Silicon wafer double-sided wind power dust removal device

Abstract

The utility model discloses a double-sided wind power dust removal device for a silicon wafer, and relates to the technical field of silicon wafer production equipment. The silicon wafer double-sided wind power dust removal device comprises a base, an air outlet assembly, a dust collection assembly and a conveying assembly. Wherein the air outlet assembly is installed on the base, the air outlet assembly is provided with an air outlet, and the air outlet is used for allowing airflow to flow out; the dust collection assembly is mounted on the base, the dust collection assembly is provided with a dust collection opening, the dust collection opening and the air outlet are oppositely arranged, and the dust collection opening is used for sucking air flow; the conveying assembly is installed on the base and used for conveying the silicon wafers to move between the air outlet and the dust collection opening. In the process that the silicon wafer moves between the air outlet and the dust collection opening, the first surface of the silicon wafer faces the air outlet so as to remove dust on the first surface of the silicon wafer, and the second surface of the silicon wafer faces the dust collection opening so as to remove dust on the second surface of the silicon wafer; wherein the first surface of the silicon wafer is opposite to the second surface of the silicon wafer. The silicon wafer double-sided wind power dust removal device provided by the utility model has the advantages of high dust removal efficiency and good dust removal effect.

Description

Technical Field

[0001] The present application relates to the technical field of silicon wafer production equipment, and in particular to a double-sided wind dust removal device for silicon wafers. Background Art

[0002] With the development of photovoltaic technology, silicon wafers (solar cells) have been widely used. Tunnel Oxide Passivated Contact (TOPCon) solar cells have become the mainstream solar cells due to their obvious advantages such as high conversion efficiency, low attenuation performance and high mass production cost performance.

[0003] During the production process of TOPCon solar cells, especially the screen printing process, the fine dust and particles attached to the solar cells will affect the production efficiency and quality of the solar cells, resulting in defective cells, reducing product yield and power generation efficiency.

[0004] In the related art, manual blowing is often used to remove dust from the front side of the solar cell, but it is difficult to take the back side of the solar cell into consideration, resulting in low dust removal efficiency and poor dust removal effect on the solar cell. Utility Model Content

[0005] In view of this, an embodiment of the present application provides a double-sided wind dust removal device for a silicon wafer.

[0006] The double-sided wind dust removal device for cabinet silicon wafers provided in the embodiment of the present application includes a base, an air outlet assembly, a dust suction assembly and a conveying assembly. Among them, the air outlet assembly is installed on the base, and the air outlet assembly is provided with an air outlet, and the air outlet is used to flow out the airflow; the dust suction assembly is installed on the base, and the dust suction assembly is provided with a dust suction port, and the dust suction port and the air outlet are arranged oppositely, and the dust suction port is used to inhale the airflow; the conveying assembly is installed on the base, and the conveying assembly is used to convey the silicon wafer to move between the air outlet and the dust suction port; during the movement of the silicon wafer between the air outlet and the dust suction port, the first side of the silicon wafer faces the air outlet to remove dust from the first side of the silicon wafer, and the second side of the silicon wafer faces the dust suction port to remove dust from the second side of the silicon wafer; wherein, the first side of the silicon wafer and the second side of the silicon wafer are opposite to each other.

[0007] In a possible implementation of the present application, the air outlet component includes an air outlet plate, on which a plurality of air outlets are arranged, and the air outlet capacity of the air outlet plate gradually increases from the edge of the air outlet plate to the middle of the air outlet plate along a first direction; wherein the first direction is parallel to the movement direction of the silicon wafer.

[0008] In a possible implementation of the present application, the air outlet is circular, and a plurality of air outlets are arranged vertically and horizontally along a first direction and a second direction; along the second direction, the air outlets in the same row have the same size; along the first direction, the diameter of the air outlets in the same column gradually increases from the edge of the air outlet plate to the middle air outlet of the air outlet plate; wherein the second direction is perpendicular to the first direction.

[0009] In a possible implementation of the present application, the air outlet is in a long strip shape, and the length direction of the air outlet is parallel to the second direction; multiple air outlets are arranged and distributed along the first direction, and the sizes of the multiple air outlets gradually increase from the edge of the air outlet plate to the middle of the air outlet plate along the first direction; wherein the second direction is perpendicular to the first direction.

[0010] In a possible implementation of the present application, the air outlet is in a long strip shape, and the length direction of the air outlet is parallel to the first direction; multiple air outlets are arranged and distributed along the second direction, and the size of each air outlet gradually increases from the edge of the air outlet plate to the middle of the air outlet plate along the first direction; wherein the second direction is perpendicular to the first direction.

[0011] In a possible implementation of the present application, a plurality of rows of air outlets are provided on the air outlet plate, and the plurality of rows of air outlets are arranged in an array along a second direction, and each row of air outlets includes two air outlets arranged along a first direction, and the two air outlets included in each row of air outlets are symmetrically arranged about a center line of the air outlet plate extending along the second direction, and the size of the air outlet gradually increases from the edge of the air outlet plate to the middle of the air outlet plate along the first direction; wherein the second direction is perpendicular to the first direction.

[0012] In a possible implementation of the present application, the dust suction component includes a dust suction plate, and the dust suction plate is provided with a dust suction port, and the dust suction port is arranged in a mirror image with the air outlet.

