of the polluted air in the operating chamber, the extended replacement time will affect the sampling efficiency and there will also be a risk of sample contamination caused by incomplete replacement. In view of this, it is necessary to improve the sampling cabinet for high-purity electronic-grade chemicals. How to keep the operating chamber at a high purity without prolonging the time to replace the contaminated air in the operating chamber and to prevent the chemicals sampled in the operating chamber from being contaminated to improve the accuracy of the test results is a problem to be solved in this case. Utility Model Content

[0003] In order to overcome the deficiencies in the prior art, the utility model discloses a sampling cabinet suitable for sampling high-purity electronic-grade chemicals, comprising a cabinet body, an air supply unit, an exhaust unit, a pressure difference detection unit, a sewage discharge unit and an electronic control unit, wherein the cabinet body is provided with a main compartment and a left secondary compartment and a right secondary compartment respectively arranged on the left and right sides thereof, inner doors are respectively arranged between the left and right secondary compartments and the main compartment, the two secondary compartments and the outside are both provided with outer doors that can be opened and closed automatically, and wind curtain tubes that can blow air outward and downward are arranged on the periphery of the outer doors; two groups of pressure difference detection units are respectively arranged between the main compartment and the left and right secondary compartments for detecting the air pressure difference between two adjacent compartments; the air supply unit is arranged at the top of the cabinet body for conveying high-cleanliness air to the main compartment and the two secondary compartments respectively, and the air supply unit can also pressurize the air conveyed to the main compartment so that the air pressure in the main compartment is higher than the air pressure in the two secondary compartments; the exhaust unit is arranged at the lower part of the cabinet body for exhausting the gas in the main compartment and the two secondary compartments. The utility model improves the sampling cabinet for high-purity electronic-grade chemical samples, sets the cabinet body as a main cabinet and two sub-cabinets disposed on the left and right sides thereof, sets inner doors between the two sub-cabinets and the main cabinet, sets outer doors on the two sub-cabinets, and sets air curtain tubes on the periphery of the outer doors. The buffering effect of the left and right sub-cabinets can reduce the influence of unclean air mixed in when the outer doors are opened on the main cabinet, and the air curtain generated by the air curtain tube can also reduce the amount of unclean air mixed in when the outer doors are opened; an air supply unit and two sets of pressure difference detection units are arranged on the cabinet body. Yuanhe exhaust unit uses the air supply unit to deliver high-cleanliness air to each compartment of the cabinet body and the exhaust unit to extract the dirty air for air replacement, and uses the air supply unit to pressurize the main compartment before the inner door of the cabinet body is opened to make the air pressure in the main compartment slightly higher than the air pressure in the left and right sub-compartments, so as to avoid the air in the two sub-compartments from flowing into the main compartment. In this way, the main compartment can always maintain high purity without extending the air replacement time in the main compartment, so that the chemicals sampled in the main compartment will not be contaminated, thereby improving the accuracy of the test results.

[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0005] A sampling cabinet suitable for sampling high-purity electronic-grade chemicals, including an electronic control unit, characterized in that it also includes a cabinet body, an air supply unit, an exhaust unit and a pressure difference detection unit. The cabinet body is provided with a main compartment and a left secondary compartment and a right secondary compartment respectively disposed on both sides of the main compartment. The pressure difference detection unit is divided into two groups, and the two groups of pressure difference detection units are respectively disposed between the main compartment and the left secondary compartment and between the main compartment and the right secondary compartment. The pressure difference detection unit is provided with an air pressure difference detection component, which can detect the air pressure difference between two adjacent compartments. The left secondary compartment and the right secondary compartment are both provided with outer doors that can be opened and closed automatically and are provided with wind curtain components around the outer doors. The air supply unit is placed on the top of the cabinet body and is divided into two groups. The air supply unit is respectively connected with the left secondary bin, the main bin and the right secondary bin, the air supply unit is provided with an air supply component and a pressurizing component is provided on the pipeline connected with the main bin, the air supply unit can respectively deliver high-cleanliness air to the left secondary bin, the main bin and the right secondary bin, the air supply unit can also pressurize the air delivered to the main bin so that the air pressure in the main bin is higher than the air pressure in the left secondary bin and the right secondary bin, the exhaust unit is placed at the lower part of the cabinet body and is respectively connected with the left secondary bin, the main bin and the right secondary bin, the exhaust unit is provided with an exhaust component and can exhaust the gas in the left secondary bin, the main bin and the right secondary bin, the cabinet body, the air supply unit, the exhaust unit and the pressure difference detection unit are all electrically connected with the electronic control unit.

