Pipe target binding and coating device

Abstract

The utility model discloses a tube target binding and coating device which comprises a frame used for supporting the tube target binding and coating device. The back target fixator is rotatably arranged on the frame, and one end of the back target fixator is used for being connected with a tubular back target; the two groups of back target fixers are arranged in parallel, so that the tubular back targets connected to the two groups of back target fixers are arranged in parallel and at intervals on the same horizontal plane; and the rotating mechanism is mounted on the frame and is in transmission connection with the other ends of the back target fixers so as to respectively drive the two tubular back targets to rotate relatively through the two groups of back target fixers. According to the tube target binding and coating device provided by the utility model, the two tubular back targets are arranged at intervals, the axes of the two tubular back targets are parallel to each other, the conductive and heat-conducting glue is added between the two tubular back targets, and the conductive and heat-conducting glue can be uniformly coated on the surfaces of the two tubular back targets through the process that the rotating mechanism drives the two tubular back targets to rotate relatively; and two tubular back targets can be uniformly coated at one time, so that the efficiency and the coating quality are high.

Description

Technical Field

[0001] The utility model relates to the technical field of rotating target materials, and more specifically, to a tube target binding coating device. Background Art

[0002] In order to reduce costs and improve reliability, the target material for magnetron sputtering needs to be bound to the backplane during the preparation process. Due to its advantages of low cost, simple operation and easy repair, thermal and electrical conductive adhesive bonding is the most commonly used bonding method at this stage.

[0003] Currently, the binding of thermal conductive adhesive relies on manually applying the thermal conductive adhesive to the surface of the tube target with a brush, which is inefficient and uneven in coating. The coating thickness cannot be controlled, which easily leads to waste of thermal conductive adhesive.

[0004] Therefore, how to provide a tube target binding coating device that can achieve rapid and uniform coating has become a technical problem that urgently needs to be solved in this field. Utility Model Content

[0005] The utility model aims to provide a tube target binding coating device which can realize rapid and uniform coating.

[0006] The utility model provides a tube target binding coating device, comprising a frame for supporting the tube target binding coating device;

[0007] A back target fixer, the back target fixer is rotatably arranged on the frame, one end of the back target fixer is used to connect the tubular back target; two groups of back target fixers are arranged in parallel so that the tubular back targets connected to the two groups of back target fixers are arranged in parallel and at intervals on the same horizontal plane;

[0008] The rotating mechanism is installed on the frame and is drivingly connected with the other end of the back target fixer to respectively drive the two tubular back targets to rotate relative to each other through the two groups of back target fixers.

[0009] Optionally, the tube-target binding coating device further comprises:

[0010] The rangefinder is arranged toward the outer periphery of the tubular back target and is used for detecting the coating thickness of the tubular back target.

[0011] Optionally, the rangefinder includes an infrared rangefinder, which is located above a tubular back target, and a straight line where a detection direction of the infrared rangefinder is located is perpendicular to an axis of the tubular back target.

[0012] Optionally, the two tubular back targets mounted on the two sets of back target holders are located on the same horizontal plane;

[0013] The tube target binding coating device also includes: a roller distance adjustment mechanism, which is arranged on the frame and connected to the back target fixer to drive one tubular back target to move toward or away from another tubular back target in a horizontal direction.

[0014] Optionally, the roller gap adjustment mechanism includes a roller gap knob and a gear pair, the input end of the gear pair is connected to the roller gap knob, and the output end of the gear pair is connected to the tubular back target. Rotating the roller gap knob can drive one tubular back target to move horizontally toward or away from another tubular back target through the gear pair.

[0015] Optionally, the back target fixture is a telescopic fixture, including a connecting shaft coaxial with the tubular back target, and a telescopic connector connected to the outer periphery of the connecting shaft and expandable radially along the connecting shaft, and the outer periphery of the telescopic connector abuts against the inner periphery of the tubular back target for interference fit.

[0016] Optionally, the tube-target binding coating device further comprises:

[0017] The receiving hopper is located below the two tubular back targets.

[0018] Optionally, the receiving hopper comprises a scraper portion, and the scraper portion faces the tubular back target.

[0019] Optionally, the tube-target binding coating device further comprises:

[0020] Baffles, two baffles are respectively arranged on both sides of the axial direction of the tubular back target.