[0013] In a possible implementation of the present application, the air outlet component also includes an air outlet pipe and an air outlet bin, the air outlet pipe is connected to the upper end of the air outlet bin, the air outlet plate is installed at the lower end of the air outlet bin, the air outlet bin is in a cone shape, and the size of the lower end of the air outlet bin is larger than the size of the upper end of the air outlet bin; the dust suction component includes a dust suction plate, a dust suction pipe and a dust suction bin, the dust suction plate is provided with a dust suction port, the dust suction pipe is connected to the lower end of the dust suction bin, the dust suction plate is installed at the upper end of the dust suction bin, the dust suction bin is in a cone shape, and the size of the upper end of the dust suction bin is larger than the size of the lower end of the dust suction bin.

[0014] In a possible implementation of the present application, the air outlet plate is rectangular in shape, and the length direction of the air outlet plate is parallel to the first direction; the projections of the dust collection plate and the air outlet plate along the vertical direction overlap.

[0015] In a possible implementation of the present application, the conveying assembly includes two conveyor belts, and the two conveyor belts are arranged at intervals along a second direction; wherein the second direction is perpendicular to the first direction.

[0016] In the double-sided wind dust removal device for silicon wafers provided in the embodiment of the present application, by setting a conveying component, the conveying component can be used to convey the silicon wafer between the air outlet and the dust suction port, so that the air outlet can be used to remove dust on the first side of the silicon wafer, and the dust suction port can be used to remove dust on the second side of the silicon wafer, thereby achieving the effect of simultaneously removing dust from the first side and the second side of the silicon wafer, which can improve the efficiency of dust removal on the silicon wafer and improve the effect of dust removal on the silicon wafer. In addition, by relatively arranging the dust suction port and the air outlet, it can also ensure that the pressure formed by the airflow of the air outlet on the silicon wafer and the suction formed by the airflow of the dust suction port on the silicon wafer are balanced, so as to ensure the smooth movement of the silicon wafer and prevent the airflow from causing the silicon wafer to deviate. Further, the dust suction port can suck the airflow after the silicon wafer is dusted into the dust suction component, which can prevent the airflow carrying dust from affecting the surrounding environment. Through the above arrangement, a wind curtain can be formed between the air outlet component and the dust suction component, which is blown out by the air outlet component and sucked in by the dust suction component, and the wind curtain can be made to conform to fluid mechanics, thereby achieving the effect of controllably and stably removing dust from both sides of the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solution of the present application, the drawings required for use in the embodiments are briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0018] The drawings herein are incorporated into the specification and constitute a part of the specification. These drawings illustrate embodiments consistent with the present application and are used together with the specification to illustrate the technical solution of the present application.

[0019] Figure 1 A schematic diagram of the overall structure of a double-sided wind dust removal device for silicon wafers provided in an embodiment of the present application;

[0020] Figure 2 This is a schematic diagram of the overall structure of the air outlet assembly in the embodiment of the present application;

[0021] Figure 3 A bottom view of the air outlet assembly in the embodiment of the present application;

[0022] Figure 4 A top view of the air outlet assembly in the embodiment of the present application;

[0023] Figure 5 This is a front view of the air outlet assembly in the embodiment of the present application;

[0024] Figure 6 It is a left view of the air outlet assembly in the embodiment of the present application;

[0025] Figure 7 This is a schematic diagram of the overall structure of the dust collection assembly in the embodiment of the present application;

[0026] Figure 8 A top view of the dust collection assembly in an embodiment of the present application;

[0027] Fig. 9 A bottom view of the dust collection assembly in the embodiment of the present application;

[0028] Fig.10 This is a front view of the dust collection assembly in the embodiment of the present application;

[0029] Fig.11 It is a left side view of the dust collection assembly in the embodiment of the present application;

[0030] Fig.12 A schematic diagram of the arrangement of an air outlet plate in an embodiment of the present application;

[0031] Fig.13 This is a schematic diagram of the arrangement of an air outlet plate in an embodiment of the present application (oblique viewing angle);

[0032] Fig.14 A schematic diagram of the arrangement of an air outlet plate in an embodiment of the present application;

[0033] Fig.15 This is a schematic diagram of the arrangement of an air outlet plate in an embodiment of the present application (oblique viewing angle);

[0034] Fig.16 A schematic diagram of the arrangement of an air outlet plate in an embodiment of the present application;

[0035] Fig.17 This is a schematic diagram of the arrangement of an air outlet plate in an embodiment of the present application (oblique viewing angle);

[0036] Fig.18 This is a schematic diagram of the arrangement of an air outlet plate in an embodiment of the present application.

[0037] Figure ID:

[0038] 1. Base; 2. Air outlet assembly; 21. Air outlet plate; 211. Air outlet; 22. Air outlet pipe; 23. Air outlet bin; 24. Fan; 3. Dust suction assembly; 31. Dust suction plate; 311. Dust suction port; 32. Dust suction pipe; 33. Dust suction bin; 34. Exhaust fan; 4. Conveying assembly; 01. Silicon wafer. DETAILED DESCRIPTION

[0039] In order to enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the application embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of this application; it is obvious that the described embodiments are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of this application.

