Positioning mechanism for ion implantation base

Abstract

The utility model provides a positioning mechanism for an ion implantation base, which comprises a transverse bearing assembly, a vertical bracket assembly, a low-position supporting assembly, a high-position supporting assembly, a switching supporting cushion assembly and an opening and closing driving assembly. By adopting the transverse bearing assembly, the vertical supporting assembly, the low-position supporting assembly, the high-position supporting assembly and the like, the stability of the whole mechanism is ensured, and equipment displacement or damage caused by equipment vibration or other external factors in the ion implantation process can be effectively prevented; the technical cavity assembly, the target disc supporting assembly, the target disc covering assembly and other key components are allowed to be conveniently mounted and dismounted, so that the equipment is very convenient to replace the technical cavity or maintain, and when the equipment function needs to be expanded or maintained, only a specific module needs to be operated, so that the equipment is very convenient to use. And the whole equipment does not need to be changed on a large scale, so that the maintenance cost and the expansion difficulty of the equipment are reduced.

Description

Technical Field

[0001] The utility model relates to integrated circuit production equipment, in particular to a positioning mechanism for an ion implantation base. Background Art

[0002] Patent document CN215266185U discloses an ion implanter base, which includes a base, a shockproof device and a pedestal. The shockproof device includes a first shockproof component, a second shockproof component, a first stopper, a second stopper, a first support rod, a second support rod, a mounting seat, a third shockproof component and a fourth shockproof component. The shockproof device is provided to realize the shockproof and shock-absorbing function, which can prevent the high-speed ion beam from causing a large impact on the bottom of the target disk and damage the base, thereby increasing the service life of the bottom of the target disk. However, this base adopts a fixed structure. When the position of the target disk needs to be adjusted, it is difficult to make adaptive changes, which affects the smooth progress of production. Therefore, it is necessary to optimize its structure to overcome the above-mentioned defects. Utility Model Content

[0003] The utility model aims to provide a positioning mechanism for an ion implantation base, so as to perform adaptive adjustment according to the position of a target disk and improve production efficiency.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] A positioning mechanism for an ion implantation base, comprising:

[0006] A transverse bearing assembly, which is assembled on the installation table through a connecting piece and has a bearing space inside;

[0007] A vertical support assembly, which is installed on the transverse bearing assembly and has a supporting space inside, and the transverse bearing assembly supports the vertical support assembly;

[0008] A low-position support assembly, which is installed on the vertical support assembly and has a support space inside, and the vertical support assembly supports the low-position support assembly;

[0009] A high-position support assembly, which is installed on the vertical support assembly and corresponds to the position of the low-position support assembly. Its height is greater than that of the low-position support assembly, and there is a support space inside it for installing the process chamber assembly. The high-position support assembly is supported by the vertical support assembly;

[0010] A transfer pad assembly is installed on the low-position support assembly, and has an assembly space for installing the target plate support assembly inside the transfer pad assembly, and the low-position support assembly supports the transfer pad assembly;

[0011] The opening and closing driving assembly is installed on the low-position supporting assembly, and has an assembly space for installing the target plate covering assembly inside. The opening and closing driving assembly is supported by the low-position supporting assembly, and the opening and closing driving assembly performs the opening and closing operations on the target plate covering assembly.

[0012] Specifically, the lateral bearing assembly includes:

[0013] A transverse bottom frame, which is formed by enclosing and connecting pipes and arranged in the transverse direction;

[0014] A group of load-bearing angle plates are provided, each of which is installed at the bottom of the transverse bottom frame. They are located at the corners of the transverse bottom frame. The load-bearing angle plates are used to strengthen the structure of the transverse bottom frame, and the load-bearing angle plates can be fixedly connected to the installation table by connecting bolts.

[0015] The vertical support assembly includes:

[0016] The vertical frame is formed by enclosing and connecting pipes and arranged vertically. It is installed on the top of the horizontal base frame and extends above the horizontal base frame. The top of the vertical frame has a low support surface and a high support surface. The height of the high support surface is greater than the height of the low support surface.

[0017] The low support assembly includes:

[0018] The low-position seat plate is arranged in the transverse direction and is installed on the low-position supporting surface of the vertical stand. The transfer support pad assembly and the opening and closing drive assembly are respectively installed on the top of the low-position seat plate.

[0019] The high support assembly includes:

[0020] The high-position seat plate is arranged in the transverse direction and is installed on the high-position supporting surface of the vertical stand. It is parallel to the low-position seat plate and arranged in a stepped manner. The process chamber is installed on the high-position seat plate.

