Scanning electron microscope objective table and scanning electron microscope
By designing a scanning electron microscope stage with universal connection device, the problem of shaking and unstable irregular samples during pasting is solved, and the universal rotation of the samples is achieved and the better observation effect is achieved.
Patent Information
- Application Number
- CN202421730129.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-22
- Publication Date
- 2025-05-06
- Estimated Expiration
- 2034-07-22
AI Technical Summary
During scanning electron microscopy testing, some irregularly shaped samples are prone to shaking, unstable, skewed and other problems during pasting, making it difficult to observe the ideal position.
A scanning electron microscope stage is designed, including a sample base, a clamping assembly and a base. The clamping assembly is connected to the sample base through a universal connection device, allowing the sample to be tested to rotate in all directions in three dimensions, and adjust the position of the sample through a lifting connection between the base and the sample base.
The universal rotation of the sample is realized through the universal connection device, so that the irregular surface can face the lens of the scanning electron microscope, and the observation accuracy and efficiency of the irregular surface are improved.
Smart Images
Figure CN222838786U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of scanning electron microscopes, in particular to a scanning electron microscope stage and a scanning electron microscope. Background Art
[0002] Scanning electron microscopy (SEM) is an observation method between transmission electron microscopy and optical microscopy. It uses a focused narrow high-energy electron beam to scan the sample, and stimulates various physical information through the interaction between the beam and the material. This information is collected, amplified, and re-imaged to achieve the purpose of characterizing the microscopic morphology of the material.
[0003] When performing SEM testing, we need to fix the sample on the stage with conductive glue, and then put the stage into the sample chamber for testing. At present, there are some samples to be tested, such as stretched samples, samples that need to observe the fracture section, the coating interface, etc. Most of these samples are irregular and uneven. During the pasting process, there will be shaking, looseness, skewness, etc., which makes it difficult for us to observe the ideal position. Utility Model Content
[0004] The technical problem to be solved by the embodiments of the utility model is to provide a scanning electron microscope stage and a scanning electron microscope, which can facilitate the adjustment of the angle of the sample to be tested and facilitate the observation of the irregular surface of the sample to be tested.
[0005] In order to solve the above technical problems, the utility model provides a scanning electron microscope stage, including: a sample base, at least one clamping assembly and a base, the sample base is connected to the base for lifting and lowering, each of the clamping assemblies is used to clamp a sample to be tested, and the bottom of each clamping assembly is universally connected to the sample base through a universal connection device.
[0006] In a feasible embodiment, each of the clamping assemblies comprises: a clamping base and two first clamping jaws arranged in pairs along a first direction, each of the first clamping jaws is slidably connected to the clamping base along the first direction, and the two first clamping jaws move closer or farther away along the first direction to clamp or release the sample to be tested.
[0007] In a feasible embodiment, the clamping base is provided with a first guide groove along the first direction, and a first slider is provided at the bottom of each first clamping jaw. The first slider is accommodated in the first guide groove and moves along the first guide groove to drive the clamping base to slide.
[0008] In a feasible embodiment, the clamping assembly also includes two first elastic elements and two first fasteners arranged in pairs, the elastic direction of each first elastic element is arranged along the first direction, the two elastic elements are arranged at the two ends of the two first clamps away from each other along the first direction, the two first fasteners are fixed to the two ends of the two first elastic elements away from each other along the first direction, one first elastic element is arranged between one first clamp and one first fastener, and the first elastic element is used to provide a driving force for the two first clamps to approach each other.
[0009] In a feasible embodiment, each of the clamping assemblies further includes: two second clamping jaws arranged in pairs along a second direction, each of the second clamping jaws being slidably connected to the clamping base along the second direction, the two first clamping jaws approaching or moving away along the second direction to clamp or release the sample to be tested, and the second direction is perpendicular to the first direction in a horizontal plane.
[0010] In a feasible implementation manner, the universal connection device comprises: a ball head element and an outer ring element, and the ball head element is connected to the outer ring element by a ball hinge.
[0011] In a feasible implementation, the ball head element is arranged at the bottom of the clamping base, the outer ring element is the sample base, the sample base is provided with a cavity corresponding to the ball head, and the ball head element is at least partially accommodated in the cavity.
[0012] In a feasible embodiment, the scanning electron microscope stage includes a sample base and at least two clamping components.
[0013] In a feasible implementation, the scanning electron microscope stage further includes a threaded rod and a butterfly bolt, and the base is connected to the sample base in a lifting manner via the threaded rod; the butterfly bolt is used to fix the base to the threaded rod.