[0006] The air supply unit includes an air supply pipe, an air supply port, a pipeline booster pump, an electric valve and a filter. The air supply pipe is provided with an air inlet end and three parallel air outlet ends. The filter is connected to the pipe at the air inlet end of the air supply pipe. The air inlet end is connected to an external air supply pump or a compressed air network. The air supply port and the electric valve each consist of three pieces. The three air supply ports are respectively fixedly connected and connected to the three air outlet ends of the air supply pipe. The three electric valves are respectively fixedly connected and connected to the pipes corresponding to the three air supply ports. The pipeline booster pump is fixedly connected and connected to the pipe corresponding to the middle air supply port.

[0007] The filter is a filter that can filter out air with a cleanliness level of 10, and the pipeline booster pump is an air pipeline booster pump.

[0008] The exhaust unit includes an exhaust duct, an air suction port, a check valve and an exhaust fan. The exhaust duct is provided with three parallel air suction ends and one exhaust end. The exhaust fan is connected to the pipe at the exhaust end of the exhaust duct. The air suction port and the check valve are three pieces respectively. The three air suction ports are respectively fixedly connected and connected to the three air suction ends of the exhaust duct. The three check valves are respectively fixedly connected and connected to the pipes corresponding to the three air suction ports. The exhaust end of the exhaust duct is connected to an external waste gas treatment facility.

[0009] The differential pressure detection unit includes an airway, a pitot-static pressure tube and a differential pressure sensor. Each set of differential pressure detection units has two pitot-static pressure tubes, which are respectively fixed and connected at both ends of the airway. The differential pressure sensor is connected to the middle of the airway.

[0010] The two ends of one of the two groups of pressure differential detection units are respectively placed above the middle of the main tank compartment and the left secondary tank compartment, and the two ends of the other group of pressure differential detection units are respectively placed above the middle of the main tank compartment and the right secondary tank compartment.

[0011] The outer door includes an automatic door and an air curtain tube. The air curtain tube is a P-shaped semi-enclosed tube formed by fixing and connecting a horizontal tube and vertical tubes on both sides. The bottom of the vertical tube is sealed and a plurality of air outlet holes are densely arranged on the front side walls of the horizontal tube and the vertical tube. The air outlet holes are arranged obliquely outward and downward. An air inlet is arranged in the middle of the air curtain tube and the air inlet can be connected to a pipeline of a compressed air source with a cleanliness level of 10 provided externally. An automatic opening and closing control valve is also arranged on the pipeline. The automatic door is a door leaf that can be opened automatically and closed tightly.

[0012] Inner doors are provided between the main compartment and the left secondary compartment, and between the main compartment and the right secondary compartment. The inner doors are door leaves that can be opened automatically and closed tightly.

[0013] The electric control unit is provided with an automatic control element, which can receive the signal fed back by the pressure difference detection unit for analysis and processing, and can instruct the outer door and inner door of the cabinet body, the air supply unit and the exhaust unit to automatically complete the execution action.

[0014] A sampling cabinet suitable for sampling high-purity electronic-grade chemicals also includes a sewage discharge unit, which includes a sewage discharge pipe and a sewage discharge valve. The sewage discharge pipe includes a main pipe and three branch pipes, and the three branch pipes are arranged in parallel and merged to be connected to the main pipe. The three branch pipes are respectively inserted into and fixedly connected to the bottom of the left secondary bin, the main bin and the right secondary bin. The sewage discharge valve is fixedly connected and connected to the main pipe of the sewage discharge pipe, and the water outlet end of the main pipe of the sewage discharge pipe is connected to an external sewage treatment facility.