[0021] The adapter pad assembly includes:

[0022] A pair of support blocks are provided, each support block is installed on the top of the low seat plate, arranged on both sides of the low seat plate and close to one end of the high seat plate, and the target plate support assembly is installed on the support blocks.

[0023] The opening and closing drive components include:

[0024] A driving cylinder is provided with a pair of driving cylinders, each driving cylinder is arranged on both sides of the low seat plate and away from one end of the high seat plate. The cylinder body of each driving cylinder is respectively installed on the top of the low seat plate through a hinge seat, and its piston rod extends above the low seat plate and engages with the target plate covering assembly. The target plate covering assembly is driven by the driving cylinder to perform opening and closing operations.

[0025] The advantages of the utility model are:

[0026] The positioning mechanism adopts a multi-layer support and bearing design, and adopts a horizontal bearing component, a vertical support component, a low-position support component and a high-position support component, etc., to ensure the stability of the entire mechanism, and can effectively prevent the equipment from being displaced or damaged due to equipment vibration or other external factors during the ion implantation process, and allows key components such as the process chamber component, the target plate support component and the target plate cover component to be conveniently installed and disassembled, making the equipment very convenient when replacing the process chamber or performing maintenance, thereby improving the equipment's utilization efficiency. When it is necessary to expand the equipment function or perform maintenance, it is only necessary to operate on a specific module without making large-scale changes to the entire equipment, thereby reducing the equipment's maintenance cost and expansion difficulty. It has the advantages of high stability, good flexibility, precise control, and easy expansion and maintenance, making it widely used in processes requiring high precision and high stability such as ion implantation. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural schematic diagram of a positioning mechanism for an ion implantation base proposed by the utility model;

[0028] Figure 2 is a side structural schematic diagram of the positioning mechanism;

[0029] Figure 3 1 is a schematic diagram of the front structure of the positioning mechanism;

[0030] Figure 4 It is a schematic diagram of the bottom structure of the positioning mechanism. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0032] like Figure 1 to Figure 4As shown, the positioning mechanism for the ion implantation base proposed by the utility model includes a transverse bearing assembly, a vertical support assembly, a low-position support assembly, a high-position support assembly, a transfer support assembly and an opening and closing drive assembly. The transverse bearing assembly is assembled on the mounting table through a connecting piece, and has a bearing space inside. The vertical support assembly is mounted on the transverse bearing assembly, and has a supporting space inside. The transverse bearing assembly carries the vertical support assembly. The low-position support assembly is mounted on the vertical support assembly, and has a supporting space inside. The low-position support assembly is supported by the vertical support assembly. The high-position support assembly is mounted on the vertical support assembly. The transfer pad assembly is mounted on the low-position support assembly and corresponds to the position of the low-position support assembly. Its height is greater than the height of the low-position support assembly. It has a supporting space inside for installing the process chamber assembly. The high-position support assembly is supported by the vertical support assembly. The transfer pad assembly is mounted on the low-position support assembly. It has an assembly space inside for installing the target plate support assembly. The transfer pad assembly is supported by the low-position support assembly. The opening and closing drive assembly is mounted on the low-position support assembly. It has an assembly space inside for installing the target plate covering assembly. The opening and closing drive assembly is supported by the low-position support assembly, and the target plate covering assembly is opened and closed by the opening and closing drive assembly.

[0033] In this embodiment, the transverse bearing assembly includes a transverse bottom frame 110 and a bearing angle plate 120. The transverse bottom frame is formed by enclosing and connecting pipes and arranged in the transverse direction. A group of bearing angle plates are provided, and each bearing angle plate is respectively installed at the bottom of the transverse bottom frame. They are respectively located at the corner positions of the transverse bottom frame. The bearing angle plates are used to strengthen the structure of the transverse bottom frame, and the bearing angle plates can be fixedly connected to the mounting table by connecting bolts.

[0034] The vertical support assembly includes a vertical frame 200, which is formed by enclosing and connecting pipes and arranged vertically. It is installed on the top of the horizontal base frame and extends above the horizontal base frame. The top of the vertical frame has a low support surface and a high support surface, and the height of the high support surface is greater than the height of the low support surface.

[0035] In this embodiment, the horizontal bottom frame and the vertical stand are respectively formed by welding stainless steel square tubes.

[0036] The low-position support assembly includes a low-position seat plate 300, which is arranged in the transverse direction and installed on the low-position supporting surface of the vertical frame. The transfer support pad assembly and the opening and closing drive assembly are respectively installed on the top of the low-position seat plate.

