Cooling device and graphite boat cooling system

Abstract

The utility model discloses a cooling device and a graphite boat cooling system, relates to the technical field of solar cells, and aims to solve the problems of poor heat dissipation and cooling effect, long cooling time and low heat dissipation and cooling efficiency of a heat dissipation mode in the prior art. The cooling device comprises a bearing frame, a cooling mechanism and a fan mechanism. The cooling mechanism and the fan mechanism are both arranged on the bearing frame, and the cooling mechanism and the fan mechanism are oppositely arranged in the height direction of the bearing frame. When a fan included in the fan mechanism is in the first working mode, the fan is used for blowing air around the cooling mechanism to the workpiece. And when a fan included in the fan mechanism is in the second working mode, the fan is used for pumping away heat around the workpiece. The utility model further provides a graphite boat cooling system. The graphite boat cooling system comprises a storage rack and the cooling device in the technical scheme. The storage rack is used for bearing the graphite boat, and the cooling device is arranged on the storage rack and used for cooling the graphite boat.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cells, in particular to a cooling device and a graphite boat cooling system. Background Art

[0002] In the production process of solar cells, during the coating process, the graphite boat taken out of the furnace tube needs to be sent to the storage rack of the cooling main machine for cooling. After the graphite boat is cooled to 45℃ or below, the boat moving mechanism sends the graphite boat to the automated machine for loading and unloading operations.

[0003] In the prior art, a cooling fan is generally used to blow air to dissipate heat from the graphite boat, but the cooling effect is poor, the cooling time is long, and the cooling efficiency is low. Utility Model Content

[0004] The utility model aims to provide a cooling device and a graphite boat cooling system, which are used to improve the heat dissipation and cooling effect, reduce the cooling time, and improve the heat dissipation and cooling efficiency.

[0005] In order to achieve the above-mentioned purpose, in a first aspect, the utility model provides a cooling device. The cooling device comprises: a carrier, a cooling mechanism and a fan mechanism. The cooling mechanism and the fan mechanism are both arranged on the carrier, and along the height direction of the carrier, the cooling mechanism and the fan mechanism are arranged opposite to each other. When the fan included in the fan mechanism is in a first working mode, the fan is used to blow the air around the cooling mechanism toward the workpiece. When the fan included in the fan mechanism is in a second working mode, the fan is used to extract the heat around the workpiece.

[0006] Compared with the prior art, in the cooling device provided by the utility model, since the cooling device includes a cooling mechanism, the cooling mechanism can not only conduct part of the heat at the workpiece to reduce the temperature of the workpiece surface. At the same time, the temperature of the air around the location of the cooling mechanism can be made lower than the temperature of the air in the area where the cooling mechanism is not set. Further, since the fan included in the fan mechanism is in the first working mode, the air around the cooling mechanism can be blown to the workpiece. Therefore, compared with the method of simply using a heat dissipation fan to blow air to dissipate heat to the graphite boat in the prior art, the fan in the first working mode can blow air with a lower temperature (for the convenience of description, it will be referred to as cold air later) to the workpiece. That is, compared with the prior art, the utility model adds cold air to blow to the workpiece. At this time, the workpiece (such as a graphite boat) can be further cooled and cooled to improve the heat dissipation and cooling effect of the workpiece. Further, since the fan can draw away the heat around the workpiece when it is in the second working mode, it can assist in cooling. It can be seen from this that by switching the fan between the first working mode and the second working mode, the cooling time can be further reduced and the heat dissipation and cooling efficiency of the workpiece can be improved.

[0007] In one implementation, when some fans included in the fan mechanism are in the first working mode and the others are in the second working mode, some fans are used to blow air around the cooling mechanism toward the workpiece, and the others are used to extract heat around the workpiece.

[0008] In one implementation, the time that the fan is in the first working mode is greater than the time that the fan is in the second working mode.

[0009] When the above technical solution is adopted, the workpiece can be cooled down quickly when the fan is in the first working mode, and can be used for auxiliary cooling when the fan is in the second working mode. Therefore, increasing the time when the fan is in the first working mode to be less than or equal to the time when the fan is in the second working mode can reduce the cooling time of the workpiece and improve the heat dissipation and cooling efficiency of the workpiece.

[0010] In one implementation, a ratio of a time period during which the fan is in the first working mode to a time period during which the fan is in the second working mode is greater than or equal to 2.5 and less than or equal to 12.

