Cooling device for heating cavity of InP crystal growing furnace

Abstract

The utility model relates to the technical field of InP crystal growth, and discloses a cooling device for a heating cavity of an InP crystal growing furnace, which comprises a working table and a cooling barrel, and further comprises a limiting plate arranged in the cooling barrel, one side of the limiting plate is fixedly connected with a sucking disc, and one side of the sucking disc is clamped with the inner wall of the cooling barrel; the adjusting mechanism is arranged at the top of the working table and used for conveniently adjusting the condensation effect and comprises a first conveying pipe communicated with one side of the cooling barrel, the condensation effect can be conveniently adjusted through the adjusting mechanism, and the situation that when the temperature in the heating cavity is not stable enough, the condensation effect cannot be adjusted in time is avoided; the utility model aims to solve the problems that an InP material is melted in an overheat environment and the crystal growth quality is influenced, and meanwhile, when one set of cooling device fails, a timely condensation effect is achieved to dissipate heat, so that the problem that the structural safety of equipment is influenced due to pressure rise in a heating cavity is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of InP crystal growth, in particular to a cooling device for a heating cavity of an InP crystal growth furnace. Background Art

[0002] A crystal growth furnace is a device specifically used to grow high-quality, single-crystal InP crystals. It is mainly used in the field of semiconductor manufacturing, especially in high-precision applications such as optoelectronic devices, solar cells, and photonic integrated circuits.

[0003] During the growth process of InP crystals, a chemical reaction at high temperature is required in the heating chamber to transform the InP crystals from solid to gas and control their growth direction and crystal structure. Therefore, a cooling device of the heating chamber of the growth furnace is required. However, the design structure of the cooling device of the heating chamber of the traditional growth furnace is relatively simple, which makes it inconvenient to adjust the condensation effect. As a result, when the temperature in the heating chamber is not stable enough, the condensation effect cannot be adjusted in time, which may cause the InP material to melt in an overheated environment and affect the quality of crystal growth. At the same time, high temperature may directly cause damage to the heating chamber itself, affecting the stability and service life of the equipment. In addition, when a set of cooling devices fails, there is no timely condensation effect to dissipate the heat, which may cause the pressure in the heating chamber to increase, thereby affecting the structural safety of the equipment. Utility Model Content

[0004] The utility model aims to provide a cooling device for a heating cavity of an InP crystal growth furnace to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above purpose, the utility model provides the following technical solution: a cooling device for a heating cavity of an InP crystal growth furnace, comprising a workbench and a cooling barrel, and also comprising:

[0006] A limit plate is arranged inside the cooling barrel, one side of the limit plate is fixedly connected to a suction cup, and one side of the suction cup is clamped with the inner wall of the cooling barrel;

[0007] An adjusting mechanism is arranged on the top of the workbench for adjusting the condensation effect, the adjusting mechanism includes a first delivery pipe connected to one side of the cooling barrel, one side of the cooling barrel is connected to a second delivery pipe, the outer side of the first delivery pipe is connected to multiple groups of first condensation plates, a first regulating valve is arranged on the outer side of the first delivery pipe, a second regulating valve is arranged on the outer side of the second delivery pipe, and the outer side of the second delivery pipe is connected to multiple groups of second condensation plates.

[0008] Preferably, a fixing frame is fixedly connected to the inner wall of the cooling barrel, a heating tube is clamped on the inner wall of the fixing frame, and a mounting block for limiting the heating tube is fixedly connected to one side of the fixing frame.

[0009] Preferably, a plurality of brackets are fixedly connected to the bottom of the workbench, and mounting rings are clamped on the outer sides of the brackets.

[0010] Preferably, a collecting frame is clamped on the outer side of the mounting ring, a moving wheel is provided at the bottom of the bracket, and a barrel cover is provided on the top of the cooling barrel.

[0011] Preferably, a water tank is fixedly connected to the top of the workbench, and a drainage pipe is connected to one side of the water tank.

[0012] Preferably, one end of the drainage pipe is connected to a water pump, the water outlet end of the water pump is connected to a mounting pipe, and a placement frame for placing crystals is provided inside the cooling barrel.