[0040] The present application provides a double-sided wind dust removal device for silicon wafers, referring to Figure 1 , Figure 2 and Figure 7 The double-sided wind dust removal device for silicon wafers comprises a base 1, an air outlet assembly 2, a dust suction assembly 3 and a conveying assembly 4. The air outlet assembly 2 is mounted on the base 1, and the air outlet assembly 2 is provided with an air outlet 211, and the air outlet 211 is used to discharge airflow; the dust suction assembly 3 is mounted on the base 1, and the dust suction assembly 3 is provided with a dust suction port 311, and the dust suction port 311 is arranged opposite to the air outlet 211, and the dust suction port 311 is used to inhale airflow; the conveying assembly 4 is mounted on the base 1, and the conveying assembly 4 is used to convey the silicon wafer 01 to move between the air outlet 211 and the dust suction port 311; during the movement of the silicon wafer 01 between the air outlet 211 and the dust suction port 311, the first side of the silicon wafer 01 faces the air outlet 211 to remove dust from the first side of the silicon wafer 01, and the second side of the silicon wafer 01 faces the dust suction port 311 to remove dust from the second side of the silicon wafer 01; wherein, the first side of the silicon wafer 01 and the second side of the silicon wafer 01 are opposite to each other.

[0041] It can be understood that, in the embodiment of the present application, the base 1 can provide an installation base for the air outlet component 2, the dust collection component 3 and the conveying component 4, and the base 1 can be set in a variety of structural forms. For example, the base 1 can be set in a box-shaped structure formed by a plate-shaped structure; in addition, referring to Figure 1 The base 1 may also be configured as a frame-like structure formed by a strip structure. Specifically, the base 1 may be adaptively configured according to the installation characteristics of the air outlet component 2, the dust collection component 3 and the conveying component 4.

[0042] On this basis, the air outlet assembly 2 is installed on the base 1. For example, the air outlet assembly 2 can be installed on the base 1 by welding or fastener connection.

[0043] It should be noted that, refer to Figure 2In the embodiment of the present application, an air outlet 211 is provided on the air outlet assembly 2, and the air outlet 211 is used to discharge airflow. Exemplarily, in the embodiment of the present application, a driving member may be provided in the air outlet assembly 2 to drive the airflow to flow out through the air outlet 211, such as a fan 24 may be provided in the air outlet assembly 2. In addition, the driving member may not be provided in the air outlet assembly 2, and the air outlet assembly 2 may be connected to a pressurized gas system, so that the airflow can also flow out through the air outlet 211, such as the air outlet assembly 2 may be connected to a nitrogen system of a production plant.

[0044] It can be understood that in the embodiment of the present application, holes can be provided on the air outlet component 2 to connect the interior of the air outlet component 2 to the external environment, so that the above-mentioned holes can be used as the air outlet 211.

[0045] In this way, by utilizing the airflow flowing out of the air outlet 211 to form a flow of gas near the silicon wafer 01 , a purging effect on the silicon wafer 01 can be formed, thereby achieving the purpose of removing dust from the silicon wafer 01 .

[0046] Further, see Figure 7 In the embodiment of the present application, the dust suction component 3 is provided with a dust suction port 311, and the dust suction port 311 is used to suck airflow. Exemplarily, in the embodiment of the present application, a driving member can be provided in the dust suction component 3 to drive the airflow to be sucked into the dust suction component 3 through the dust suction port 311, such as, an exhaust fan can be provided in the dust suction component 3. In addition, the driving member can also be not provided in the dust suction component 3, and the dust suction component 3 can be connected to an exhaust fan outside the dust suction component 3.

[0047] It is understandable that in the embodiment of the present application, a hole can be provided in the dust suction component 3 to connect the inside of the dust suction component 3 to the external environment, so that the above-mentioned hole can be used as the dust suction port 311.

[0048] In this way, by utilizing the airflow sucked in by the dust suction port 311 to form a flow of gas near the silicon wafer 01 , a purging effect on the silicon wafer 01 can be formed, thereby achieving the purpose of removing dust from the silicon wafer 01 .

[0049] On this basis, in the embodiment of the present application, the dust suction port 311 and the air outlet 211 are also arranged relative to each other. It should be noted that the dust suction port 311 and the air outlet 211 are arranged relative to each other, which can be considered as the dust suction port 311 and the air outlet 211 facing each other. Figure 1 In some embodiments of the present application, the air outlet component 2 can be arranged directly above the dust suction component 3, with the air outlet 211 facing downward, the dust suction port 311 facing upward, and the projections of the air outlet 211 and the dust suction port 311 in the vertical direction overlap, so that the dust suction port 311 and the air outlet 211 are relative to each other in the vertical direction.

[0050] Furthermore, in the embodiment of the present application, the conveying component 4 can convey the silicon wafer 01 to move between the air outlet 211 and the dust suction port 311, so that the silicon wafer 01 can be dusted by using the air outlet component 2 and the dust suction component 3.

[0051] It should be noted that in the embodiments of the present application, reference is made to Figure 1 The conveying component 4 conveys the silicon wafer 01 to move between the air outlet 211 and the dust suction port 311, which means that the conveying component 4 conveys the silicon wafer 01 from one end of the space formed between the air outlet 211 and the dust suction port 311 to the other end.

