Single crystal furnace thermal field vortex gas sealing ring

Abstract

The utility model discloses a single crystal furnace thermal field vortex gas sealing ring which comprises a furnace body and a crucible located in the furnace body, an outer guide cylinder is arranged above the crucible and located in the furnace body, and supporting heat preservation covers are arranged on the two sides of the crucible and located on the inner wall of the furnace body. A cavity area is arranged above the crucible and located in the furnace body. The gas sealing ring body is located on the side wall of the supporting heat preservation cover, the gas sealing ring body is located above the crucible, a connecting base is arranged on the gas sealing ring body, a protruding base is arranged on the connecting base, and a protruding clamping ring is arranged below the connecting base and located at the bottom of the gas sealing ring body. By means of the structure, the oxygen and carbon content of the crystal can be reduced, the growth speed of the crystal is increased, and energy consumption and production cost are reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field related to Czochralski single crystals, and in particular relates to a thermal field eddy current sealing ring for a single crystal furnace. Background Art

[0002] The photovoltaic industry has developed rapidly in recent years. Thanks to the application of a large number of innovative technologies, photovoltaic power generation has entered the fast lane of parity power generation. As an important link in the photovoltaic industry chain, the significant reduction in the production cost of direct-pull single-crystal silicon is the core and foundation for the significant reduction in the cost of photovoltaic power generation. At present, large-size thermal fields and large-size single crystals have become the mainstream of the industry in the crystal growth process. Although the cost of crystal growth has been further greatly reduced, the technical difficulties brought about by the increase in the size of the thermal field and the crystal rod have become increasingly prominent.

[0003] The existing CZ single crystal furnace technology has the following problems:

[0004] The research and development of large-size crystal growth thermal fields has greatly increased the amount of feed, improved production efficiency, and reduced non-silicon production costs. However, the increase in the size of the thermal field also increases the vortex area of ​​the airflow during the crystal growth process, thereby weakening the ability of argon to carry away volatiles, resulting in an increase in the oxygen and carbon content of the crystal. In the process of the industry's rapid transition from P to N, the oxygen content of large-size N-type single crystals pulled by large-size thermal fields has become a technical problem that needs to be solved urgently.

[0005] Improving crystal growth rate is the main direction to reduce the non-silicon cost of crystal growth. However, under the current technical conditions of the industry, how to further improve the growth rate of large-size single crystals has reached a bottleneck;

[0006] Competition in the industry is becoming increasingly fierce, the prices of raw and auxiliary materials have fallen sharply, and the proportion of non-silicon costs of crystal growth in total costs has increased significantly. Energy consumption costs are also a major factor in the non-silicon costs of crystal growth. How to further reduce energy consumption costs will be of great significance to improving the future market competitiveness of corporate products. Utility Model Content

[0007] The utility model aims to provide a single crystal furnace thermal field eddy current sealing ring to solve the problems of high oxygen and carbon content of crystals, slow crystal growth rate, high energy consumption and high production cost proposed in the above background technology.

[0008] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a single crystal furnace thermal field eddy current sealing ring, comprising a furnace body and a crucible located inside the furnace body, an outer guide tube is arranged above the crucible and located inside the furnace body, supporting heat-insulating covers are arranged on both sides of the crucible and located on the inner wall of the furnace body, and a cavity area is arranged above the crucible and located inside the furnace body;

[0009] The sealing ring body is located on the side wall of the supporting heat-insulating cover, and the sealing ring body is located above the crucible. A connecting seat is arranged on the sealing ring body, a raised seat is arranged on the connecting seat, and a raised clamping ring is arranged below the connecting seat and at the bottom of the sealing ring body.

[0010] Preferably, a transfer liner ring is provided at the lower end of the air sealing ring body and on the side wall supporting the heat-insulating cover, and a supporting groove is provided on the transfer liner ring.

[0011] Preferably, the size of the supporting groove is slightly larger than the size of the raised snap ring.