[0021] Optionally, the tube-target binding coating device further comprises:

[0022] The rotating hand wheel and the transmission mechanism, the rotating hand wheel, the transmission mechanism and the back target fixer are matched and connected in sequence to drive the tubular back target to rotate.

[0023] According to the technical content disclosed in the utility model, the following beneficial effects are achieved:

[0024] The tube target binding coating device provided by the utility model can arrange two tubular back targets in parallel and at intervals on the same horizontal plane, add conductive and thermally conductive glue between the two tubular back targets, and drive the two tubular back targets to rotate relative to each other through a rotating mechanism, so that the conductive and thermally conductive glue can be evenly coated on the surfaces of the two tubular back targets, and two tubular back targets can be evenly coated at one time, with high efficiency and high coating quality.

[0025] Other features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present invention and, together with the description, serve to explain the principles of the present invention.

[0027] Figure 1 This is a structural diagram of the tube target binding coating device of the utility model.

[0028] Explanation of the reference numerals: 10, frame; 20, first copper back target; 21, second copper back target; 30, baffle; 31, infrared rangefinder; 32, receiving hopper; 40, roller distance knob; 41, rotating hand wheel; 42, telescopic fixture. DETAILED DESCRIPTION

[0029] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention.

[0030] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present invention, its application, or uses.

[0031] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0032] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0033] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0034] See also Figure 1 The utility model discloses a tube target binding coating device, including a frame 10, a back target fixer, a baffle 30, a rangefinder, a roller distance adjustment mechanism, a receiving hopper, a roller distance knob 40, a rotating mechanism and a telescopic fixer 42.

[0035] The frame 10 is used to support the tube target binding coating device; the back target holder is rotatably arranged on the frame 10, and one end of the back target holder is used to connect the tubular back target; two groups of back target holders are arranged in parallel so that the tubular back targets connected to the two groups of back target holders are arranged in parallel and spaced on the same horizontal plane; the rotating mechanism is installed on the frame and is transmission-connected to the other end of the back target holder, so as to drive the two tubular back targets to rotate relative to each other through the two groups of back target holders. Specifically, in order to adapt to tubular back targets with different inner diameters, the back target holder is a telescopic holder 42, and the telescopic holder 42 includes a connecting shaft coaxially arranged with the tubular back target, and a telescopic connector connected to the outer periphery of the connecting shaft and expandable along the radial direction of the connecting shaft, and the outer periphery of the telescopic connector abuts against the inner periphery of the tubular back target to be interference-fitted to fix the tubular back target. The tubular back target to be coated includes a first copper back target 20 and a second copper back target 21 of the same shape and size. The first copper back target 20 and the second copper back target 21 are respectively connected to a group of telescopic fixtures 42 so that the first copper back target 20 and the second copper back target 21 are arranged at intervals and their axes are parallel to each other and arranged on the same horizontal plane.

[0036] The rotating mechanism is installed on the frame 10, and includes a transmission mechanism and a rotating hand wheel 41. The rotating hand wheel 41, the transmission mechanism and the telescopic fixture 42 are sequentially connected. The rotating hand wheel 41 can drive the first copper back target 20 and the second copper back target 21 to rotate relative to each other around their respective axes through the transmission mechanism and the telescopic fixture 42. A conductive thermal conductive adhesive is added between the two copper back targets. Through the relative rotation of the two copper back targets, the conductive thermal conductive adhesive is evenly coated on the surface of the target material. Two copper back targets can be evenly coated at one time, with high efficiency and high coating quality.

[0037] The rangefinder includes an infrared rangefinder 31, which is located above the first copper back target 20 or the second copper back target 21, and is arranged toward the periphery of the tubular back target, and the straight line where the detection direction of the infrared rangefinder 31 is located is perpendicular to the axis of the corresponding tubular back target, and the infrared rangefinder 31 is used to measure the thickness of the conductive and thermal conductive adhesive coated on the periphery of the first copper back target 20 and the second copper back target 21. It can be seen that the infrared rangefinder 31 is arranged above the copper back target to monitor the coating thickness on the copper back target in real time, and the coating thickness can be changed by adjusting the gap between the two targets to achieve controllable thickness.