[0052] In addition, in the embodiment of the present application, the specific structural form of the conveying component 4 is not limited. For example, the conveying component 4 can be set using a conveyor belt or a conveyor chain.

[0053] On this basis, by adaptively setting the path of the conveying component 4 for conveying the silicon wafer 01 and the relative positions between the air outlet 211 and the dust suction port 311, during the process of the conveying component conveying the silicon wafer 01, the first surface of the silicon wafer 01 can be directed toward the air outlet 211, and the second surface of the silicon wafer 01 can be directed toward the dust suction port 311. In this way, the air outlet 211 can be used to remove dust from the first surface of the silicon wafer 01, and the dust suction port 311 can be used to remove dust from the second surface of the silicon wafer 01.

[0054] It should be noted that, in the embodiment of the present application, the first side of the silicon wafer 01 and the second side of the silicon wafer 01 are opposite to each other. For example, the first side of the silicon wafer 01 may refer to the front side of the silicon wafer 01, and the second side of the silicon wafer 01 may refer to the back side of the silicon wafer 01. Figure 1 ,by Figure 1 Taking the relative positions in the figure as an example, the first surface of the silicon wafer 01 may refer to the upper surface of the silicon wafer 01 , and the second surface of the silicon wafer 01 may refer to the lower surface of the silicon wafer 01 .

[0055] Thus, in the double-sided wind dust removal device for silicon wafers provided in the embodiment of the present application, by setting the conveying assembly 4, the conveying assembly can be used to convey the silicon wafer 01 to between the air outlet 211 and the dust suction port 311, so that the first side of the silicon wafer 01 can be dusted by the air outlet 211, and the second side of the silicon wafer 01 can be dusted by the dust suction port 311, thereby achieving the effect of simultaneously dusting the first side of the silicon wafer 01 and the second side of the silicon wafer 01, which can improve the efficiency of dust removal for the silicon wafer 01 and improve the effect of dust removal for the silicon wafer 01. In addition, by relatively arranging the dust suction port 311 and the air outlet 211, it can also ensure that the pressure formed by the airflow of the air outlet 211 on the silicon wafer 01 and the suction force formed by the airflow of the dust suction port 311 on the silicon wafer 01 are balanced, thereby ensuring the smooth movement of the silicon wafer 01 and preventing the airflow from causing the silicon wafer 01 to deviate. Furthermore, the dust suction port 311 can suck the airflow after the silicon wafer 01 is dusted into the dust suction component 3, which can prevent the airflow carrying dust from affecting the surrounding environment. Through the above arrangement, an air curtain blown out by the air outlet component 2 and sucked in by the dust suction component 3 can be formed between the air outlet component 2 and the dust suction component 3, and the air curtain can be made to conform to fluid mechanics, so that the double sides of the silicon wafer 01 can be dusted in a controllable and stable manner.

[0056] On this basis, refer to Figure 2 and Figure 3 In some embodiments of the present application, the air outlet component 2 includes an air outlet plate 21, and a plurality of air outlets 211 are arranged on the air outlet plate 21. The air outlet capacity of the air outlet plate 21 gradually increases from the edge of the air outlet plate 21 to the middle of the air outlet plate 21 along a first direction, wherein the first direction is parallel to the movement direction of the silicon wafer 01.

[0057] It should be noted that in the embodiment of the present application, the strength of the wind can be used to characterize the air outlet capacity of the air outlet plate 21, that is, in the embodiment of the present application, the wind force in the middle of the air outlet plate 21 along the first direction is strong, and the wind force at the edge of the air outlet plate 21 is weak.

[0058] Exemplarily, the above-mentioned purpose can be achieved by setting the size of the air outlet 211. Specifically, the size of the air outlet 211 located in the middle of the air outlet plate 21 along the first direction can be set to be larger, and the size of the air outlet 211 located at the edge of the air outlet plate 21 along the first direction can be set to be smaller. In this way, the wind force in the middle of the air outlet plate 21 along the first direction can be strong, and the wind force at the edge of the air outlet plate 21 can be weak.

[0059] Through the above-mentioned arrangement, in the embodiment of the present application, the air outlet component 2 can provide the silicon wafer 01 with wind force from small to large and then to small along the movement direction of the silicon wafer 01. While ensuring effective dust removal, it can also prevent the silicon wafer 01 from being offset due to excessive wind force when it just moves to between the air outlet 211 and the dust suction port 311 or when it is about to leave between the air outlet 211 and the dust suction port 311, thereby enabling the silicon wafer 01 to enter the next process well.

[0060] On this basis, refer to Figure 2 , Figure 3 , Figure 8 , Fig.12 and Fig.13 In some embodiments of the present application, the air outlet 211 may be set as a circular hole, and a plurality of air outlets 211 may be arranged in a vertical and horizontal array along the first direction and the second direction, and the air outlets 211 in the same row along the second direction have the same size; the diameter of the air outlets 211 in the same column along the first direction gradually increases from the edge of the air outlet plate 21 to the middle of the air outlet plate 21. The second direction is perpendicular to the first direction.

