XY light spot variable laser head

Abstract

The utility model provides an XY light spot variable laser head. The XY light spot variable laser head comprises a shell, an X zoom lens group and a Y zoom lens group, the X zoom lens group comprises an X zoom fixed lens, an X zoom movable lens and an X zoom driving motor, the X zoom fixed lens is fixed in the shell, the X zoom movable lens is slidably connected to one side of the X zoom fixed lens, and the X zoom driving motor can drive the X zoom movable lens to slide; the Y zoom lens group comprises a Y zoom fixed lens, a Y zoom movable lens and a Y zoom driving motor, the Y zoom fixed lens is fixed in the shell, the Y zoom movable lens is slidably connected to one side of the Y zoom fixed lens, and the Y zoom driving motor can drive the Y zoom movable lens to slide. According to the laser head with the variable light spots, the length and width of the light spots can be changed according to different requirements, the effect that multiple laser heads are replaced by a single laser head is achieved, the cost in practical application is reduced, and efficient operation is achieved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor chip laser heating equipment, in particular to an XY spot variable laser head. Background Art

[0002] In the field of semiconductor packaging, semiconductor laser heating is required for certain special processing, which in turn places special requirements on the laser spot size emitted by the laser head.

[0003] The laser spot size in the XY direction can be adjusted independently to adapt to heating areas of different shapes and sizes. In the existing technical solutions, the spot size of the laser head is single and cannot be adjusted. The spot size can only be adjusted by changing the collimation and focusing ratio. This approach is costly and inefficient in actual applications. Utility Model Content

[0004] Based on the above situation, the main purpose of the utility model is to provide an XY spot variable laser head to solve the problem that the spot size of the motor laser head is single and cannot be adjusted, and the spot size can only be adjusted by changing the ratio of collimation and focusing. This approach has high cost and low operating efficiency in actual applications.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0006] An XY spot variable laser head comprises a housing and an X zoom lens group and a Y zoom lens group;

[0007] The X-zoom lens group includes an X-zoom fixed lens, an X-zoom movable lens and an X-zoom driving motor, wherein the X-zoom fixed lens is fixed in the housing, the X-zoom movable lens is slidably connected to one side of the X-zoom fixed lens, and the X-zoom driving motor can drive the X-zoom movable lens to slide;

[0008] The Y zoom lens group includes a Y zoom fixed lens, a Y zoom movable lens and a Y zoom driving motor. The Y zoom fixed lens is fixed in the housing. The Y zoom movable lens is slidably connected to one side of the Y zoom fixed lens. The Y zoom driving motor can drive the Y zoom movable lens to slide.

[0009] Preferably, the X-zoom lens group further comprises an X-zoom driving screw, an X-zoom slider is fixed to one side of the X-zoom movable lens, the X-zoom driving screw is threadedly connected to the X-zoom slider, and the output shaft of the X-zoom driving motor is fixed to the X-zoom driving screw;

[0010] The Y zoom lens group also includes a Y zoom driving screw, a Y zoom slider is fixed on one side of the Y zoom movable lens, the Y zoom driving screw is threadedly connected to the Y zoom slider, and the output shaft of the Y zoom driving motor is fixed to the Y zoom driving screw.

[0011] Preferably, a laser is fixed at one end of the housing, a collimator is fixed at the lower side of the laser, and a laser reflector is fixed obliquely in the housing corresponding to the lower side of the collimator.

[0012] Preferably, a first dichroic mirror is fixed with an inclined arrangement at one end of the housing away from the laser reflecting mirror, and a laser focusing mirror is fixed at the lower side of the housing, and the laser focusing mirror is located below the first dichroic mirror.

[0013] Preferably, a high-speed closed-loop pyrometer is fixed above the housing, a second dichroic mirror is fixed on the upper side of the housing, the second dichroic mirror is located above the laser focusing mirror, and the second dichroic mirror is located below the high-speed closed-loop pyrometer.

[0014] Preferably, a CCD image sensor and a visible light reflector are provided on the upper side of the housing;

[0015] The visible light reflector is fixed on one side of the second dichroic mirror, and the CCD image sensor is located on the upper side of the visible light reflector.

[0016] Preferably, an infrared collecting lens is fixed between the high-speed closed-loop pyrometer and the second dichroic mirror;

[0017] A visible light imaging lens is fixed between the visible light reflector and the CCD image sensor.

[0018] The beneficial effects of the utility model are as follows: when working, the laser can emit laser light, which is collimated by a collimating mirror and deflected by a laser reflecting mirror. The laser light passes through an X-zoom lens group and a Y-zoom lens group. As required, a driving motor is operated to drive the X-zoom moving lens and / or the Y-zoom moving lens to move, so as to achieve the purpose of changing the length and width of the light spot according to different requirements, realize the effect of a single laser head replacing multiple laser heads, reduce the cost in practical applications, and achieve efficient operation.

[0019] Other beneficial effects of the utility model will be explained through the introduction of specific technical features and technical solutions in the specific implementation manner. Through the introduction of these technical features and technical solutions, those skilled in the art should be able to understand the beneficial technical effects brought about by the technical features and technical solutions. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a cross-sectional view of an XY spot variable laser head of the utility model.

