Adjusting device and precision machine

Abstract

The utility model provides an adjusting device and a precision machine, relates to the technical field of semiconductor equipment, and aims to solve the problem that two parts are difficult to prevent from rotating around a central shaft. The adjusting device comprises an adjusting basic part, a part to be adjusted, a first positioning assembly and a second positioning assembly, the first positioning assembly comprises a first adjusting part and a first adjusting part, the first adjusting part can be self-centered relative to the first adjusting part, one of the adjusting basic part and the to-be-adjusted part is provided with the first adjusting part, and the other one of the adjusting basic part and the to-be-adjusted part is provided with the first adjusting part; the second positioning assembly comprises a second adjusting part and an adjusting groove, the adjusting groove can allow the second adjusting part to slide in the first direction of the adjusting groove and prevent the second adjusting part from sliding in the second direction of the adjusting groove, one of the adjusting basic part and the part to be adjusted is provided with the second adjusting part, and the other one is provided with the adjusting groove. The adjusting device provided by the utility model can prevent the part to be adjusted and the adjusting basic part from rotating along the central shaft.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to an adjusting device and a precision machine. Background Art

[0002] The existing parallelism adjustment mechanism is usually composed of a top plate, a bottom plate, three groups of round head stop screws and three groups of cylindrical head screws evenly distributed along the circumference. The round head stop screw is locked on the top plate and pressed against the bottom plate; the ordinary cylindrical head screw passes through the top plate and is threadedly connected to the bottom plate; by pushing and pulling together, the parallelism of the top plate can be adjusted to a relatively ideal position. In addition, in this solution, there is a round head stop screw locked in the center of the top plate, and there is a smaller through hole in the center of the bottom plate and a round groove matching the round head of the round head stop screw, which can ensure that the central axis of the top plate and the bottom plate are the same and not eccentric during adjustment.

[0003] Although this solution can adjust the parallelism and up and down height of the top plate, in actual conditions, when the flatness requirements for the top plate or the upper surface of the fixed components on the top plate are relatively high, the three sets of adjustment positions are difficult to meet actual needs; this solution can only ensure coaxiality, and ordinary cylindrical head screws can only be fastened by friction, and cannot absolutely limit the rotation of the top plate and the bottom plate. During the actual adjustment process, the top plate will rotate relative to the center axis, which will cause large errors; when the top plate and the bottom plate need to be made hollow or there are other spatial size requirements, the existing solution is difficult to design and difficult to adjust manually. Utility Model Content

[0004] The first object of the utility model is to provide an adjusting device to solve the existing technical problem that it is difficult to prevent two parts from rotating around the central axis.

[0005] The adjusting device provided by the utility model comprises an adjusting base member, a member to be adjusted, and a first positioning component and a second positioning component which are arranged relatively;

[0006] The first positioning assembly includes a first adjusting member and a first adjusting portion, the first adjusting member can be self-centering relative to the first adjusting portion, and one of the adjusting base member and the member to be adjusted is provided with the first adjusting member, and the other is provided with the first adjusting portion;

[0007] The second positioning assembly includes a second adjusting member and an adjusting slot, wherein the adjusting slot enables the second adjusting member to slide along a first direction of the adjusting slot and prevents the second adjusting member from sliding along a second direction of the adjusting slot, and one of the adjusting base member and the member to be adjusted is provided with the second adjusting member, and the other is provided with the adjusting slot.

[0008] The beneficial effects brought by the regulating device of the utility model are:

[0009] If the adjustment base part is fixed as a basis, by setting a first positioning component, the position of a point of the part to be adjusted in the plane can be determined by utilizing the self-centering effect of the first adjusting part on the end of the first adjusting part, and the adjustment groove in the second positioning component is set to prevent the second adjusting part from sliding in the width direction, the circumferential position of another point of the part to be adjusted relative to the previous point can be determined on the plane, and the adjustment groove allows the second adjusting part to slide in its length direction, and over-positioning of the second adjusting part can also be avoided. Through the cooperation of the first adjusting part and the first adjusting part of the first positioning component, and the cooperation of the second adjusting part and the adjustment groove of the second positioning component, it can be achieved to prevent the adjustment base part and the part to be adjusted from rotating along an axis perpendicular to the two.

