Display panel transfer device and chemical vapor deposition equipment

Abstract

The utility model relates to a display panel transfer device and chemical vapor deposition equipment. The display panel transfer device comprises a shell, a magnetic suspension assembly and a bearing piece. A containing cavity is formed in the shell, and a long hole is formed in the top of the shell. The magnetic suspension assembly is arranged in the containing cavity and comprises a stator and a rotor, the stator is installed on the shell, and the rotor and the stator are supported in a suspended mode. One end of the bearing piece is connected with the rotor, and the other end penetrates through the long hole and extends out of the containing cavity. As lubricating oil does not need to be added into the magnetic suspension assembly, compared with moving parts such as a gear transmission mechanism and a chain transmission mechanism in the prior art, the situation that the lubricating oil volatilizes in the high-temperature environment of the chemical vapor deposition equipment and pollutes the display panel can be avoided, and the manufacturing quality of the display panel can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of display device manufacturing, and in particular to a display panel transfer device and chemical vapor deposition equipment. Background Art

[0002] With the development of semiconductor technology, the development and use of plasma enhanced chemical vapor deposition (PECVD) equipment has become increasingly widespread. This equipment uses glow discharge to ionize chemical gases to form a thin film structure on a glass substrate, and then after exposure and etching processes, it finally forms a display panel. Figure 1 As shown, an existing chemical vapor deposition device includes a preparation chamber 1', a transfer chamber 2' and a process chamber 3' which are connected in sequence. During the manufacturing process, the glass substrate is first sent into the preparation chamber 1', and the preparation chamber 1' is converted into the same vacuum environment as the transfer chamber 2' and the process chamber 3'. A robot 3' is provided in the transfer chamber 2', and the robot 3' is used to transport the glass substrate to the process chamber 3' for chemical vapor deposition treatment to form a thin film structure.

[0003] The existing technology has the following shortcomings: Since the manipulator 3' relies on a transmission mechanism such as a gear transmission mechanism, a belt transmission mechanism, a chain transmission mechanism, etc. to achieve movement, such a transmission mechanism is usually added with lubricating oil to obtain a good working state. The temperature in the preparation chamber 1', the transfer chamber 2' and the process chamber 3' is relatively high, usually reaching above 200°C. In a high temperature environment, the lubricating oil is easy to volatilize, thereby causing contamination to the glass substrate and affecting the manufacturing quality of the display panel. Utility Model Content

[0004] The utility model aims to provide a display panel transfer device and a chemical vapor deposition device, which can avoid adding lubricating oil into moving parts and prevent the volatile lubricating oil from affecting the manufacturing quality of the display panel.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A display panel transfer device is provided, comprising:

[0007] A housing, wherein a receiving cavity is formed in the housing, and a long hole is provided on the top of the housing, the long hole is connected to the receiving cavity, and the length direction of the long hole is parallel to the moving direction of the display panel;

[0008] A magnetic suspension component, the magnetic suspension component is arranged in the accommodating cavity, the magnetic suspension component comprises a stator and a mover, the stator is mounted on the shell, and the mover and the stator are suspended and supported by magnetic suspension;

[0009] A carrier, one end of which is connected to the mover, and the other end of which passes through the long hole and extends to the outside of the accommodating cavity. The end of the carrier located outside the accommodating cavity is used to carry the display panel.

[0010] As a preferred solution of the display panel transferring device, the stator includes a guide rail, the length direction of the guide rail is parallel to the transferring direction of the display panel, a first magnet is arranged on the guide rail, the mover includes a base, a second magnet with opposite polarity to the first magnet is arranged on the base, the first magnet and the second magnet are arranged at intervals in the vertical direction, and the magnetic force between the first magnet and the second magnet causes the base and the guide rail to be suspended and supported.

[0011] As a preferred solution for the display panel transferring device, a accommodating groove is provided on the base, the groove opening of the accommodating groove is downward, and third magnets are provided on two opposite groove walls of the accommodating groove in the horizontal direction. The guide rail is passed through the accommodating groove, and fourth magnets facing the third magnets are respectively provided on two opposite side surfaces of the guide rail, and the third magnet and the fourth magnet located on the same side of the guide rail have the same polarity.

