Adsorption heat cylinder for tail gas treatment

Abstract

The utility model discloses an adsorption heat cylinder for tail gas treatment, which comprises a cylinder body, the cylinder body comprises an inner cavity and an outer cavity, a heating unit for heating airflow is arranged in the outer cavity and is communicated with an inlet, the inner cavity is communicated with an outlet, and tail gas enters the outer cavity through the inlet and can be discharged from the outlet through the inner cavity. A plurality of rectifying plates with through holes are arranged in the inner cavity up and down, the rectifying plates divide the inner cavity into a plurality of relatively independent adsorption cavities, and at least one adsorption cavity contains an adsorbent. The adsorption device is reasonable in structure, uniform in heating and favorable for improving the adsorption effect.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment, in particular to an adsorption heat cylinder for tail gas treatment. Background Art

[0002] The semiconductor manufacturing industry produces tail gas containing a variety of harmful substances during the production process. These tail gases need to be effectively treated to reduce the harm to the environment and personnel. Adsorption is an important tail gas treatment method. Its main purpose is to remove harmful gases and particulate matter generated during the production process, ensure the safety of the working environment and reduce environmental pollution. Among them, the efficiency of the adsorption process is affected not only by pressure but also by temperature. Appropriate and constant temperature is conducive to improving the adsorption efficiency. In the existing technology, low adsorption efficiency often occurs due to uneven heating of the tail gas. Utility Model Content

[0003] The utility model discloses an adsorption heat cylinder for tail gas treatment, which solves the technical problems of uneven heating and poor adsorption effect during tail gas adsorption in the prior art, and has the technical effects of reasonable structure, uniform heating and being conducive to improving the adsorption effect. The technical scheme adopted is as follows:

[0004] An adsorption heat cylinder for exhaust gas treatment includes a cylinder body, the cylinder body includes an inner cavity and an outer cavity, the outer cavity is provided with a heating unit for heating airflow and is connected to an inlet, the inner cavity is connected to an outlet, the exhaust gas enters the outer cavity through the inlet and can be discharged from the outlet through the inner cavity, a plurality of rectifier plates with through holes are arranged above and below the inner cavity, the plurality of rectifier plates divide the inner cavity into a plurality of relatively independent adsorption chambers, and at least one of the adsorption chambers contains an adsorbent. Preferably, the through holes of the plurality of rectifier plates are arranged in a staggered manner.

[0005] On the basis of the above technical solution, the outer cavity is connected to the inner cavity through a plurality of first through holes at the upper part, and the heating unit comprises a plurality of heating rods arranged circumferentially, and the heating rods are fixed on the inner wall surface of the outer cavity away from the inner cavity.

[0006] On the basis of the above technical solution, a support frame is provided between two adjacent rectifier plates, the support frame comprises a plurality of circumferentially arranged columns, at least one end of the columns is connected to the rectifier plate, and the plurality of columns are fixedly connected via a plurality of annular plates.

[0007] On the basis of the above technical solution, it also includes a first heat exchange unit, which includes a first tube side and a first shell side, the first tube side is connected to the inlet on the outer cavity, and the first shell side is connected to the outlet on the inner cavity.

[0008] On the basis of the above technical solution, the first heat exchange unit extends out of the cylinder body and vertically to facilitate connection with other equipment.

[0009] On the basis of the above technical solution, it also includes a second heat exchange unit, which is arranged below the adsorption chamber of the cylinder body. The second heat exchange unit includes a second tube side and a second shell side. The second tube side is connected to the first tube side, and the second shell side is connected to the first shell side.

[0010] On the basis of the above technical solution, the second tube side and the second shell side extend in an S-shape.

[0011] Based on the above technical solution, the second shell side is connected to the outer cavity through a plurality of second through holes arranged circumferentially, the second through holes extend radially, and the second tube side is connected to the outer cavity through a plurality of third through holes arranged circumferentially, the third through holes extend vertically, and a baffle is fixedly provided near the outlet end of the third through holes to allow the airflow to flow radially.

[0012] On the basis of the above technical solution, it also includes a shaft rod, which passes through the inner cavity and can be fixedly connected to the rectifying plate or the second heat exchange unit passing through.

[0013] On the basis of the above technical solution, the cylinder body is fixedly connected with a mounting seat downward, the mounting seat is fixedly provided with a universal wheel downward, and the mounting seat is fixedly provided with a protective cover which is arranged outside the cylinder body.

[0014] Beneficial Effects

[0015] The utility model has a reasonable structure, includes an inner cavity and an outer cavity, which prolongs the flow length of the exhaust gas in the cylinder body, thereby prolonging the residence time of the exhaust gas in the cylinder body, so that the exhaust gas can be evenly and effectively heated when passing through the outer cavity. In addition, a plurality of rectifying plates are arranged in the inner cavity, and the exhaust gas is diverted when passing through the rectifying plates. On the one hand, it has a rectifying effect so that the exhaust gas is evenly diffused and passes through the inner cavity at a uniform speed, which is beneficial for the exhaust gas to fully contact with the adsorbent. On the other hand, the setting of the rectifying plates can also reduce the exhaust gas flow rate, prolong the contact time between the exhaust gas and the adsorbent, thereby helping to improve the exhaust gas adsorption efficiency.

