Variable-diameter nozzle of polycrystalline silicon reduction furnace
By designing a variable diameter polysilicon reduction furnace nozzle and adjusting the nozzle diameter using the reciprocating device, the problems of increasing raw material consumption and increasing power consumption caused by the inability to adjust the nozzle size in the prior art are solved, and the effect of saving raw material and reducing power consumption is achieved.
Patent Information
- Application Number
- CN202421582748.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-05
- Publication Date
- 2025-05-02
- Estimated Expiration
- 2034-07-05
AI Technical Summary
The nozzle size of the existing polysilicon reduction furnace cannot be adjusted, resulting in the need to increase the air volume in the early stage to ensure the quality of the top, resulting in problems such as increasing raw material consumption, increasing power consumption and increasing downstream process load.
A variable diameter nozzle of a polycrystalline silicon reduction furnace is designed. By reducing the nozzle size in the early stage and using the reciprocating device to drive the moving baffle to adjust the nozzle diameter, the dynamic adjustment of the intake amount is achieved to ensure that the hydrogen intake rate remains unchanged and reaches the cross beam.
By adjusting the nozzle diameter, the intake amount is reduced, the raw materials are effectively saved, the polysilicon power consumption is reduced, and the downstream exhaust gas treatment process load is reduced.
Smart Images
Figure CN222821256U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of polysilicon reduction furnaces, in particular to a variable-diameter nozzle for a polysilicon reduction furnace. Background Art
[0002] At present, the main solar photovoltaic material is polysilicon, which has become the basic raw material for solar photovoltaics. The main production processes of polysilicon are the modified Siemens method and the fluidized bed method, of which the modified Siemens method accounts for about 85% of the output.
[0003] The production of polysilicon by the modified Siemens process is carried out in a bell-shaped reduction furnace. A metal electrode is arranged on the chassis of the reduction furnace, and a graphite base is arranged on the electrode. Two silicon core wires in the vertical direction and one silicon core wire in the horizontal direction are assembled into a Π shape and installed on the graphite base; the supply port of the raw gas and the exhaust port of the reaction waste gas are also arranged on the chassis; the supply port can be equipped with a nozzle or not, and the flow field and material distribution of the gas in the reduction furnace can be adjusted by changing the structure and form of the nozzle.
[0004] The mixture of trichlorosilane and hydrogen is injected into the reduction furnace through the nozzle, and a deposition reaction is carried out on the surface of the silicon core. The size of the nozzle has a great influence on the product quality and power consumption of the reduction furnace. The only source of heat in the reduction furnace is the heat generated by the silicon rod (electric heating), and the rest is to take away the heat. The inlet temperature is much lower than the exhaust temperature. The raw materials still take away the heat after the reaction in the reduction furnace (from the nozzle to the exhaust hole). During the entire reaction process, if the gas volume does not match the reaction speed, it will not only cause a waste of raw gas, but also a waste of heat, thereby increasing the unit power consumption of the reduction product.
[0005] The larger the nozzle size, the larger the single gas volume entering the reduction furnace, and the silicon production reaction in the gas phase is not easily affected by temperature; the smaller the nozzle size, the higher the gas injection speed in the furnace under the same gas volume, thereby improving the intrinsic quality of the top silicon core line. During the growth of silicon rods, the diameter (surface area) of the silicon rods gradually increases with the reaction time, so the surface area of the silicon rods is small in the early stage and does not require too much gas volume. However, if the nozzle size cannot be changed, in order to ensure the quality of the top beam line in the early stage of the reaction, the raw material gas intake volume needs to be increased, resulting in increased raw material consumption, increased polysilicon power consumption, and increased downstream process load.
[0006] The utility model patent with publication number CN203498099U discloses a new type of polysilicon reduction furnace nozzle, including a nozzle core, a chassis and a distribution hood. The nozzle core is installed on the air inlet of the chassis by welding or threading. An air inlet cavity is provided in the center of the nozzle core. The distribution hood is installed on the upper end of the outer side of the nozzle core by threading or welding. A main injection hole is opened in the center of the distribution hood. The distribution hood and the nozzle core form a distribution air cavity.