[0011] In one implementation, the fan is in the first working mode for a time period greater than or equal to 2 minutes and less than or equal to 4 minutes each time. At this time, cold air is blown toward the workpiece, causing the workpiece temperature to drop rapidly. Further, the fan is in the second working mode for a time period greater than or equal to 20 seconds and less than or equal to 45 seconds each time. Since a large amount of hot air is gathered above the workpiece, the hot air can be drawn away when the fan is in the second working mode to assist in cooling.

[0012] In one implementation, the fan mechanism includes: a bearing plate and a plurality of fans. The bearing plate has a plurality of hollow areas, and the bearing plate is arranged on a bearing frame. The plurality of fans are arranged on the bearing plate, and each fan covers a corresponding hollow area.

[0013] When the above technical solution is adopted, the above fan mechanism has a simple structure, is easy to manufacture, and is also easy to assemble and use, thereby improving work efficiency. Furthermore, since the fan mechanism includes multiple fans, in actual use, when multiple fans are in the first working mode at the same time, the total amount of cold air blown to the workpiece can be increased to accelerate the heat loss on the surface of the workpiece, thereby further improving the heat dissipation and cooling effect on the workpiece. When multiple fans are in the second working mode at the same time, the total heat around the workpiece drawn away by the fan can be increased to further improve the heat dissipation and cooling effect on the workpiece.

[0014] In one implementation, the cooling mechanism includes: a substrate and a cooling tube, wherein the substrate is disposed on a carrier. The cooling tube has a liquid inlet and a liquid outlet along the length direction of the cooling tube. The liquid inlet is used to introduce a cooling medium, and the liquid outlet is used to discharge the cooling medium. The cooling tube is disposed on the substrate.

[0015] In one implementation, the cooling mechanism includes: a substrate, an inlet pipe and an outlet pipe. The substrate is arranged on the carrier, the inlet pipe is arranged on the substrate, the inlet pipe has a first liquid inlet and a first liquid outlet, and the inlet pipe is used to pass the cooling medium. The outlet pipe is arranged on the substrate, the outlet pipe has a second liquid inlet and a second liquid outlet, and the outlet pipe is used to discharge the cooling medium. The second liquid inlet is connected to the first liquid outlet, the first liquid inlet is located on one side of the second liquid outlet, and the inlet pipe is arranged in parallel with the outlet pipe.

[0016] When the above technical solution is adopted, compared with the method of only setting one inlet pipe on the substrate, the total length of the cooling mechanism is increased, thereby increasing the total heat conducted out of the cooling mechanism. At this time, not only can the cooling mechanism further reduce the temperature of the workpiece surface, but also the total amount of cold air blown to the workpiece when the fan is in the first working mode can be increased to accelerate the heat dissipation of the workpiece surface.

[0017] In one implementation, the inlet pipe is one or more of a serpentine inlet pipe, a spiral inlet pipe, and a U-shaped inlet pipe. The outlet pipe is one or more of a serpentine outlet pipe, a spiral outlet pipe, and a U-shaped outlet pipe.

[0018] When the above technical solution is adopted, the shapes of the inlet pipe and the outlet pipe can be set according to the actual situation, and no specific limitation is made here. In this case, the cooling mechanism can be adapted to different application scenarios and its scope of application can be expanded. Furthermore, compared with the inlet pipe and the outlet pipe being both in a straight line shape, the total length of the cooling mechanism can be further increased to further increase the total heat conducted out of the cooling mechanism.

[0019] In one implementation, the cooling medium is any one of gas, water, deionized water, electronic fluoride liquid, and liquid metal.

[0020] When the above technical solution is adopted, different types of cooling media can be selected according to actual conditions, thereby increasing the selectivity of the cooling media. Based on this, the cooling mechanism can be further adapted to different application scenarios and its scope of application can be expanded.

[0021] In a second aspect, the utility model further provides a graphite boat cooling system. The graphite boat cooling system comprises a material storage rack and a cooling device as described in the above technical solution. The material storage rack is used to carry the graphite boat, and the cooling device is arranged on the material storage rack. Along the height direction of the material storage rack, the cooling device is located below the graphite boat and is used to cool the graphite boat.

