Shunting unit and liquid treatment system

Abstract

The utility model relates to a shunting unit and a liquid treatment system. Provided is a technique that facilitates the delivery of a liquid that may contain bubbles in a state in which the bubbles have been reduced. The flow dividing unit includes a flow dividing main body portion having a guide flow path, an inflow portion that guides the liquid to the guide flow path, and a first outflow portion and a second outflow portion that cause the liquid to flow out from the guide flow path to the outside, the first outflow portion being located above the second outflow portion, and the first outflow portion being located below the second outflow portion when bubbles exist in the liquid in the guide flow path. The volume of the air bubbles flowing out together with the liquid through the second outflow part is smaller than the volume of the air bubbles flowing out together with the liquid through the first outflow part.

Description

Technical Field

[0001] The utility model relates to a flow distribution unit and a liquid processing system. Background Art

[0002] There is known a system in which a treatment liquid is circulated in a tank and a circulation line and a required amount of the treatment liquid is supplied from the circulation line to a treatment unit (see Patent Documents 1 and 2).

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2022-3666

[0006] Patent Document 2: International Publication No. 2022 / 009661 Utility Model Content

[0007] Problems to be solved by utility models

[0008] In a system that circulates a treatment liquid, gas dissolved in the treatment liquid may appear in the treatment liquid as bubbles in a tank.

[0009] Bubbles in the treatment liquid tend to grow and become larger when passing through a portion where the liquid flow is disturbed, such as a step portion. Therefore, even if the bubbles in the treatment liquid have a relatively small size in the tank, they may sometimes grow larger when moving from the tank to the circulation line and passing through a pump provided in the circulation line.

[0010] The processing liquid flows in the circulation line with the larger bubbles (for example, the larger bubbles are sucked in by a pump) and supplied to the processing unit, so that the particles sometimes suddenly increase in size. In addition, even if the bubbles are smaller in size, if the number of bubbles increases, there is a tendency for the particles to increase in size.

[0011] The utility model provides a technology which is advantageous for delivering a liquid which may contain bubbles in a state where the bubbles are reduced.

[0012] Solutions for solving problems

[0013] A technical solution of the utility model relates to a flow diversion unit, characterized in that the flow diversion unit comprises: a flow diversion main body, which has a guide flow path; an inflow portion, which guides liquid to the guide flow path; and a first outflow portion and a second outflow portion, which make the liquid flow out from the guide flow path to the outside, the first outflow portion is located at a position higher than the second outflow portion, and the guide flow path includes: an inflow guide path, the liquid from the inflow portion flows into the inflow guide path; a first outflow guide path, which is located between the inflow guide path and the first outflow parts; and a second outflow guide path, which is located between the inflow guide path and the second outflow part, the diversion main body portion comprises: a guide dividing portion, which extends along the first direction and divides at least a portion of the inflow guide path; a shoulder portion, which forms a shoulder surface that divides a portion of the inflow guide path and extends in a direction perpendicular to the first direction; and a tapered portion, which forms a tapered surface that divides at least a portion of the first outflow guide path and gradually decreases in diameter toward the first outflow part, the shoulder surface and the tapered surface are directly or indirectly connected to each other.

[0014] The inflow portion may be configured to eject the liquid into the inflow guide path toward the guide partition portion.

[0015] It may also be that the inlet guide path extends along the first direction, the first outflow guide path and the second outflow guide path are located at positions offset from the inlet guide path in a second direction perpendicular to the first direction, and the liquid is guided toward the second direction after the inlet guide path is guided toward the first direction.

[0016] It may also be that at least a portion of the inflow guide path and at least a portion of the second outflow guide path are separated by the guide dividing portion, and the cross-sectional area of ​​the portion of the second outflow guide path divided by the guide dividing portion in the direction perpendicular to the first direction is larger than the cross-sectional area of ​​the portion of the inflow guide path divided by the guide dividing portion in the direction perpendicular to the first direction.

[0017] The flow dividing unit may include a vortex forming portion that causes the liquid to flow toward the first outflow portion in the form of a vortex in at least a portion of the first outflow guide path.