[0007] The utility model patent with publication number CN210393745U discloses a nozzle for a polysilicon reduction furnace, comprising: a chassis and a nozzle, characterized in that the portion where the nozzle and the chassis are connected is provided with an external thread, and the diameter of the nozzle gas inlet is greater than the diameter of the nozzle gas outlet.
[0008] The invention patent with announcement number CN103466627B discloses a nozzle for a polysilicon reduction furnace, which mainly adjusts the gas distribution in the furnace by setting the nozzle at the air inlet of the reduction furnace chassis, can meet the air intake demand from the bottom of the silicon core to the crossbeam, maintain uniform gas distribution in the furnace, and generate high-quality polysilicon while accelerating the deposition speed. The new type of polysilicon reduction furnace nozzle is mainly composed of a nozzle core, a chassis, and a distribution cover. The nozzle core is installed on the air inlet of the chassis by welding or threading, and the distribution cover is installed on the upper end of the outer side of the nozzle core.
[0009] The utility model patent with publication number CN203498098U discloses a recoil-type polysilicon reduction furnace nozzle, including a main nozzle, a chassis, a fixing screw, a guide cover and a nozzle. The main nozzle is mounted on the air inlet of the chassis by welding or threading. The center of the main nozzle is an air inlet channel, the air inlet channel is connected to the nozzle, the nozzle is connected to the main nozzle, the guide cover is connected to the main nozzle, and the fixing screw is mounted on the outside of the guide cover.
[0010] However, the polysilicon reduction furnace nozzles provided by the above patents do not solve the technical problem that the air intake demand is low in the early stage of polysilicon production and high in the later stage, and the air intake rate remains unchanged, resulting in increased raw material consumption, increased polysilicon power consumption, and increased downstream process load.
[0011] Therefore, there is an urgent need to provide a polysilicon reduction furnace with a variable diameter nozzle to solve the above-mentioned problems. Utility Model Content
[0012] The utility model aims to solve the problem that the size of the nozzle of a polysilicon reduction furnace in the prior art cannot be adjusted, resulting in the need to increase the air volume in the early stage to ensure the top quality, resulting in increased raw material consumption, increased polysilicon power consumption, increased downstream process load and other problems. Therefore, a variable diameter nozzle for a polysilicon reduction furnace is proposed. By reducing the nozzle size in the early stage, the air intake volume is reduced while ensuring that the air intake rate remains unchanged and can reach the crossbeam, which can effectively save raw materials, reduce polysilicon power consumption and reduce the load of the downstream exhaust gas treatment process.
[0013] In order to achieve the above-mentioned invention object, the technical solution of the utility model is as follows:
[0014] A variable-diameter nozzle for a polysilicon reduction furnace comprises an outer shell and a movable baffle. The interior of the outer shell is a hollow rectangular structure. A threaded joint connected to a bottom plate of the reduction furnace is provided at the bottom of the outer shell. A sealing baffle is provided between the threaded joint and the outer shell. An air flow hole is provided on the sealing baffle. The movable baffle is movably arranged in the outer shell and arranged parallel to the air flow direction. The movable baffle, the outer shell and the air flow hole form an air flow channel. A through hole is provided on the side wall of the outer shell. A reciprocating motion device is penetrated through the through hole. One end of the reciprocating motion device is fixedly connected to the movable baffle, and the other end is connected to a driving device.
[0015] Furthermore, the movable baffles are provided in two groups, which are respectively located on both sides of the air flow hole and are arranged in parallel.
[0016] Furthermore, the movable baffle is slidably connected to the outer shell through a sliding sealing device, and the sliding sealing device includes a sliding assembly and a guide rail. The sliding assembly is arranged at both ends of the movable baffle, and the guide rail is arranged on the inner side of the outer shell in a direction perpendicular to the nozzle airflow. The guide rail is provided with a sealing strip, and the sliding assembly is slidably connected to the guide rail.
[0017] Furthermore, the sliding assembly includes sliding blocks arranged at both ends of the movable baffle and pulleys rotatably connected to the sliding blocks.
[0018] Furthermore, the reciprocating motion device is an electric cylinder, and the driving device is a motor.