[0022] Compared with the prior art, since the graphite boat cooling system includes the cooling device described in the above technical solution, and since the cooling device includes a cooling mechanism, the cooling mechanism can not only conduct part of the heat at the workpiece to reduce the temperature of the workpiece surface. At the same time, the temperature of the air around the location of the cooling mechanism can be lower than the temperature of the air in the area where the cooling mechanism is not set. Further, since the fan included in the fan mechanism is in the first working mode, the air around the cooling mechanism can be blown to the workpiece. Therefore, compared with the method of simply using a heat dissipation fan to blow air to dissipate heat to the graphite boat in the prior art, the fan in the first working mode can blow air with a lower temperature (for the convenience of description, it will be referred to as cold air later) to the workpiece. That is, compared with the prior art, the utility model adds cold air to blow to the workpiece. At this time, the workpiece (such as the graphite boat) can be further cooled to improve the heat dissipation and cooling effect of the workpiece. Further, since the fan is in the second working mode, the heat around the workpiece can be extracted to assist in cooling. It can be seen from this that by switching the fan between the first working mode and the second working mode, the cooling time can be further reduced and the heat dissipation and cooling efficiency of the workpiece can be improved.

[0023] In one implementation, the orthographic projection of the graphite boat on the fan mechanism is located inside the fan mechanism. At this time, it can not only be basically guaranteed or guaranteed that each position of the graphite boat facing the surface of the fan mechanism is subjected to the cold wind blown by the fan, so as to increase the cooling area of ​​the graphite boat, thereby improving the heat dissipation and cooling efficiency of the graphite boat. At the same time, it can also be basically guaranteed or guaranteed that the fan extracts the heat around the graphite boat, avoiding the low heat dissipation and cooling efficiency of the graphite boat due to the small coverage area of ​​the heat extracted by the fan mechanism.

[0024] Furthermore, the orthographic projection of the fan mechanism on the cooling mechanism is located inside the cooling mechanism. In this case, it can be basically ensured or ensured that when the fan blows air in a direction perpendicular to the workpiece, the cold air around the cooling mechanism can be blown onto the graphite boat, thereby avoiding the high temperature of the air blown to the graphite boat by the fan, so as to accelerate the heat loss on the surface of the graphite boat, thereby improving the heat dissipation and cooling effect and heat dissipation efficiency of the graphite boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0026] Figure 1 This is a schematic diagram of the structure of the cooling device in the embodiment of the utility model;

[0027] Figure 2 A perspective view of a cooling device in an embodiment of the utility model;

[0028] Figure 3 This is a structural schematic diagram of the fan mechanism in the embodiment of the utility model;

[0029] Figure 4 A top view of a fan in an embodiment of the utility model;

[0030] Figure 5 A top view of a wind turbine protection net in an embodiment of the utility model;

[0031] Figure 6 This is a top view of the fan and the fan protection net after they are combined in the embodiment of the utility model;

[0032] Figure 7 This is a schematic diagram of the structure of the cooling mechanism in the embodiment of the utility model;

[0033] Figure 8 It is a partial structural schematic diagram of the inlet pipe and the outlet pipe in the embodiment of the utility model;

[0034] Fig. 9 It is a schematic diagram of the structure of the inlet pipe in the embodiment of the utility model.

[0035] Reference numerals:

[0036] 1-carrier, 2-cooling mechanism, 20-substrate,

[0037] 21-inlet pipe, 22-outlet pipe, 23-first liquid inlet,

[0038] 24-second liquid outlet, 3-fan mechanism, 30-carrying plate,

[0039] 31-fan, 32-fan protection net, 4-reinforcement rod,

[0040] 5-Mounting holes. DETAILED DESCRIPTION

[0041] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0042] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0043] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. The meaning of "several" is one or more, unless otherwise clearly and specifically defined.

[0044] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0045] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0046] The production process of photovoltaic cells mainly includes texturing of the original silicon wafer, diffusion, making SE (selective emitter), oxidation, making PSG (phosphorosilicate glass), alkali polishing, annealing, ALD (atomic layer deposition), front passivation, back passivation, post-laser, screen printing, and sorting. In the front and back passivation coating process, the graphite boat that has been processed by the PE machine furnace tube needs to be cooled and sent to the automatic machine for loading and unloading.

[0047] Specifically, during the coating process, the graphite boat taken out of the furnace tube needs to be sent to the material storage rack of the cooling main machine for cooling. After the graphite boat is cooled to 45°C or below, the boat moving mechanism sends the graphite boat to the automated machine for loading and unloading operations.

[0048] In the prior art, a cooling fan is generally used to blow air to dissipate heat from the graphite boat, but the cooling effect is poor, the cooling time is long, and the cooling efficiency is low.