[0010] In the preferred technical solution, the adjusting device also includes a third positioning assembly, and the third positioning assembly includes a third adjusting member and a fastener. One of the adjusting base member and the member to be adjusted is spirally provided with the third adjusting member and passed through by the fastener, and the other is abutted by the third adjusting member and threadedly connected to the fastener.

[0011] In a preferred technical solution, the first positioning assembly, the second positioning assembly and the third positioning assembly all include a threaded connection seat, the threaded connection seat is threadedly connected to the adjustment base member or the member to be adjusted, and the first adjustment member, the second adjustment member and the third adjustment member are threadedly connected to the threaded connection seat.

[0012] In a preferred technical solution, the threaded connection seat is threadedly connected with a first stop screw, and the first stop screw is used to fasten the third adjusting member or the second adjusting member or the first adjusting member to the threaded connection seat.

[0013] In a preferred technical solution, the threaded connection seat has a prism portion, which is located on a side of one of the adjustment base member and the member to be adjusted away from the other; and the side surfaces of the prism portion are provided with threaded holes for threaded connection with the first stop screw.

[0014] In a preferred technical solution, the first adjustment portion is formed by a positioning gasket, and the positioning gasket is provided with a recessed portion or a through hole on a side facing the first adjusting member, one end of the first adjusting member abuts against the recessed portion or the through hole, and the positioning gasket is located in a countersunk hole of the adjustment base member or the member to be adjusted facing the first adjusting member.

[0015] In a preferred technical solution, the adjustment groove is formed by partial surfaces of a pair of parallel pins facing the second adjustment member, and the second adjustment member abuts against the partial surfaces of the pair of pins.

[0016] In a preferred technical solution, the third positioning assembly further includes a flat gasket, and the third adjusting member abuts against the flat gasket.

[0017] In a preferred technical solution, the first positioning component, the second positioning component and the third positioning component are distributed along the circumferential direction, the first positioning component and the second positioning component are arranged relatively to each other, and the third positioning component is located on both sides of the line connecting the first positioning component and the second positioning component.

[0018] In a preferred technical solution, both the first positioning assembly and the second positioning assembly include a tensioning connector; in the first positioning assembly, the tensioning connector and the first adjusting member are spaced apart; in the second positioning assembly, the tensioning connector and the second adjusting member are spaced apart; the tensioning connector passes through one of the adjustment base member and the member to be adjusted and is threadedly connected to the other.

[0019] The second object of the utility model is to provide a precision machine to solve the technical problem that it is difficult to prevent two parts from rotating around the central axis.

[0020] The precision machinery provided by the utility model comprises the above-mentioned regulating device.

[0021] By providing the above-mentioned adjusting device in the precision machine, the precision machine accordingly has all the advantages of the above-mentioned adjusting device, which will not be described one by one here. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments or background technologies of the present invention, the drawings required for use in the embodiments or background technology descriptions are briefly introduced below. Obviously, the drawings described below are merely embodiments of the present invention, and ordinary technicians in this field can obtain other drawings based on the provided drawings without paying any creative work.

[0023] Figure 1 A schematic diagram of the structure of the regulating device provided in Embodiment 1 of the utility model;

[0024] Figure 2 A schematic diagram of the structure of a first positioning assembly in an adjustment device provided in Embodiment 1 of the utility model;

[0025] Figure 3 A schematic diagram of the structure of a second positioning assembly in the adjustment device provided in Embodiment 1 of the utility model;

[0026] Figure 4 A schematic diagram of the structure of the member to be adjusted and the parts arranged thereon in the adjusting device provided in the first embodiment of the utility model;

[0027] Figure 5 A schematic diagram of the structure of the adjusting base member and the parts arranged thereon in the adjusting device provided in the first embodiment of the utility model;

[0028] Figure 6 A three-dimensional disassembled diagram of the adjustment device provided in the first embodiment of the utility model;

[0029] Figure 7 A three-dimensional disassembled diagram of an adjusting base member and parts arranged thereon in an adjusting device provided in Embodiment 1 of the utility model;

[0030] Figure 8 This is a schematic structural diagram of the part to be adjusted and the parts arranged thereon in the adjusting device provided in the first embodiment of the utility model.