[0015] From the above description, it can be seen that the advantages of the sampling cabinet suitable for high-purity electronic-grade chemical sampling provided by the utility model are: first, the cabinet body is set as a main cabinet and a left secondary cabinet and a right secondary cabinet placed on its left and right sides, inner doors are set between the left and right secondary cabinets and the main cabinet, outer doors are set on the two secondary cabinets, and air curtain tubes are set on the sides of the outer doors. The buffering effect of the left and right secondary cabinets can reduce the influence of unclean air mixed in when the outer door is opened on the main cabinet, and the wind generated by the air curtain tube can be used to reduce the impact of unclean air mixed in when the outer door is opened on the main cabinet. The curtain can also reduce the amount of unclean air mixed in when the outer door is opened; secondly, an air supply unit, two sets of pressure difference detection units and an exhaust unit are arranged on the cabinet body, and the air supply unit is used to deliver high-cleanliness air to each compartment of the cabinet body and the exhaust unit is used to exhaust dirty air for air replacement, and the air supply unit is used to pressurize the air delivered to the main compartment before the inner door of the cabinet body is opened so that the air pressure in the main compartment is slightly higher than the air pressure in the left and right secondary compartments, so as to avoid the air in the two secondary compartments from flowing into the main compartment. The utility model improves the sampling cabinet for sampling high-purity electronic-grade chemicals, so that the main compartment can always maintain high purity without extending the replacement time of the air in the main compartment, so that the chemicals sampled in the main compartment are not contaminated to improve the accuracy of the detection results. The utility model has a reasonable design, a simple structure, a low cost, and is easy to promote. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The utility model is a general schematic diagram of a sampling box cabinet suitable for sampling high-purity electronic-grade chemicals.

[0017] Figure 2 for Figure 1 AA schematic diagram in;

[0018] Figure 3 for Figure 1 Schematic diagram of the BB section after rotation;

[0019] Figure 4 This is an enlarged schematic diagram of the outer door;

[0020] Figure 5 for Figure 4 The C-direction schematic diagram in FIG.

[0021] Figure 6 for Figure 5 An enlarged schematic diagram of part D in FIG.

[0022] Reference numerals:

[0023] 1 cabinet body; 11 left secondary compartment; 12 main compartment; 13 right secondary compartment; 14 outer door; 141 automatic door; 142 air curtain tube; 1421 air outlet; 15 inner door; 2 air supply unit; 21 air supply pipe; 22 air supply outlet; 23 pipeline booster pump; 24 electric valve; 25 filter; 3 exhaust unit; 31 exhaust pipe; 32 air suction outlet; 33 check valve; 34 exhaust fan; 4 differential pressure detection unit; 41 air duct; 42 pitot static pressure tube; 43 differential pressure sensor; 5 sewage unit; 51 sewage pipe; 52 sewage valve; 6 electronic control unit. DETAILED DESCRIPTION

[0024] The present invention is further described below through specific implementation methods.

[0025] like Figures 1 to 6 As shown, the utility model discloses a sampling cabinet suitable for sampling high-purity electronic-grade chemicals, comprising a cabinet body 1, an air supply unit 2, an exhaust unit 3, a pressure difference detection unit 4, a sewage discharge unit 5 and an electronic control unit 6. The cabinet body 1 is provided with a main compartment 12 and a left sub-compartment 11 and a right sub-compartment 13 disposed on both sides of the main compartment 12. The left sub-compartment 11 and the right sub-compartment 13 are provided with an outer door 14 that can be opened and closed automatically and an air curtain component is provided on the periphery of the outer door 14. The outer door 14 comprises an automatic door 141 and an air curtain tube 142. The air curtain tube 142 is composed of a horizontal tube and vertical tubes on both sides. The pipes are fixedly connected and connected to form a П-shaped semi-enclosed pipe, the bottom of the vertical pipe is sealed, and a plurality of air outlet holes 1421 are densely arranged on the front side walls of the horizontal pipe and the vertical pipe. The air outlet holes 1421 are arranged outward and obliquely downward. The middle part of the wind curtain pipe 142 is provided with an air inlet, and the air inlet can be connected to a pipeline of a compressed air source with a cleanliness level of 10 provided externally, and an automatic opening and closing control valve is also arranged on the pipeline; the compressed air blown out of the wind curtain pipe 142 through the densely arranged plurality of air outlet holes 1421 can form an air curtain; the automatic door 141 is a door leaf that can be opened automatically and can be tightly closed. An inner door 15 is arranged between the main compartment 12 and the left secondary compartment 11 and between the main compartment 12 and the right secondary compartment 13, and the inner door 15 is a door leaf that can be opened automatically and can be tightly closed.