[0012] As a preferred solution of the display panel transferring device, a fifth magnet is arranged on the base, and a sixth magnet is arranged on the guide rail or the shell, the sixth magnet includes a plurality of electromagnetic coils with variable magnetic poles arranged in sequence along the length direction of the guide rail, and the magnetic force between the fifth magnet and the sixth magnet is used to drive the base to move along the length direction of the guide rail.

[0013] As a preferred solution of the display panel transfer device, it further includes a lifting component, the guide rail and the shell are connected through the lifting component, and the lifting component is used to drive the guide rail to move up and down.

[0014] As a preferred solution of the display panel conveying device, a distance sensor is provided on the guide rail or the base, and the distance sensor is used to measure the distance between the guide rail and the base.

[0015] As a preferred solution of the display panel transfer device, it also includes an exhaust component, which includes an air pump and an exhaust pipe connected to the air pump, and one end of the exhaust pipe is connected to the accommodating cavity.

[0016] As a preferred solution of the display panel transfer device, a plurality of grooves are arranged at intervals at one end of the carrier away from the mover, and an elastic protrusion is formed between two adjacent grooves.

[0017] As a preferred solution of the display panel transfer device, there are multiple shells, and the multiple shells are arranged in parallel and at intervals along a first direction, the first direction is perpendicular to the transfer direction of the display panel, and the magnetic suspension component is arranged in each of the shells.

[0018] A chemical vapor deposition device is also provided, comprising a display panel transferring device and a preparation chamber, a transfer chamber and a process chamber arranged sequentially along a second direction, wherein the transfer direction of the display panel is parallel to the second direction, and the display panel transferring device passes through the preparation chamber, the transfer chamber and the process chamber sequentially.

[0019] Compared with the prior art, the utility model has the following beneficial effects:

[0020] The utility model discloses a display panel transfer device and chemical vapor deposition equipment, which uses a magnetic suspension assembly as a moving part to transfer the display panel. The mover and the stator in the magnetic suspension assembly are suspended and supported, and there is no need to add lubricating oil to reduce the friction of the movement. Compared with the moving parts such as the gear transmission mechanism and the chain transmission mechanism in the prior art, it can prevent the lubricating oil from volatilizing in the high temperature environment of the chemical vapor deposition equipment and contaminating the display panel, which is conducive to improving the manufacturing quality of the display panel. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The utility model is further described in detail below based on the drawings and embodiments.

[0022] Figure 1 It is a schematic diagram of a chemical vapor deposition device in the prior art.

[0023] Figure 2 Schematic diagram of a display panel transfer device according to an embodiment of the present invention.

[0024] Figure 3 It is a cross-sectional view of a display panel transfer device according to an embodiment of the present invention.

[0025] Figure 4 It is a cross-sectional view of a display panel transferring device according to another embodiment of the present invention.

[0026] Figure 5 This is a cross-sectional view of a display panel transfer device according to another embodiment of the present invention.

[0027] Figure 1 middle:

[0028] 1′, preparation chamber; 2′, transfer chamber; 3′, process chamber; 4′, robot.

[0029] Figures 2 to 5 middle:

[0030] 1. Shell; 11. Accommodating cavity; 12. Long hole; 2. Magnetic suspension assembly; 21. Mover; 210. Base; 211. Second magnet; 212. Third magnet; 213. Fifth magnet; 214. Accommodating groove; 22. Stator; 220. Guide rail; 221. First magnet; 222. Fourth magnet; 223. Sixth magnet; 23. Distance sensor; 3. Carrying member; 31. Groove; 4. Lifting assembly; 41. Fixing part; 42. Telescopic part; 5. Air extraction assembly; 51. Exhaust pipe; 6. Display panel;

[0031] 100, preparation chamber; 200, transfer chamber; 300, process chamber. DETAILED DESCRIPTION

[0032] The advantages and features of the present invention and the methods for achieving them will become apparent with reference to the embodiments described in detail below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various forms. The present embodiments are provided only to complete the disclosure of the present invention and to enable those skilled in the art to fully understand the scope of the present invention, and the present invention is limited only by the scope of the claims. The same reference numerals represent the same constituent elements throughout the specification.