[0031] Description of reference numerals:

[0032] 100-adjustment base; 110-positioning gasket; 120-pin shaft; 130-flat gasket; 200-part to be adjusted;

[0033] 300-first positioning assembly; 310-first adjusting member; 320-tightening connector; 330-threaded connection seat; 331-third threaded hole; 333-prism portion; 340-first stop screw;

[0034] 400 - second positioning assembly; 410 - second adjusting member;

[0035] 500 - third positioning assembly; 510 - third adjusting member; 520 - fastener. DETAILED DESCRIPTION

[0036] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific embodiments of the utility model are described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0037] Embodiment 1:

[0038] Figure 1 A schematic diagram of the structure of the regulating device provided in Embodiment 1 of the utility model; Figure 2 A schematic diagram of the structure of a first positioning assembly in an adjustment device provided in Embodiment 1 of the utility model; Figure 3 This is a schematic diagram of the structure of the second positioning assembly in the adjustment device provided in the first embodiment of the utility model; Figure 1-Figure 3 As shown, the adjustment device provided in the first embodiment of the present utility model comprises an adjustment base member 100, a member to be adjusted 200, a first positioning assembly 300 and a second positioning assembly 400 which are arranged relatively;

[0039] The first positioning assembly 300 includes a first adjusting member 310 and a first adjusting portion. The first adjusting member 310 can be self-centered relative to the first adjusting portion. One of the adjusting base member 100 and the member to be adjusted 200 is provided with the first adjusting member 310, and the other is provided with the first adjusting portion.

[0040] The second positioning assembly 400 includes a second adjusting member 410 and an adjusting groove, wherein the adjusting groove allows the second adjusting member 410 to slide along a first direction of the adjusting groove and prevents the second adjusting member 410 from sliding along a second direction of the adjusting groove. One of the adjusting base member 100 and the member to be adjusted 200 is provided with the second adjusting member 410, and the other is provided with the adjusting groove.

[0041] The adjusting device in this embodiment is used to adjust the horizontality of the mechanism / module installed on the part to be adjusted 200, and / or adjust the flatness between the part to be adjusted 200 and the adjustment base part 100, so as to adjust the relative posture between the mechanism / module installed on the part to be adjusted 200 and the mechanism / module / component installed on the adjustment base part 100.

[0042] In this embodiment, the adjusting base member 100 is located below the member to be adjusted 200, and both the adjusting base member 100 and the member to be adjusted 200 are arranged substantially horizontally. Therefore, the side of the adjusting base member 100 facing the member to be adjusted 200 is the upper side of the adjusting base member 100, and the side of the adjusting base member 100 away from the member to be adjusted 200 is the lower side of the adjusting base member 100; the side of the member to be adjusted 200 facing the adjusting base member 100 is the lower side of the member to be adjusted 200, and the side of the member to be adjusted 200 away from the adjusting base member 100 is the upper side of the member to be adjusted 200.

[0043] Among them, the first adjusting member 310 and the second adjusting member 410 can both be round-headed set screws, that is, second set screws, and the first adjusting member 310 and the second adjusting member 410 are both spirally connected to the member to be adjusted 200, so that when the first adjusting member 310 and the second adjusting member 410 are rotated, the length thereof extending out of the lower surface of the member to be adjusted 200 can be changed, thereby changing the distance between the area of ​​the member to be adjusted 200 where the first adjusting member 310 and the second adjusting member 410 are set and the adjustment base member 100, so as to change the flatness and horizontality between the member to be adjusted 200 and the adjustment base member 100.

[0044] The first adjusting member 310 in the first positioning assembly 300 can be self-centering relative to the first adjusting part, which means that when one end of the first adjusting member 310 abuts against the first adjusting part, the end of the first adjusting member 310 will spontaneously move to a certain position under the force of the abutment and the reaction force of the first adjusting part, and determine the position in a two-dimensional plane on the upper surface of the first adjusting part. Unless there is a direct horizontal force acting on the first adjusting member 310, the end position of the first adjusting member 310 is not easy to change.

[0045] If the adjustment base member 100 is fixed as a basis, by setting the first positioning assembly 300, the position of a point of the member 200 to be adjusted in the plane can be determined by utilizing the self-centering effect of the first adjusting portion on the end of the first adjusting portion 310, and the adjustment groove in the second positioning assembly 400 is set to prevent the second adjusting portion 410 from sliding in the width direction, so that the circumferential position of another point of the member 200 to be adjusted relative to the previous point can be determined on the plane, and the adjustment groove allows the second adjusting portion 410 to slide in its length direction, and can also avoid over-positioning of the second adjusting portion 410. Through the cooperation of the first adjusting portion 310 and the first adjusting portion of the first positioning assembly 300, and the cooperation of the second adjusting portion 410 and the adjustment groove of the second positioning assembly 400, it is possible to prevent the adjustment base member 100 and the member 200 to be adjusted from rotating along an axis perpendicular to the two.