[0014] Correspondingly, an embodiment of the present application also provides a scanning electron microscope, comprising any of the scanning electron microscope stages described above.
[0015] The clamping assembly of the scanning electron microscope stage provided in the embodiment of the present application is universally connected to the base through a universal connection device, so that the sample to be tested clamped by the clamping assembly can be universally rotated relative to the base. The irregular surface of the sample to be tested with irregularities can be universally rotated under the action of the universal connection device, so that the irregular surface can face the lens of the scanning electron microscope, and then the distance between the sample base and the lens can be adjusted by the lifting connection between the base and the sample base, so that the irregular surface of the sample to be tested can be better observed. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of a scanning electron microscope stage shown in an embodiment of the present application;
[0017] Figure 2 is an exploded view of a clamping assembly of a scanning electron microscope stage shown in an embodiment of the present application;
[0018] Figure 3 yes Figure 2 A cross-sectional view of a clamping assembly of a scanning electron microscope stage shown;
[0019] Figure 4 It is an exploded view of a scanning electron microscope stage shown in another embodiment of the present application.
[0020] Reference numerals in the figure: 100 - scanning electron microscope stage;
[0021] 101-base, 102-threaded rod, 103-butterfly bolt,
[0022] 110-clamping assembly, 111-clamping base, 1111-first guide groove, 1112-second guide groove, 112-first clamping jaw, 1121-first slider, 113-first elastic element, 114-first fastener, 115-second clamping jaw, 116-second elastic element, 117-second fastener,
[0023] 120-sample base, 121-chamber, 122-trapezoidal screw,
[0024] 131- ball head element, 132- outer ring element. DETAILED DESCRIPTION
[0025] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.
[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.
[0027] Please refer to Figures 1 to 3 The embodiment of the present application provides a scanning electron microscope stage 100. The scanning electron microscope stage 100 includes: a sample base 120, five clamping assemblies 110 and a base 101. The sample base 120 is connected to the base 101 for lifting. Each of the clamping assemblies 110 is used to clamp a sample to be tested. The bottom of each of the clamping assemblies 110 is universally connected to the sample base 120 through a universal connection device.
[0028] The clamping assembly of the scanning electron microscope stage provided in the embodiment of the present application is universally connected to the sample base through a universal connection device, so that the sample to be tested clamped by the clamping assembly can be universally rotated relative to the base. The irregular surface of the sample to be tested with irregularities can be universally rotated under the action of the universal connection device, so that the irregular surface can face the lens of the scanning electron microscope, and then the distance between the sample base and the lens can be adjusted by the lifting connection between the base and the sample base, so that the irregular surface of the sample to be tested can be better observed.
[0029] In a feasible embodiment, the scanning electron microscope stage 100 may not be limited to including five clamping assemblies 110, and may also include a number of clamping assemblies 110 other than five, or may include one or more than two clamping assemblies 110. Providing two or more clamping assemblies 110 can improve the carrying capacity of the scanning electron microscope stage 100. In this way, multiple samples to be tested can be carried at the same time, or multiple angles of samples from the same batch: for example, multiple different angles of different surfaces or irregular surfaces of samples from the same batch can be adjusted through a universal connection device. In this way, the efficiency of electron microscope scanning can be improved, and the accuracy of observation of samples to be tested can also be improved, which is conducive to wide application.
[0030] In a possible implementation, Figures 1 to 3 As shown, each of the clamping assemblies 110 includes: a clamping base 111, two first clamping jaws 112 arranged in pairs along a first direction X, and two first clamping jaws 115 arranged in pairs along the second direction Y. Each of the first clamping jaws 112 is slidably connected to the clamping base 111 along the first direction X, and the two first clamping jaws 112 move closer or farther away along the first direction X to clamp or release the sample to be tested. Each of the first clamping jaws 115 is slidably connected to the clamping base 111 along the second direction Y, and the two first clamping jaws 112 move closer or farther away along the second direction Y to clamp or release the sample to be tested, and the second direction Y is perpendicular to the first direction X in a horizontal plane. However, it should be noted that the first direction and the second direction are not limited to the first direction. Figure 2In the directions shown in , because the clamping assembly can perform universal rotation relative to the base, the first direction and the second direction are not fixed, but are perpendicular to each other only in the plane where the two directions are located. In a feasible embodiment, the clamping assembly 110 may also only include a pair of first clamps 112 or first clamps 115, so that the sample to be tested can be fixed and stably clamped, thereby ensuring stable observation and shooting results. Of course, through the first clamp and the first clamp 115, the two groups of four clamps are set to further improve the stability and flexibility of sample clamping. The two groups of four clamps form a centrally symmetrical arrangement, which makes the area and shape of clamping the sample to be tested more flexible. As Figure 1 As shown, the sheet-like sample to be tested can be clamped in a vertical state or in a flat state. At the same time, the vertical and flat angles can also be selected. For example, the vertical state can be as follows Figure 1 The clamping assembly 100-1 in the embodiment clamps the sample to be tested, and can also be as shown in Figure 1 The corresponding tiling state can be as shown in the clamping assembly 100-2. Figure 1 The clamping assembly 100-3 in the figure clamps the sample to be tested in the state shown, and so on, which will not be repeated here. At the same time, the clamping assembly 110-4 set in this way can also achieve a good clamping effect on columnar samples. The columnar sample is clamped at the symmetric center of the four clamping jaws, which can also achieve a good clamping effect. The clamping assembly provided in the embodiment of the present application can achieve a good clamping effect on samples to be tested of various specifications and shapes.