[0061] It should be noted that, refer to Fig.12 In the embodiment of the present application, all the air outlets 211 may be classified into rows and columns. Here, the air outlets 211 arranged along the second direction may be referred to as rows, and the air outlets 211 arranged along the first direction may be referred to as columns.

[0062] On this basis, through adaptation, the sizes of the air outlets 211 in the same column can be made the same; and the diameter of the air outlets 211 in the same column can gradually increase from the edge of the air outlet plate 21 to the middle of the air outlet plate 21 along the first direction.

[0063] For example, refer to Fig.12 and Fig.13 Along the first direction, the diameter of the air outlet 211 at the middle position of the air outlet plate 21 is greater than the diameter of the air outlet 211 at the edge position of the air outlet plate 21 .

[0064] Thus, through the above arrangement, the air outlet capacity of the air outlet plate 21 gradually increases along the first direction from the edge of the air outlet plate 21 to the middle of the air outlet plate 21. In addition, by arranging the air outlet 211 in a circular shape, the air outlet 211 can be easily manufactured.

[0065] In addition, refer to Fig.14 and Fig.15In the embodiment of the present application, the air outlet 211 can also be set to be a long strip, and the length direction of the air outlet 211 can be set to be parallel to the second direction. On this basis, multiple air outlets 211 are arranged and distributed along the first direction, and the size of the air outlet 211 gradually increases from the edge of the air outlet plate 21 to the middle of the air outlet plate 21 along the first direction.

[0066] It should be noted that, in the embodiment of the present application, the specific shape of the air outlet 211 is not limited. For example, the shape of the air outlet 211 can be set to a standard rectangle. Fig.14 and Fig.15 , the shape of the air outlet 211 can also be set to a rectangle with rounded corners. In addition, in the embodiment of the present application, the air outlet 211 can also be set to a long strip of other shapes, which is not limited in the embodiment of the present application.

[0067] It can be understood that the elongated air outlet 211 has a length direction and a width direction. In the embodiment of the present application, the length direction of the air outlet 211 is parallel to the second direction.

[0068] For example, refer to Fig.14 and Fig.15 In order to illustrate the double-sided wind dust removal device for silicon wafers provided in the embodiment of the present application, the shape of the air outlet 211 is a rectangle with rounded corners as an example for illustration.

[0069] Specifically, refer to Fig.14 In the embodiment of the present application, the dimensions of all the air outlets 211 along the second direction can be set to be the same, that is, the lengths of the air outlets 211 can be set to be the same, and all the air outlets 211 can be aligned.

[0070] On this basis, the width of the air outlet 211 located in the middle of the air outlet plate 21 along the first direction can be set wider, and the width of the air outlet 211 can be set to gradually decrease from the middle of the air outlet plate 21 to the edge of the air outlet plate 21 along the first direction.

[0071] Thus, through the above arrangement, the air outlet capacity of the air outlet plate 21 gradually increases along the first direction from the edge of the air outlet plate 21 to the middle of the air outlet plate 21. In addition, through the above arrangement, the shape of the air outlet 211 can be made simple and convenient to arrange, and the flow area of ​​the air outlet 211 can also be increased.

[0072] In addition, refer to Fig.18In some embodiments of the present application, the air outlet 211 is in a long strip shape, and the length direction of the air outlet 211 is parallel to the first direction. In addition, the plurality of air outlets 211 are arranged and distributed along the second direction, and the size of each air outlet 211 gradually increases from the edge of the air outlet plate 21 to the middle of the air outlet plate 21 along the first direction.

[0073] Specifically, refer to Fig.18 In the embodiment of the present application, the shape and contour of each air outlet 211 can be set to be the same. For each air outlet 211, the length direction of the air outlet 211 can be set to be parallel to the first direction, and the size of the air outlet 211 can be gradually reduced from the middle of the air outlet 211 to the edge of the air outlet 211 along the first direction.

[0074] For example, refer to Fig.18 The air outlet 211 can be set to a diamond shape, and the side of the air outlet 211 can be a straight line; in addition, the side of the air outlet 211 can be set to an arc shape or other curves, as long as the size of the air outlet 211 is gradually reduced from the middle of the air outlet 211 to the edge of the air outlet 211.

[0075] In this way, through the above arrangement, the air outlet capacity of the air outlet plate 21 gradually increases from the edge of the air outlet plate 21 to the middle of the air outlet plate 21 along the first direction.

[0076] In addition, refer to Fig.16 and Fig.17 In the embodiment of the present application, a plurality of rows of air outlets 211 are provided on the air outlet plate 21, and the plurality of rows of air outlets 211 are arranged in an array along the second direction. Each row of air outlets 211 includes two air outlets 211 arranged along the first direction, and the two air outlets 211 included in each row of air outlets 211 are symmetrically arranged about a center line extending along the second direction of the air outlet plate 21, and the size of the air outlet 211 gradually increases from the edge of the air outlet plate 21 to the middle of the air outlet plate 21 along the first direction.

[0077] For example, refer to Fig.16 In the embodiment of the present application, the shape profile of each column of air outlets 211 can be set to be the same, and multiple columns of air outlets 211 can be arranged in an array along the second direction.

[0078] Further, see Fig.16 For each column of air outlets 211 , each column of air outlets 211 includes two air outlets 211 , and the two air outlets 211 are symmetrically arranged about a center line extending along the second direction of the air outlet plate 21 .