[0046] In another implementation, the adjustment base member 100 may be disposed above the member to be adjusted 200, and the member to be adjusted 200 may be disposed below the adjustment base member 100. In addition, the first adjustment member 310 and the second adjustment member 410 may be disposed on the adjustment base member 100, and correspondingly, the first adjustment portion and the adjustment slot may also be disposed on the member to be adjusted 200.

[0047] like Figure 1 and Figure 4 As shown, Figure 4 A schematic structural diagram of the part to be adjusted and the parts arranged thereon in the adjusting device provided in Example 1 of the utility model; preferably, the adjusting device also includes a third positioning assembly 500, the third positioning assembly 500 includes a third adjusting member 510 and a fastener 520, and one of the adjusting base member 100 and the part to be adjusted 200 is spirally provided with the third adjusting member 510 and passed through by the fastener 520, and the other is abutted by the third adjusting member 510 and threadedly connected to the fastener 520.

[0048] Specifically, in this embodiment, the third adjusting member 510 can be a round head stop screw, that is, a second stop screw. The third adjusting member 510 is spirally arranged relative to the member to be adjusted 200, and the fastener 520 can be a male threaded connector such as a screw or a bolt, more specifically, it can be a cylindrical head hexagon socket screw.

[0049] In this embodiment, the third adjusting member 510 and the fastener 520 can both be arranged on the member to be adjusted 200. The member to be adjusted 200 can be provided with a stepped hole with a larger top and a smaller bottom, and the lower end face of the screw head of the cylindrical head hexagon socket screw of the fastener 520 abuts against the stepped end face in the stepped hole.

[0050] By setting the third adjusting member 510 of the third positioning assembly 500 at one of the adjusting base member 100 and the member to be adjusted 200 and abutting the other, the maximum distance between the adjusting base member 100 and the member to be adjusted 200 at the position where the third adjusting member 510 is set can be controlled, and by setting the fastener 520 to pass through one and abut the other, the two can be supported. Through the push action of the third adjusting member 510 and the pulling action of the fastener 520, the distance between the member to be adjusted 200 and the adjusting base member 100 at the third positioning assembly 500 is limited, and at the same time, the force that makes the first adjusting member 310 and the second adjusting member 410 abut the first adjusting portion and the adjusting groove respectively can be provided to ensure the stability of the entire system of the adjusting device.

[0051] In another implementation, those skilled in the art may screw the third adjusting member 510 onto the adjusting base member 100 as needed. Similarly, the fastener 520 also passes through the adjusting base member 100 and abuts against the member to be adjusted 200 .

[0052] like Figure 4 As shown, preferably, the first positioning assembly 300 , the second positioning assembly 400 and the third positioning assembly 500 all include a threaded connection seat 330 , the threaded connection seat 330 is threadedly connected to the adjustment base member 100 or the member to be adjusted 200 , and the third adjustment member 510 is threadedly connected to the threaded connection seat 330 .

[0053] Among them, in this embodiment, the threaded connection seat 330 in the first positioning component 300, the second positioning component 400 and the third positioning component 500 are all threadedly connected to the part to be adjusted 200. Since the part to be adjusted 200 is located above the adjustment base component 100, the threaded connection seat 330 is set on the part to be adjusted 200, which is beneficial to control the rotation of the threaded connection seat 30 relative to the part to be adjusted 200, so as to fix the threaded connection seat 330 on the part to be adjusted 200.

[0054] Specifically, in this embodiment, the threaded connection seat 330 includes an external threaded portion at the lower portion thereof, and the member to be adjusted 200 is provided with a first threaded hole, and the two are screwed together. A second threaded hole is provided in the threaded connection seat 330, and the third adjusting member 510 is screwed in the second threaded hole, and the axis of the second threaded hole coincides with the axis of the external threaded portion of the threaded connection seat 330.