[0013] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0014] The utility model can adjust the condensation effect by setting an adjustment mechanism, so as to avoid the situation that when the temperature in the heating chamber is not stable enough, the condensation effect cannot be adjusted in time, causing the InP material to melt in an overheated environment and affecting the quality of crystal growth. At the same time, when a set of cooling devices fails, the heat is dissipated by the condensation effect in time, so as to avoid the pressure increase in the heating chamber, which in turn affects the structural safety of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A schematic diagram of the structure of a cooling device for a heating cavity of an InP crystal growth furnace provided by the utility model;

[0016] Figure 2 A schematic diagram of the structure of the adjustment mechanism provided by the utility model;

[0017] Figure 3 A schematic diagram of the structure of the workbench and cooling barrel provided by the utility model;

[0018] Figure 4 This is a schematic diagram of the cooling barrel and placement frame structure provided by the utility model.

[0019] In the figure: 1. workbench; 2. cooling barrel; 3. adjusting mechanism; 31. first delivery pipe; 32. second delivery pipe; 33. first condensation plate; 34. first regulating valve; 35. second regulating valve; 36. second condensation plate; 4. fixing frame; 5. heating pipe; 6. mounting block; 7. bracket; 8. mounting ring; 9. collecting frame; 10. moving wheel; 11. barrel cover; 12. water tank; 13. drainage pipe; 14. water pump; 15. mounting pipe; 16. limit plate; 17. suction cup; 18. placement frame. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] See also Figure 1-4 As shown, a cooling device for a heating chamber of an InP crystal growth furnace comprises a workbench 1 and a cooling barrel 2. By setting the workbench 1, the cooling barrel 2 can be easily fixed, and by setting the cooling barrel 2, the furnace can be easily cooled. A limiting plate 16 is arranged inside the cooling barrel 2, and by setting the limiting plate 16, a second condensing plate 36 can be easily limited. A suction cup 17 is fixedly connected to one side of the limiting plate 16. By setting the suction cup 17, the limiting plate 16 can be easily fixed, and one side of the suction cup 17 is clamped with the inner wall of the cooling barrel 2; an adjusting mechanism 3 is arranged on the top of the workbench 1 for adjusting the condensation effect, and the adjusting mechanism 3 comprises a first conveying pipe 31 connected to one side of the cooling barrel 2. By setting the first conveying pipe 31, In order to facilitate the transportation of the condensate, a second delivery pipe 32 is connected to one side of the cooling barrel 2. By setting the second delivery pipe 32, the condensate can be transported easily. The outer side of the first delivery pipe 31 is connected to multiple groups of first condensation plates 33. By setting the first condensation plates 33, the condensate can be condensed easily. A first regulating valve 34 is provided on the outer side of the first delivery pipe 31. By setting the first regulating valve 34, the first delivery pipe 31 can be adjusted easily. A second regulating valve 35 is provided on the outer side of the second delivery pipe 32. By setting the second regulating valve 35, the second delivery pipe 32 can be adjusted easily. The outer side of the second delivery pipe 32 is connected to multiple groups of second condensation plates 36. By setting the second condensation plates 36, the condensate can be condensed easily.

[0022] refer to Figure 2 and Figure 3As shown, the inner wall of the cooling barrel 2 is fixedly connected with a fixing frame 4, and the fixing frame 4 is provided to facilitate the clamping of the heating tube 5. The inner wall of the fixing frame 4 is clamped with the heating tube 5, and the heating tube 5 is provided to facilitate heating of the crystal growth. One side of the fixing frame 4 is fixedly connected with a mounting block 6 for limiting the heating tube 5, and the mounting block 6 is provided to facilitate limiting the heating tube 5; the bottom of the workbench 1 is fixedly connected with a plurality of groups of brackets 7, and the workbench 1 can be supported by providing the brackets 7. The outer side of the brackets 7 is clamped with a mounting ring 8, and the mounting ring 8 can facilitate the clamping of the collecting frame 9; the outer side of the mounting ring 8 is clamped with a collecting frame 9, and the collecting frame 9 can be provided to facilitate the collection of crystals. The bottom of the bracket 7 is provided with a moving wheel 10, and the moving wheel 10 can facilitate the movement of the equipment. The top of the cooling barrel 2 is provided with a barrel cover 11, and the cooling barrel 2 can be opened by providing the barrel cover 11.