[0018] It can also be that the inlet portion is connected to the inlet guide path of the guide flow path at the side wall portion of the diversion body portion, the first outflow portion is connected to the first outflow guide path including the top of the guide flow path at the top wall portion of the diversion body portion, and the second outflow portion is connected to the second outflow guide path including the bottom of the guide flow path at the bottom wall portion of the diversion body portion, the diversion body portion has the guide dividing portion, which extends from the bottom wall portion toward the top wall portion, and forms a connecting guide path for the flow of the liquid between the guide dividing portion and the top wall portion, at least a part of the inlet guide path is formed by the space outside the guide dividing portion in the guide flow path, at least a part of the second outflow guide path is formed by the space inside the guide dividing portion in the guide flow path, and at least a part of the first outflow guide path is formed by the space in the guide flow path that is opposite to the space inside the guide dividing portion in the direction from the bottom wall portion toward the top wall portion.

[0019] The first outflow portion and the second outflow portion may be configured such that a flow rate of the liquid flowing out from the guide flow path to the outside via the first outflow portion is smaller than a flow rate of the liquid flowing out from the guide flow path to the outside via the second outflow portion.

[0020] The flow dividing body portion may include a protrusion that protrudes downward from an inner wall surface of the flow dividing body portion that defines at least one of the inflow guide path and the first outflow guide path.

[0021] The flow dividing body portion may include a first divided body portion and a second divided body portion which are separably mounted to each other.

[0022] Alternatively, the first split body portion and the second split body portion may be mounted together in a threaded manner.

[0023] A technical solution of the utility model relates to a liquid processing system, characterized in that the liquid processing system comprises: the above-mentioned diversion unit, which guides the processing liquid to the guide flow path via the inlet portion, and makes it flow out from the guide flow path via the first outflow portion and the second outflow portion; a first outflow line, which is connected to the first outflow portion; and a second outflow line, which is connected to the second outflow portion, and the second outflow line is also connected to a processing unit that performs a treatment using the processing liquid.

[0024] Alternatively, the liquid treatment system includes a liquid storage portion, which is connected to the first outflow line and the second outflow line and is connected to the inflow portion via an inflow line, and the liquid storage portion is configured such that the treatment liquid is supplied from the liquid storage portion to the diversion unit via the inflow line, at least a portion of the treatment liquid flowing out from the diversion unit to the first outflow line is returned to the liquid storage portion, and at least a portion of the treatment liquid flowing out from the diversion unit to the second outflow line that is not supplied to the treatment unit is returned to the liquid storage portion.

[0025] The liquid storage section may be provided with a discharge port for discharging the treatment liquid returned to the liquid storage section via the first outflow line at a position above the treatment liquid stored in the storage space of the liquid storage section.

[0026] Alternatively, there may be a plurality of diversion units.

[0027] Effect of utility model

[0028] According to the utility model, it is advantageous to deliver the liquid that may contain bubbles in a state where the bubbles are reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a diagram schematically showing an example of a liquid processing system.

[0030] Figure 2 It is a schematic partial cross-sectional view showing an example of a processing unit.

[0031] Figure 3 This is a diagram schematically showing the structure of an example of a liquid processing system that does not include a flow dividing unit effective for reducing bubbles in the processing liquid, and mainly shows a circulation structure of the processing liquid.

[0032] Figure 4(a) to Figure 4(e) Yes means Figure 3 Schematic diagram of an example of the state of bubbles in the processing liquid in the circulation line shown.

[0033] Figure 5 This is a diagram schematically showing the structure of an example of a liquid processing system including a flow dividing unit effective for reducing bubbles in a processing liquid, and mainly shows a circulation structure of the processing liquid.

[0034] Figure 6 It is a cross-sectional view showing an example of a flow dividing unit.

[0035] Figure 7(a) to Figure 7(b) This is a diagram for explaining the gas-liquid separation effect of the flow dividing unit (particularly the guide partition portion and the shoulder portion), and shows an example of the state of bubbles in the processing liquid near the guide partition portion and the shoulder portion.

[0036] Figure 8(a) to Figure 8(b) This is a diagram for explaining the gas-liquid separation effect of the flow dividing unit (particularly the guide partition portion and the shoulder portion), and shows an example of the state of bubbles in the processing liquid near the guide partition portion and the shoulder portion.