[0031] In a possible implementation, Figure 1 to Figure 2As shown, the clamping base 111 is provided with a first guide groove 1111 along the first direction X. A first slider 1121 is provided at the bottom of each first clamping jaw 112, and the first slider 1121 is accommodated in the first guide groove 1111 and moves along the first guide groove 1111 to drive the clamping base 111 to slide. Correspondingly, the clamping base 111 is provided with a second guide groove 1112 along the second direction Y. The structure of the first clamping jaw 115 is the same as that of the first clamping jaw 112, and will not be repeated here. The setting of the guide groove and the slider can improve the accuracy and stability: the guide groove provides a precise motion trajectory for the slider, ensuring that the movement of the slider on a straight line or a specific path will not deviate, thereby improving the positioning accuracy and operation stability of the clamping assembly 110 clamping the sample to be tested. The guide groove and the slider structure can withstand a large load, and the high-rigidity slider and the precision-machined guide rail can stably carry heavy objects and keep the movement smooth and without deviation. Compared with the traditional sliding fit, the design of the guide groove and the slider is more modular, easy to standardize production, simplifying the design and assembly process of the mechanical structure, and reducing the manufacturing cost and complexity. Easy maintenance: Most guide groove slider systems support easy cleaning and lubrication operations, which is conducive to maintaining good working condition for a long time. Some designs also allow for quick replacement of worn parts, reducing downtime. Dustproof and sealing: Combined with appropriate sealing measures, the guide groove and slider structure can effectively prevent the entry of pollutants such as dust and cutting fluid, protect the internal rolling elements, and maintain the cleanliness and high performance of the system. Furthermore, the first guide groove 1111 can also be a stepped groove structure design, and the slider of the first clamp 112 is also designed to correspond to the stepped groove. The stepped design sometimes facilitates the alignment and installation of components. Each step serves as a natural reference point, which simplifies the assembly process. At the same time, the gaps between the steps may provide convenience for inspection and cleaning. Similarly, the structure of the second guide groove 1112 and the first clamp 115 can be the same or similar to the structure of the first guide groove 1111 and the first clamp 112, which will not be repeated here.
[0032] In a possible implementation, Figure 1 to Figure 2As shown, the clamping assembly 110 also includes two first elastic elements 113 and two first fasteners 114 arranged in pairs. The elastic direction of each first elastic element 113 is arranged along the first direction X. The two elastic elements are arranged at the two ends of the two first clamping jaws 112 away from each other along the first direction X. The two first fasteners 114 are fixed to the two ends of the two first elastic elements 113 away from each other along the first direction X. One first elastic element 113 is arranged between one first clamping jaw 112 and one first fastener 114. The first elastic element 113 is used to provide a driving force for the two first clamping jaws 112 to approach each other. It can also be said that when the two first clamping jaws 112 abut against each other, the first elastic element 113 is in a natural or compressed state. In this way, when the sample to be tested is accommodated between the two first clamping jaws 112, the distance between the two first clamping jaws 112 increases, and the first elastic element 113 is in a compressed state. In this way, the first elastic element 113 can provide a driving force for the two first clamping jaws 112 to approach each other, thereby driving the two first clamping jaws 112 to clamp the sample to be tested. Correspondingly, the two first clamping jaws 115 are also provided with corresponding second elastic elements 116 and second fasteners 117. No further description is given here. It should be noted that only the first clamping jaw 112 or the first clamping jaw 115 can also achieve the clamping effect of the clamping assembly 110 of the embodiment of the present application, and the setting of the two groups can improve the clamping effect. Further, the sample base 120 is provided with a through hole for accommodating the elastic element and the fastener, and at the same time, the through hole has an internal thread, and the fastener has an external thread, and the fastener can be fixedly connected to the sample base 120 by threaded connection, thereby fixing the elastic element. This technology is relatively existing and will not be repeated here.
