Sponge magnetron sputtering auxiliary mounting mechanism for foamed nickel production

Abstract

The utility model discloses a sponge magnetron sputtering auxiliary mounting mechanism for foamed nickel production, which relates to the technical field of foamed nickel production equipment and comprises an operation table, a support is fixedly connected to the upper surface of the operation table, stand columns are fixedly connected to two ends of the upper surface of the support, and a first pressing cylinder and a second pressing cylinder are arranged between the two stand columns. The two ends of the second pressing cylinder are rotationally connected with second rotating pipes, the ends, away from the second pressing cylinder, of the second rotating pipes are fixedly connected to the stand column, the two ends of the first pressing cylinder are rotationally connected with first rotating pipes, strip grooves are formed in the outer wall of the first pressing cylinder and the outer wall of the second pressing cylinder, and air openings are formed in the bottoms of the strip grooves. According to the sponge magnetron sputtering auxiliary mounting mechanism for foamed nickel production, the first pressing cylinder and the second pressing cylinder are attached to the upper surface and the lower surface of the base material correspondingly and rotate by means of friction force with the base material, the situation that the base material is folded is prevented, and the magnetron sputtering efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of foam nickel production equipment, in particular to a sponge magnetron sputtering auxiliary installation mechanism for foam nickel production. Background Art

[0002] Nickel foam is a sound-absorbing material with excellent performance and a high sound absorption coefficient at high frequencies; its sound absorption performance at low frequencies can be improved through the design of the sound-absorbing structure.

[0003] The working principle of magnetron sputtering is that electrons collide with argon atoms in the process of flying toward the substrate under the action of the electric field E, causing them to ionize and produce Ar positive ions and new electrons; the new electrons fly toward the substrate, and the Ar ions are accelerated to fly toward the cathode target under the action of the electric field, and bombard the target surface with high energy, causing the target material to sputter. Among the sputtered particles, neutral target atoms or molecules are deposited on the substrate to form a thin film. When the magnetron sputtering coating equipment is winding the substrate, especially the thin sponge with a thickness of less than 0.8mm, it is easy to cause folding or deviation, which will lead to defects in the substrate coating area and affect the coating effect.

[0004] Therefore, it is necessary to invent an auxiliary installation mechanism for sponge magnetron sputtering in the production of nickel foam to solve the above problems. Utility Model Content

[0005] The utility model aims to provide an auxiliary installation mechanism for sponge magnetron sputtering in the production of foam nickel, so as to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an auxiliary installation mechanism for sponge magnetron sputtering in the production of foam nickel, comprising an operating table, a bracket fixedly connected to the upper surface of the operating table, the bracket being a U-shaped structure, both ends of the upper surface of the bracket being fixedly connected to columns, a first pressing cylinder and a second pressing cylinder being arranged between the two columns, the first pressing cylinder being located above the second pressing cylinder, both ends of the second pressing cylinder being rotatably connected to second rotating tubes, the second rotating tube being connected to the second pressing cylinder, an end of the second rotating tube away from the second pressing cylinder being fixedly connected to the column, both ends of the first pressing cylinder being rotatably connected to the first rotating tubes, the first rotating tube being connected to the first pressing cylinder, a sliding groove being provided on the sides of the two columns close to each other, an extrusion assembly cooperating with the first rotating tube being arranged inside the sliding groove, strip grooves being provided on the outer walls of the first pressing cylinder and the second pressing cylinder, an air outlet being provided at the bottom of the strip grooves, and a sealing assembly being arranged inside the strip grooves.

[0007] Preferably, the extrusion assembly includes a slider, a telescopic rod and a second spring, the slider is slidably connected to the inside of the slide, the end of the first rotating tube away from the first pressing cylinder is fixedly connected to the slider, one end of the telescopic rod is fixedly connected to the upper surface of the slider, the other end of the telescopic rod is fixedly connected to the top of the slide, the second spring is sleeved on the outside of the telescopic rod, one end of the second spring is fixedly connected to the upper surface of the slider, and the other end of the second spring is fixedly connected to the top of the slide.

[0008] Preferably, the sealing assembly includes a cover plate, a circular groove and a first spring, the circular groove and the first spring are both provided in two numbers, the cover plate is slidably provided inside the strip groove, a gap is provided between the cover plate and the side wall of the strip groove, the circular groove is provided on a side of the cover plate facing the air outlet, the two circular grooves are respectively distributed at both ends of the cover plate, the first spring is located inside the circular groove, one end of the first spring is fixedly connected to the inside of the circular groove, and the other end of the first spring is fixedly connected to the bottom of the strip groove.