[0026] like Figures 1 to 3As shown, the air supply unit 2 described in the utility model is placed on the top of the cabinet body 1 and is respectively connected with the left secondary compartment 11, the main compartment 12 and the right secondary compartment 13. The air supply unit 2 includes an air supply pipe 21, an air supply port 22, a pipeline booster pump 23, an electric valve 24 and a filter 25. The air supply pipe 21 is provided with an air inlet end and three parallel air outlet ends. The filter 25 is connected to the pipe at the air inlet end of the air supply pipe 21, and the air inlet end is connected to an external air supply pump or a compressed air network. The air supply port 22 and the electric valve 24 are both three pieces. The three air supply ports 22 are respectively fixedly connected and connected to the three air outlet ends of the air supply pipe 21, and the three electric valves 24 are respectively fixedly connected and connected to the pipes corresponding to the three air supply ports 22. The pipeline booster pump 23 is fixedly connected and connected to the pipe corresponding to the middle air supply port 22. The filter 25 is a filter that can filter out air with a cleanliness level of 10, and the pipeline booster pump 23 is an air pipeline booster pump. The air supply unit 2 can deliver high-cleanliness air to the left sub-tank 11, the main tank 12, and the right sub-tank 13, respectively. The air supply unit 2 can also pressurize the air delivered to the main tank 12 so that the air pressure in the main tank 12 is higher than the air pressure in the left sub-tank 11 and the right sub-tank 13.

[0027] like Figures 1 to 3 As shown, the exhaust unit 3 described in the utility model is placed at the lower part of the cabinet body 1 and is connected with the left secondary bin 11, the main bin 12 and the right secondary bin 13 respectively. The exhaust unit 3 includes an exhaust duct 31, an air suction port 32, a check valve 33 and an exhaust fan 34. The exhaust duct 31 is provided with three parallel air suction ends and one exhaust end. The exhaust fan 34 is connected to the pipe at the exhaust end of the exhaust duct 31. The air suction port 32 and the check valve 33 are respectively three pieces. The three air suction ports 32 are respectively fixedly connected and connected to the three air suction ends of the exhaust duct 31. The three check valves 33 are respectively fixedly connected and connected to the pipes corresponding to the three air suction ports 32. The exhaust unit 3 can exhaust the replaced gas in the left secondary bin 11, the main bin 12 and the right secondary bin 13. The exhaust end of the exhaust duct 31 is connected to an external exhaust gas treatment facility.

[0028] like Figures 1 to 3As shown, the pressure differential detection unit 4 described in the utility model is divided into two groups, and the two groups of pressure differential detection units 4 are respectively placed between the main tank 12 and the left sub-tank 11 and between the main tank 12 and the right sub-tank 13. The pressure differential detection unit 4 includes an air duct 41, a pitot-static pressure tube 42 and a pressure differential sensor 43. The pitot-static pressure tube 42 of each group of pressure differential detection units 4 is two pieces, and the two pitot-static pressure tubes 42 are respectively fixed and connected to the two ends of the air duct 41. The pitot-static pressure tube 42 is a well-known technology. The pitot-static pressure tube 42 is a tubular device with a cylindrical flow head, and there are some static pressure sensing holes around its side wall, and there is a full pressure sensing hole facing the flow at the top. The pressure differential sensor 43 is connected to the middle of the air duct 41. The two ends of one of the two groups of differential pressure detection units 4 are respectively placed above the middle of the main tank 12 and the left sub-tank 11, and the two ends of the other group of differential pressure detection units 4 are respectively placed above the middle of the main tank 12 and the right sub-tank 13. The differential pressure detection unit 4 can detect the air pressure difference between two adjacent tanks.