[0049] In order to solve the above technical problems, in the first aspect, the present utility model provides a cooling device. Figure 1 and Figure 2 The cooling device comprises: a carrier frame 1, a cooling mechanism 2 and a fan mechanism 3. The cooling mechanism 2 and the fan mechanism 3 are both arranged on the carrier frame 1, and the cooling mechanism 2 and the fan mechanism 3 are arranged opposite to each other along the height direction of the carrier frame 1. When the fan 31 included in the fan mechanism 3 is in the first working mode, the fan 31 is used to blow the air around the cooling mechanism 2 toward the workpiece. When the fan 31 included in the fan mechanism 3 is in the second working mode, the fan 31 is used to extract the heat around the workpiece.

[0050] The shape, material, thickness, and thermal conductivity of the above-mentioned carrier 1 can be set according to actual conditions, and are not specifically limited here. In an embodiment of the utility model, the above-mentioned carrier 1 is a rectangular frame, which has a storage space for placing the cooling mechanism 2. Furthermore, the above-mentioned workpiece can be a graphite boat, a silicon wafer or other structure, which is not specifically limited here. In other words, in addition to the need for heat dissipation and cooling in the production process of the above-mentioned photovoltaic cells, other high-temperature products also require cooling treatment. Therefore, the cooling device provided in the embodiment of the utility model can be applied to photovoltaic cells and can also be applied to other high-temperature products. For example, heat dissipation of products in high-temperature processes, cooling by refrigerators, and heat dissipation of laminated glass assemblies in laminators in battery assembly processes.

[0051] See also Figure 1 and Figure 2 In the cooling device provided by the embodiment of the utility model, since the cooling device includes a cooling mechanism 2, the cooling mechanism 2 can not only conduct part of the heat at the workpiece to reduce the temperature of the workpiece surface. At the same time, the temperature of the air around the location of the cooling mechanism 2 can be made lower than the temperature of the air in the area where the cooling mechanism 2 is not set. Further, since the fan included in the fan mechanism 3 is in the first working mode, the air around the cooling mechanism 2 can be blown to the workpiece. Therefore, compared with the method of simply using a heat dissipation fan to blow air to dissipate heat to the graphite boat in the prior art, the fan in the first working mode can blow air with a lower temperature (for the convenience of description, it will be referred to as cold air later) to the workpiece. That is, compared with the prior art, the embodiment of the utility model adds cold air to blow to the workpiece. At this time, the workpiece (such as a graphite boat) can be further cooled to improve the heat dissipation and cooling effect of the workpiece. Further, since the fan can draw away the heat around the workpiece when it is in the second working mode, it can assist in cooling. It can be seen from this that by switching the fan between the first working mode and the second working mode, the cooling time can be further reduced and the heat dissipation and cooling efficiency of the workpiece can be improved.

[0052] As a possible implementation, when some fans included in the fan mechanism are in the first working mode and the rest are in the second working mode, some fans are used to blow air around the cooling mechanism toward the workpiece, and the rest are used to extract heat around the workpiece.

[0053] As a possible implementation, see Figure 3 and Figure 4 The fan mechanism 3 includes: a carrier plate 30 and a plurality of fans 31. The carrier plate 30 has a plurality of hollow areas, and the carrier plate 30 is disposed on the carrier frame 1. The plurality of fans 31 are disposed on the carrier plate 30, and each fan 31 covers a corresponding hollow area. Exemplarily, the fan may be a 220V AC fan.

[0054] When the above technical solution is adopted, the above-mentioned fan mechanism 3 has a simple structure, is easy to manufacture, and is also easy to assemble and use, thereby improving work efficiency. Furthermore, since the fan mechanism 3 includes multiple fans 31, in actual use, when multiple fans 31 are in the first working mode at the same time, the total amount of cold air blown to the workpiece can be increased to accelerate the heat loss on the surface of the workpiece, thereby further improving the heat dissipation and cooling effect on the workpiece. When multiple fans 31 are in the second working mode at the same time, the total heat around the workpiece drawn away by the fan 31 can be increased to further improve the heat dissipation and cooling effect on the workpiece.

[0055] In an alternative approach, see Figure 3 , a plurality of fans 31 are distributed on the carrier plate 30 in a rectangular array, and correspondingly, the carrier plate 30 has a plurality of hollow areas distributed in a rectangular array. It should be understood that the specific number of the above fans can be set according to actual conditions and is not specifically limited here. For example, the fan mechanism 3 includes 16 fans, and each row of 8 fans is a row.