[0016] In the utility model, the arrangement of the first heat exchange unit and the second heat exchange unit can greatly improve the utilization rate of thermal energy. The exhaust gas discharged through the outlet has a certain amount of heat. In the process of flowing along the second shell side and the first shell side, on the one hand, the exhaust gas corresponding to the second tube side and the first tube side can be effectively heated, which is beneficial to reducing the workload of the heating unit. On the other hand, the exhaust gas after adsorption can be quickly cooled down, which is convenient for entering the next process flow. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0018] Figure 1 : A schematic diagram of the cross-sectional structure of the main view of the utility model;

[0019] Figure 2 : Figure 1 A schematic diagram of the mechanism of the first heat exchange unit and the second heat exchange unit;

[0020] Figure 3 : Schematic diagram of the three-dimensional structure of the second heat exchange unit

[0021] Figure 4 : Schematic diagram of the three-dimensional structure of the rectifier plate and the support frame;

[0022] Figure 5 : Schematic diagram of the three-dimensional structure of the heating unit; DETAILED DESCRIPTION

[0023] The following description and accompanying drawings fully illustrate the specific embodiments of this article so that those skilled in the art can practice them. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. The scope of the embodiments of this article includes the entire scope of the claims, as well as all available equivalents of the claims. Herein, the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the embodiments can be referred to each other.

[0024] The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, it can also be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0025] As used herein, unless otherwise specified, the term "plurality" means two or more than two.

[0026] In this document, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B means: A or B.

[0027] In this article, the term "and / or" is a description of the association relationship between objects, indicating that three relationships may exist. For example, A and / or B means: A or B, or, A and B.

[0028] like Figures 1 to 3 The adsorption heat cylinder for tail gas treatment shown in the figure comprises a cylinder body 1, the hollow cavity of the cylinder body 1 comprises an inner cavity 101 and an outer cavity 102, and the outer cavity 102 is connected with the inner cavity 101 through a plurality of first through holes 6 at the upper part, as shown in FIG. Figure 1 As shown, the first through hole 6 extends radially.

[0029] A heating unit 13 for heating the airflow is provided in the outer cavity 102. Figure 5 As shown, the heating unit 13 includes a plurality of heating rods arranged circumferentially, and the heating rods are fixed on the inner wall surface of the outer cavity 102 away from the inner cavity 101. In this embodiment, the heating rods are electric heating rods, which are prior art and will not be described in detail here.

[0030] The outer cavity 102 is also connected to an inlet, and the inner cavity 101 is connected to an outlet. The exhaust gas enters the outer cavity 102 through the inlet and is heated, and then the exhaust gas flows through the inner cavity 101 and is discharged from the outlet.

[0031] like Figure 1As shown, four rectifier plates 2 with through holes are arranged in the upper and lower parts of the inner cavity 101. The four rectifier plates 2 divide the inner cavity 101 into three relatively independent adsorption chambers. In this embodiment, the three adsorption chambers are all filled with adsorbents, such as activated carbon, molecular sieves, silica gel or other special chemical adsorbents. Those skilled in the art can choose according to their needs, which will not be repeated here.

[0032] Among them, a support frame 3 is provided between two adjacent rectifier plates 2, and the support frame 3 includes a plurality of columns 31 arranged circumferentially, at least one end of the column 31 is connected to the rectifier plate 2, and the plurality of columns 31 are fixedly connected by a plurality of annular plates 32. In this embodiment, the support frame 3 is fixedly connected to the rectifier plate 2 upward, and the lower end of the support frame 3 is placed on the lower rectifier plate 2 or the flat plate, which is convenient for disassembly and assembly, and greatly simplifies the operation of taking and placing the adsorbent.

[0033] like Figure 1 and 2 As shown, the first heat exchange unit 4 and the second heat exchange unit 5 are also included. The first heat exchange unit 4 includes a first tube side 41 and a first shell side 42. The first heat exchange unit 4 extends out of the barrel body 1 and extends vertically to facilitate connection with other equipment. The second heat exchange unit 5 is arranged below the adsorption chamber of the barrel body 1. The second heat exchange unit 5 includes a second tube side 51 and a second shell side 52. Figure 2 As shown, the second tube side 51 and the second shell side 52 extend in an S-shaped winding manner, and the second tube side 51 and the second shell side 52 are coaxial with the inner cavity. In addition, the first tube side 51 is connected to the inlet on the outer cavity 102 through the second tube side 52, and the first shell side 42 is connected to the outlet on the inner cavity 101 through the second shell side 52, so that the exhaust gas discharged from the inner cavity 101 can effectively transfer heat to the exhaust gas to be entered into the outer cavity 102, which greatly improves the utilization rate of thermal energy, is conducive to reducing the load of the heating unit, and further helps to reduce costs.

