Rotary cleaning device
By designing a rotary cleaning device, using multiple radially extending flushing tanks and rotary driving parts, the problems of low cleaning efficiency and secondary pollution in the prior art are solved, and efficient dirt discharge and cleaning effects are achieved.
Patent Information
- Application Number
- CN202421456494.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-25
- Publication Date
- 2025-05-02
- Estimated Expiration
- 2034-06-25
AI Technical Summary
The existing straight-trough flushing devices have space limitations and difficult to reach contaminated areas when cleaning semiconductor wafers, resulting in low cleaning efficiency and the risk of secondary contamination.
A rotary cleaning device is designed, and the lower cover is provided with a plurality of radially extending flush tanks, each of which is provided with a plurality of product placement positions in the radial space, combining high-pressure liquid and rotary driving members to promote the movement and discharge of dirt.
It improves cleaning efficiency, increases the number of product placement, promotes dirt discharge, avoids secondary pollution in the flushing process, and ensures cleaning effect.
Smart Images
Figure CN222817453U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductors, in particular to a rotary cleaning device. Background Art
[0002] In the precision manufacturing process of semiconductor integrated circuits (ICs), the quality of wafers is directly related to the performance and reliability of the entire circuit. Therefore, wafers need to undergo a rigorous cleaning process on the production line to ensure that their surfaces are clean and free of impurities. However, existing straight tank rinsers have some obvious limitations when dealing with this challenge.
[0003] First, the straight tank design limits the number of wafers that can be placed. Due to limited space, only a limited number of wafers can be accommodated each time the cleaning process is performed, which reduces the cleaning efficiency. Secondly, there are also problems with the method of relying solely on high-pressure water for rinsing. Although high-pressure water can effectively remove most contaminants on the surface of the wafer, dirt tends to accumulate in hard-to-reach areas such as the corners of the rinsing device. These contaminants that are difficult to rinse off not only affect the quality of the wafer, but may also cause secondary contamination during the rinsing process, further reducing product quality. Utility Model Content
[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. The utility model provides a rotary cleaning device, which improves the cleaning efficiency, promotes the discharge of dirt, avoids secondary pollution in the flushing process, and ensures the cleaning effect.
[0005] In order to achieve the above-mentioned purpose, the utility model provides a rotary cleaning device, including a support frame, a rotary driving member, and an upper cover and a lower cover with openings arranged opposite to each other, the upper cover and the rotary driving member are respectively connected to the support frame, the lower cover is transmission-connected to the rotary driving member, the upper cover and the lower cover are folded and connected to form a flushing box, the flushing box is provided with a drain and a water inlet for communicating with a water source, the lower cover is provided with a plurality of flushing grooves extending radially, the flushing grooves are provided with a plurality of product placement positions for placing products at intervals along the radial direction, and the water inlet and the drain are respectively communicated with the flushing grooves.
[0006] As a preferred solution, the lower cover is provided with a connecting groove, and the flushing grooves adjacent to each other in the circumferential direction are connected through the connecting groove.
[0007] As a preferred solution, a plurality of the communicating grooves are provided, and the adjacent flushing grooves are respectively connected through a plurality of the communicating grooves spaced apart in the radial direction.
[0008] As a preferred embodiment, a central groove is provided at the center of the lower cover, one end of each of the flushing grooves is connected to the central groove, the water inlet is opened in the upper cover, and the position of the water inlet is arranged corresponding to the position of the central groove.
[0009] As a preferred solution, the water inlet and the drain outlet are respectively located at opposite ends of the flushing trough.
[0010] As a preferred embodiment, the product placement position is provided with a product bearing surface, the lower cover is provided with a lower cover bottom surface, the upper cover is provided with an upper cover top surface, the lower cover bottom surface and the upper cover top surface are arranged opposite to each other, the flushing groove is provided with a first flushing channel and a second flushing channel, the first flushing channel is located between the product bearing surface and the upper cover top surface, and the second flushing channel is located between the product bearing surface and the lower cover bottom surface.
