Device for automatically testing vacuum pump

Abstract

The utility model relates to a device for automatically testing a vacuum pump, and aims to solve the problems of high labor cost, noise pollution and insufficient potential fault detection in the conventional test. According to the utility model, the gas circuit device and the circuit device are integrated, so that the automatic test of the vacuum pump is realized. Wherein the gas circuit device comprises a pneumatic valve, a simulation chamber and a dry vacuum pump, and is used for constructing and controlling a test environment; the circuit device comprises a timer, an electromagnetic valve and a computer software testing platform and is used for automatically controlling the testing process. On or off of the electromagnetic valve is controlled through the timer with preset time, opening and closing of the pneumatic valve are further controlled, and actual working conditions are simulated. And the computer software test platform monitors and records various parameters in the test process in real time. According to the device, the labor cost is reduced, the noise pollution is reduced, the test frequency and the test intensity are improved by simulating the test environment, and the failure rate is effectively reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum instruments and meters, in particular to a device for automatic testing of a vacuum pump. Background Art

[0002] In the semiconductor field, vacuum pumps are widely used and critical. By extracting gas from the process chamber, vacuum pumps effectively reduce the content of particles and impurities in the environment, providing a clean environment for the semiconductor manufacturing process. This helps to improve the production quality and stability of semiconductor devices and reduce the defect rate in the process. In each step of semiconductor production, the working atmosphere needs to be precisely controlled. The vacuum pump can adjust the pressure to create a vacuum environment that meets the process requirements and ensure that semiconductor devices are manufactured and processed in a specific atmosphere. The vacuum pump efficiently extracts gas from the process chamber and discharges it or purifies it through the processing system to meet the precise requirements of the atmosphere in the process. In the thin film deposition process, the vacuum pump helps to achieve high-precision thin film deposition by creating a vacuum environment to ensure the uniformity and quality of the deposited layer. The vacuum pump provides an ideal vacuum environment for key steps such as ion implantation and etching to ensure the accuracy of these processes.

[0003] In the semiconductor industry, the main vacuum pumps used include centrifugal pumps, molecular pumps, diffusion pumps, dry pumps, etc. These different types of vacuum pumps each play a specific role and together support the highly dry, dust-free, and atmosphere-free requirements of the semiconductor processing process.

[0004] After the vacuum pump has completed the repair and assembly process, in order to ensure the stability and performance of the overall operation of the machine, it must be transferred to a dedicated test site for a comprehensive operation test. This test link is crucial because it can verify the various performance indicators of the vacuum pump under simulated actual working conditions. During the test, the technician needs to control the opening and closing of the hand valve at a fixed time to simulate the air intake state of the main machine in the actual working environment. Through such operations, it is possible to accurately detect whether the key parameters of the vacuum pump, such as power, current, temperature and vacuum value, are within the normal range.

[0005] However, on the existing test platform, the valve needs to be opened or closed manually every 30 minutes. This frequent manual operation not only takes up a lot of time and energy of technicians, resulting in a waste of human resources, but also the noise pollution generated during the opening and closing of the valve also brings considerable troubles and potential health hazards to the operators. Figure 1 As shown, this situation needs to be improved urgently to improve testing efficiency, reduce the degree of human intervention, and improve the working environment. Utility Model Content

[0006] The purpose of the utility model is to add a timing device by design, and utilize compressed air, solenoid valves, pneumatic valves, vacuum gauges, etc. to achieve repeated automatic testing without human operation, so as to solve the problems of waste of testing manpower, noise pollution and harm to testers in existing equipment, and failure to detect potential faults due to insufficient testing frequency.

[0007] The specific technical solution of the utility model is as follows:

[0008] A device for automatic testing of a vacuum pump, comprising an air circuit device and a circuit device, wherein the air circuit device comprises a pneumatic valve, a simulation chamber, and a dry vacuum pump; the circuit device comprises a timer, a solenoid valve, and a computer software testing platform;

[0009] The air inlet of the pneumatic valve is provided with a gas flow meter for controlling and monitoring the gas flow entering the pneumatic valve;

[0010] The air outlet of the pneumatic valve is connected to the simulation chamber through a pipeline, and a vacuum gauge is provided on the pipeline for detecting the vacuum value in the air circuit;