[0037] The high-position support assembly includes a high-position seat plate 400, which is arranged in the transverse direction and installed on the high-position supporting surface of the vertical stand. It is parallel to the low-position seat plate and arranged in a stepped manner. The process chamber is installed on the high-position seat plate.

[0038] The transfer pad assembly includes a pad seat block 500, a pair of which are respectively mounted on the top of the low seat plate, arranged on both sides of the low seat plate and close to one end of the high seat plate, and the target plate support assembly is mounted on the pad seat block.

[0039] The opening and closing driving assembly includes a driving cylinder 600, which is provided with a pair of driving cylinders, each of which is arranged on both sides of the low seat plate and away from one end of the high seat plate. The cylinder body of each driving cylinder is respectively installed on the top of the low seat plate through a hinge seat, and its piston rod extends above the low seat plate and engages with the target plate covering assembly. The target plate covering assembly is driven by the driving cylinder to perform opening and closing operations.

[0040] In the description of the present utility model, it should be noted that when terms such as "upper", "lower", "inner", "outer", "left", "right" and the like indicating orientation or positional relationship appear, it should be understood that the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art, is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the equipment or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, when terms such as "first" and "second" appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that, unless otherwise clearly specified and limited, terms such as "installation", "setting", and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. A positioning mechanism for an ion implantation base, characterized in that: include: A transverse bearing assembly, which is assembled on the installation table through a connecting piece and has a bearing space inside; A vertical support assembly, which is installed on the transverse bearing assembly and has a supporting space inside, and the transverse bearing assembly supports the vertical support assembly; A low-position support assembly, which is installed on the vertical support assembly and has a support space inside, and the vertical support assembly supports the low-position support assembly; A high-position support assembly, which is installed on the vertical support assembly and corresponds to the position of the low-position support assembly. Its height is greater than that of the low-position support assembly, and has a supporting space inside which the process chamber assembly can be installed. The high-position support assembly is supported by the vertical support assembly; A transfer pad assembly is installed on the low-position support assembly, and has an assembly space for installing the target plate support assembly inside the transfer pad assembly, and the low-position support assembly supports the transfer pad assembly; The opening and closing driving assembly is installed on the low-position supporting assembly, and has an assembly space for installing the target plate covering assembly inside. The opening and closing driving assembly is supported by the low-position supporting assembly, and the opening and closing driving assembly performs the opening and closing operations on the target plate covering assembly.

2. A positioning mechanism for an ion implantation base according to claim 1, characterized in that: The lateral load-bearing components include: A transverse bottom frame, which is formed by enclosing and connecting pipes and arranged in the transverse direction; A group of load-bearing angle plates are provided, and each load-bearing angle plate is respectively installed at the bottom of the transverse bottom frame, and is respectively located at the corner position of the transverse bottom frame.

3. A positioning mechanism for an ion implantation base according to claim 2, characterized in that: The vertical support assembly includes: The vertical frame is formed by enclosing and connecting pipes and arranged vertically. It is installed on the top of the horizontal base frame and extends above the horizontal base frame. The top of the vertical frame has a low support surface and a high support surface. The height of the high support surface is greater than the height of the low support surface.

4. A positioning mechanism for an ion implantation base according to claim 3, characterized in that: The low support assembly includes: The low-position seat plate is arranged in the transverse direction and is installed on the low-position supporting surface of the vertical stand. The transfer support pad assembly and the opening and closing drive assembly are respectively installed on the top of the low-position seat plate.

5. A positioning mechanism for an ion implantation base according to claim 4, characterized in that: The high support assembly includes: The high-position seat plate is arranged in the transverse direction and is installed on the high-position supporting surface of the vertical stand. It is parallel to the low-position seat plate and arranged in a stepped manner. The process chamber is installed on the high-position seat plate.

6. A positioning mechanism for an ion implantation base according to claim 5, characterized in that: The adapter pad assembly includes: A pair of support blocks are provided, each support block is installed on the top of the low seat plate, arranged on both sides of the low seat plate and close to one end of the high seat plate, and the target plate support assembly is installed on the support blocks.

7. A positioning mechanism for an ion implantation base according to claim 6, characterized in that: The opening and closing drive components include: A driving cylinder is provided in pair, each driving cylinder is arranged on both sides of the low seat plate and away from one end of the high seat plate. The cylinder body of each driving cylinder is respectively installed on the top of the low seat plate through a hinge seat, and its piston rod extends above the low seat plate.

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