[0055] In this embodiment, the first adjusting member 310, the second adjusting member 410 and the third adjusting member 510 can all be second set screws, more specifically, they can all be round head set screws. The first adjusting member 310 and the second adjusting member 410 are respectively threadedly connected to the threaded connection seat 330, and the round heads at the bottom of the first adjusting member 310 and the second adjusting member 410 can respectively realize positioning in two directions and one direction in the plane with the first adjusting portion and the adjusting groove, and the two cooperate to realize positioning of the member to be adjusted 200 relative to the adjusting base member 100 on the horizontal plane.

[0056] By providing a threaded connection seat 330 threadedly connected to the part to be adjusted 200 or the adjusting base part 100, and utilizing the third adjusting part 510 to be threadedly connected to the threaded connection seat 330, when it is necessary to adjust the height of the third adjusting part 510 extending out of the part to be adjusted 200 or the adjusting base part 100, the third adjusting part 510 can be rotated relative to the threaded connection seat 330 or the threaded connection seat 330 can be rotated relative to the part to be adjusted 200 or the adjusting base part 100, thereby making adjustment more convenient and improving operational convenience.

[0057] In another implementation, one of the first adjusting member 310 and the second adjusting member 410 may be fixedly connected to the member to be adjusted 200, and the other may be threadedly connected, for example, to change the height of the member to be adjusted 200 extending downward, thereby adjusting the parallelism between the member to be adjusted 200 and the adjusting base member 100. Of course, if both the first adjusting member 310 and the second adjusting member 410 are fixedly connected to the member to be adjusted 200, and the height of the member to be adjusted 200 extending toward the adjusting base member 100 does not change, the member to be adjusted 200 and the adjusting base member 100 may swing around an axis, thereby changing the parallelism between the two or changing the horizontality of the member to be adjusted 200.

[0058] Figure 6 A three-dimensional disassembled diagram of the adjustment device provided in the first embodiment of the utility model; Figure 8 A schematic diagram of the structure of the member to be adjusted and the parts arranged thereon in the adjusting device provided in the first embodiment of the utility model; Figure 1-Figure 4 , Figure 6 and Figure 8 As shown, preferably, the threaded connection seat 330 is threadedly connected with a first stop screw 340 , and the first stop screw 340 is used to fasten the third adjustment member 510 or the second adjustment member 410 or the first adjustment member 310 to the threaded connection seat 330 .

[0059] Specifically, a third threaded hole 331 is provided at the upper portion of the threaded connection seat 330 , and the first set screw 340 is threadedly connected in the third threaded hole 331 . More specifically, the axis of the third threaded hole 331 may be perpendicular to the axis of the second threaded hole.

[0060] By setting a first stop screw 340 to be threadedly connected in the threaded connection seat 330, the end of the first stop screw 340 can be used to lock the first adjustment member 310 or the second adjustment member 410 or the third adjustment member 510, thereby preventing them from loosening or rotating relative to the threaded connection member, thereby ensuring the stability of the position between the part to be adjusted 200 and the adjustment base member 100.

[0061] like Figure 2 and Figure 3 As shown, preferably, the threaded connection seat 330 has a prism portion 333, which is located on the side of one of the adjustment base member 100 and the member to be adjusted 200 away from the other; the side surfaces of the prism portion 333 are provided with threaded holes for threaded connection of the first stop screw 340.

[0062] Specifically, in this embodiment, the prism portion 333 can be a hexagonal prism. Of course, in other implementations, it can also be a quadrangular prism, an octagonal prism, or even a triangular prism or a pentagonal prism. In this embodiment, the prism portion 333 is located on the side of one of the adjusting base member 100 and the part to be adjusted 200 that is away from the other, which means that, taking the solution of the part to be adjusted 200 located at the adjusting base member 100 of this embodiment as an example, the adjusting base member 100 is below the part to be adjusted 200, then the side of the part to be adjusted 200 that is away from the adjusting base member 100 is the top of the part to be adjusted 200. In other words, if the threaded connection seat 330 is set at the lower one of the adjusting base member 100 and the part to be adjusted 200, then the prism portion 333 of the threaded connection seat 330 is set below the lower one.

[0063] The threaded hole here is a third threaded hole 331 , and the third threaded hole 331 can be arranged along the radial direction of the threaded connection seat 330 .

[0064] The prism portion 333 is provided in the threaded connection seat 330, so that the threaded connection seat 330 can be easily clamped by a tool such as a wrench. Moreover, the prism portion 333 is provided, so that the threaded hole for threading the first set screw 340 can be easily processed on the plane.