[0011] As a preferred solution, the height a of the flushing groove is set at 1mm-2mm, and the width b of the flushing groove is set at 110mm-112mm.
[0012] As a preferred solution, limiting grooves are respectively provided on both sides perpendicular to the extension direction of the flushing groove, the openings of the two limiting grooves are facing the flushing groove and are arranged opposite to each other, and the two limiting grooves define the product placement position.
[0013] As a preferred solution, the limiting groove is arranged in an arc shape.
[0014] As a preferred solution, the support frame is connected to a lifting drive member, and a driving end of the lifting drive member is arranged toward the opening of the lower cover and connected to the upper cover.
[0015] Compared with the prior art, the rotary cleaning device of the utility model has the following beneficial effects: the lower cover is provided with a plurality of flushing grooves extending in the radial direction, and at the same time, each flushing groove is provided with a plurality of product placement positions for placing products at intervals in the radial direction, thereby increasing the number of product placement positions and improving the cleaning efficiency. Among them, the upper cover and the lower cover are boxed to form a flushing groove, and the high-pressure liquid enters the flushing groove through the water inlet, and the product is flushed in the flushing groove. The flushing liquid flows in the flushing groove to flush the product in the product placement position. At the same time, during the flushing process, the rotating driving member controls the rotation of the lower cover to generate a rotating centrifugal force, which promotes the movement of dirt in the corners of the flushing groove and discharges it from the drain port, thereby avoiding secondary contamination during the flushing process and ensuring the cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the utility model.
[0017] Figure 2 It is a structural schematic diagram of the upper cover and the lower cover of the embodiment of the utility model when they are separated.
[0018] Figure 3 It is a cross-sectional schematic diagram of the overall structure of an embodiment of the utility model.
[0019] Figure 4 This utility model embodiment Figure 3 Schematic diagram of the enlarged structure at A in FIG.
[0020] Figure 5 It is a structural schematic diagram of the lower cover of an embodiment of the utility model.
[0021] In the figure:
[0022] 10. Support frame; 11. Rotating drive member; 12. Flushing box; 13. Drain port; 14. Water inlet; 15. Lifting drive member; 16. Product;
[0023] 20. Upper cover;
[0024] 30. Lower cover; 31. Flushing groove; 32. Product placement position; 33. Limiting groove; 34. Product carrying surface; 35. First flushing channel; 36. Second flushing channel; 37. Connecting groove; 38. Center groove. DETAILED DESCRIPTION
[0025] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0026] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like used in the present invention to indicate the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0027] In the description of the present invention, it should be understood that the terms "connected", "connected", "fixed" and the like used in the present invention should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, or a welding connection; it can be directly connected, or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0028] like Figures 1 to 5As shown, a rotary cleaning device of a preferred embodiment of the utility model comprises a support frame 10, a rotary driving member 11, and an upper cover 20 and a lower cover 30 with openings arranged opposite to each other, the upper cover 20 and the rotary driving member 11 are respectively connected to the support frame 10, the lower cover 30 is transmission-connected to the rotary driving member 11, the upper cover 20 and the lower cover 30 are covered and connected to form a flushing box 12, the flushing box 12 is provided with a drain port 13 and a water inlet 14 for communicating with a water source, the lower cover 30 is provided with a plurality of flushing grooves 31 extending radially, the flushing grooves 31 are provided with a plurality of product placement positions 32 for placing products 16 at intervals along the radial direction, and the water inlet 14 and the drain port 13 are respectively communicated with the flushing grooves 31.
[0029] In the rotary cleaning device of the utility model, the lower cover 30 is provided with a plurality of flushing grooves 31 extending in the radial direction. At the same time, each flushing groove 31 is provided with a plurality of product placement positions 32 for placing the product 16 at intervals in the radial direction, thereby increasing the number of product placement positions 32 and improving the cleaning efficiency. The upper cover 20 and the lower cover 30 are combined to form a flushing groove 31, and the high-pressure liquid enters the flushing groove 31 through the water inlet 14. The product 16 is flushed in the flushing groove 31. The flushing liquid flows in the flushing groove 31 to flush the product 16 in the product placement position 32. At the same time, during the flushing process, the rotary drive member 11 controls the lower cover 30 to rotate, generating a rotating centrifugal force, promoting the movement of dirt in the corners of the flushing groove 31 and discharging it from the drain port 13, avoiding secondary contamination during the flushing process, and ensuring the cleaning effect.