[0056] In an optional manner, the plane where the fan mechanism 3 is located is parallel to the plane where the cooling mechanism 2 is located.

[0057] Under the condition of ensuring the normal operation of the cooling device, the fan mechanism 3 and the cooling mechanism 2 can be in contact or spaced apart. The smaller the distance between the fan mechanism 3 and the cooling mechanism 2, the better the cooling effect of the cooling device.

[0058] Exemplarily, when the fan mechanism 3 and the cooling mechanism 2 are opposite and spaced apart, the distance between the fan mechanism 3 and the cooling mechanism 2 is greater than or equal to 4 cm and less than or equal to 5 cm. For example, the distance may be 4 cm, 4.2 cm, 4.5 cm, 4.7 cm, 4.9 cm or 5 cm, etc.

[0059] In an alternative approach, see Figures 3 to 6 The fan mechanism 3 may further include a fan protection net 32 ​​, which is covered on the fan 31 .

[0060] There are various ways to control the fan in the first working mode and the second working mode. The following describes two possible implementation methods as examples. It should be understood that the following description is only for understanding and is not used for specific limitation.

[0061] Example 1: The fan includes a housing, fan blades and a frequency converter. The fan blades are arranged in the housing, and the frequency converter is electrically connected to the fan blades. In actual use, the frequency converter is controlled to control the rotation direction of the fan blades in the housing. As for the specific method of the frequency converter controlling the rotation direction of the fan blades in the housing, please refer to the prior art and no specific limitation is made here. For example, when the fan is in the first working mode, the frequency converter controls the fan blades to rotate clockwise in the housing. When the fan is in the second working mode, the frequency converter controls the fan blades to rotate counterclockwise in the housing.

[0062] Example 2: The fan includes a housing, a fan blade and a relay. The fan blade is arranged in the housing, and the relay is electrically connected to the fan blade. In actual use, the rotation direction of the fan blade in the housing is controlled by controlling the relay. As for the specific method of controlling the rotation direction of the fan blade in the housing by the relay, please refer to the prior art, which is not specifically limited here. For example, when the fan is in the first working mode, the relay controls the fan blade to rotate clockwise in the housing. When the fan is in the second working mode, the relay controls the fan blade to rotate counterclockwise in the housing. The voltage of the above relay can be 24V.

[0063] As a possible implementation manner, the time that the fan is in the first working mode is greater than the time that the fan is in the second working mode.

[0064] Since the fan can quickly cool down the workpiece when it is in the first working mode, and can assist in cooling down when it is in the second working mode, increasing the time the fan is in the first working mode to be less than or equal to the time the fan is in the second working mode can reduce the cooling time of the workpiece and improve the heat dissipation and cooling efficiency of the workpiece.

[0065] In an optional manner, the ratio of the time the fan is in the first working mode to the time the fan is in the second working mode is greater than or equal to 2.5 and less than or equal to 12. For example, the ratio may be 2.5, 3, 5, 8, 9, 10, 11 or 12, etc.

[0066] As a possible implementation, the time that the fan is in the first working mode each time is greater than or equal to 2 minutes and less than or equal to 4 minutes. For example, the time that the fan is in the first working mode each time can be 2 minutes, 2.5 minutes, 3 minutes, 3.2 minutes, 3.8 minutes or 4 minutes, etc. At this time, the cold air is blown to the workpiece, so that the temperature of the workpiece is quickly reduced. Further, the time that the fan is in the second working mode each time is greater than or equal to 20 seconds and less than or equal to 45 seconds. For example, the time that the fan is in the second working mode each time can be 20 seconds, 26 seconds, 30 seconds, 35 seconds, 38 seconds, 40 seconds or 45 seconds, etc. Since a large amount of hot air is gathered above the workpiece, the hot air can be drawn away when the fan is in the second working mode to assist in cooling. For example, the time that the fan is in the first working mode once is 2 minutes, and the time that the fan is in the second working mode is 30 seconds.

[0067] Exemplarily, the fan is in the first working mode once and the second working mode once as a cycle. In actual use, the fan works in a cycle 2, 3 or more times. Further, in each cycle, the time the fan is in the first working mode once is greater than or equal to 2 minutes and less than or equal to 4 minutes. The time the fan is in the second working mode is greater than or equal to 20 seconds and less than or equal to 45 seconds.