[0037] Figure 9(a) to Figure 9(b) This is a diagram for explaining the gas-liquid separation effect of the flow dividing unit (particularly the guide partition portion and the shoulder portion), and shows an example of the state of bubbles in the processing liquid near the guide partition portion and the shoulder portion.

[0038] Figure 10(a) to Figure 10(b) This is a diagram for explaining the gas-liquid separation effect of the flow dividing unit (particularly the guide partition portion and the shoulder portion), and shows an example of the state of bubbles in the processing liquid near the guide partition portion and the shoulder portion.

[0039] Fig.11 It is an enlarged cross-sectional view showing an example of the flow dividing unit according to the first modification.

[0040] Fig.12 It is a perspective view showing another example of the flow dividing unit according to the first modification, and shows a state where the flow dividing unit is cut in half.

[0041] Fig.13 An enlarged cross-sectional view showing an example of a flow dividing unit according to a second modification.

[0042] Fig.14 An enlarged cross-sectional view showing another example of the flow dividing unit according to the second modification.

[0043] Fig.15 This is a diagram schematically showing the structure of an example of a liquid processing system according to a third modified example, and mainly shows a circulation structure of a processing liquid.

[0044] Description of Reference Numerals

[0045] 15. Diversion unit; 21. 1st circulation line; 22. 2nd circulation line; 30. Diversion main body; 40. Inflow part; 41. 1st outflow part; 42. 2nd outflow part; 80. Liquid treatment system; 90. Treatment unit; R. Guide flow path; L. Treatment liquid. DETAILED DESCRIPTION

[0046] The exemplary embodiments of the present invention are described with reference to the accompanying drawings. The shapes and sizes of the elements shown in the drawings may not be consistent with the shapes and sizes of the actual objects, and the configuration relationship and dimensional ratio between the elements may not be consistent with the configuration relationship and dimensional ratio of the actual objects. In addition, the configuration relationship and dimensional ratio between the elements may not be consistent between the drawings.

[0047] In the following description, the X direction, the Y direction, and the Z direction are directions orthogonal to each other, the X direction and the Y direction are horizontal directions, and the Z direction is a height direction (vertical direction) perpendicular to the horizontal direction. Therefore, the horizontal direction perpendicular to the height direction (Z direction) is the direction in which the XY plane (horizontal plane) extends.

[0048] Figure 1 It is a diagram schematically showing an example of a liquid processing system 80 .

[0049] Figure 1 The liquid processing system 80 shown has a feeding station 91 and a processing station 92. The feeding station 91 includes a loading section 81 having a plurality of carriers C and a conveying section 82 having a first conveying mechanism 83 and a transfer section 84. A plurality of substrates W are accommodated in each carrier C in a horizontal state. Typically, the substrate W is composed of a semiconductor wafer, but is not limited thereto. The processing station 92 is provided with a plurality of processing units 90 arranged on both sides of a conveying path 86 and a second conveying mechanism 85 that reciprocates on the conveying path 86.

[0050] The substrate W is taken out from the carrier C by the first conveying mechanism 83 and placed on the interface 84, and then taken out from the interface 84 by the second conveying mechanism 85. Then, the substrate W is conveyed to the corresponding processing unit 90 by the second conveying mechanism 85, and a predetermined process is performed in the corresponding processing unit 90. After that, the substrate W is taken out from the corresponding processing unit 90 by the second conveying mechanism 85 and placed on the interface 84, and then returned to the carrier C of the placement unit 81 by the first conveying mechanism 83. In addition, the substrate W may be returned to the carrier C after being processed in two or more processing units 90.

[0051] In the above-mentioned liquid processing system 80, two or more processing units 90 among the plurality of processing units 90 may have the same structure or different structures, and may perform the same process or different processes. Each processing unit 90 applies various processing fluids (such as chemical solutions, rinse solutions, and cleaning solutions) to the substrate W, thereby being able to perform various processes on the substrate W. The processing fluid (processing liquid) that can be used in each processing unit 90 is not limited, and may include components that change the surface characteristics of the substrate W, or may be pure water (DIW (De-Ionized Water)).

[0052] The liquid processing system 80 includes a control unit 93. The control unit 93 is composed of, for example, a computer and includes a processing unit and a storage unit. The storage unit of the control unit 93 stores programs and data for various processes performed in the liquid processing system 80. The processing unit of the control unit 93 appropriately reads and executes the program stored in the storage unit, thereby controlling various mechanisms of the liquid processing system 80 to perform various processes.