[0038] The roller distance adjustment mechanism is arranged on the frame 10 and connected to the telescopic fixture 42 to drive one tubular back target to move toward or away from another tubular back target in the horizontal direction. Specifically, the roller distance adjustment mechanism includes a roller distance knob 40 and a gear pair, the input end of the gear pair is connected to the roller distance knob 40, and the output end of the gear pair is connected to the telescopic fixture 42. Rotating the roller distance knob 40 can drive one tubular back target to move toward or away from another tubular back target in the horizontal direction through the gear pair. The setting of the roller distance adjustment mechanism enables the distance between the two targets to be set according to the target thickness.

[0039] The receiving hopper 32 is located below the two tubular back targets and includes a scraper portion for scraping the conductive and thermally conductive adhesive on the outer periphery of the tubular back targets, and the scraper portion faces the tubular back targets. It can be seen that the receiving hopper is provided to remove the excess conductive and thermally conductive adhesive in real time, and the removed conductive and thermally conductive adhesive can be transferred to a new copper back target to achieve maximum utilization and zero material waste.

[0040] The two baffles 30 are respectively arranged on both sides of the axial direction of the tubular back target to prevent the conductive and thermal conductive adhesive from spreading to both sides of the axial direction of the tubular back target.

[0041] In summary, the tube target binding coating device provided by the utility model has the innovation and advantage of being able to achieve rapid coating while recovering excess thermal and electrical conductive adhesive, and being able to monitor coating thickness in real time, greatly improving the target material binding efficiency and target material quality.

[0042] Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A tube target binding coating device, characterized in that: include: A frame, used to support the tube target binding coating device; A back target fixer, the back target fixer is rotatably arranged on the frame, one end of the back target fixer is used to connect a tubular back target; two groups of the back target fixers are arranged in parallel so that the tubular back targets connected to the two groups of the back target fixers are arranged in parallel and at intervals on the same horizontal plane; The rotating mechanism is installed on the frame and is drivingly connected with the other end of the back target fixer to respectively drive the two tubular back targets to rotate relative to each other through two groups of back target fixers.

2. The tube target binding coating device according to claim 1, characterized in that: The tube target binding coating device also includes: The rangefinder is arranged toward the outer periphery of the tubular back target and is used for detecting the coating thickness of the tubular back target.

3. The tube target binding coating device according to claim 2, characterized in that: The rangefinder comprises an infrared rangefinder, which is located above one of the tubular back targets, and a straight line where a detection direction of the infrared rangefinder is located is perpendicular to an axis of the tubular back target.

4. The tube target binding coating device according to any one of claims 1 to 3, characterized in that: The two tubular back targets mounted on the two sets of back target holders are located on the same horizontal plane; The tube target binding coating device further comprises: a roller distance adjustment mechanism, which is arranged on the frame and connected to the back target holder to drive one of the tubular back targets to move toward or away from another tubular back target in a horizontal direction.

5. The tube-target binding coating device according to claim 4, characterized in that: The roller gap adjustment mechanism includes a roller gap knob and a gear pair, wherein the input end of the gear pair is connected to the roller gap knob, and the output end of the gear pair is connected to the tubular back target. Rotating the roller gap knob can drive one tubular back target to move toward or away from another tubular back target in a horizontal direction through the gear pair.

6. The tube target binding coating device according to any one of claims 1 to 3, characterized in that: The back target fixture is a telescopic fixture, including a connecting shaft coaxial with the tubular back target, and a telescopic connector connected to the outer periphery of the connecting shaft and expandable along the radial direction of the connecting shaft. The outer periphery of the telescopic connector abuts against the inner periphery of the tubular back target for interference fit.

7. The tube target binding coating device according to any one of claims 1 to 3, characterized in that The tube target binding coating device also includes: A receiving hopper is located below the two tubular back targets.

8. The tube-target binding coating device according to claim 7, characterized in that: The receiving hopper includes a scraper portion, and the scraper portion faces the tubular back target.

9. The tube target binding coating device according to any one of claims 1 to 3, characterized in that The tube target binding coating device also includes: Baffles, two baffles are respectively arranged on both sides of the axial direction of the tubular back target.

10. The tube target binding coating device according to any one of claims 1 to 3, characterized in that The tube target binding coating device also includes: A rotating hand wheel and a transmission mechanism, wherein the rotating hand wheel, the transmission mechanism and the back target fixer are matched and connected in sequence to drive the tubular back target to rotate.

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