[0009] Preferably, the upper surface of the operating table is fixedly connected to a pump body, one of the first rotating tubes is connected to a first air duct, and a square groove for the second air duct to slide is opened on the same side column, and the end of the first air duct away from the first rotating tube is connected to the air inlet end of the pump body, and one of the second rotating tubes is connected to a second air duct, and the end of the second air duct away from the second rotating tube is connected to the air inlet end of the pump body.

[0010] Preferably, both ends of the upper surface of the operating table are fixedly connected with support plates, the sides of the two support plates close to each other are fixedly connected with electric push rods, the ends of the electric push rods away from the support plates are fixedly connected with U-shaped frames, and rollers are rotatably connected inside the U-shaped frame.

[0011] Technical effects and advantages of the utility model:

[0012] 1. When the substrate passes through the first pressing cylinder and the second pressing cylinder, the slider is driven to slide upward inside the slide groove and squeeze the second spring to contract, and the return elastic force of the second spring makes the substrate fit tightly between the first pressing cylinder and the second pressing cylinder. The magnetron sputtering coating equipment is winding the substrate, and the first pressing cylinder and the second pressing cylinder are respectively attached to the upper and lower surfaces of the substrate, and rotate by the friction force with the substrate to prevent the substrate from folding, thereby improving the efficiency of magnetron sputtering;

[0013] 2. The pump body absorbs dust and impurities on the upper surface of the substrate through the first air duct, the first pressure cylinder and its external grooves and air ports, and simultaneously absorbs dust and impurities on the lower surface of the substrate through the second air duct, the second pressure cylinder and its external grooves and air ports, thereby improving the effect of magnetron sputtering;

[0014] 3. Start the electric push rods at both ends to make the two rollers fit on both sides of the substrate respectively to prevent deviation and further improve the efficiency of magnetron sputtering. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a structural schematic diagram of a one-view perspective of a sponge magnetron sputtering auxiliary installation mechanism for producing nickel foam according to the utility model.

[0016] Figure 2 This is a structural schematic diagram from another perspective of the sponge magnetron sputtering auxiliary installation mechanism for producing nickel foam in the utility model.

[0017] Figure 3 This is a schematic diagram of the first compression cylinder, cover plate and air outlet structure of the utility model.

[0018] Figure 4 For this utility model Figure 3 Enlarged structural diagram at A in the middle.

[0019] Figure 5 This is a schematic diagram of the structure of the column, slide groove and slider of the utility model.

[0020] In the figure: 1. operating table; 2. first pressing cylinder; 3. second pressing cylinder; 4. first rotating tube; 5. second rotating tube; 6. cover plate; 7. strip groove; 8. round groove; 9. first spring; 10. air outlet; 11. bracket; 12. column; 13. slide groove; 14. slider; 15. telescopic rod; 16. second spring; 17. first air duct; 18. second air duct; 19. pump body; 20. support plate; 21. electric push rod; 22. U-shaped frame; 23. roller. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clarify the technical solutions in the embodiments of the utility model; it is completely described. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] The utility model provides Figure 1-Figure 5The auxiliary installation mechanism for magnetron sputtering of foam nickel production shown includes an operating table 1, and a bracket 11 is fixedly connected to the upper surface of the operating table 1, and the bracket 11 is a U-shaped structure. Both ends of the upper surface of the bracket 11 are fixedly connected to the columns 12, and the first pressing cylinder 2 and the second pressing cylinder 3 are arranged between the two columns 12, and the first pressing cylinder 2 is located above the second pressing cylinder 3. When used specifically, the substrate passes between the first pressing cylinder 2 and the second pressing cylinder 3, and the magnetron sputtering coating equipment is winding the substrate, and the first pressing cylinder 2 and the second pressing cylinder 3 are rotated by the friction force with the substrate. Both ends of the second pressing cylinder 3 are rotatably connected to the second rotating tube 5, and the second rotating tube 5 is connected to the second pressing cylinder 3, and the end of the second rotating tube 5 away from the second pressing cylinder 3 is fixedly connected to the column 12. Both ends of the first pressing cylinder 2 are rotatably connected to the first rotating tube 4, and the first rotating tube 4 is connected to the first pressing cylinder 2. A slide groove 13 is provided on the side of the two columns 12 close to each other, and an extrusion assembly that cooperates with the first rotating tube 4 is provided inside the slide groove 13. The extrusion assembly makes the first pressing cylinder 2 fit on the upper surface of the substrate. A groove 7 is provided on the outer wall of the first pressing cylinder 2 and the second pressing cylinder 3, and an air port 10 is provided at the bottom of the groove 7. The air port 10 is provided to absorb dust and impurities on the outer surface of the substrate to improve the efficiency of magnetron sputtering. A sealing assembly is provided inside the groove 7.