[0030] Further, such as Figure 2 and Figure 5 As shown, the lower cover 30 is provided with a connecting groove 37, and the adjacent flushing grooves 31 in the circumferential direction are connected through the connecting groove 37. Through the arrangement of the connecting groove 37, a flow connection is formed between the flushing grooves 31, so that the high-pressure liquid not only flows in the radial direction in the flushing groove 31, but also circulates in the circumferential direction, so that the flushing groove 31 has water flow impact in different directions, thereby promoting the movement of dirt at the edges and corners of the flushing groove 31, thereby enhancing the cleaning effect and reducing the cleaning dead corners.
[0031] Furthermore, a plurality of connecting grooves 37 are provided, and adjacent flushing grooves 31 are connected through a plurality of connecting grooves 37 arranged at radial intervals, so that the flushing groove 31 has circumferential water flow impact at multiple radial positions, thereby increasing the range of circumferential water flow impact, further promoting the movement of dirt at the edges and corners of the flushing groove 31, thereby enhancing the cleaning effect and reducing cleaning dead corners.
[0032] Further, such as Figure 2 and Figure 5As shown, a central groove 38 is provided at the center of the circle of the lower cover 30, one end of a plurality of flushing grooves 31 is connected to the central groove 38, and a water inlet 14 is provided on the upper cover 20, and the position of the water inlet 14 is provided corresponding to the position of the central groove 38. Since the water inlet 14 is provided directly corresponding to the central groove 38 of the lower cover 30, the high-pressure liquid can flow into the central groove 38 quickly and evenly, and is quickly distributed to the entire device through the plurality of flushing grooves 31 connected to the central groove 38, ensuring that each flushing groove 31 can obtain sufficient flushing liquid, thereby improving the cleaning efficiency. Since the flushing liquid is evenly distributed from the central groove 38 to each flushing groove 31, the cleaning pressure in each flushing groove 31 is relatively balanced, ensuring that the surface of the product 16 is evenly cleaned, avoiding the problem of insufficient or excessive local cleaning, thereby optimizing the cleaning effect. The provision of the central groove 38 makes the device more stable when rotating, and since the liquid flows outward from the central groove 38, the overall stability of the device is improved.
[0033] As one embodiment, Figure 5 As shown, the diameter position of the connecting groove 37 and the adjacent flushing groove 31 is the same.
[0034] Further, such as Figures 2 to 5 As shown, the water inlet 14 and the drain outlet 13 are respectively located at opposite ends of the rinse tank 31. The water inlet 14 and the drain outlet 13 are respectively located at opposite ends of the rinse tank 31. The rinse liquid enters the rinse tank 31 from the water inlet 14 under high pressure, which can form a rinse flow to impact the surface of the wafer and effectively remove pollutants attached to the surface. After the rinse water flows through the surface of the wafer, it flows out from the drain outlet 13 at the other end, forming a flushing effect and enhancing the rinse effect. The relative position design of the water inlet 14 and the drain outlet 13 allows the rinse liquid to form a clear and efficient water flow path in the rinse tank 31, which can promote the discharge of sewage and dirt generated during the rinse process and reduce the retention time of sewage in the rinse tank 31.
[0035] As one embodiment, Figures 2 to 5 As shown, the water inlet 14 is located above the central groove 38 , and the water outlet 13 is located at the edge of the lower cover 30 .