[0065] Of course, in another implementation, most of the area outside the external threaded portion of the threaded connection seat 330 can be cylindrical, and only a pair of planes parallel to the axis of the threaded connection seat 330 are set in a local area for applying torque. Alternatively, a socket can be set in the area outside the external threaded portion of the threaded connection seat 330. If it is necessary to rotate the threaded connection seat 330 relative to the adjusted part 200, a rod can be inserted into the socket to apply torque to the threaded connection seat 330.

[0066] Figure 5A schematic diagram of the structure of the adjusting base member and the parts arranged thereon in the adjusting device provided in the first embodiment of the utility model; Figure 7 A three-dimensional disassembled diagram of the adjusting base member and the parts arranged thereon in the adjusting device provided in the first embodiment of the utility model; Figure 5-Figure 7 As shown, preferably, the first adjustment portion is formed by a positioning gasket 110, and the positioning gasket 110 is provided with a recessed portion or a through hole on a side facing the first adjustment member 310, one end of the first adjustment member 310 abuts against the recessed portion or the through hole, and the positioning gasket 110 is located in the countersunk hole of the adjustment base member 100 or the member to be adjusted 200 facing the first adjustment member 310.

[0067] Specifically, in this embodiment, the positioning gasket 110 is provided with a through hole, that is, the positioning gasket 110 is annular. A countersunk hole is provided on the adjustment base member 100 to accommodate the positioning gasket 110. More specifically, the positioning gasket 110 cooperates with the inner peripheral wall of the countersunk hole to achieve accurate positioning of the first adjustment member 310. That is, the first adjustment portion is a recessed portion or a through hole of the positioning gasket 110.

[0068] By providing the positioning gasket 110, it can cooperate with the first adjusting member 310, so that when adjusting the parallelism between the to-be-adjusted member 200 and the adjusting base member 100, even if the end of the first adjusting member 310 and the first adjusting portion move slightly, the adjusting base member 100 or the to-be-adjusted member 200 will not be worn. If the first adjusting portion is worn, only the positioning gasket 110 needs to be replaced.

[0069] In another implementation, the positioning gasket 110 may also be provided with a recessed portion to cooperate with the round head at the bottom of the first adjusting member 310 to achieve precise positioning of the first adjusting member 310 .

[0070] like Figure 5 and Figure 7 As shown, preferably, the adjustment groove is formed by partial surfaces of a pair of parallel pins 120 facing the second adjustment member 410 , and the second adjustment member 410 abuts against partial surfaces of the pair of pins 120 .

[0071] Specifically, in this embodiment, the pin can be a cylindrical pin, and the adjustment groove is composed of the upper half of the opposite sides of the two pins 120, that is, composed of two 1 / 4 arc surfaces of the two pins, and the sides of these two parts are abutted by the second adjustment member 410. Since the area sandwiched by the sides of these two parts is also a space with a larger upper part and a smaller lower part, and the pins 120 are arranged in parallel, an adjustment groove with a consistent cross-section height is formed. If the second adjustment member 410 slides along the adjustment groove, the height of the second adjustment member 410 will not change, and will not affect the relative distance between the to-be-adjusted member 200 on which the second adjustment member 410 is installed and the adjustment base member 100.

[0072] In this embodiment, the pin 120 can be fixedly connected to the adjusting base member 100. Specifically, for example, it can be connected by bonding, or installed on the adjusting base member 100 in a form such as embedding.

[0073] By setting a parallel pin 120 to form an adjustment groove abutting the second adjustment member 410, not only can the parallelism of the adjustment groove be ensured, but also the height change of the adjustable member 200 or the adjustment base member 100 connected to the second adjustment member 410 can be avoided as the second adjustment member 410 moves in the adjustment groove along the length direction of the adjustment groove. In addition, when the second adjustment member 410 moves along the adjustment groove and wears the pin 120, it is only necessary to replace the pin 120, and the adjustable member 200 or the adjustment base member 100 will not be scrapped.

[0074] like Figure 7 As shown, preferably, the third positioning assembly 500 further includes a flat gasket 130 , and the third adjusting member 510 abuts against the flat gasket 130 .