[0029] like Figures 1 to 3 As shown, the cabinet body 1, air supply unit 2, exhaust unit 3 and pressure difference detection unit 4 described in the utility model are all electrically connected to the electric control unit 6. The electric control unit 6 is provided with an automatic control element, and the electric control unit 6 can receive the signal fed back by the pressure difference detection unit 4 for analysis and processing, and the electric control unit 6 can instruct the outer door 14 and inner door 15 of the cabinet body 1, the air supply unit 2 and the exhaust unit 3 to automatically complete the execution action.

[0030] like Figures 1 to 3 As shown, the sewage discharge unit 5 described in the utility model includes a sewage discharge pipe 51 and a sewage discharge valve 52. The sewage discharge pipe 51 includes a main pipe and three branch pipes. The three branch pipes are arranged in parallel and merged to be connected to the main pipe. The three branch pipes are respectively inserted into and fixedly connected to the bottom of the left secondary tank bin 11, the main tank bin 12 and the right secondary tank bin 13. The sewage discharge valve 52 is fixedly connected and connected to the main pipe of the sewage discharge pipe 51. The water outlet end of the main pipe of the sewage discharge pipe 51 is connected to an external sewage treatment facility.

[0031] The method of using the sampling cabinet suitable for sampling high-purity electronic-grade chemicals described in the utility model is as follows:

[0032] The sampling and packaging of high-purity electronic-grade chemicals are mostly automatic or semi-automatic operations. These operating devices are installed in the main compartment 12 and the operations are completed in the main compartment 12. The left secondary compartment 11 and the right secondary compartment 13 can be used as operation buffers for preparing sampling devices that need to contact the outside world and for picking up items after sampling.

[0033] If it is necessary to open a certain outer door 14, the electronic control unit 6 can instruct in advance to control the control valve that supplies air to the air curtain tube 142 corresponding to the outer door 14 to open, and the compressed air with a cleanliness level of 10 is delivered into the air curtain tube 142 and blown outward and downward through a plurality of air outlet holes 1421 densely arranged on the air curtain tube 142 to form an air curtain, thereby preventing or reducing the outside unclean air from mixing into the left sub-bin 11 or the right sub-bin 13 from the opened outer door 14; the air curtain also stops after the outer door 14 is closed.

[0034] If it is necessary to open a certain inner door 15, for example, the inner door 15 between the main compartment 12 and the left secondary compartment 11, the electronic control unit 6 can determine in advance whether it is necessary to start the pipeline booster pump 23 based on the air pressure difference between the main compartment 12 and the left secondary compartment 11 dynamically provided by the pressure difference detection unit 4 between the main compartment 12 and the left secondary compartment 11. If the pressure difference detection unit 4 detects that the air pressure difference between the main compartment 12 and the left secondary compartment 11 is the same or the air pressure in the main compartment 12 is lower than the air pressure in the left secondary compartment 11, the electronic control unit 6 will instruct the pipeline booster pump 23 to start the boosting, so that the air pressure in the main compartment 12 is slightly higher than the air pressure in the left secondary compartment 11, and then the inner door 15 can be automatically opened, and the air in the left secondary compartment 11 is prevented from flowing into the main compartment 12; the pipeline booster pump 23 also stops working after the inner door 15 is closed.

[0035] The air pressure in the main compartment 12 needs to be slightly higher than the air pressure in the left sub-compartment 11 or the right sub-compartment 13 by a certain amount before the inner door 15 can be opened, which can be set in advance by the operator in the electronic control unit 6.