[0053] The program and data stored in the storage unit of the control unit 93 may also be recorded in a storage medium that can be read by a computer, and loaded from the storage medium into the storage unit. Examples of the storage medium that can be read by a computer include a hard disk (HD), a floppy disk (FD), a compact disk (CD), a magneto-optical disk (MO), and a memory card.

[0054] Figure 2 It is a schematic partial cross-sectional view showing an example of the processing unit 90 .

[0055] Figure 2 The illustrated processing unit 90 includes a chamber 70 , a substrate holding mechanism 71 , a processing liquid supply unit 72 , and a recovery cup 73 .

[0056] A substrate holding mechanism 71, a processing liquid supply unit 72, and a recovery cup 73 are arranged inside the chamber 70. A FFU (Fan Filter Unit) 74 for forming a downward airflow in the chamber 70 is provided at the top of the chamber 70. The substrate holding mechanism 71 includes a holding portion 75, a support portion 76, and a driving portion 77. The holding portion 75 holds the substrate W horizontally. The support portion 76 extends in the vertical direction, and the base end ( Figure 2 The lower end portion of the support portion 76 is supported by the driving portion 77, and the top end portion of the support portion 76 ( Figure 2 The driving unit 77 rotates the support column 76 (and the support column 75) about a vertical axis passing through the center of the support column 76 (and the support column 75). In this way, the support column 76 rotates together with the support column 76, so that the substrate W (see FIG. 2 ) held by the support column 75 is rotated. Figure 1 ) also rotates.

[0057] The processing liquid supply unit 72 supplies the processing liquid to the substrate W held by the holding unit 75. The processing liquid supply unit 72 includes a plurality of nozzles and is connected to the liquid supply system 10. Each nozzle ejects the processing liquid supplied from the liquid supply system 10 to the substrate W. For example, the plurality of nozzles are provided to correspond to a plurality of types of processing liquids supplied from the liquid supply system 10, respectively.

[0058] The recovery cup 73 is arranged to surround the holding portion 75, and collects the processing liquid scattered from the substrate W. A drain port 78 is formed at the bottom of the recovery cup 73, and the processing liquid collected by the recovery cup 73 is discharged to the outside of the processing unit 90 through the drain port 78. In addition, an exhaust port 79 is formed at the bottom of the recovery cup 73, and the gas (downflow) supplied from the FFU 74 is discharged to the outside of the processing unit 90 through the exhaust port 79.

[0059] [Liquid supply system]

[0060] Next, the liquid supply system 10 for supplying the processing liquid to the processing liquid supply part 72 of the processing unit 90 will be described.

[0061] Figure 3 The schematic diagram shows that the flow dividing unit (see FIG. 1 ) which is effective for reducing the bubbles B in the processing liquid L is not provided. Figure 5 and Figure 6 15 ) is a diagram of the structure of an example of a liquid processing system 80 , mainly showing a circulation structure of the processing liquid L.

[0062] exist Figure 3 In the liquid processing system 80 shown, the liquid supply system 10 has a tank 11 and a circulation line 20 connected to the tank 11. The processing liquid L is stored in the storage space Ts of the tank 11. The circulation line 20 is provided with a circulation pump 25 for sending the processing liquid L. The circulation pump 25 is driven under the control of the control unit 93, so that the processing liquid L flows out of the tank 11 through one end of the circulation line 20 and returns to the tank 11 through the circulation line 20.

[0063] The circulation line 20 extends in such a manner as to pass through the liquid supply system 10 and the processing unit 90 . Figure 3 The circulation line 20 of the illustrated example is shared by a plurality of processing units 90. A plurality of supply lines 87 branching from the circulation line 20 are connected to the processing liquid supply parts 72 of the plurality of processing units 90, respectively, and the processing liquid L is supplied from the circulation line 20 to each processing liquid supply part 72 via the supply line 87.