[0021] Figure 2 The utility model is a top view of an XY spot variable laser head.

[0022] Description of reference numerals:

[0023] 1. Shell; 2. X zoom lens group; 21. X zoom fixed lens; 22. X zoom moving lens; 23. X zoom drive motor; 24. X zoom drive screw; 25. X zoom slider; 3. Y zoom lens group; 31. Y zoom fixed lens; 32. Y zoom moving lens; 33. Y zoom drive motor; 34. Y zoom drive screw; 35. Y zoom slider; 4. Laser reflector; 5. First dichroic mirror; 51. Laser focusing mirror; 6. Laser; 61. Collimator; 7. High-speed closed-loop pyrometer; 71. Second dichroic mirror; 72. Infrared collection lens; 8. CCD image sensor; 81. Visible light reflector; 82. Visible light imaging lens. DETAILED DESCRIPTION

[0024] The present invention is described below based on embodiments, but the present invention is not limited to these embodiments. In the following detailed description of the present invention, some specific details are described in detail. In order to avoid confusing the essence of the present invention, known methods, processes, procedures, and components are not described in detail.

[0025] In addition, persons of ordinary skill in the art will appreciate that the drawings provided herein are for illustration purposes and are not necessarily drawn to scale.

[0026] Unless the context clearly requires otherwise, throughout the specification and claims, the words "include", "comprising" and similar words should be interpreted in an inclusive sense rather than an exclusive or exhaustive sense; that is, in the sense of "including but not limited to".

[0027] In the description of the present invention, it should be understood that the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In addition, in the description of the present invention, unless otherwise specified, the meaning of "plurality" is two or more.

[0028] Reference Figure 1 and Figure 2 The utility model provides an XY spot variable laser head, comprising a housing 1, an X zoom lens group 2 and a Y zoom lens group 3. The X zoom lens group 2 and the Y zoom lens group 3 are fixed in the housing 1.

[0029] The X zoom lens group 2 and the Y zoom lens group 3 are fixed to the middle of the housing 1. The laser reflector 4 and the first dichroic mirror 5 are fixed to the two ends of the housing 1 respectively. The first dichroic mirror 5 and the laser reflector 4 are both tilted. Specifically, the X zoom lens group 2 is arranged close to the first dichroic mirror 5, and the Y zoom lens group 3 is arranged close to the laser reflector 4. A laser 6 is fixed to the upper side of one end of the housing 1 corresponding to the laser reflector 4, and a collimator 61 is fixed to the lower side of the laser 6. The laser 6 can emit laser light, which is collimated by the collimator 61 and turned by the laser reflector 4, so that the laser light passing through the X zoom lens group 2 and the Y zoom lens group 3 can be zoomed. A laser focusing lens 51 is fixed to the lower side of the housing 1. The laser focusing lens 51 is located at the lower side of the first dichroic mirror 5. The laser light after being zoomed by the X zoom lens group 2 and the Y zoom lens group 3 can be emitted through the laser focusing lens 51 and vertically hit the working surface.

[0030] The X-zoom lens group 2 includes two X-zoom fixed lenses 21, an X-zoom movable lens 22, an X-zoom driving motor 23 and an X-zoom driving screw 24. The two X-zoom fixed lenses 21 are respectively located on the sides of the two X-zoom movable lenses 22 that are away from each other, and the X-zoom fixed lenses 21 are fixed in the housing 1. The X-zoom driving motor 23 is fixed in the housing 1. The output shaft of the X-zoom driving motor 23 is fixed to the X-zoom driving screw 24. An X-zoom slider 25 is fixed on one side of the X-zoom movable lens 22. The X-zoom driving screw 24 is threadedly connected in the X-zoom slider 25. The output shaft of the X-zoom driving motor 23 drives the X-zoom driving screw 24 to rotate, thereby driving the X-zoom movable lens 22 to move, thereby realizing X-direction laser zoom.

[0031] The Y zoom lens group 3 includes two Y zoom fixed lenses 31, a Y zoom movable lens 32, a Y zoom driving motor 33 and a Y zoom driving screw 34. The two Y zoom fixed lenses 31 are respectively located at the side away from each other of the two Y zoom movable lenses 32, and the Y zoom fixed lenses 31 are fixed in the housing 1. The Y zoom driving motor 33 is fixed in the housing 1. The output shaft of the Y zoom driving motor 33 is fixed to the Y zoom driving screw 34. A Y zoom slider 35 is fixed to one side of the Y zoom movable lens 32. The Y zoom driving screw 34 is threadedly connected in the Y zoom slider 35. The output shaft of the Y zoom driving motor 33 drives the Y zoom driving screw 34 to rotate, thereby driving the Y zoom movable lens 32 to move, thereby realizing Y-direction laser zoom.

[0032] When working, the laser 6 can emit laser, which is collimated by the collimator 61 and deflected by the laser reflector 4. The laser passes through the X zoom lens group 2 and the Y zoom lens group 3. As needed, the drive motor is operated to drive the X zoom movable lens 22 and / or the Y zoom movable lens 32 to move, so as to achieve the purpose of changing the length and width of the light spot according to different needs, realize the effect of a single laser head replacing multiple laser heads, reduce the cost in practical applications, and achieve efficient operation.