[0023] refer to Figure 3 and Figure 4 As shown, a water tank 12 is fixedly connected to the top of the workbench 1. By setting the water tank 12, the condensate can be stored conveniently. A drainage pipe 13 is connected to one side of the water tank 12. By setting the drainage pipe 13, the condensate can be transported conveniently. One end of the drainage pipe 13 is connected to a water pump 14. By setting the water pump 14, the condensate can be extracted conveniently. The water outlet end of the water pump 14 is connected to a mounting pipe 15. By setting the mounting pipe 15, the condensate can be drained conveniently. A placement frame 18 for placing crystals is provided inside the cooling barrel 2. By setting the placement frame 18, the crystals can be placed conveniently.

[0024] Working principle: When in use, open the barrel cover 11 and put the crystal into the placement frame 18. At this time, turn on the heating tube 5 to grow the crystal. When it is necessary to adjust the condensation inside the cooling barrel 2, first turn on the water pump 14. The water pump 14 draws the condensate inside the water tank 12 into the drainage pipe 13, and then drains it into the installation pipe 15. Open the first regulating valve 34 to drain the condensate into the first condensation plate 33 to condense the cooling barrel 2. When it is necessary to increase the condensation effect, open the second regulating valve 35 to drain the liquid into the second condensation plate 36. At this time, a better condensation effect can be achieved.

[0025] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0026] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cooling device for a heating chamber of an InP crystal growth furnace, comprising a workbench (1) and a cooling barrel (2), characterized in that: Also includes: A limiting plate (16) is arranged inside the cooling barrel (2), one side of the limiting plate (16) is fixedly connected to a suction cup (17), and one side of the suction cup (17) is clamped with the inner wall of the cooling barrel (2); An adjusting mechanism (3) is arranged on the top of the workbench (1) for adjusting the condensation effect, the adjusting mechanism (3) comprising a first delivery pipe (31) connected to one side of the cooling barrel (2), a second delivery pipe (32) connected to one side of the cooling barrel (2), a plurality of first condensation plates (33) connected to the outer side of the first delivery pipe (31), a first regulating valve (34) arranged on the outer side of the first delivery pipe (31), a second regulating valve (35) arranged on the outer side of the second delivery pipe (32), and a plurality of second condensation plates (36) connected to the outer side of the second delivery pipe (32).

2. The cooling device for a heating chamber of an InP crystal growth furnace according to claim 1, characterized in that: The inner wall of the cooling barrel (2) is fixedly connected to a fixing frame (4), the inner wall of the fixing frame (4) is clamped with a heating tube (5), and one side of the fixing frame (4) is fixedly connected to a mounting block (6) for limiting the position of the heating tube (5).

3. The cooling device for a heating chamber of an InP crystal growth furnace according to claim 1, characterized in that: A plurality of brackets (7) are fixedly connected to the bottom of the workbench (1), and a mounting ring (8) is clamped on the outer side of the bracket (7).

4. The cooling device for a heating chamber of an InP crystal growth furnace according to claim 3, characterized in that: A collecting frame (9) is clamped on the outer side of the mounting ring (8), a moving wheel (10) is arranged at the bottom of the bracket (7), and a barrel cover (11) is arranged at the top of the cooling barrel (2).

5. The cooling device for a heating chamber of an InP crystal growth furnace according to claim 1, characterized in that: The top of the workbench (1) is fixedly connected to a water tank (12), and one side of the water tank (12) is connected to a drainage pipe (13).

6. The cooling device for the heating chamber of an InP crystal growth furnace according to claim 5, characterized in that: One end of the drainage pipe (13) is connected to a water pump (14), and the water outlet end of the water pump (14) is connected to a mounting pipe (15). A placement frame (18) for placing crystals is provided inside the cooling barrel (2).

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