[0034] Among them, the second shell side 52 is connected with the outer cavity 102 through a plurality of second through holes 7 arranged circumferentially, and the second through holes 7 extend radially; the second tube side 51 is connected with the inner cavity 101 through a plurality of third through holes 8 arranged circumferentially, and the third through holes 8 extend vertically, and a baffle is fixedly provided near the outlet end of the third through holes 8 to make the airflow flow radially, which is conducive to the smooth entry of the airflow into the outer cavity 102 or the second shell side 52.

[0035] like Figure 1 As shown, a shaft rod 11 is also provided, which passes through the inner cavity 101 and can be fixedly connected to the rectifying plate 2 or the second heat exchange unit 5 passing through, so that the rectifying plate 2 and the second heat exchange unit 5 are firmly placed in the inner cavity 101.

[0036] like Figure 1As shown, the cylinder body 1 is fixedly connected with a mounting seat downward, a universal wheel 9 is fixedly provided downwardly on the mounting seat, and a protective cover 10 is fixedly provided on the mounting seat and is arranged outside the cylinder body 1 to prevent the staff from touching the cylinder body 1 or the first heat exchange unit 4, thereby improving the safety of use.

[0037] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.

Claims

1. An adsorption heat cartridge for tail gas treatment, characterized in that: The invention comprises a cylinder body (1), wherein the cylinder body (1) comprises an inner cavity (101) and an outer cavity (102), wherein a heating unit (13) for heating an airflow is provided in the outer cavity (102) and is connected to an inlet, and wherein the inner cavity (101) is connected to an outlet, wherein the exhaust gas enters the outer cavity (102) through the inlet and can be discharged from the outlet through the inner cavity (101), wherein a plurality of rectifier plates (2) provided with through holes are provided above and below the inner cavity (101), wherein the plurality of rectifier plates (2) divide the inner cavity (101) into a plurality of relatively independent adsorption cavities, and at least one of the adsorption cavities contains an adsorbent.

2. The adsorption heat cartridge for exhaust gas treatment according to claim 1, characterized in that: The outer cavity (102) is connected to the inner cavity (101) at the top through a plurality of first through holes (6); the heating unit (13) comprises a plurality of heating rods arranged circumferentially; the heating rods are fixedly mounted on the inner wall surface of the outer cavity away from the inner cavity (101).

3. The adsorption heat cartridge for exhaust gas treatment according to claim 1, characterized in that: A support frame (3) is provided between two adjacent rectifying plates (2), the support frame (3) comprising a plurality of columns (31) arranged circumferentially, at least one end of the columns (31) being connected to the rectifying plate (2), and the plurality of columns (31) being fixedly connected via a plurality of annular plates (32).

4. The adsorption heat cartridge for tail gas treatment according to any one of claims 1 to 3, characterized in that: The invention also comprises a first heat exchange unit (4), wherein the first heat exchange unit (4) comprises a first tube side (41) and a first shell side (42), wherein the first tube side (41) is connected to an inlet on the outer chamber (102), and the first shell side (42) is connected to an outlet on the inner chamber (101).

5. The adsorption heat cartridge for exhaust gas treatment according to claim 4, characterized in that: The first heat exchange unit (4) extends out of the cylinder body (1) and vertically to facilitate connection with other equipment.

6. The adsorption heat cartridge for exhaust gas treatment according to claim 5, characterized in that: The invention also comprises a second heat exchange unit (5), wherein the second heat exchange unit (5) is arranged below the adsorption chamber of the cylinder body (1), and the second heat exchange unit (5) comprises a second tube side (51) and a second shell side (52), wherein the second tube side (51) is connected to the first tube side (41), and the second shell side (52) is connected to the first shell side (42).

7. The adsorption heat cartridge for exhaust gas treatment according to claim 6, characterized in that: The second tube side (51) and the second shell side (52) extend in an S-shape.

8. The adsorption heat cartridge for exhaust gas treatment according to claim 7, characterized in that: The second shell side (52) is connected to the outer cavity (102) via a plurality of second through holes (7) arranged circumferentially, the second through holes (7) extending radially, and the second tube side (51) is connected to the outer cavity via a plurality of third through holes (8) arranged circumferentially, the third through holes (8) extending vertically, and a baffle is fixedly provided near the outlet end of the third through holes (8) to allow the airflow to flow radially.

9. The adsorption heat cartridge for tail gas treatment according to any one of claims 5 to 8, characterized in that: It also comprises a shaft rod (11), wherein the shaft rod (11) passes through the inner cavity (101) and can be fixedly connected to the rectifying plate (2) or the second heat exchange unit (5) passing through it.

10. The adsorption heat cartridge for exhaust gas treatment according to claim 9, characterized in that: The cylinder body (1) is fixedly connected downwardly with a mounting seat, a universal wheel (9) is fixedly provided downwardly on the mounting seat, and a protective cover (10) is fixedly provided on the mounting seat and is arranged outside the cylinder body (1).

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