[0064] exist Figure 3 2 shows a circulation structure related to a single type of processing liquid L. In the case where multiple types of processing liquids are ejected from each processing liquid supply unit 72, a circulation structure such as the following can be set for each processing liquid. Figure 3 The circulation structure of the processing liquid L shown in FIG. 1 is a circulation structure of the processing liquid L. In this case, the circulation lines of the plurality of circulation structures are connected to the processing liquid supply parts 72 , and the plurality of types of processing liquids are supplied to the processing liquid supply parts 72 from the circulation lines of the plurality of circulation structures.

[0065] FIG. 4 shows Figure 3 The circulation line 20 shown (particularly the area between the tank 11 and the circulation pump 25; see Figure 3 Schematic diagram of an example of a state of bubbles B in a processing liquid L (denoted by the figure mark “IV”). Figure 4(a) to Figure 4(e) In this order, an example of the state of the bubbles B in the processing liquid L in the circulation line 20 is shown over time.

[0066] like Figure 4(a) to Figure 4(e) As shown, in the case where there is no split flow unit described later that works as a gas-liquid separation mechanism Figure 3In the liquid supply system 10, the processing liquid L continues to flow out from the tank 11 to the circulation line 20 together with the bubbles B without reducing the bubbles B contained therein. Figure 4(a) to Figure 4(e) As shown, the number and total volume of the bubbles B in the processing liquid L in the circulation line 20 do not change greatly over time. As a result, bubbles B having a larger diameter that grow in the processing liquid L are sometimes supplied to the processing unit 90 .

[0067] Figure 5 1 is a diagram schematically showing a configuration of an example of a liquid processing system 80 including a flow dividing unit 15 effective for reducing bubbles B in the processing liquid L, and mainly showing a circulation configuration of the processing liquid L.

[0068] Figure 5 The illustrated liquid processing system 80 includes a tank 11 , a flow dividing unit 15 connected to the tank 11 via an inflow line 19 , and a first circulation line 21 and a second circulation line 22 connected to the flow dividing unit 15 and the tank 11 .

[0069] The tank 11 is a liquid storage unit connected to the first circulation line 21 and the second circulation line 22 arranged in parallel, and is connected to the branching unit 15 (particularly the "inflow unit" described later; see Figure 6 The tank 11 may be a main tank that does not receive the supply of the processing liquid L from other tanks, or a sub-tank / buffer tank to which the processing liquid L is supplied from other tanks (main tank, etc.).

[0070] The treatment liquid L is stored in the storage space Ts formed by the internal space of the tank 11. The inflow line 19 opens at a portion (e.g., at the bottom) in the storage space Ts where the treatment liquid L is stored. On the other hand, the first circulation line 21 and the second circulation line 22 open at a space above the storage liquid (treatment liquid L) in the storage space Ts (e.g., at the top).

[0071] The processing liquid L returned to the tank 11 via the first circulation line 21 and the second circulation line 22 may be returned to the storage space Ts, for example, by flowing along the inner wall surface of the tank 11 that partitions the storage space Ts.

[0072] Gas is dissolved in the processing liquid L stored in the storage space Ts. A portion of the gas in the processing liquid L is released from the processing liquid L while the processing liquid L is stored in the tank 11 , but another portion of the gas continues to remain in the processing liquid L in the form of bubbles.

[0073] The processing liquid L is supplied from the tank 11 to the branching unit 15 via the inflow line 19. When the inflow line 19 has a step or a bend, bubbles in the processing liquid L grow larger when the processing liquid L flowing through the inflow line 19 passes through such a step or a bend.

[0074] The flow dividing unit 15 divides the processing liquid L supplied through the inflow line 19 into the processing liquid L sent to the first circulation line 21 and the processing liquid L sent to the second circulation line 22 .

[0075] In particular, the diversion unit 15 of the present embodiment diverts the processing liquid L in such a manner that the volume of the bubbles B flowing out to the outside of the diversion unit 15 together with the processing liquid L through the second circulation line 22 is smaller than the volume of the bubbles B flowing out to the outside of the diversion unit 15 together with the processing liquid L through the first circulation line 21.

[0076] The processing liquid L is guided to the internal flow path (guide flow path) in the flow distribution unit 15 through the inflow portion, and the processing liquid L flows out from the guide flow path through the first outflow portion and the second outflow portion to the first circulation line 21 and the second circulation line 22, respectively. Figure 6 ).