[0019] Furthermore, the reciprocating motion device is an electromagnetic reciprocating motion machine, and the driving device is an electromagnet.
[0020] Furthermore, a plurality of groups of springs are arranged between the movable baffle and the housing.
[0021] Beneficial effects of the utility model:
[0022] 1. In the utility model, a reciprocating motion device is provided to drive the movable baffle to translate in the shell, so as to realize the adjustment of the nozzle diameter. In the early stage of polysilicon generation, by reducing the nozzle diameter, the intake volume is reduced while ensuring that the intake rate remains unchanged and hydrogen can reach the crossbeam, which can effectively save raw materials, reduce the power consumption of polysilicon and reduce the load of the downstream exhaust gas treatment process.
[0023] 2. In the utility model, the nozzle diameter can be adjusted in real time by controlling the driving device, the air intake volume is adjusted according to the hydrogen demand in the reduction furnace, and the hydrogen intake rate is ensured to be sufficient to reach the crossbeam of the reduction furnace, thereby ensuring the quality of the silicon rods in the reduction furnace.
[0024] 3. In the utility model, springs are respectively arranged between the two movable baffles and the edges of the housing parallel to the movable baffles. The springs mainly move the movable baffles in the energy direction provided by the electromagnetic device after the electromagnetic device provides kinetic energy, thereby effectively adjusting the movement smoothness of the movable baffles. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] Figure 1 This is a schematic diagram of the cross-sectional structure of the variable diameter nozzle of the utility model;
[0026] Figure 2 It is a top view of the variable diameter nozzle of the utility model.
[0027] Among them, 1. shell; 2. movable baffle; 3. threaded joint; 4. sliding sealing device; 41. guide rail; 42. sliding assembly; 5. through hole; 6. reciprocating motion device; 7. driving device; 8. spring; 9. sealing baffle. DETAILED DESCRIPTION
[0028] The present invention is further described in detail below in conjunction with the embodiments, but the implementation manner of the present invention is not limited thereto.
[0029] Example 1
[0030] This embodiment provides a Figure 1 and Figure 2 The variable diameter nozzle of the polysilicon reduction furnace shown comprises a shell 1 and a movable baffle 2. The interior of the shell 1 is a hollow rectangular parallelepiped structure. A threaded joint 3 connected to the bottom plate of the reduction furnace is provided at the bottom of the shell 1. A sealing baffle 9 is provided between the threaded joint 3 and the shell 1. An air flow hole is provided on the sealing baffle 9. The movable baffle 2 is movably provided in the shell 1 and is provided in parallel with the air flow direction. The movable baffle 2, the shell 1 and the air flow hole form an air flow channel. A through hole 5 is provided on the side wall of the shell 1. A reciprocating motion device 6 is penetrated through the through hole 5. One end of the reciprocating motion device 6 is fixedly connected to the movable baffle 2, and the other end is connected to a driving device 7.
[0031] The movable baffle 2 is slidably connected to the outer shell 1 through a sliding sealing device 4, and the sliding sealing device 4 includes a sliding component 42 and a guide rail 41. The sliding component 42 is arranged at both ends of the movable baffle, and the guide rail 41 is arranged on the inner side of the outer shell 1 along a direction perpendicular to the airflow. The guide rail 41 is provided with a sealing strip, and the sliding component 42 is slidably connected to the guide rail 41; the sliding component 42 includes a slider arranged at both ends of the movable baffle and a pulley rotatably connected to the slider; the reciprocating motion device 6 is an electromagnetic reciprocating motion machine, and the driving device 7 is an electromagnet. In this embodiment, the variable diameter nozzle is connected to the reduction furnace chassis through the bottom threaded joint 3. When the synthesis furnace starts to react, the electromagnetic reciprocating motion machine is driven by adjusting the electromagnet to drive the movable baffle 2 close to the direction of the airflow hole, thereby reducing the size of the airflow channel and reducing the size of the variable diameter nozzle. While ensuring that the air intake rate remains unchanged and the hydrogen can reach the crossbeam, the air intake amount is reduced. As the reaction proceeds, the hydrogen demand in the reduction furnace continues to increase. By changing the magnetic pole of the electromagnet and adjusting the power of the electromagnet, the electromagnetic reciprocating motion machine is driven to adjust the position of the movable baffle 2 to expand the size of the variable diameter nozzle. The air intake amount is adjusted according to the hydrogen demand in the reduction furnace and the hydrogen intake rate is ensured to be sufficient to reach the crossbeam of the reduction furnace, thereby ensuring the quality of the silicon rods in the reduction furnace.