[0079] For example, refer to Fig.16In the embodiment of the present application, the shape of each air outlet 211 can be set to an isosceles triangle, and the vertex of the isosceles triangle is facing the edge of the air outlet plate 21 along the first direction.

[0080] For the isosceles triangle air outlet 211, the hypotenuse of the air outlet 211 is a straight line. For this, the hypotenuse of the air outlet 211 can also be set to an arc or other curve, as long as the size of each air outlet 211 gradually increases from the edge of the air outlet plate 21 to the middle of the air outlet plate 21 along the first direction.

[0081] Through the above arrangement, in the double-sided wind dust removal device for silicon wafers provided in the embodiment of the present application, the air outlet plate 21 between the two air outlets 211 in each column can be used to support the air outlet 211 to improve the rigidity of the air outlet plate 21.

[0082] In addition, in some embodiments of the present application, the dust suction component 3 includes a dust suction plate 31 , and a dust suction port 311 is provided on the dust suction plate 31 , and the dust suction port 311 is arranged in a mirror image with the air outlet 211 .

[0083] It should be noted that, referring to the aforementioned embodiment, the air outlet 211 can be arranged in a variety of different ways. Correspondingly, the dust suction port 311 can also be arranged in a variety of different ways. It is only necessary to arrange the dust suction port 311 and the air outlet 211 in a mirror-like manner.

[0084] In addition, in the embodiment of the present application, a reinforcement member may be provided on the dust suction plate 31 or the air outlet plate 21 to reinforce the dust suction plate 31 or the air outlet plate 21. For example, the reinforcement member may be provided as an angle steel or the like.

[0085] Exemplarily, the suction port 311 may also be configured to be circular, elongated, diamond-shaped, or triangular.

[0086] It can be understood that the mirror-image arrangement of the dust suction port 311 and the air outlet 211 means that the dust suction port 311 and the air outlet 211 are mirror-image arranged about the center dividing plane between the dust suction plate 31 and the air outlet plate 21 .

[0087] Through the above arrangement, in the double-sided wind dust removal device for silicon wafers provided in the embodiment of the present application, the shape contours of the air outlet 211 and the dust suction port 311 can be made consistent, which facilitates the manufacture of the air outlet 211 and the dust suction port 311.

[0088] In addition, in the embodiment of the present application, the air outlet component 2 also includes an air outlet pipe 22 and an air outlet bin 23, the air outlet pipe 22 is connected to the upper end of the air outlet bin 23, the air outlet plate 21 is installed at the lower end of the air outlet bin 23, the air outlet bin 23 is a cone-shaped, and the size of the lower end of the air outlet bin 23 is larger than the size of the upper end of the air outlet bin 23, the dust suction component 3 includes a dust suction plate 31, a dust suction pipe 32 and a dust suction bin 33, the dust suction plate 31 is provided with a dust suction port 311, the dust suction pipe 32 is connected to the lower end of the dust suction bin 33, the dust suction plate 31 is installed at the upper end of the dust suction bin 33, the dust suction bin 33 is a cone-shaped, and the size of the upper end of the dust suction bin 33 is larger than the size of the lower end of the dust suction bin 33.

[0089] It should be noted that, in the embodiment of the present application, the specific structural form of the air outlet pipe 22 is not limited, and the cross-sectional shape of the air outlet pipe 22 can be set to a square, a circle or other shapes. Figures 4 to 6 In some embodiments of the present application, the air outlet pipe 22 can be configured as a double-cylinder circular pipe.

[0090] In addition, refer to Figure 1 , Figure 2 and Figure 4 In the embodiment of the present application, a fan 24 may be further provided on the air outlet pipe 22, and the fan 24 may be used to drive the air flow from the air outlet pipe 22 to the air outlet bin 23, and finally flow out through the air outlet 211. Figure 4 In the embodiment of the present application, the above-mentioned fan 24 can be set as a double-tube air outlet fan.

[0091] It should be noted that in the embodiment of the present application, the upper end and the lower end of the air outlet bin 23 are connected. Exemplarily, the air outlet bin 23 can be set as a shell-like structure to form a connecting cavity between the upper end and the lower end of the air outlet bin 23, through which the upper end and the lower end of the air outlet bin 23 can be connected together.

[0092] Further, see Figure 1 and Figure 2 In the embodiment of the present application, the air outlet bin 23 is also set to a frustum shape, for example, the air outlet bin 23 can be set to a circular frustum shape or a square frustum shape; in addition, the air outlet bin 23 can also be set to a gradient frustum shape with an upper part being a circular frustum and a lower part being a square frustum.

[0093] It should be noted that, refer to Figure 1 and Figure 2 In the embodiment of the present application, the size of the lower end of the air outlet bin 23 is larger than the size of the upper end of the air outlet bin 23. In this way, the air outlet bin 23 can be used to diffuse the airflow of the air outlet pipe 22, thereby improving the air outlet effect of the air outlet 211.

[0094] On this basis, refer to Figure 7 and Fig. 9 In the embodiment of the present application, the dust suction pipe 32 can also be set as a double-cylinder circular pipe. On this basis, an exhaust fan 34 can also be set on the dust suction pipe 32, such as a double-cylinder exhaust fan.