[0011] The air inlet of the simulation chamber is connected to the air outlet of the pneumatic valve, and the air outlet is connected to a dry vacuum pump;

[0012] The dry vacuum pump is used to pump the gas in the simulation chamber out of the gas path;

[0013] The timer is installed in the power supply circuit of the solenoid valve, connected to the solenoid valve through the circuit, and can control the conduction or disconnection of the solenoid valve by preset time;

[0014] The solenoid valve is connected to the compressed air source and the pneumatic valve, and the opening or closing of the compressed air source is controlled by the conduction or disconnection of the solenoid valve, thereby controlling the opening or closing of the pneumatic valve;

[0015] The computer software testing platform is equipped with testing software and is respectively connected to a gas flow meter, a vacuum meter and a dry vacuum pump, and can control and monitor the gas flow in the gas circuit, receive vacuum value data of the gas circuit, and record and monitor various parameters of the dry vacuum pump.

[0016] The gas flow meter can cooperate with the computer software test platform to control and monitor the gas flow in the gas circuit and test the highest and lowest peak values ​​of the load intensity.

[0017] The vacuum gauge can detect the vacuum value in the gas circuit in real time and transmit the data to the computer software testing platform.

[0018] The dry vacuum pump can extract the gas in the simulation chamber to maintain the vacuum state of the gas circuit, and can also record and monitor parameters such as current, power, body temperature and motor temperature at the highest peak and lowest peak of its load.

[0019] The timer can preset the time and control the opening and closing of the pneumatic valve by controlling the power circuit of the solenoid valve.

[0020] The solenoid valve is a 24V DC solenoid valve, which can control the opening or closing of the compressed air source by turning the solenoid valve on or off, thereby controlling the opening or closing of the pneumatic valve.

[0021] The computer software testing platform can monitor and record relevant data of the dry vacuum pump at the highest peak value and the lowest peak value of the load by connecting to the vacuum pump.

[0022] Beneficial effects:

[0023] The solution of the utility model is to transform and optimize the existing test platform, add automatic devices, reduce human operation, reduce labor costs and the harm to personnel caused by noise pollution during testing; by simulating Chamber testing, the test intensity is improved and the failure rate of the machine is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is an existing manual test device for vacuum pumps.

[0025] Figure 2 It is a schematic diagram of the connection relationship of an embodiment of the utility model. DETAILED DESCRIPTION

[0026] The preferred embodiments of the present invention are given below in conjunction with the accompanying drawings to illustrate the technical solution of the present invention in detail.

[0027] Figure 2 The figure shows an embodiment of the device for automatic testing of vacuum pumps of the utility model, which includes an air circuit device and a circuit device. The arrow direction in the figure indicates the flow direction of external gas or compressed gas. The air circuit device mainly consists of a pneumatic valve 100, a simulation chamber 200 and a dry vacuum pump 300; while the circuit device includes a timer 400, a solenoid valve 500 and a computer software testing platform 600.

[0028] A gas flow meter 700 is provided at the air inlet of the pneumatic valve 100 to control and monitor the gas flow entering the pneumatic valve. The air outlet of the pneumatic valve is connected to the simulation chamber through a pipeline, and a vacuum meter 1100 is also installed on the pipeline to detect the vacuum value in the gas circuit in real time.

[0029] The air inlet of the simulation chamber 200 is connected to the air outlet of the pneumatic valve, and the air outlet is connected to a dry vacuum pump. The main function of the dry vacuum pump is to extract the gas in the simulation chamber to maintain the vacuum state of the gas path.

[0030] The timer 400 is installed in the power circuit of the solenoid valve 500 and is connected to the solenoid valve through the circuit. It can control the on or off state of the solenoid valve according to the preset time. In this embodiment, the power supply 800 adopts 220V AC power, which is connected to a 24V DC transformer 900 to provide a stable DC power supply for the solenoid valve through the transformer.