[0068] As a possible implementation, see Figure 1 and Figure 2 The cooling device may further include a reinforcing rod 4. Along the length direction of the reinforcing rod 4, both ends of the reinforcing rod 4 are respectively arranged on the rectangular parallelepiped support frame, for reinforcing the support frame 1 to ensure the stability and firmness of the support frame 1. Exemplarily, the reinforcing rod 4 may abut against the support plate 30.

[0069] As a possible implementation, the cooling mechanism may include: a substrate and a cooling tube, and the substrate is disposed on a carrier. The cooling tube has an inlet and an outlet along the length direction of the cooling tube. The inlet is used to introduce a cooling medium, and the outlet is used to discharge the cooling medium, and the cooling tube is disposed on the substrate. It should be understood that when the cooling medium enters the inlet, the initial temperature of the cooling medium is lower than the temperature of the workpiece (for example, the temperature of the graphite boat is 520°C). In the actual working process, the temperature of the cooling medium gradually increases, and when the cooling medium is discharged from the outlet, the cooling medium conducts and dissipates most of the heat of the workpiece to reduce the temperature of the workpiece surface.

[0070] In an optional manner, the cooling tube may be one or more of a serpentine cooling tube, a spiral cooling tube, and a U-shaped cooling tube. In this case, the cooling mechanism is adapted to different application scenarios and its scope of application is expanded.

[0071] In an optional manner, the cooling medium can be any one of gas, water, deionized water, electronic fluoride liquid, and liquid metal. At this time, different types of cooling media can be selected according to actual conditions, which increases the selectivity of the cooling medium. Based on this, the cooling mechanism can be further adapted to different application scenarios and its scope of application can be expanded.

[0072] As another possible implementation, see Figure 7 and Figure 8 The cooling mechanism 2 may include: a substrate 20, an inlet pipe 21 and an outlet pipe 22. The substrate 20 is disposed on the carrier 1, and the inlet pipe 21 and the outlet pipe 22 are both disposed on the substrate 20. Exemplarily, along the length direction of the substrate 20, both ends of the substrate 20 are disposed on the wide side or the high side of the rectangular carrier 1, respectively.

[0073] The inlet pipe 21 has a first liquid inlet 23 and a first liquid outlet, and the inlet pipe 21 is used to pass the cooling medium. The outlet pipe 22 has a second liquid inlet and a second liquid outlet 24, and the outlet pipe 22 is used to discharge the cooling medium. The second liquid inlet is connected to the first liquid outlet, the first liquid inlet 23 is located on one side of the second liquid outlet 24, and the inlet pipe 21 is parallel to the outlet pipe 22. In the embodiment of the utility model, the inlet pipe 21 is parallel to the outlet pipe 22 and is spaced apart.

[0074] When the above technical solution is adopted, compared with the method of only setting an inlet pipe 21 on the substrate 20, the total length of the cooling mechanism 2 is increased, thereby increasing the total heat conducted out by the cooling mechanism 2. At this time, not only can the cooling mechanism 2 further reduce the temperature of the workpiece surface, but also the total amount of cold air blown to the workpiece when the fan is in the first working mode can be increased to accelerate the heat loss on the workpiece surface. It should be understood that when the cooling medium enters the first liquid inlet 23, the initial temperature of the cooling medium is lower than the temperature of the workpiece (for example, the temperature of the graphite boat is 520°C). In the actual working process, the temperature of the cooling medium gradually increases. When the cooling medium is discharged from the second liquid outlet 24, the cooling medium conducts and dissipates most of the heat of the workpiece to reduce the temperature of the workpiece surface.

[0075] In an alternative approach, see Figures 7 to 9 The inlet pipe 21 may be one or more of a serpentine inlet pipe, a spiral inlet pipe, and a U-shaped inlet pipe. The outlet pipe 22 may be one or more of a serpentine outlet pipe, a spiral outlet pipe, and a U-shaped outlet pipe.

[0076] When the above technical solution is adopted, the shapes of the inlet pipe 21 and the outlet pipe 22 can be set according to the actual situation, and no specific limitation is made here. In this case, the cooling mechanism 2 can be adapted to different application scenarios and its scope of application can be expanded. Furthermore, compared with the inlet pipe 21 and the outlet pipe 22 being both in a straight line shape, the total length of the cooling mechanism 2 can be further increased to further increase the total heat conducted out of the cooling mechanism 2.

[0077] Exemplarily, the shape of the inlet pipe 21 and the shape of the liquid outlet pipe are the same as serpentine, and the inlet pipe 21 and the liquid outlet pipe are arranged at equal intervals at all locations.