[0075] Since the third positioning assembly 500 does not assume the function of positioning the adjustable member 200 and the adjusting base member 100 on a plane parallel to the two, the third positioning assembly 500 uses a flat gasket 130 , and only the third adjusting member 510 needs to abut against the flat gasket 130 .

[0076] By using the flat gasket 130 to abut against the third adjusting member 510 instead of using the end of the third adjusting member 510 to directly abut against the adjusting member 200 or the adjusting base member 100 , the wear of the adjusting member 200 and the adjusting base member 100 can be significantly reduced.

[0077] like Figure 1 As shown, preferably, the first positioning assembly 300 , the second positioning assembly 400 and the third positioning assembly 500 are distributed along the circumferential direction, the first positioning assembly 300 and the second positioning assembly 400 are arranged opposite to each other, and the third positioning assembly 500 is located on both sides of the line connecting the first positioning assembly 300 and the second positioning assembly 400 .

[0078] Specifically, in this embodiment, a group of first positioning components 300, a group of second positioning components 400 and four groups of third positioning components 500 are included, the first positioning components 300 and the second positioning components 400 are arranged opposite to each other, and two groups of third positioning components 500 are arranged on one side of the line connecting the first positioning components 300 and the second positioning components 400, and two groups of third positioning components 500 are arranged on the other side. That is, the first positioning components 300, the second positioning components 400 and the groups of third positioning components 500 are evenly distributed with an interval of 60° between adjacent ones.

[0079] Distributing the first positioning assembly 300 , the second positioning assembly 400 and the third positioning assembly 500 in the above manner can free up the middle area of ​​the to-be-adjusted component 200 and the adjustment base component 100 , so that the areas of the two are hollowed out for easy installation of other equipment.

[0080] like Figure 1-Figure 3 and Figure 8 As shown, preferably, the first positioning assembly 300 and the second positioning assembly 400 both include a tensioning connector 320; in the first positioning assembly 300, the tensioning connector 320 and the first adjusting member 310 are spaced apart; in the second positioning assembly 400, the tensioning connector 320 and the second adjusting member 410 are spaced apart; the tensioning connector 320 passes through one of the adjusting base member 100 and the member to be adjusted 200 and is threadedly connected to the other.

[0081] In this embodiment, the first adjusting member 310 of the first positioning assembly 300 abuts against the adjusting portion, and the second adjusting member 410 of the second positioning assembly 400 abuts against the adjusting groove, and both play a supporting role, that is, they are installed on the member to be adjusted 200 and support the adjusting base member 100; because the first positioning assembly 300 and the second positioning assembly 400 both include a tensioning connector 320, specifically, the tensioning connector 320 can be a male threaded connector such as a screw or a bolt. Among them, the tensioning connector 320 can be threadedly connected to the adjusting base member 100, and the tensioning connector 320 passes through the member to be adjusted 200, and the screw head or bolt head of the screw or bolt is located above the member to be adjusted 200, and the tensioning connector 320 pulls the member to be adjusted 200 toward the adjusting base member 100. Therefore, the tensioning connector 320 cooperates with the first adjusting member 310 and the second adjusting member 410 to pull and push to ensure that the distance between the adjusted member 200 and the adjustment base member 100 at the first positioning assembly 300 and the second positioning assembly 400 will not decrease or increase.

[0082] Moreover, since the first adjusting member 310 and the second adjusting member 410 are both arranged at a distance from the tensioning connecting member 320, although the first adjusting member 310 and the second adjusting member 410 have a supporting function, if the tensioning connecting member 320 is continued to be adjusted, the corresponding distance between the part to be adjusted 200 around the tensioning connecting member 320 and the adjustment base member 100 can be changed, so that the part to be adjusted 200 around which the tensioning adjusting member is set will undergo local deformation to varying degrees, so as to achieve the effect of adjusting the flatness of the part to be adjusted 200.

[0083] Embodiment 2:

[0084] Embodiment 2 further provides a precision machine, comprising the above-mentioned adjustment device.

[0085] By providing the above-mentioned adjusting device in the precision machine, the precision machine accordingly has all the advantages of the above-mentioned adjusting device, which will not be described one by one here.

[0086] Although the utility model is disclosed as above, the utility model is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the utility model. Therefore, the protection scope of the utility model shall be subject to the scope defined by the claims.

[0087] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the term "comprises" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprises a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0088] In the above embodiments, the descriptions of directions such as “upper” and “lower” are all based on the drawings.