[0031] The solenoid valve 500 is connected to the compressed air source 1000 and the pneumatic valve 100, respectively. When the solenoid valve is in the on state, the compressed air source will be turned on to control the circulation opening of the pneumatic valve; when the solenoid valve is in the off state, the compressed air source will be turned off to control the closing of the pneumatic valve. It is worth mentioning that a 24V DC solenoid valve is used in this embodiment. When the pneumatic valve is in the open state, external gas can directly enter the simulation chamber and the dry vacuum pump, and the load of the dry vacuum pump will increase accordingly; when the pneumatic valve is closed, the external gas stops entering the simulation chamber, and the gas in the simulation chamber will be continuously pumped out by the dry vacuum pump until a vacuum state is reached, and the load of the dry vacuum pump will decrease accordingly.

[0032] The computer software test platform 600 is equipped with special test software and is connected to a gas flow meter, a vacuum meter and a dry vacuum pump. The dry vacuum pump uses a 380V three-phase AC power supply 1200. The test software cooperates with the gas flow meter to control and monitor the gas flow in the gas circuit and test the highest and lowest peak values ​​of the load intensity. In addition, the test software also receives the vacuum value data of the gas circuit by connecting to the vacuum meter, and records and monitors the key parameters such as current, power, body temperature and motor temperature at the highest peak value of the load by connecting to the dry vacuum pump, as well as the relevant data at the lowest peak value of the dry vacuum pump load.

[0033] The above embodiments can reflect the obvious advantages of the utility model:

[0034] The automated process significantly reduces human operations, thereby reducing the labor costs required for testing. It is estimated that about 3 hours of human operation time can be saved when testing each device.

[0035] It effectively reduces the noise pollution generated during the test, thereby reducing the health damage that noise may cause to operators.

[0036] The ability to realistically simulate the test environment not only increases the frequency and intensity of testing, but also significantly reduces the failure rate of equipment when it is running on the machine.

[0037] It is fully compatible with and retains the original test platform system, ensuring the continuity and stability of the test.

Claims

1. A device for automatic testing of a vacuum pump, characterized in that: It includes an air circuit device and a circuit device, wherein the air circuit device includes a pneumatic valve, a simulation chamber, and a dry vacuum pump; the circuit device includes a timer, a solenoid valve, and a computer software testing platform; The air inlet of the pneumatic valve is provided with a gas flow meter for controlling and monitoring the gas flow entering the pneumatic valve; The air outlet of the pneumatic valve is connected to the simulation chamber through a pipeline, and a vacuum gauge is provided on the pipeline for detecting the vacuum value in the air circuit; The air inlet of the simulation chamber is connected to the air outlet of the pneumatic valve, and the air outlet is connected to a dry vacuum pump; The dry vacuum pump is used to pump the gas in the simulation chamber out of the gas path; The timer is installed in the power supply circuit of the solenoid valve, connected to the solenoid valve through the circuit, and can control the conduction or disconnection of the solenoid valve by preset time; The solenoid valve is connected to the compressed air source and the pneumatic valve, and the opening or closing of the compressed air source is controlled by the conduction or disconnection of the solenoid valve, thereby controlling the opening or closing of the pneumatic valve; The computer software testing platform is equipped with testing software and is respectively connected to a gas flow meter, a vacuum meter and a dry vacuum pump, and can control and monitor the gas flow in the gas circuit, receive vacuum value data of the gas circuit, and record and monitor various parameters of the dry vacuum pump.

2. The device according to claim 1, characterized in that The gas flow meter can cooperate with the computer software test platform to control and monitor the gas flow in the gas circuit and test the highest and lowest peak values ​​of the load intensity.

3. The device according to claim 1, characterized in that The vacuum gauge can detect the vacuum value in the gas circuit in real time and transmit the data to the computer software testing platform.

4. The device according to claim 1, characterized in that The dry vacuum pump can extract the gas in the simulation chamber to maintain the vacuum state of the gas circuit, and can also record and monitor the current, power, body temperature and motor temperature at the highest peak and lowest peak of its load.

5. The device according to claim 1, characterized in that The timer can preset the time and control the opening and closing of the pneumatic valve by controlling the power circuit of the solenoid valve.

6. The device according to claim 1, characterized in that The solenoid valve is a 24V DC solenoid valve, which can control the opening or closing of the compressed air source by turning the solenoid valve on or off, thereby controlling the opening or closing of the pneumatic valve.

7. The device according to claim 1, characterized in that The computer software testing platform can monitor and record relevant data of the dry vacuum pump at the highest peak value and the lowest peak value of the load by connecting to the vacuum pump.

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