[0023] During operation, when the substrate passes between the first pressing cylinder 2 and the second pressing cylinder 3, the slider 14 is driven to slide upward inside the slide groove 13 and squeeze the second spring 16 to contract, and the return elastic force of the second spring 16 makes the substrate fit tightly between the first pressing cylinder 2 and the second pressing cylinder 3. When the magnetron sputtering coating equipment is winding the substrate, the first pressing cylinder 2 and the second pressing cylinder 3 are respectively attached to the upper and lower surfaces of the substrate, and rotate by relying on the friction force with the substrate to prevent the substrate from folding, thereby improving the efficiency of magnetron sputtering.

[0024] In a specific configuration, the extrusion assembly includes a slider 14, a telescopic rod 15, and a second spring 16. The slider 14 is slidably connected to the inside of the slide 13, and one end of the first rotating tube 4 away from the first pressing cylinder 2 is fixedly connected to the slider 14. One end of the telescopic rod 15 is fixedly connected to the upper surface of the slider 14, and the other end of the telescopic rod 15 is fixedly connected to the top of the slide 13. The second spring 16 is sleeved on the outside of the telescopic rod 15, one end of the second spring 16 is fixedly connected to the upper surface of the slider 14, and the other end of the second spring 16 is fixedly connected to the top of the slide 13.

[0025] Specifically, when setting, the sealing assembly includes a cover plate 6, a circular groove 8 and a first spring 9, and the circular groove 8 and the first spring 9 are both set in two. The cover plate 6 is slidably set inside the strip groove 7, and a gap is set between the cover plate 6 and the side wall of the strip groove 7. During the vacuuming operation, the dust and impurities on the outer surface of the substrate enter the strip groove 7 through the gap and are then sucked away through the air outlet 10. The circular groove 8 is opened on the side of the cover plate 6 facing the air outlet 10, and the two circular grooves 8 are respectively distributed at both ends of the cover plate 6. The first spring 9 is located inside the circular groove 8, one end of the first spring 9 is fixedly connected to the inside of the circular groove 8, and the other end of the first spring 9 is fixedly connected to the bottom of the strip groove 7.

[0026] During operation, when the dust and impurities on the outer surface of the substrate are sucked away, when the cover plate 6 is attached to the outer surface of the substrate, the first spring 9 is squeezed to contract, and then the cover plate 6 is retracted into the interior of the strip groove 7, while covering the air outlet 10 in the corresponding strip groove 7, and only the anti-bending effect is performed to prevent the substrate from being adsorbed in the strip groove 7, while the air outlets 10 of the strip grooves 7 on both sides are still in an open state, so as to suck away the dust and impurities on the outer surface of the substrate.

[0027] Furthermore, the pump body 19 is started, and the pump body 19 absorbs dust and impurities on the upper surface of the substrate through the first air duct 17, the first pressure cylinder 2 and the external grooves 7 and the air outlet 10 thereof, and simultaneously absorbs dust and impurities on the lower surface of the substrate through the second air duct 18, the second pressure cylinder 3 and the external grooves 7 and the air outlet 10 thereof, thereby improving the effect of magnetron sputtering.

[0028] The upper surface of the operating table 1 is fixedly connected with a pump body 19, one of the first rotating pipes 4 is connected with a first air duct 17, and a square groove for the second air duct 18 to slide is opened on the same side column 12, referring to Figure 2 As shown, the square groove is provided so that when the slider 14 slides inside the slide groove 13, the first air duct 17 and the first rotating tube 4 are driven to move up and down synchronously, without affecting the pump body 19 to pump through the first air duct 17 and the first rotating tube 4. The end of the first air duct 17 away from the first rotating tube 4 is connected to the air inlet end of the pump body 19. One of the second rotating tubes 5 is connected to the second air duct 18, and the end of the second air duct 18 away from the second rotating tube 5 is connected to the air inlet end of the pump body 19.