[0078] In an alternative approach, see Figure 3 and Figure 4 The cooling medium can be any one of gas, water, deionized water, electronic fluoride liquid, and liquid metal. At this time, different types of cooling media can be selected according to actual conditions, which increases the selectivity of the cooling medium. Based on this, the cooling mechanism can be further adapted to different application scenarios and expand its scope of application.

[0079] In summary, the use of the cooling device of the embodiment of the utility model can achieve better cooling effect of the workpiece (graphite boat), uniform heat dissipation, short cooling time, and improve the production capacity of a single coating host.

[0080] In a second aspect, the present invention also provides a graphite boat cooling system. The graphite boat cooling system includes a storage rack and a cooling device as described in the above technical solution. The storage rack is used to carry the graphite boat, and the cooling device is arranged on the storage rack. Along the height direction of the storage rack, the cooling device is located below the graphite boat. For example, see Figure 2 The left and right sides of the above-mentioned carrier, substrate and carrier plate are provided with mounting holes 5 to facilitate the installation of the cooling device on the storage rack for cooling the graphite boat.

[0081] Since the graphite boat cooling system includes the cooling device described in the above technical solution, and since the cooling device includes the cooling mechanism 2, the cooling mechanism 2 can not only conduct part of the heat at the workpiece to reduce the temperature of the workpiece surface. At the same time, the temperature of the air around the location of the cooling mechanism 2 can be lower than the temperature of the air in the area where the cooling mechanism 2 is not set. Further, since the fan included in the fan mechanism 3 is in the first working mode, the air around the cooling mechanism 2 can be blown to the workpiece. Therefore, compared with the method of simply using a heat dissipation fan to blow air and dissipate heat to the graphite boat in the prior art, the fan in the first working mode can blow air with a lower temperature (for the convenience of description, it will be referred to as cold air later) to the workpiece. That is, compared with the prior art, the embodiment of the utility model adds cold air to blow to the workpiece. At this time, the workpiece (such as a graphite boat) can be further cooled to improve the heat dissipation and cooling effect of the workpiece. Further, since the fan is in the second working mode, the heat around the workpiece can be extracted to assist in cooling. It can be seen from this that by switching the fan between the first working mode and the second working mode, the cooling time can be further reduced and the heat dissipation and cooling efficiency of the workpiece can be improved.

[0082] In actual use, the cooling device is provided with a side of the fan mechanism 3 facing the graphite boat, the fan mechanism 3 is located below the graphite boat, and the cooling mechanism 2 is located below the fan mechanism 3 .

[0083] As a possible implementation, see Figure 1 and Figure 2 , the orthographic projection of the graphite boat on the fan mechanism 3 is located inside the fan mechanism 3. At this time, it can not only basically guarantee or ensure that each position of the graphite boat facing the surface of the fan mechanism 3 is subjected to the cold wind blown by the fan, so as to increase the cooling area of ​​the graphite boat, and thus improve the heat dissipation and cooling efficiency of the graphite boat. At the same time, it can also basically guarantee or ensure that the fan extracts the heat around the graphite boat, avoiding the low heat dissipation and cooling efficiency of the graphite boat due to the small coverage area of ​​the heat extracted by the fan mechanism 3. That is, the uniformity of heat dissipation can be improved, the cooling time can be shortened, and the cooling effect can be improved.

[0084] Furthermore, the orthographic projection of the fan mechanism 3 on the cooling mechanism 2 is located inside the cooling mechanism 2. At this time, it can be basically ensured or ensured that when the fan blows air in a direction perpendicular to the workpiece, the cold air around the cooling mechanism 2 can be blown onto the graphite boat, avoiding the high temperature of the air blown to the graphite boat by the fan, so as to accelerate the heat loss on the surface of the graphite boat, thereby improving the heat dissipation and cooling effect and heat dissipation efficiency of the graphite boat.

[0085] Specifically, by using the cooling device to cool the graphite boat, the cooling time can be shortened from the original 16 minutes to 12 minutes, and the surface temperature of the graphite boat can be reduced to 45° C. or even lower, which greatly improves the machine production capacity.

[0086] In summary, the graphite boat can be prevented from being overheated, thereby reducing or eliminating the risk of wafer warping and falling in the graphite boat, and reducing the output ratio of defective products. Furthermore, it can also avoid the loss of suction cup tooling when the graphite boat with a high temperature enters the automated machine to insert and remove wafers due to uneven heat dissipation of the graphite boat.