[0089] The above description of the disclosed embodiments enables professionals in the field to implement or use the utility model. Various modifications to these embodiments will be apparent to professionals in the field, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the utility model.

[0090] Therefore, the present invention will not be limited to the embodiments shown herein but will be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A regulating device, characterized in that: It comprises an adjustment base member (100), a member to be adjusted (200), a first positioning component (300) and a second positioning component (400) which are arranged relatively; The first positioning assembly (300) comprises a first adjusting member (310) and a first adjusting portion, the first adjusting member (310) being capable of self-centering relative to the first adjusting portion, and one of the adjusting base member (100) and the member to be adjusted (200) being provided with the first adjusting member (310) and the other being provided with the first adjusting portion; The second positioning assembly (400) comprises a second adjusting member (410) and an adjusting groove, wherein the adjusting groove enables the second adjusting member (410) to slide along a first direction of the adjusting groove and prevents the second adjusting member (410) from sliding along a second direction of the adjusting groove, and one of the adjusting base member (100) and the member to be adjusted (200) is provided with the second adjusting member (410) and the other is provided with the adjusting groove.

2. The adjustment device according to claim 1, characterized in that: The adjustment device further comprises a third positioning assembly (500), wherein the third positioning assembly (500) comprises a third adjustment member (510) and a fastener (520), wherein one of the adjustment base member (100) and the member to be adjusted (200) is spirally provided with the third adjustment member (510) and is passed through by the fastener (520), and the other is abutted by the third adjustment member (510) and is threadedly connected to the fastener (520).

3. The adjusting device according to claim 2, characterized in that: The first positioning assembly (300), the second positioning assembly (400) and the third positioning assembly (500) all include a threaded connection seat (330), the threaded connection seat (330) is threadedly connected to the adjustment base member (100) or the member to be adjusted (200), and the first adjustment member (310), the second adjustment member (410) and the third adjustment member (510) are threadedly connected to the threaded connection seat (330).

4. The adjusting device according to claim 3, characterized in that: The threaded connection seat (330) is threadedly connected with a first stop screw (340), and the first stop screw (340) is used to fasten the third adjustment member (510) or the second adjustment member (410) or the first adjustment member (310) to the threaded connection seat (330).

5. The adjusting device according to claim 4, characterized in that: The threaded connection seat (330) has a prism portion (333), and the prism portion (333) is located on a side of one of the adjustment base member (100) and the member to be adjusted (200) that is away from the other; the side surfaces of the prism portion (333) are provided with threaded holes for threaded connection with the first stop screw (340).

6. The adjusting device according to claim 1, characterized in that: The first adjustment portion is formed by a positioning gasket (110), and the positioning gasket (110) is provided with a recessed portion or a through hole on a side facing the first adjustment member (310), one end of the first adjustment member (310) abuts against the recessed portion or the through hole, and the positioning gasket (110) is located in a countersunk hole of the adjustment base member (100) or the member to be adjusted (200) facing the first adjustment member (310).

7. The adjusting device according to claim 1, characterized in that: The adjustment groove is formed by partial surfaces of a pair of parallel pin shafts (120) facing the second adjustment member (410), and the second adjustment member (410) abuts against the partial surfaces of the pair of pin shafts (120).

8. The regulating device according to any one of claims 2 to 5, characterized in that: The third positioning assembly (500) further comprises a flat gasket (130), and the third adjusting member (510) abuts against the flat gasket (130).

9. The regulating device according to any one of claims 2 to 5, characterized in that: The first positioning component (300), the second positioning component (400) and the third positioning component (500) are distributed along the circumferential direction; the first positioning component (300) and the second positioning component (400) are arranged opposite to each other; and the third positioning component (500) is located on both sides of the line connecting the first positioning component (300) and the second positioning component (400).

10. The adjustment device according to claim 1, characterized in that: The first positioning assembly (300) and the second positioning assembly (400) both include a tensioning connector (320); in the first positioning assembly (300), the tensioning connector (320) and the first adjusting member (310) are spaced apart; in the second positioning assembly (400), the tensioning connector (320) and the second adjusting member (410) are spaced apart; the tensioning connector (320) passes through one of the adjusting base member (100) and the member to be adjusted (200) and is threadedly connected to the other.

11. A precision machine, characterized in that: The precision machine comprises the adjustment device according to any one of claims 1-10.

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