[0033] In a feasible embodiment, the structures of the multiple clamping assemblies 110 arranged on the scanning electron microscope stage 100 may be the same or different. For example, some clamping assemblies 110 may have a first clamping jaw 112 and its supporting components, where the supporting components include the corresponding first elastic element 113 and the first fastener 114 and the first guide groove 1111, etc., while some clamping assemblies 110 have a first clamping jaw 112 and its supporting components and / or a first clamping jaw 115 and its supporting components. Or other clamping assemblies 110 have three clamping jaws, etc. In this way, the flexible arrangement of different clamping assemblies 110 can better cope with samples to be tested of different specifications and shapes, further improve the diversity of application scenarios of the scanning electron microscope stage 100, and improve detection efficiency and detection effect.
[0034] In a possible implementation, Figures 1 to 3As shown, the universal connection device includes: a ball head element 131 and an outer ring element, and the ball head element 131 is connected to the outer ring element by a ball hinge. The ball hinge allows the connected object to rotate freely in three dimensions, that is, the clamping assembly 110 and the sample base 120 can rotate around three mutually perpendicular axes, which makes it very suitable for applications that require flexible steering or angle adjustment. At the same time, due to the spherical structure, the ball hinge can effectively withstand loads and pressures from all directions, ensuring stability and durability under complex working conditions. In addition, the structural design of the ball hinge enables it to have high flexibility and accuracy in transmitting torque and movement. Ball hinges are usually designed with features that are easy to install and adjust, which not only reduces installation costs, but also helps to extend service life and reduce maintenance requirements. Finally, through the reasonable design and adjustment of the ball hinge constraint force, the movement of the object can be effectively controlled and stabilized, excessive movement or accidental disengagement can be avoided, and the safe and stable operation of the mechanical system can be guaranteed.
[0035] In a possible implementation, Figures 1 to 3 As shown, the ball head element 131 is arranged at the bottom of the clamping base 111, the outer ring element is the sample base 120, the sample base 120 is provided with a chamber 121 corresponding to the ball head, and the ball head element 131 is at least partially accommodated in the chamber 121. The chamber 121 is a spherical groove adapted to the structure of the ball head element 131, and the outer ring element wraps most of the ball head element 131, so that a small part of the ball head element 131 is exposed, so that the ball head element 131 can achieve universal rotation in the outer ring element, and at the same time, it can also prevent the ball head element 131 from falling out of the outer ring element. One outer ring element and one ball head element 131 form a spherical universal connector. Further, the installation method of the ball head element 131 and the clamping bottom can be achieved in the following way: the clamping assembly 110 and the sample base 120 are cryogenically frozen before assembly; the cryogenically frozen clamping assembly 110 and the sample base 120 are assembled; after returning to room temperature, the ball head element 131 of the clamping assembly 110 forms a ball hinge connection with the sample base 120. Under low temperature conditions, since the clamping assembly 110 and the sample base 120 are made of metal materials, their thermal expansion and contraction characteristics cause the chamber 121 on the sample base 120 to become larger and the ball head element 131 to become smaller, which can facilitate the installation of the ball head element 131. After returning to room temperature, under the action of thermal expansion and contraction, the ball head element 131 and the chamber 121 fit tightly together. In the absence of external forces, the clamping assembly 110 and the sample base 120 are fixedly connected, and the angle is fixed and not easy to change. In this way, the angle of the sample can be avoided when the scanning electron microscope stage 100 is moved after loading or sampled for observation, thereby improving the detection stability and detection effect.
[0036] In a possible implementation, Figure 4 As shown, the outer ring element of the universal connection device can be a trapezoidal screw 122. The trapezoidal screw 122 is fixed on the sample base 120. In this embodiment, the trapezoidal screw 122 can be fixed to the chamber 123 on the sample base 120. Specifically, the inner wall of the chamber 123 can be provided with an internal thread, and the trapezoidal screw 122 can be screwed with the sample base 120 through the thread. The larger opening of the trapezoidal screw faces the ball head element 131. When the trapezoidal screw is away from the ball head element 131, the ball hinge connection is completely loosened, and the clamping assembly 110 can be disassembled. When it is not completely locked, the direction of the sample to be tested clamped by the clamping assembly 110 can be arbitrarily changed by rotating the clamping assembly 110. When the ideal direction is reached, the ball head element 131 is locked by a nut to prevent the scanning electron microscope stage 100 from angularly deviating when the sample is moved or sampled for observation after loading, thereby improving the detection stability and detection effect.