[0033] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

[0034] like Figure 2 and Figure 3 As shown, a display panel transfer device is provided, which is applied to a chemical vapor deposition device, and the display panel transfer device is used to transfer a display panel 6 in the chemical vapor deposition device. The substrate of the display panel 6 is a glass substrate, and the glass substrate forms a thin film structure in the chemical vapor deposition device. For the convenience of description, the glass substrate and various thin film structures, circuit patterns, etc. formed on its surface are collectively referred to as the display panel 6. In this embodiment, the transfer direction of the display panel 6 is the X direction shown in the figure.

[0035] The display panel transfer device includes a shell 1, a magnetic suspension component 2 and a carrier 3. The shell 1 plays a role in installation support and protection of the magnetic suspension component 2. The length of the shell 1 extends along the X direction shown in the figure. The shell 1 is a hollow structure, and the inside of the shell 1 forms a receiving cavity 11 for installing the magnetic suspension component 2. A long hole 12 is provided at the top of the shell 1, and the length of the long hole 12 extends along the X direction shown in the figure, that is, the length direction of the long hole 12 is parallel to the transfer direction of the display panel 6. The long hole 12 runs through the top of the shell 1, that is, the receiving cavity 11 is connected to the outside of the receiving cavity 11 through the long hole 12. The magnetic suspension component 2 is arranged in the receiving cavity 11, and the magnetic suspension component 2 includes a stator 22 and a mover 21. The stator 22 is installed inside the shell 1, and the mover 21 and the stator 22 are suspended and supported by magnetic suspension. It should be noted that the magnetic suspension technology is a prior art, which realizes the suspension support between the stator 22 and the mover 21 by magnetic force, and the specific technical principle is not described in detail here. Due to the suspension support between the stator 22 and the mover 21, there is a gap between the two, that is, the stator 22 and the mover 21 are non-contact connected. The support member 3 is used to support the display panel 6. The support member 3 is arranged on the top of the magnetic suspension component 2. The bottom end of the support member 3 is connected and fixed to the mover 21. The top end of the support member 3 passes through the long hole 12 and extends to the outside of the accommodating cavity 11. The end (i.e., the top end) of the support member 3 located outside the accommodating cavity 11 is used to support the display panel 6. It should be noted that the bottom and top ends of the support member 3 are referenced to the vertical direction (Z direction in the figure).

[0036] It can be understood that the mover 21 is suspended and supported on the stator 22, and the mover 21 moves along the length direction of the stator 22 (X direction in the figure) to drive the carrier 3 to move along the length direction of the stator 22, thereby realizing the transfer operation of the display panel 6. The mover 21 is a moving part in the display panel transfer device. Since it is non-contact connected with the stator 22, there is no need to apply lubricating oil between the two to promote movement. Therefore, compared with the moving parts such as the gear transmission mechanism or the chain transmission mechanism in the prior art, there is no need to add lubricating oil to the entire display panel transfer device, thereby avoiding the lubricating oil from volatilizing in the high temperature environment of the chemical vapor deposition equipment and causing pollution to the display panel 6, which is beneficial to improving the manufacturing quality of the display panel 6.

[0037] Specifically, there are multiple shells 1, and the multiple shells 1 are arranged in parallel and at intervals along a first direction (Y direction in the figure), and the first direction is perpendicular to the moving direction of the display panel 6. A magnetic suspension component 2 is arranged in each shell 1, and a bearing 3 is arranged on each magnetic suspension component 2. It can be understood that multiple shells 1 are provided, that is, multiple bearings 3 are correspondingly provided, so as to facilitate multi-point support of the display panel 6, so that the display panel 6 is more evenly stressed. In this embodiment, two shells 1 are provided. Of course, in other embodiments, the number of shells 1 can be reasonably selected according to the specific size of the display panel 6, that is, the number of bearings 3 can be reasonably selected.