[0095] It should be noted that in the embodiment of the present application, the upper and lower ends of the dust removal bin are connected. Exemplarily, the dust removal bin can be set as a shell-like structure to form a connecting cavity between the upper and lower ends of the dust removal bin, through which the upper and lower ends of the dust removal bin can be connected together.

[0096] Further, see Figure 7 , Fig.10 and Fig.11 In the double-sided wind dust removal device for silicon wafers provided in the embodiment of the present application, the dust collection bin 33 is also in a frustum shape. Specifically, the dust collection bin can be set with reference to the setting mode of the air outlet bin 23. For example, the dust collection bin can be set in a frustum shape, a square frustum shape or a gradient frustum shape.

[0097] In this way, in the double-sided wind dust removal device for silicon wafers provided in the embodiment of the present application, the dust removal bin can be used to form a gathering effect on the airflow, thereby improving the suction effect of the dust suction port 311 on the airflow.

[0098] For a common silicon wafer 01, which is generally rectangular, in order to match the air outlet plate 21 and the dust suction plate 31 with the shape of the silicon wafer 01, refer to Figure 2 In some embodiments of the present application, the shape of the air outlet plate 21 is set to be rectangular, and the length direction 1 of the air outlet plate 21 is also parallel to the first direction. On this basis, the projections of the dust collecting plate 31 and the air outlet plate 21 along the vertical direction are also set to overlap.

[0099] It can be understood that in the embodiment of the present application, the overlap of the projections of the dust collecting plate 31 and the air outlet plate 21 in the vertical direction also indicates that the dust collecting plate 31 and the air outlet plate 21 have the same shape and contour, and the dust collecting plate 31 and the air outlet plate 21 are arranged opposite to each other in the vertical direction. In this way, the structure of the double-sided wind dust removal device for silicon wafers provided in the embodiment of the present application can be regular and convenient to arrange.

[0100] Through the above configuration, the length direction of the air outlet plate 21 is set to be parallel to the first direction, so that the length direction of the air outlet plate 21 can match the movement direction of the silicon wafer 01, thereby improving the dust removal effect on the silicon wafer 01.

[0101] In addition, refer to Figure 1 In some embodiments of the present application, the conveying component 4 includes two conveyor belts, and the two conveyor belts are arranged in an interval along the second direction.

[0102] Exemplarily, the distance between the two conveyor belts along the second direction can be set to be the same as the width of the silicon wafer 01, so that the conveyor belt can be used to contact the edge of the silicon wafer 01, thereby ensuring the dust removal effect of the dust collection component 3 on the lower surface of the silicon wafer 01.

[0103] For example, refer to Figure 1 ,by Figure 1 The operation process of the double-sided wind dust removal device for silicon wafers provided in the embodiment of the present application is described by taking the relative position in as an example.

[0104] First, the conveying component 4 can be controlled to start running to convey the silicon wafer 01 from the right end of the air outlet component 2 to the left end of the air outlet component 2 .

[0105] During the process of the silicon wafer 01 being transported between the air outlet component 2 and the dust collection component 3, the air outlet 211 of the air outlet component 2 blows out an airflow toward the upper surface of the silicon wafer 01. The airflow can drive the airflow movement near the upper surface of the silicon wafer 01 to form a sweeping effect on the upper surface of the silicon wafer 01, thereby achieving the effect of removing dust from the upper surface of the silicon wafer 01.

[0106] At the same time, the dust suction port 311 of the dust suction component 3 sucks in the airflow near the lower surface of the silicon wafer 01, which can drive the airflow near the lower surface of the silicon wafer 01 to form a purge effect on the lower surface of the silicon wafer 01, thereby achieving the effect of dust removal on the lower surface of the silicon wafer 01.

[0107] It is understandable that the dust collection component 3 can suck in the airflow after the upper surface and the lower surface of the silicon wafer 01 are dusted, and can also suck the dust in the airflow into the dust collection component 3, thereby reducing the impact of the airflow on the surrounding environment.

[0108] Furthermore, by setting the air outlet component 2 above the silicon wafer 01 and setting the dust suction component 3 below the silicon wafer 01, the air outlet component 2 can be used to form a downward pressure on the silicon wafer 01, and the dust suction component 3 can be used to form a downward suction on the silicon wafer 01, so that the silicon wafer 01 can be stably positioned on the conveying component 4 and the silicon wafer 01 can be prevented from shifting.

[0109] On this basis, in some embodiments of the present application, by setting the air outlet 211 and the dust suction port 311, a wind curtain with a strong middle and weak sides can be formed between the air outlet component 2 and the dust removal component, so that the silicon wafer 01 can move smoothly on the conveying component 4, avoiding deviation and warping, so that it can smoothly enter the next process.

[0110] The double-sided wind dust removal device for silicon wafers provided in the embodiment of the present application can improve the dust removal efficiency of silicon wafers 01, thereby improving production efficiency and labor costs. In addition, the special wind strength gradient wind wall structure effectively prevents the deflection, flying and chipping of the battery cells caused by the excessive stress difference between the front and rear battery cells at the feed inlet and the discharge outlet, thereby effectively improving the product yield.