[0037] In a feasible implementation, the outer ring elements of the universal connection device may be half screws arranged in pairs. Figure 4 The trapezoidal screw 122 shown is cut in half along the axial line. The ball head element is still fixed on the top of the two half screws, so that when the nut is screwed from the narrow end to the wide end, the two half screws are tightened more and more, locking the ball head element 131 and fixing the angle between the clamping assembly 110 and the sample base 120. In this way, the angle deviation of the sample can be avoided when the scanning electron microscope stage 100 is moved or sampled for observation after loading, thereby improving the detection stability and detection effect.
[0038] In a feasible implementation, Figures 1 to 3As shown, the scanning electron microscope stage 100 also includes a threaded rod 102 and a butterfly bolt 103. The base 101 is connected to the sample base 120 by the threaded rod 102. The butterfly bolt 103 is used to fix the base 101 and the threaded rod 102. Specifically, the base 101 has a first mounting hole in the vertical direction, the first mounting hole is provided with an internal thread, and the threaded rod 102 is threadedly screwed in the first mounting hole in the vertical direction. The base 101 also has a second mounting hole in the horizontal direction, and the second mounting hole connects the first mounting hole with the outside of the base 101. The butterfly bolt 103 passes through the second mounting hole and abuts against the threaded rod 102. In this way, by loosening the butterfly bolt 103, the threaded rod 102 cooperates with the first mounting hole on the base 101 to adjust the distance between the sample base 120 and the base 101, thereby adjusting the height of the sample base 120. By tightening the butterfly bolt 103, the connection between the threaded rod 102 and the base 101 and the sample base 120 can be fixed. In this way, the height displacement of the sample when the scanning electron microscope stage 100 is moved or sampled for observation after loading can be avoided, thereby improving the detection stability and detection effect. The wide and flat head design of the butterfly bolt 103 allows it to be easily tightened and loosened with fingers or simple tools without the need for special tools, which is extremely convenient in scenarios where space is small or assembly is fast. Since the installation is simple and quick without the assistance of professional tools, it can significantly save assembly time, reduce labor costs, and improve production efficiency. The butterfly bolt 103 has no protruding bolt head and can be close to the mounting surface, which helps to improve the sealing of the enclosed area and reduce the risk of leakage, which is particularly important for applications that require waterproofing or dustproofing. The special structural design of the butterfly bolt 103, including its wide head, can increase its stability under dynamic load or vibration conditions to a certain extent and reduce the possibility of loosening. In particular, the butterfly bolt 103 made of plastic has good insulation and non-magnetic properties, and is suitable for environments that are sensitive to magnetism. The butterfly bolt 103 is often made of corrosion-resistant materials and has good weather resistance. At the same time, the butterfly bolt 103 has diversified specifications and can provide a variety of sizes and materials to meet different design and application requirements, which is conducive to wide application. Similarly, the sample base 120 can also be provided with a mounting hole and an internal thread, which can facilitate the connection between the sample base 120 and the base 101, facilitate installation, have low production costs, and are conducive to wide application.
[0039] Accordingly, the present application also provides a scanning electron microscope. The scanning electron microscope includes any one of the above-mentioned scanning electron microscope stages 100. The scanning electron microscope provided in the present application has all the beneficial effects of the above-mentioned scanning electron microscope stages 100, which will not be described in detail here.
[0040] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this specification. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this specification.
[0041] At the same time, this specification uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of this specification. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in this specification does not necessarily refer to the same embodiment. In addition, certain features, structures or characteristics in one or more embodiments of this specification can be appropriately combined.
[0042] In addition, unless explicitly stated in the claims, the order of the processing elements and sequences, the use of alphanumeric characters, or the use of other names described in this specification are not intended to limit the order of the processes and methods of this specification. Although the above disclosure discusses some currently considered useful utility model embodiments through various examples, it should be understood that such details are only for illustrative purposes, and the attached claims are not limited to the disclosed embodiments. On the contrary, the claims are intended to cover all modifications and equivalent combinations that are consistent with the essence and scope of the embodiments of this specification.