[0029] Both ends of the upper surface of the operating table 1 are fixedly connected with support plates 20, and the side of the two support plates 20 close to each other is fixedly connected with an electric push rod 21. The end of the electric push rod 21 away from the support plate 20 is fixedly connected with a U-shaped frame 22, and the inside of the U-shaped frame 22 is rotatably connected with a roller 23.

[0030] During operation, the electric push rods 21 at both ends are started to make the two rollers 23 respectively fit on both sides of the substrate to prevent the occurrence of deviation and further improve the efficiency of magnetron sputtering.

Claims

1. A sponge magnetron sputtering auxiliary installation mechanism for producing nickel foam, comprising an operating table (1), characterized in that: The upper surface of the operating table (1) is fixedly connected to a bracket (11), the bracket (11) is in a U-shaped structure, both ends of the upper surface of the bracket (11) are fixedly connected to columns (12), a first pressing cylinder (2) and a second pressing cylinder (3) are arranged between the two columns (12), the first pressing cylinder (2) is located above the second pressing cylinder (3), both ends of the second pressing cylinder (3) are rotatably connected to a second rotating tube (5), the second rotating tube (5) is connected to the second pressing cylinder (3), and one end of the second rotating tube (5) away from the second pressing cylinder (3) is fixedly connected to the second pressing cylinder (3). The first compression cylinder (2) is fixedly connected to a column (12); both ends of the first compression cylinder (2) are rotatably connected to a first rotating tube (4); the first rotating tube (4) is communicated with the first compression cylinder (2); a slide groove (13) is provided on a side of the two columns (12) close to each other; an extrusion component cooperating with the first rotating tube (4) is provided inside the slide groove (13); a strip groove (7) is provided on the outer wall of the first compression cylinder (2) and the second compression cylinder (3); an air outlet (10) is provided at the bottom of the strip groove (7); a sealing component is provided inside the strip groove (7).

2. The auxiliary installation mechanism for sponge magnetron sputtering in the production of nickel foam according to claim 1, characterized in that: The extrusion assembly comprises a slider (14), a telescopic rod (15) and a second spring (16); the slider (14) is slidably connected to the inside of the slide groove (13); one end of the first rotating tube (4) away from the first pressing cylinder (2) is fixedly connected to the slider (14); one end of the telescopic rod (15) is fixedly connected to the upper surface of the slider (14); the other end of the telescopic rod (15) is fixedly connected to the top of the slide groove (13); the second spring (16) is sleeved on the outside of the telescopic rod (15); one end of the second spring (16) is fixedly connected to the upper surface of the slider (14); and the other end of the second spring (16) is fixedly connected to the top of the slide groove (13).

3. The auxiliary installation mechanism for sponge magnetron sputtering in the production of nickel foam according to claim 2, characterized in that: The sealing assembly comprises a cover plate (6), a circular groove (8) and a first spring (9), wherein the circular groove (8) and the first spring (9) are both provided in two numbers, the cover plate (6) is slidably provided inside the strip groove (7), a gap is provided between the side walls of the cover plate (6) and the strip groove (7), the circular groove (8) is provided on a surface of the cover plate (6) facing the air outlet (10), the two circular grooves (8) are respectively distributed at two ends of the cover plate (6), the first spring (9) is located inside the circular groove (8), one end of the first spring (9) is fixedly connected inside the circular groove (8), and the other end of the first spring (9) is fixedly connected to the bottom of the strip groove (7).

4. The auxiliary installation mechanism for sponge magnetron sputtering in the production of nickel foam according to claim 1, characterized in that: The upper surface of the operating table (1) is fixedly connected to a pump body (19); one of the first rotating tubes (4) is connected to a first air duct (17); and a square groove for sliding a second air duct (18) is provided on the same side column (12); an end of the first air duct (17) away from the first rotating tube (4) is connected to an air inlet end of the pump body (19); one of the second rotating tubes (5) is connected to a second air duct (18); and an end of the second air duct (18) away from the second rotating tube (5) is connected to an air inlet end of the pump body (19).

5. The auxiliary installation mechanism for sponge magnetron sputtering in the production of nickel foam according to claim 1, characterized in that: Both ends of the upper surface of the operating table (1) are fixedly connected to support plates (20), the sides of the two support plates (20) close to each other are fixedly connected to electric push rods (21), the ends of the electric push rods (21) away from the support plates (20) are fixedly connected to a U-shaped frame (22), and the interior of the U-shaped frame (22) is rotatably connected to a roller (23).

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