[0111] It should be understood that "one embodiment" or "an embodiment" mentioned throughout the specification means that specific features, structures or characteristics related to the embodiment are included in at least one embodiment of the present application. Therefore, "in one embodiment" or "in an embodiment" appearing throughout the specification does not necessarily refer to the same embodiment. In addition, these specific features, structures or characteristics can be combined in one or more embodiments in any suitable manner. It should be understood that in various embodiments of the present application, the size of the serial number of each step / process mentioned above does not mean the order of execution, and the execution order of each step / process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiment of the present application. The serial numbers of the embodiments of the present application mentioned above are for description only and do not represent the advantages and disadvantages of the embodiments.

[0112] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0113] The above is only an implementation method of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application.

Claims

1. A double-sided wind dust removal device for silicon wafers, characterized in that: include: Pedestal; An air outlet component is installed on the base, and the air outlet component is provided with an air outlet, and the air outlet is used to discharge air flow; A dust suction component is installed on the base, the dust suction component is provided with a dust suction port, the dust suction port and the air outlet are arranged opposite to each other, and the dust suction port is used to inhale airflow; A conveying assembly is installed on the base, and the conveying assembly is used to convey the silicon wafer to move between the air outlet and the dust suction port; during the movement of the silicon wafer between the air outlet and the dust suction port, the first side of the silicon wafer faces the air outlet to remove dust from the first side of the silicon wafer, and the second side of the silicon wafer faces the dust suction port to remove dust from the second side of the silicon wafer; wherein the first side of the silicon wafer and the second side of the silicon wafer are opposite to each other.

2. The double-sided wind dust removal device for silicon wafers according to claim 1, characterized in that: The air outlet component includes an air outlet plate, and a plurality of air outlets are arranged on the air outlet plate. The air outlet capacity of the air outlet plate gradually increases from the edge of the air outlet plate to the middle of the air outlet plate along a first direction; wherein the first direction is parallel to the movement direction of the silicon wafer.

3. The double-sided wind dust removal device for silicon wafers according to claim 2, characterized in that: The air outlet is circular, and a plurality of the air outlets are arranged vertically and horizontally along the first direction and the second direction; Along the second direction, the air outlets in the same row have the same size; Along the first direction, the diameters of the air outlets in the same row gradually increase from the edge of the air outlet plate to the middle of the air outlet plate; wherein the second direction is perpendicular to the first direction.

4. The double-sided wind dust removal device for silicon wafers according to claim 2, characterized in that: The air outlet is in an elongated strip shape, and the length direction of the air outlet is parallel to the second direction; The plurality of air outlets are arranged and distributed along the first direction, and sizes of the plurality of air outlets gradually increase from the edge of the air outlet plate to the middle of the air outlet plate along the first direction; wherein the second direction is perpendicular to the first direction.

5. The double-sided wind dust removal device for silicon wafers according to claim 2, characterized in that: The air outlet is in the shape of an elongated strip, and the length direction of the air outlet is parallel to the first direction; The plurality of air outlets are arranged and distributed along a second direction, and the size of each air outlet gradually increases from the edge of the air outlet plate to the middle of the air outlet plate along the first direction; wherein the second direction is perpendicular to the first direction.

6. The double-sided wind dust removal device for silicon wafers according to claim 2, characterized in that: A plurality of rows of air outlets are arranged on the air outlet plate, and the plurality of rows of air outlets are arranged in an array along a second direction, and each row of the air outlets includes two air outlets arranged along the first direction, and the two air outlets included in each row of the air outlets are symmetrically arranged about a center line of the air outlet plate extending along the second direction, and the size of the air outlet gradually increases from the edge of the air outlet plate to the middle of the air outlet plate along the first direction; wherein the second direction is perpendicular to the first direction.

7. The double-sided wind dust removal device for silicon wafers according to any one of claims 2 to 6, characterized in that: The dust suction component comprises a dust suction plate, the dust suction port is arranged on the dust suction plate, and the dust suction port is arranged in a mirror image with the air outlet.

8. The double-sided wind dust removal device for silicon wafers according to claim 2, characterized in that: The air outlet component also includes an air outlet pipe and an air outlet bin, the air outlet pipe is connected to the upper end of the air outlet bin, the air outlet plate is installed at the lower end of the air outlet bin, the air outlet bin is in a cone shape, and the size of the lower end of the air outlet bin is larger than the size of the upper end of the air outlet bin; the dust suction component includes a dust suction plate, a dust suction pipe and a dust suction bin, the dust suction port is provided on the dust suction plate, the dust suction pipe is connected to the lower end of the dust suction bin, the dust suction plate is installed at the upper end of the dust suction bin, the dust suction bin is in a cone shape, and the size of the upper end of the dust suction bin is larger than the size of the lower end of the dust suction bin.

9. The double-sided wind dust removal device for silicon wafers according to claim 8, characterized in that: The air outlet plate is in a rectangular shape, and the length direction of the air outlet plate is parallel to the first direction; the projections of the dust collecting plate and the air outlet plate along the vertical direction overlap.

10. The double-sided wind dust removal device for silicon wafers according to claim 2, characterized in that: The conveying assembly includes two conveyor belts, and the two conveyor belts are arranged in an interval along a second direction; wherein the second direction is perpendicular to the first direction.

Images