[0036] Further, such as Figures 4 to 5As shown, the product placement position 32 is provided with a product bearing surface 34, the lower cover 30 is provided with a bottom surface of the lower cover 30, the upper cover 20 is provided with a top surface of the upper cover 20, the bottom surface of the lower cover 30 and the top surface of the upper cover 20 are arranged oppositely, and the flushing groove 31 is provided with a first flushing channel 35 and a second flushing channel 36, the first flushing channel 35 is located between the product bearing surface 34 and the top surface of the upper cover 20, and the second flushing channel 36 is located between the product bearing surface 34 and the bottom surface of the lower cover 30. The first flushing channel 35 flushes one side of the product 16, and the second flushing channel 36 flushes the other side of the product 16, and the two opposite sides of the product 16 are flushed by the flushing water flow in the first flushing channel 35 and the second flushing channel 36 respectively. It is ensured that the two opposite sides of the product 16 are flushed at the same time, and the flushing efficiency is improved. It is only necessary to place the product 16 on the product bearing surface 34, and then start the flushing process, without complicated operations or adjustments, so that the entire flushing process is easier to operate.
[0037] As one embodiment, Figures 4 to 5 As shown, the extension direction of the first flushing channel 35 and the second flushing channel 36 is respectively the same as the extension direction of the flushing slot 31 .
[0038] As one embodiment, Figure 4 As shown, the heights of the first flushing channel 35 and the second flushing channel 36 are substantially equal, so as to ensure that the water flow rates distributed in the first flushing channel 35 and the second flushing channel 36 are substantially equal, thereby ensuring the flushing effect on the two opposite surfaces of the product 16 .
[0039] As one embodiment, Figure 5 As shown, one end of the first flushing channel 35 and the second flushing channel 36 are respectively communicated with the water inlet 14, and the other end thereof are respectively communicated with the water outlet.
[0040] Further, such as Figure 4 As shown, the height a of the flushing groove 31 is set at 1mm-2mm, and the width b of the flushing groove 31 is set at 110mm-112mm. The product 16 to be flushed is placed in a relatively narrow and long space for flushing. The space for storing the flushing liquid is reduced, and the product 16 is flushed with less water, thereby reducing the cleaning cost. In the narrow and long space, the product 16 can be fully in contact with the flushing liquid to a large extent, thereby improving the cleaning effect.
[0041] As one embodiment, Figure 4 As shown, the height of the first flushing channel 35 is set at 0.5mm-1mm, and the height of the second flushing channel 36 is set at 0.5-1mm. The height of the first flushing channel 35 is set to be roughly the same as the height of the second flushing channel 36, ensuring that the flushing water volume distribution of the two flushing channels is roughly equal, ensuring the uniformity of the flushing effect.
[0042] Further, such as Figure 2 and Figure 5 As shown, two limiting grooves 33 are respectively provided on both sides perpendicular to the extension direction of the rinsing groove 31, and the openings of the two limiting grooves 33 face the rinsing groove 31 and are arranged opposite to each other, and the two limiting grooves 33 define a product placement position 32. The two limiting grooves 33 are used to limit the opposite sides of the wafer respectively, ensuring that the rinsing product 16 remains in the product placement position 32 during the rinsing process. The middle part of the wafer is located in the rinsing groove 31, and of course, the limiting groove 33 is connected to the rinsing groove 31, so that the part of the rinsing product 16 located in the limiting groove 33 can also be rinsed.
[0043] Further, such as Figure 2 and Figure 5 As shown, the limiting groove 33 is arranged in an arc shape. Since the wafer is circular, the limiting groove 33 is in an arc shape to match the edge shape of the wafer, and the limiting effect is better.
[0044] Further, such as Figure 1 and Figure 2 As shown, the support frame 10 is connected to a lifting drive member 15, and the driving end of the lifting drive member 15 is arranged toward the opening of the lower cover 30 and connected to the upper cover 20. The lifting drive member 15 controls the upper cover 20 and the lower cover 30 to move closer to or away from each other, so as to realize the opening or closing of the upper cover 20 and the lower cover 30, and the operation is more convenient.