[0032] Example 2
[0033] Compared with Example 1, the present embodiment is different in that two groups of movable baffles 2 are provided, which are respectively arranged in parallel on both sides of the air flow hole; the reciprocating motion device 6 is an electric cylinder, the driving device 7 is a motor, and two groups of springs 8 are respectively provided on the two sides corresponding to the two groups of movable baffles 2 and the outer shell, and the rest of the structure is the same as Example 1.
[0034] In the present embodiment, the movable baffle 2 is provided with two groups. When the nozzle needs to change its diameter, the motor-driven electric cylinder connected to the movable baffles 2 on both sides is adjusted to control the size of the airflow channel formed by the movable baffle 2, the outer shell 1 and the airflow hole, thereby realizing the diameter change of the nozzle of the polysilicon reduction furnace; and two groups of springs 8 are respectively arranged between the two movable baffles 2 and the edges parallel to the outer shell 1 and the movable baffle 2. By setting the spring 8, the spring 8 mainly makes the movable baffle 2 move in the energy direction provided by the electromagnetic device after the electromagnetic device provides kinetic energy, thereby effectively adjusting the movement smoothness of the movable baffle 2.
[0035] It is understood that the present invention is described by some embodiments, and those skilled in the art are aware that various changes or equivalent substitutions may be made to these features and embodiments without departing from the spirit and scope of the present invention. In addition, under the teachings of the present invention, these features and embodiments may be modified to adapt to specific circumstances and materials without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the scope of protection of the present invention.
Claims
1. A variable diameter nozzle for a polysilicon reduction furnace, characterized in that: The invention comprises an outer shell (1) and a movable baffle (2). The inner part of the outer shell (1) is a hollow rectangular parallelepiped structure. A threaded joint (3) connected to the bottom plate of the reduction furnace is arranged at the bottom of the outer shell (1). A sealing baffle (9) is arranged between the threaded joint (3) and the outer shell (1). An air flow hole is provided on the sealing baffle (9). The movable baffle (2) is movably arranged in the outer shell (1) and arranged parallel to the air flow direction. The movable baffle (2), the outer shell and the air flow hole form an air flow channel. A through hole (5) is provided on the side wall of the outer shell (1). A reciprocating motion device (6) is penetrated through the through hole (5). One end of the reciprocating motion device (6) is fixedly connected to the movable baffle (2), and the other end is connected to a driving device (7).
2. The variable diameter nozzle according to claim 1, characterized in that: The movable baffles (2) are provided in two groups, which are respectively located on both sides of the air flow hole and are arranged in parallel.
3. The variable diameter nozzle according to claim 1 or 2, characterized in that: The movable baffle (2) is slidably connected to the outer shell (1) via a sliding sealing device (4); the sliding sealing device (4) comprises a sliding assembly (42) and a guide rail (41); the sliding assembly (42) is arranged at both ends of the movable baffle (2); the guide rail (41) is arranged on the inner side of the outer shell in a direction perpendicular to the airflow; the guide rail (41) is provided with a sealing strip; and the sliding assembly (42) is slidably connected to the guide rail (41).
4. The variable diameter nozzle according to claim 3, characterized in that: The sliding assembly (42) comprises sliding blocks arranged at both ends of the movable baffle (2) and pulleys rotatably connected to the sliding blocks.
5. The variable diameter nozzle according to claim 1 or 2, characterized in that: The reciprocating motion device (6) is an electric cylinder, and the driving device (7) is a motor.
6. The variable diameter nozzle according to claim 1 or 2, characterized in that: The reciprocating motion device (6) is an electromagnetic reciprocating motion machine, and the driving device (7) is an electromagnet.
7. The variable diameter nozzle according to claim 1 or 2, characterized in that: A plurality of groups of springs (8) are arranged between the movable baffle (2) and the outer shell.