[0036] The utility model improves the sampling cabinet for high-purity electronic-grade chemical sampling, sets the cabinet body 1 as a main cabinet 12 and two sub-cabinets disposed on the left and right sides thereof, sets inner doors 15 between the two sub-cabinets and the main cabinet 12, sets outer doors 14 on the two sub-cabinets, and sets air curtain tubes 142 on the periphery of the outer doors 14, and reduces the influence of unclean air mixed in when the outer doors 14 are opened on the main cabinet 12 by utilizing the buffering effect of the left and right sub-cabinets, and reduces the amount of unclean air mixed in when the outer doors 14 are opened by utilizing the air curtains generated by the air curtain tubes 142; sets an air supply unit 2 and two sets of pressure difference detection units 15 on the cabinet body 1, and sets an air supply unit 2 and two sets of pressure difference detection units 15 on the cabinet body 1. The measuring unit 4 and the exhaust unit 3 utilize the air supply unit 2 to transport high-cleanliness air into each compartment of the cabinet body 1 and the exhaust unit 3 to exhaust the dirty air for air replacement, and utilize the air supply unit 2 to pressurize the main compartment 12 before the inner door 15 of the cabinet body 1 is opened to make the air pressure in the main compartment 12 slightly higher than the air pressure in the left and right sub-compartments, so as to avoid the air in the two sub-compartments from flowing into the main compartment 12, so that the main compartment 12 can always maintain high purity without extending the replacement time of the air in the main compartment 12, so that the chemicals sampled in the main compartment 12 will not be contaminated, thereby improving the accuracy of the detection result.

[0037] The above is only a specific embodiment of the present utility model, but the design concept of the present utility model is not limited to this. Any non-substantial changes to the present utility model using this concept shall be deemed as an infringement of the protection scope of the present utility model.

Claims

1. A sampling cabinet suitable for sampling high-purity electronic-grade chemicals, comprising an electronic control unit (6), characterized in that: The invention also comprises a cabinet body (1), an air supply unit (2), an air exhaust unit (3) and a pressure difference detection unit (4); the cabinet body (1) is provided with a main compartment (12) and a left secondary compartment (11) and a right secondary compartment (13) respectively arranged on both sides of the main compartment (12); the pressure difference detection unit (4) is divided into two groups, and the two groups of pressure difference detection units (4) are respectively arranged between the main compartment (12) and the left secondary compartment (11) and between the main compartment (12) and the right secondary compartment (13). (13), the pressure difference detection unit (4) is provided with an air pressure difference detection component, which can detect the air pressure difference between two adjacent compartments, the left secondary compartment (11) and the right secondary compartment (13) are both provided with an outer door (14) that can be opened and closed automatically and an air curtain component is provided on the side of the outer door (14), the air supply unit (2) is placed on the top of the cabinet body (1) and is respectively connected to the left secondary compartment (11), the main compartment (12) and the right secondary compartment (13) The air supply unit (2) is provided with an air supply component and a pressurizing component is provided on a pipeline connected to the main compartment (12). The air supply unit (2) can respectively deliver high-cleanliness air to the left sub-compartment (11), the main compartment (12) and the right sub-compartment (13). The air supply unit (2) can also pressurize the air delivered to the main compartment (12) so that the air pressure in the main compartment (12) is higher than the air pressure in the left sub-compartment (11) and the right sub-compartment (13). The air unit (3) is placed at the lower part of the cabinet body (1) and is respectively connected to the left secondary compartment (11), the main compartment (12) and the right secondary compartment (13); the exhaust unit (3) is provided with an exhaust component and can exhaust the gas in the left secondary compartment (11), the main compartment (12) and the right secondary compartment (13); the cabinet body (1), the air supply unit (2), the exhaust unit (3) and the pressure difference detection unit (4) are all electrically connected to the electronic control unit (6).

2. The sampling cabinet suitable for sampling high-purity electronic-grade chemicals according to claim 1, characterized in that: The air supply unit (2) comprises an air supply pipe (21), an air supply port (22), a pipeline booster pump (23), an electric valve (24) and a filter (25); the air supply pipe (21) is provided with an air inlet end and three parallel air outlet ends; the filter (25) is connected to the pipe at the air inlet end of the air supply pipe (21); the air supply port (22) and the electric valve (24) are each three pieces; the three air supply ports (22) are respectively fixedly connected and connected to the three air outlet ends of the air supply pipe (21); the three electric valves (24) are respectively fixedly connected and connected to the pipes corresponding to the three air supply ports (22); the pipeline booster pump (23) is fixedly connected and connected to the pipe corresponding to the middle air supply port (22).