[0087] The following describes the method of using the cooling device by taking a possible implementation as an example. It should be understood that the following description is only for understanding and is not intended to be a specific limitation.

[0088] See also Figures 1 to 9 The high-temperature graphite boat coming out of the furnace tube of the coating machine is transported to the storage rack by a manipulator. When the boat feet of the graphite boat are pressed onto the graphite boat sensor on the storage rack, the cooling device starts to work. Then, the fan mechanism 3 in the cooling device controls the fan 31 to rotate counterclockwise or clockwise in the shell through the inverter, so that the fan 31 switches between the first working mode and the second working mode, thereby realizing the heat dissipation and cooling treatment of the high-temperature graphite boat. The fan is in the first working mode and the second working mode once as a cycle. In actual use, the fan cycles 3 times. When the graphite boat is cooled, the graphite boat is transported to the next station.

[0089] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.

[0090] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A cooling device, characterized in that: include: Carrying frame; A cooling mechanism, disposed on the carrier; A fan mechanism is arranged on the carrier frame; along the height direction of the carrier frame, the cooling mechanism and the fan mechanism are arranged opposite to each other; When the fan included in the fan mechanism is in a first working mode, the fan is used to blow air around the cooling mechanism toward the workpiece; When the fan included in the fan mechanism is in the second working mode, the fan is used to extract heat around the workpiece.

2. The cooling device according to claim 1, characterized in that: When some fans included in the fan mechanism are in the first working mode and the others are in the second working mode, some fans are used to blow air around the cooling mechanism toward the workpiece, and the others are used to extract heat around the workpiece.

3. The cooling device according to claim 1, characterized in that: The time during which the fan is in the first working mode is greater than the time during which the fan is in the second working mode.

4. The cooling device according to claim 1 or 3, characterized in that: A ratio of a time period during which the fan is in the first working mode to a time period during which the fan is in the second working mode is greater than or equal to 2.5 and less than or equal to 12.

5. The cooling device according to claim 1 or 3, characterized in that: The time that the fan is in the first working mode each time is greater than or equal to 2 minutes and less than or equal to 4 minutes; the time that the fan is in the second working mode each time is greater than or equal to 20 seconds and less than or equal to 45 seconds.

6. The cooling device according to claim 1, characterized in that: The fan mechanism comprises: A carrying plate having a plurality of hollow areas; the carrying plate is arranged on the carrying frame; A plurality of the fans are disposed on the supporting plate, and each of the fans covers a corresponding hollow area.

7. The cooling device according to claim 1, characterized in that: The cooling mechanism comprises: A substrate, disposed on the carrier; A cooling tube, along the length direction of the cooling tube, the cooling tube has a liquid inlet and a liquid outlet; the liquid inlet is used to allow the cooling medium to pass through, and the liquid outlet is used to discharge the cooling medium; the cooling tube is arranged on the substrate.

8. The cooling device according to claim 1, characterized in that: The cooling mechanism comprises: A substrate, disposed on the carrier; An inlet pipe is arranged on the substrate, and has a first liquid inlet and a first liquid outlet; the inlet pipe is used to introduce a cooling medium; A discharge pipe is arranged on the substrate, the discharge pipe has a second liquid inlet and a second liquid outlet; the discharge pipe is used to discharge the cooling medium; The second liquid inlet is communicated with the first liquid outlet; the first liquid inlet is located at one side of the second liquid outlet; the inlet pipe is distributed in parallel with the outlet pipe.

9. The cooling device according to claim 8, characterized in that: The inlet pipe is one or more of a serpentine inlet pipe, a spiral inlet pipe, and a U-shaped inlet pipe; the outlet pipe is one or more of a serpentine outlet pipe, a spiral outlet pipe, and a U-shaped outlet pipe; and / or, The cooling medium is any one of gas, water, deionized water, electronic fluoride liquid, and liquid metal.

10. A graphite boat cooling system, characterized in that: include: A storage rack for carrying graphite boats; The cooling device according to any one of claims 1 to 9 is arranged on the storage rack; along the height direction of the storage rack, the cooling device is located below the graphite boat and is used to cool the graphite boat.

11. The graphite boat cooling system according to claim 10, characterized in that: The orthographic projection of the graphite boat on the fan mechanism is located inside the fan mechanism; The orthographic projection of the fan mechanism on the cooling mechanism is located inside the cooling mechanism.

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