[0012] Preferably, the connecting seat and the raised seat are both made of high temperature resistant materials, and a through hole structure is provided in the middle of the raised seat.

[0013] Preferably, the cavity area is an eddy flow area.

[0014] Preferably, support columns are arranged on the pot of the crucible at equal distances, and four support columns are provided.

[0015] Preferably, the inner diameter of the outer guide tube is larger than the inner diameter of the air sealing ring body, and the outer diameter of the transition liner ring is larger than the outer diameter of the air sealing ring body.

[0016] Compared with the prior art, the utility model provides a single crystal furnace thermal field eddy current sealing ring, which has the following beneficial effects:

[0017] 1. In the present invention, by appropriately increasing the inner diameter of the adapter liner ring, it is convenient to provide a support platform for the eddy current sealing ring.

[0018] 2. In the utility model, by providing a sealing ring body and a connecting seat connected to the sealing ring body, a raised clamping ring cooperates with the supporting groove in the raised seat, so as to isolate the air flow vortex in the cavity area between the guide tube and the insulation structure and the furnace body, shorten the gas flow, increase the gas flow rate, and improve the speed and ability of the gas to carry away volatiles, thereby greatly reducing the carbon and oxygen content of the crystal. In addition, the sealing ring body can be installed by using a hook through a through-hole structure that passes through the middle of the raised seat at the upper end of the connecting seat, and the raised clamping ring at the bottom of the sealing ring body cooperates with the supporting groove in the raised seat to facilitate quick positioning during installation.

[0019] 3. In the utility model, the heat radiation of the heater to the upper part of the thermal field is isolated by the high temperature resistant sealing ring body, which reduces energy loss and power consumption, further increases the longitudinal temperature gradient of the thermal field, increases the crystal growth rate, and reduces production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the cross-sectional structure of the utility model.

[0021] Figure 2 The utility model is a schematic diagram of the connection structure of the crucible, the gas sealing ring body and the outer guide tube.

[0022] Figure 3 For the utility model Figure 2 Enlarged structural diagram at A in the middle.

[0023] In the figure, 1 is the furnace body; 2 is the cavity area; 3 is the gas sealing ring body; 4 is the supporting heat-insulating cover; 5 is the crucible; 6 is the outer guide tube; 7 is the supporting column; 8 is the connecting seat; 9 is the raised seat; 10 is the adapter liner ring; 11 is the supporting groove; 12 is the raised clamping ring. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] The utility model provides Figure 1-3 A single crystal furnace thermal field eddy current sealing ring is shown, comprising a furnace body 1 and a crucible 5 located inside the furnace body 1, an outer guide tube 6 is arranged above the crucible 5 and located inside the furnace body 1, supporting heat-insulating covers 4 are arranged on both sides of the crucible 5 and located on the inner wall of the furnace body 1, and a cavity area 2 is arranged above the crucible 5 and located inside the furnace body 1;

[0026] The sealing ring body 3 is located on the side wall of the supporting heat-insulating cover 4, and the sealing ring body 3 is located above the crucible 5. A connecting seat 7 is provided on the sealing ring body 3, a raised seat 8 is provided on the connecting seat 7, and a raised clamping ring 11 is provided below the connecting seat 7 and at the bottom of the sealing ring body 3.

[0027] In an optional embodiment, a transfer liner ring 9 is provided at the lower end of the air sealing ring body 3 and on the side wall of the supporting heat insulation cover 4 , and a supporting groove 10 is provided on the transfer liner ring 9 .

[0028] In the utility model, the sealing ring body 3 is hooked by using a through-hole structure that passes through the middle of a raised seat 9 at the upper end of a connecting seat 8 on the sealing ring body 3, and then the sealing ring body 3 is installed on the adapter liner ring 10 by using a raised clamping ring 12 at the bottom thereof and a supporting groove 11 on the adapter liner ring 10 for positioning. Thus, in crystal production, the air flow vortex is isolated, the gas flow is shortened, and the gas flow rate is increased, and the speed and ability of the gas to carry away volatiles are increased, thereby significantly reducing the carbon and oxygen content of the crystal.