[0033] As an embodiment, a high-speed closed-loop pyrometer 7 is fixed above the housing 1, a second dichroic mirror 71 is fixed on the upper side of the housing 1, the second dichroic mirror 71 is located above the laser focusing mirror 51, the second dichroic mirror 71 is located below the high-speed closed-loop pyrometer 7, and an infrared collection lens 72 is fixed between the high-speed closed-loop pyrometer 7 and the second dichroic mirror 71. The high-temperature infrared signal emitted from the working area enters the high-speed closed-loop pyrometer 7 through the second dichroic mirror 71 and the infrared collection lens 72, and the high-speed closed-loop pyrometer 7 collects the infrared signal to detect the temperature of the working area.

[0034] As an embodiment, a CCD image sensor 8 and a visible light reflector 81 are arranged on the upper side of the housing 1, the visible light reflector 81 is fixed to one side of the second dichroic mirror 71, the CCD image sensor 8 is located on the upper side of the visible light reflector 81, and a visible light imaging lens 82 is fixed between the visible light reflector 81 and the CCD image sensor 8. The visible light signal enters the CCD image sensor 8 through the second dichroic mirror 71, the visible light reflector 81 and the visible light imaging lens 82, so as to realize the visualization of the working area.

[0035] The implementation principle of the utility model is as follows: when working, the laser 6 can emit laser light, which is collimated by the collimating lens 61 and deflected by the laser reflecting mirror 4. The laser light passes through the X zoom lens group 2 and the Y zoom lens group 3. As needed, the driving motor is operated to drive the X zoom movable lens 22 and / or the Y zoom movable lens 32 to move, so as to achieve the purpose of changing the length and width of the light spot according to different needs, realize the effect of replacing multiple laser heads with a single laser head, reduce the cost in practical applications, and achieve efficient operation.

[0036] Those skilled in the art will appreciate that, without conflict, the above-mentioned preferred solutions can be freely combined and superimposed.

[0037] It should be understood that the above-mentioned embodiments are merely illustrative and not restrictive. Without departing from the basic principles of the present invention, various obvious or equivalent modifications or substitutions that can be made by technicians in this field to the above details will be included in the scope of the claims of the present invention.

Claims

1. An XY spot variable laser head, characterized in that: Including housing and X zoom lens group and Y zoom lens group; The X-zoom lens group includes an X-zoom fixed lens, an X-zoom movable lens and an X-zoom driving motor, wherein the X-zoom fixed lens is fixed in the housing, the X-zoom movable lens is slidably connected to one side of the X-zoom fixed lens, and the X-zoom driving motor can drive the X-zoom movable lens to slide; The Y zoom lens group includes a Y zoom fixed lens, a Y zoom movable lens and a Y zoom driving motor. The Y zoom fixed lens is fixed in the housing. The Y zoom movable lens is slidably connected to one side of the Y zoom fixed lens. The Y zoom driving motor can drive the Y zoom movable lens to slide.

2. The XY spot variable laser head according to claim 1, characterized in that: The X-zoom lens group further includes an X-zoom driving screw, an X-zoom slider is fixed to one side of the X-zoom movable lens, the X-zoom driving screw is threadedly connected to the X-zoom slider, and the output shaft of the X-zoom driving motor is fixed to the X-zoom driving screw; The Y zoom lens group also includes a Y zoom driving screw, a Y zoom slider is fixed on one side of the Y zoom movable lens, the Y zoom driving screw is threadedly connected to the Y zoom slider, and the output shaft of the Y zoom driving motor is fixed to the Y zoom driving screw.

3. The XY spot variable laser head as claimed in claim 2, characterized in that: A laser is fixed at one end of the shell, a collimator is fixed at the lower side of the laser, and a laser reflecting mirror is fixed in the shell at an angle corresponding to the lower side of the collimator.

4. The XY spot variable laser head as claimed in claim 3, characterized in that: A first dichroic mirror is fixed with an inclined arrangement at one end of the shell away from the laser reflecting mirror, and a laser focusing mirror is fixed at the lower side of the shell, and the laser focusing mirror is located below the first dichroic mirror.

5. The XY spot variable laser head as claimed in claim 4, characterized in that: A high-speed closed-loop pyrometer is fixed above the shell, a second dichroic mirror is fixed on the upper side of the shell, the second dichroic mirror is located above the laser focusing mirror, and the second dichroic mirror is located below the high-speed closed-loop pyrometer.

6. The XY spot variable laser head as claimed in claim 5, characterized in that: A CCD image sensor and a visible light reflector are arranged on the upper side of the housing; The visible light reflector is fixed on one side of the second dichroic mirror, and the CCD image sensor is located on the upper side of the visible light reflector.

7. The XY spot variable laser head according to claim 6, characterized in that: An infrared collecting lens is fixed between the high-speed closed-loop pyrometer and the second dichroic mirror; A visible light imaging lens is fixed between the visible light reflector and the CCD image sensor.

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