[0038] Specifically, the stator 22 includes a guide rail 220, the cross section of which is rectangular, and the length of the guide rail 220 extends along the X direction shown in the figure. The guide rail 220 plays a guiding role for the mover 21, that is, it determines the movement trajectory of the final display panel 6. A first magnet 221 is arranged at the bottom of the guide rail 220. Along the width direction of the guide rail 220 (the Y direction shown in the figure), both ends of the width direction of the guide rail 220 are provided with a first magnet 221. The mover 21 includes a base 210, the base 210 is a "C"-shaped structure, and a receiving groove 214 is arranged on the base 210, and the notch of the receiving groove 214 is downward. That is, the notch of the receiving groove 214 is located at the bottom of the base 210. A second magnet 211 is arranged on the groove wall of the receiving groove 214, and the second magnet 211 is located near the notch of the receiving groove 214. The first magnet 221 and the second magnet 211 can be a permanent magnet or an electromagnet. The polarities of the first magnet 221 and the second magnet 211 are opposite. The guide rail 220 is arranged in the receiving groove 214, and the guide rail 220 is spaced from the groove wall of the receiving groove 214. The second magnet 211 on the base 210 is arranged corresponding to the first magnet 221 on the guide rail 220, and the first magnet 221 and the second magnet 211 are spaced in the vertical direction. In this embodiment, the first magnet 221 is arranged at both ends of the width direction of the guide rail 220, and correspondingly, the second magnet 211 is arranged below each first magnet 221. Since the first magnet 221 and the second magnet 211 have opposite polarities, they attract each other. Under the magnetic force between the first magnet 221 and the second magnet 211, the suspension support between the base 210 and the guide rail 220 is realized.

[0039] Specifically, a fifth magnet 213 is provided on the base 210, and a sixth magnet 223 is provided on the shell 1. The magnetic force between the fifth magnet 213 and the sixth magnet 223 is used to drive the base 210 to move along the length direction of the guide rail 220. The fifth magnet 213 is a permanent magnet, and the sixth magnet 223 is an electromagnetic coil, which is connected to a power supply. The sixth magnet 223 includes a plurality of electromagnetic coils arranged in sequence along the length direction of the guide rail 220, and the magnetic poles of the electromagnetic coils are variable. The sixth magnet 223 is in a magnetic coupling state with the fifth magnet 213, and the polarity of the sixth magnet 223 is changed to achieve relative movement between the two. The motion principle is a prior art, such as a planar motor, a maglev train, etc., and will not be described in detail here. In this embodiment, the fifth magnet 213 is provided at both ends of the width direction (Y direction in the figure) of the base 210. Correspondingly, the sixth magnet 223 is provided on the two opposite side walls of the accommodating cavity 11. The fifth magnet 213 and the sixth magnet 223 on the same side of the base 210 are spaced apart and face each other in the horizontal direction. In practical applications, the fifth magnet 213 and the sixth magnet 223 serve as the power source for the movement of the mover 21, and the magnetic force between the fifth magnet 213 and the sixth magnet 223 is used to drive the mover 21 to move relative to the stator 22.

[0040] In another embodiment, referring to Figure 4 As shown (partial reference number Figure 3 ), a fifth magnet 213 is arranged on the base 210, and a sixth magnet 223 is arranged on the guide rail 220, and the fifth magnet 213 and the sixth magnet 223 are arranged at intervals in the vertical direction. The fifth magnet 213 and the sixth magnet 223 can be permanent magnets or electromagnets. Specifically, the guide rail 220 is inserted into the receiving groove 214 of the base 210, and the top of the guide rail 220 is the bottom of the receiving groove 214. The fifth magnet 213 is embedded in the bottom of the receiving groove 214, and the sixth magnet 223 is embedded in the top of the guide rail 220, and the fifth magnet 213 and the sixth magnet 223 are opposite. The magnetic force between the fifth magnet 213 and the sixth magnet 223 is used to drive the base 210 to move along the length direction of the guide rail 220.

[0041] Specifically, a distance sensor 23 is provided on the guide rail 220 or the base 210, and the distance sensor 23 is used to measure the distance between the guide rail 220 and the base 210. The distance sensor 23 is connected to an alarm. In actual application, by detecting the distance between the guide rail 220 and the base 210 in real time, an alarm is issued when the distance exceeds a set value, thereby avoiding contact and friction between the base 210 and the guide rail 220 due to insufficient suspension support force during the production process.