[0043] Similarly, it should be noted that in order to simplify the description disclosed in this specification and thus help understand one or more utility model embodiments, in the above description of the embodiments of this specification, multiple features are sometimes combined into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this specification are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.
[0044] In some embodiments, numbers describing the number of components and attributes are used. It should be understood that such numbers used in the description of the embodiments are modified by the modifiers "about", "approximately" or "substantially" in some examples. Unless otherwise specified, "about", "approximately" or "substantially" indicate that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may change according to the required features of individual embodiments. In some embodiments, the numerical parameters should take into account the specified significant digits and adopt the general method of retaining digits. Although the numerical domains and parameters used to confirm the breadth of their range in some embodiments of this specification are approximate values, in specific embodiments, the setting of such numerical values is as accurate as possible within the feasible range.
[0045] Each patent, patent application, patent application publication, and other materials, such as articles, books, specifications, publications, documents, etc., cited in this specification are hereby incorporated by reference in their entirety. Except for application history documents that are inconsistent with or conflicting with the contents of this specification, documents that limit the broadest scope of the claims of this specification (currently or later attached to this specification) are also excluded. It should be noted that if the descriptions, definitions, and / or use of terms in the materials attached to this specification are inconsistent or conflicting with the contents described in this specification, the descriptions, definitions, and / or use of terms in this specification shall prevail.
[0046] Finally, it should be understood that the embodiments described in this specification are only used to illustrate the principles of the embodiments of this specification. Other variations may also fall within the scope of this specification. Therefore, as an example and not a limitation, alternative configurations of the embodiments of this specification may be considered consistent with the teachings of this specification. Accordingly, the embodiments of this specification are not limited to the embodiments explicitly introduced and described in this specification.
Claims
1. A scanning electron microscope stage, characterized in that: include: A sample base, at least one clamping assembly and a base, wherein the sample base is connected to the base in a lifting manner, each clamping assembly is used to clamp a sample to be tested, and the bottom of each clamping assembly is universally connected to the sample base through a universal connection device.
2. The scanning electron microscope stage according to claim 1, characterized in that: Each of the clamping assemblies comprises: a clamping base and two first clamping jaws arranged in pairs along a first direction, each of the first clamping jaws is slidably connected to the clamping base along the first direction, and the two first clamping jaws move closer or farther away along the first direction to clamp or release the sample to be tested.
3. The scanning electron microscope stage according to claim 2, characterized in that: The clamping base is provided with a first guide groove along the first direction, and each of the first clamping jaws is provided with a first slider at the bottom. The first slider is accommodated in the first guide groove and moves along the first guide groove to drive the clamping base to slide.
4. The scanning electron microscope stage according to claim 3, characterized in that: The clamping assembly also includes two first elastic elements and two first fasteners arranged in pairs, the elastic direction of each first elastic element is arranged along the first direction, the two elastic elements are arranged at the two ends of the two first clamping jaws away from each other along the first direction, the two first fasteners are fixed to the two ends of the two first elastic elements away from each other along the first direction, one first elastic element is arranged between one first clamping jaw and one first fastener, and the first elastic element is used to provide a driving force for the two first clamping jaws to approach each other.
5. The scanning electron microscope stage according to claim 2, characterized in that: Each of the clamping assemblies further includes: two second clamping jaws arranged in pairs along a second direction, each of the second clamping jaws being slidably connected to the clamping base along the second direction, the two first clamping jaws approaching or moving away along the second direction to clamp or release the sample to be tested, and the second direction is perpendicular to the first direction in a horizontal plane.
6. The scanning electron microscope stage according to claim 2, characterized in that: The universal connection device comprises: a ball head element and an outer ring element, and the ball head element is connected to the outer ring element by a ball hinge.
7. The scanning electron microscope stage according to claim 6, characterized in that: The ball head element is arranged at the bottom of the clamping base, the outer ring element is the sample base, the sample base is provided with a cavity corresponding to the ball head element, and the ball head element is at least partially accommodated in the cavity.
8. The scanning electron microscope stage according to claim 1, characterized in that: The scanning electron microscope stage comprises a sample base and at least two clamping components.
9. The scanning electron microscope stage according to claim 1, characterized in that: The scanning electron microscope stage also includes a threaded rod and a butterfly bolt, and the base is connected to the sample base for lifting and lowering through the threaded rod; the butterfly bolt is used to fix the base to the threaded rod.
10. A scanning electron microscope, characterized in that: Comprising a scanning electron microscope stage as described in any one of claims 1 to 9.