3. The sampling cabinet suitable for sampling high-purity electronic-grade chemicals according to claim 2, characterized in that: The filter (25) is a filter capable of filtering out air with a cleanliness level of Class 10, and the pipeline booster pump (23) is an air pipeline booster pump.

4. The sampling cabinet suitable for sampling high-purity electronic-grade chemicals according to claim 2, characterized in that: The exhaust unit (3) comprises an exhaust pipe (31), an air suction port (32), a non-return valve (33) and an exhaust fan (34); the exhaust pipe (31) is provided with three parallel air suction ends and one air discharge end; the exhaust fan (34) is connected to the pipe at the air discharge end of the exhaust pipe (31); the air suction port (32) and the non-return valve (33) are respectively three pieces; the three air suction ports (32) are respectively fixedly connected and connected to the three air suction ends of the exhaust pipe (31); the three non-return valves (33) are respectively fixedly connected and connected to the pipes corresponding to the three air suction ports (32).

5. The sampling cabinet suitable for sampling high-purity electronic-grade chemicals according to claim 4, characterized in that: The differential pressure detection unit (4) comprises an airway (41), a pitot-static pressure tube (42) and a differential pressure sensor (43). The pitot-static pressure tube (42) of each group of differential pressure detection units (4) is two pieces. The two pitot-static pressure tubes (42) are respectively fixedly connected and connected to the two ends of the airway (41). The differential pressure sensor (43) is connected to the middle of the airway (41).

6. The sampling cabinet suitable for sampling high-purity electronic-grade chemicals according to claim 5, characterized in that: The two ends of one of the two groups of differential pressure detection units (4) are respectively placed above the middle of the main tank compartment (12) and the left secondary tank compartment (11), and the two ends of the other group of differential pressure detection units (4) are respectively placed above the middle of the main tank compartment (12) and the right secondary tank compartment (13).

7. The sampling cabinet suitable for sampling high-purity electronic-grade chemicals according to claim 6, characterized in that: The outer door (14) comprises an automatic door (141) and an air curtain tube (142). The air curtain tube (142) is a semi-enclosed tube formed by fixing and connecting a horizontal tube and vertical tubes on both sides. The bottom of the vertical tube is sealed. A plurality of air outlet holes (1421) are densely arranged on the front side walls of the horizontal tube and the vertical tube. The air outlet holes (1421) are arranged obliquely outward and downward. An air inlet is arranged in the middle of the air curtain tube (142) and the air inlet can be connected to a pipeline of a compressed air source with a cleanliness level of 10 provided from the outside. An automatic opening and closing control valve is also arranged on the pipeline. The automatic door (141) is a door leaf that can be opened automatically and closed tightly.

8. The sampling cabinet suitable for sampling high-purity electronic-grade chemicals according to claim 7, characterized in that: An inner door (15) is provided between the main compartment (12) and the left secondary compartment (11) and between the main compartment (12) and the right secondary compartment (13). The inner door (15) is a door leaf that can be opened automatically and closed tightly.

9. The sampling cabinet suitable for sampling high-purity electronic-grade chemicals according to claim 1, characterized in that: It also includes a sewage discharge unit (5), the sewage discharge unit (5) includes a sewage discharge pipe (51) and a sewage discharge valve (52), the sewage discharge pipe (51) includes a main pipe and three branch pipes, the three branch pipes are arranged in parallel and merged to be connected to the main pipe, the three branch pipes are respectively inserted into and fixedly connected to the bottom of the left secondary tank bin (11), the main tank bin (12) and the right secondary tank bin (13), and the sewage discharge valve (52) is fixedly connected to and connected to the main pipe of the sewage discharge pipe (51).

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