[0042] Reference Figure 5 As shown (partial reference number Figure 3), both ends of the guide rail 220 in the width direction are provided with a fourth magnet 222, and the two groove walls of the receiving groove 214 that are opposite in the horizontal direction are provided with a third magnet 212. The third magnet 212 and the fourth magnet 222 located on the same side of the guide rail 220 are spaced apart and face each other in the horizontal direction. And, the third magnet 212 and the fourth magnet 222 located on the same side of the guide rail 220 have the same polarity, so that the two repel each other. Under the magnetic force of the third magnet 212 and the fourth magnet 222, the guide rail 220 is kept in the middle position in the width direction of the receiving groove 214. In this embodiment, along the width direction of the housing 1, the center line of the base 210 and the guide rail 220 is aligned with the center line of the long hole 12. Therefore, the purpose of setting the third magnet 212 and the fourth magnet 222 is to make the bearing member 3 located in the middle position of the long hole 12, so as to avoid the displacement of the mover 21 during the movement process, which causes the bearing member 3 to collide with the hole wall of the long hole 12.

[0043] Specifically, continue to refer to Figure 3 As shown, the display panel transfer device also includes a lifting component 4 and an exhaust component 5. Among them, the lifting component 4 is used to drive the guide rail 220 to move up and down, and the guide rail 220 is connected to the shell 1 through the lifting component 4. In this embodiment, the lifting component 4 is a cylinder, and the cylinder includes a fixed part 41 and a telescopic part 42. The fixed part 41 is installed at the bottom of the accommodating cavity 11, and the end of the telescopic part 42 away from the fixed part 41 is connected and fixed to the guide rail 220. The telescopic part 42 is telescoped relative to the fixed part 41 to drive the guide rail 220 to rise and fall. It can be understood that when the display panel 6 is moved out of or into the display panel transfer device, it will cooperate with other equipment, such as a manipulator, an electrode used for deposition, etc. By setting the lifting component 4, the distance between the display panel 6 and the shell 1 can be adjusted, so as to facilitate the transfer with other equipment.

[0044] The exhaust assembly 5 is used to exhaust the accommodating chamber 11 of the housing 1. The exhaust assembly 5 includes an air pump (not shown in the figure) and an exhaust pipe 51. The exhaust pipe 51 is installed on the housing 1 and communicates with the accommodating chamber 11. The air pump is arranged on the exhaust pipe 51 and is used to exhaust air. By arranging the exhaust assembly 5 to exhaust the accommodating chamber 11, the chemical gas entering the housing 1 in the chemical vapor deposition equipment is discharged in time to prevent the chemical gas from being deposited in the housing 1 to form a thin film.

[0045] Specifically, the carrier 3 is made of an elastic material, such as rubber, silicone, etc. The carrier 3 is in direct contact with the display panel 6, and wear between the two should be avoided or reduced. The carrier 3 is a square structure, the bottom end of the carrier 3 is connected and fixed to the base 210, and the top of the carrier 3 is used to carry the display panel 6. A plurality of grooves 31 are arranged at intervals at one end (i.e., the top) of the carrier 3 away from the mover 21, and an elastic protrusion is formed between two adjacent grooves 31. It can be understood that by providing the grooves 31, the end of the carrier 3 facing the display panel 6 is relatively soft in structure, so that it has good elasticity. In the event of a power outage, the base 210 will suddenly fall and collide with the guide rail 220. By forming an elastic protrusion, it can play a buffering role on the display panel 6 and prevent the display panel 6 from being damaged by impact.

[0046] like Figure 2 As shown, a chemical vapor deposition device is also provided, including a display panel transfer device and a preparation chamber 100, a transfer chamber 200 and a process chamber 300 arranged in sequence along a second direction (X direction shown in the figure). The transfer chamber 200 and the process chamber 300 are both in a vacuum state. The preparation chamber 100 can be switched between a vacuum state and a normal pressure state. For example, when the display panel 6 enters the preparation chamber 100 from the outside, the preparation chamber 100 is in a normal pressure state. When the display panel 6 enters the transfer chamber 200 from the preparation chamber 100, the preparation chamber 100 is converted to a vacuum state. The transfer direction of the display panel is parallel to the second direction, and the display panel transfer device passes through the preparation chamber 100, the transfer chamber 200 and the process chamber 300 in sequence. The length direction of the display panel transfer device extends along the second direction. To realize the transfer of the display panel 6 between the preparation chamber 100, the transfer chamber 200 and the process chamber 300. The process chamber 300 is used to perform chemical vapor deposition on the display panel 6, and a chemical vapor deposition component is arranged inside the process chamber 300. The chemical vapor deposition component is a prior art, which uses glow discharge to ionize the chemical gas to form a thin film structure on the display panel 6, and then the thin film structure is exposed, etched and other processes are performed to form a circuit pattern, and finally a display is produced. In this embodiment, the internal ambient temperature of the chemical vapor deposition equipment is above 200°C. Since the display panel transfer device adopts a magnetic suspension component 2 for movement and transportation, there is no need to add lubricating oil to reduce the movement friction in the display panel transfer device, so it can avoid the high temperature volatilization of the lubricating oil to pollute the display panel 6 and cause defects, thereby improving the manufacturing quality of the display panel 6.