[0029] In an optional embodiment, the size of the supporting groove 10 is slightly larger than the size of the raised snap ring 11 .

[0030] In this embodiment, the protruding snap ring 11 , which is smaller than the supporting groove 10 , plays a positioning function when connecting the sealing ring body 3 .

[0031] In an optional embodiment, the connecting seat 7 and the raised seat 8 are both made of high temperature resistant materials, and a through hole structure is provided in the middle of the raised seat 8 .

[0032] In this embodiment, the connecting seat 7 and the raised seat 8, which are made of the same high-temperature resistant material as the air sealing ring body 3, achieve a sealing effect between the air sealing ring body 3 and the transition ring 10 after the air sealing ring body 3 is connected to the transition ring 10, thereby isolating the heat loss and achieving the effect of reducing energy loss. In addition, the through hole structure in the middle of the raised seat 8 can be passed through with a hook, which facilitates the installation of the air sealing ring body 3.

[0033] In an optional embodiment, the cavity area 2 is an eddy flow area.

[0034] In an optional embodiment, support columns 6 are arranged on the pot of the crucible 5 at equal distances, and four support columns 6 are provided.

[0035] In an optional embodiment, the inner diameter of the outer guide tube 6 is larger than the inner diameter of the sealing ring body 3 , and the outer diameter of the transition liner ring 10 is larger than the outer diameter of the sealing ring body 3 .

[0036] In this embodiment, the sealing ring body 3 having an inner diameter smaller than that of the outer guide tube 6 can shorten the flow path of the gas, thereby increasing the flow velocity and improving the speed and ability of the gas flow to carry away volatiles.

[0037] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A single crystal furnace thermal field eddy current sealing ring, comprising a furnace body (1) and a crucible (5) located inside the furnace body (1), an outer guide tube (6) is arranged above the crucible (5) and located inside the furnace body (1), supporting heat-insulating covers (4) are arranged on both sides of the crucible (5) and located on the inner wall of the furnace body (1), and a cavity area (2) is arranged above the crucible (5) and located inside the furnace body (1); Features: The air sealing ring body (3) is located on the side wall of the supporting heat-insulating cover (4), and the air sealing ring body (3) is located above the crucible (5). A connecting seat (8) is provided on the air sealing ring body (3), and a raised seat (9) is provided on the connecting seat (8). A raised clamping ring (12) is provided below the connecting seat (8) and at the bottom of the air sealing ring body (3).

2. The single crystal furnace thermal field eddy current sealing ring according to claim 1, characterized in that: A transition liner ring (10) is provided at the lower end of the gas sealing ring body (3) and on the side wall of the supporting heat insulation cover (4), and a supporting groove (11) is provided on the transition liner ring (10).

3. The single crystal furnace thermal field eddy current sealing ring according to claim 2, characterized in that: The size of the supporting groove (11) is larger than the size of the raised snap ring (12).

4. The single crystal furnace thermal field eddy current sealing ring according to claim 2, characterized in that: The connecting seat (8) and the raised seat (9) are both made of high temperature resistant materials, and a through hole structure is provided in the middle of the raised seat (9).

5. The single crystal furnace thermal field eddy current sealing ring according to claim 1, characterized in that: The cavity area (2) is an eddy flow area.

6. The single crystal furnace thermal field eddy current sealing ring according to claim 1, characterized in that: Support columns (7) are arranged at equal distances on the pot of the crucible (5), and four support columns (7) are arranged.

7. The single crystal furnace thermal field eddy current sealing ring according to claim 2, characterized in that: The inner diameter of the outer guide tube (6) is greater than the inner diameter of the gas sealing ring body (3), and the outer diameter of the transition liner ring (10) is greater than the outer diameter of the gas sealing ring body (3).

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