[0045] As one embodiment, Figure 1 As shown, the upper cover 20 and the lower cover 30 are coaxially arranged, the diameter of the upper cover 20 is larger than the diameter of the lower cover 30, a drainage channel is formed between the inner peripheral wall of the upper cover 20 and the outer peripheral wall edge of the lower cover 30, and the drainage port 13 is connected to the drainage channel. The drainage channel extends in the height direction, so that the discharged wastewater flows downward, which is convenient for wastewater collection.
[0046] In summary, the embodiment of the utility model provides a rotary cleaning device, wherein the lower cover 30 is provided with a plurality of flushing grooves 31 extending radially, and at the same time, each flushing groove 31 is provided with a plurality of product placement positions 32 for placing the product 16 at intervals along the radial direction, thereby increasing the number of product placement positions 32 and improving the cleaning efficiency. Among them, the upper cover 20 and the lower cover 30 are combined to form a flushing groove 31, and the high-pressure liquid enters the flushing groove 31 through the water inlet 14, and the product 16 is flushed in the flushing groove 31. The flushing liquid flows in the flushing groove 31 to flush the product 16 in the product placement position 32. At the same time, during the flushing process, the rotary drive member 11 controls the rotation of the lower cover 30 to generate a rotating centrifugal force, which promotes the movement of dirt in the corners of the flushing groove 31 and discharges it from the drain port 13, thereby avoiding secondary contamination in the flushing process and ensuring the cleaning effect.
[0047] The above are only preferred implementations of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.
Claims
1. A rotary cleaning device, characterized in that: It includes a support frame, a rotating drive member, and an upper cover and a lower cover with openings arranged opposite to each other, the upper cover and the rotating drive member are respectively connected to the support frame, the lower cover is transmission-connected to the rotating drive member, the upper cover and the lower cover are folded and connected to form a flushing box, the flushing box is provided with a drain and a water inlet for communicating with a water source, the lower cover is provided with a plurality of flushing grooves extending radially, the flushing grooves are provided with a plurality of product placement positions for placing products at intervals along the radial direction, and the water inlet and the drain are respectively communicated with the flushing grooves.
2. The rotary cleaning device according to claim 1, characterized in that: The lower cover is provided with a connecting groove, and the flushing grooves adjacent to each other in the circumferential direction are connected through the connecting groove.
3. The rotary cleaning device according to claim 2, characterized in that: A plurality of the communicating grooves are provided, and the adjacent flushing grooves are respectively connected through a plurality of the communicating grooves spaced apart in the radial direction.
4. The rotary cleaning device according to claim 1, characterized in that: A central groove is arranged at the center of the circle of the lower cover, one end of each of the plurality of flushing grooves is connected to the central groove, the water inlet is arranged in the upper cover, and the position of the water inlet is arranged corresponding to the position of the central groove.
5. The rotary cleaning device according to claim 1, characterized in that: The water inlet and the water outlet are respectively located at two opposite ends of the flushing trough.
6. The rotary cleaning device according to claim 1, characterized in that: The product placement position is provided with a product carrying surface, the lower cover is provided with a lower cover bottom surface, the upper cover is provided with an upper cover top surface, the lower cover bottom surface and the upper cover top surface are arranged opposite to each other, the flushing groove is provided with a first flushing channel and a second flushing channel, the first flushing channel is located between the product carrying surface and the upper cover top surface, and the second flushing channel is located between the product carrying surface and the lower cover bottom surface.
7. The rotary cleaning device according to claim 1, characterized in that: The height a of the flushing groove is set at 1mm-2mm, and the width b of the flushing groove is set at 110mm-112mm.
8. The rotary cleaning device according to claim 1, characterized in that: Limiting grooves are respectively provided on both sides perpendicular to the extension direction of the flushing groove, the openings of the two limiting grooves face the flushing groove and are arranged opposite to each other, and the two limiting grooves define the product placement position.
9. The rotary cleaning device according to claim 8, characterized in that: The limiting groove is arranged in an arc shape.
10. The rotary cleaning device according to claim 1, characterized in that: The support frame is connected with a lifting driving member, and the driving end of the lifting driving member is arranged toward the opening of the lower cover and connected with the upper cover.