[0047] Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be manufactured in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or basic features of the present invention. Therefore, it should be understood that the above embodiments are exemplary and not restrictive in all aspects.

Claims

1. A display panel transfer device, characterized in that: include: A housing, wherein a receiving cavity is formed in the housing, and a long hole is provided on the top of the housing, the long hole is connected to the receiving cavity, and the length direction of the long hole is parallel to the moving direction of the display panel; A magnetic suspension component, the magnetic suspension component is arranged in the accommodating cavity, the magnetic suspension component comprises a stator and a mover, the stator is mounted on the shell, and the mover and the stator are suspended and supported by magnetic suspension; A carrier, one end of which is connected to the mover, and the other end of which passes through the long hole and extends to the outside of the accommodating cavity. The end of the carrier located outside the accommodating cavity is used to carry the display panel.

2. The display panel transfer device according to claim 1, characterized in that: The stator includes a guide rail, the length direction of which is parallel to the moving direction of the display panel, a first magnet is arranged on the guide rail, the mover includes a base, a second magnet with a polarity opposite to that of the first magnet is arranged on the base, the first magnet and the second magnet are arranged at intervals in the vertical direction, and the magnetic force between the first magnet and the second magnet causes the base and the guide rail to be suspended and supported.

3. The display panel transfer device according to claim 2, characterized in that: The base is provided with a receiving groove, the groove opening of the receiving groove is downward, and the third magnet is provided on two opposite groove walls of the receiving groove in the horizontal direction. The guide rail is passed through the receiving groove, and the fourth magnet facing the third magnet is respectively provided on two opposite side surfaces of the guide rail, and the third magnet and the fourth magnet located on the same side of the guide rail have the same polarity.

4. The display panel transfer device according to claim 2, characterized in that: A fifth magnet is arranged on the base, and a sixth magnet is arranged on the guide rail or the shell. The sixth magnet includes a plurality of electromagnetic coils with variable magnetic poles arranged in sequence along the length direction of the guide rail. The magnetic force between the fifth magnet and the sixth magnet is used to drive the base to move along the length direction of the guide rail.

5. The display panel transfer device according to claim 2, characterized in that: It also includes a lifting component, through which the guide rail and the shell are connected, and the lifting component is used to drive the guide rail to move up and down.

6. The display panel transfer device according to claim 2, characterized in that: A distance sensor is arranged on the guide rail or the base, and the distance sensor is used to measure the distance between the guide rail and the base.

7. The display panel transfer device according to any one of claims 1 to 6, characterized in that: It also includes an air extraction component, which includes an air pump and an exhaust pipe connected to the air pump, and one end of the exhaust pipe is connected to the accommodating chamber.

8. The display panel transfer device according to any one of claims 1 to 6, characterized in that: A plurality of grooves are arranged at intervals at one end of the bearing member away from the mover, and an elastic protrusion is formed between two adjacent grooves.

9. The display panel transfer device according to any one of claims 1 to 6, characterized in that: There are a plurality of shells, and the plurality of shells are arranged in parallel and at intervals along a first direction, the first direction is perpendicular to the moving direction of the display panel, and the magnetic suspension component is arranged in each of the shells.

10. A chemical vapor deposition device, characterized in that: It comprises a display panel transferring device as described in any one of claims 1 to 9 and a preparation chamber, a transfer chamber and a process chamber arranged in sequence along a second direction, the transfer direction of the display panel is parallel to the second direction, and the display panel transferring device passes through the preparation chamber, the transfer chamber and the process chamber in sequence.

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