[0077] The first circulation line 21 is provided with a liquid delivery device 28, and the liquid delivery device 28 and the branching unit 15 (particularly the "first outflow section" described later; see Figure 6 The liquid delivery device 28 is connected to the tank 11 and the treatment liquid L in the first circulation line 21 is delivered from the flow dividing unit 15 to the tank 11. The specific structure of the liquid delivery device 28 is not limited, and the liquid delivery device 28 can be constituted by a pump or an ejector, for example.

[0078] exist Figure 5 In the example shown, all of the treatment liquid L flowing out of the branching unit 15 to the first circulation line 21 is returned to the tank 11 , but at least a portion of the treatment liquid L flowing out to the first circulation line 21 may be returned to the tank 11 .

[0079] The processing liquid L returned to the tank 11 through the first circulation line 21 is released at a position above the processing liquid L stored in the storage space Ts of the tank 11. This promotes the release (defoaming) of bubbles B from the processing liquid L, and reduces the bubbles B in the processing liquid L.

[0080] The second circulation line 22 is provided with a circulation pump (liquid delivery device) 25, and the circulation pump (liquid delivery device) 25 and the flow dividing unit 15 (particularly the "second outflow section" described later; see Figure 6 The processing liquid L in the second circulation line 22 is transported downstream.

[0081] The second circulation line 22 extends through the liquid supply system 10 and the processing unit 90, and the processing liquid L is supplied from the second circulation line 22 to the processing unit 90 that performs a process using the processing liquid L. The second circulation line 22 of this example is provided to be shared by a plurality of processing units 90. A plurality of supply lines 87 branched from the second circulation line 22 are respectively connected to the processing liquid supply parts 72 of the plurality of processing units 90, and the processing liquid L is supplied from the second circulation line 22 to each processing liquid supply part 72 via the supply line 87.

[0082] exist Figure 5 2 shows a circulation structure related to a single type of processing liquid L. In the case where multiple types of processing liquids are ejected from the processing liquid supply unit 72 of the processing unit 90, a circulation structure such as the following can be set for each processing liquid. Figure 5 The circulation structure of the processing liquid L shown in FIG. 1 is a circulation structure of the processing liquid L. In this case, the circulation lines of the plurality of circulation structures are connected to the processing liquid supply parts 72 , and the plurality of types of processing liquids are supplied to the processing liquid supply parts 72 from the circulation lines of the plurality of circulation structures.

[0083] Of the processing liquid L flowing out from the branch unit 15 to the second circulation line 22 , at least a portion of the processing liquid L that is not supplied to the processing liquid supply part 72 of the processing unit 90 is returned to the tank 11 via the second circulation line 22 .

[0084] According to the above Figure 5 The liquid processing system 80 shown can send the processing liquid L in a state where the bubbles B are reduced to the second circulation line 22 leading to the processing unit 90 by using the branch unit 15 .

[0085] On the other hand, the treatment liquid L in a state where the bubbles B are enlarged is sent to the first circulation line 21 not connected to the treatment unit 90 by the flow diversion unit 15, and finally returns to the tank 11. At least a part of the dissolved gas in the treatment liquid L returned to the tank 11 via the first circulation line 21 is released to the upper space in the storage space Ts under the pressure release in the tank 11. The treatment liquid L is thus sent to the flow diversion unit 15 again via the inflow line 19 in a state where the dissolved gas in the tank 11 is reduced.

[0086] [Diversion unit 15]

[0087] Next, the flow dividing unit 15 included in the liquid supply system 10 will be described.

[0088] Figure 6 It is a cross-sectional view showing an example of the flow dividing unit 15 .

[0089] Figure 6The flow dividing unit 15 shown in the figure comprises: a flow dividing main body 30 having a guide flow path R; an inlet 40 for guiding the processing liquid L to the guide flow path R; and a first outflow part 41 and a second outflow part 42 for causing the processing liquid L to flow out from the guide flow path R to the outside. The first outflow part 41 is located above the second outflow part 42.

[0090] The guide flow path R includes: an inlet guide path R0, into which the processing liquid L from the inlet portion 40 flows; a first outlet guide path R1, which is located between the inlet guide path R0 and the first outlet portion 41; and a second outlet guide path R2, which is located between the inlet guide path R0 and the second outlet portion 42.

[0091] The inflow guide path R0 extends in the height direction (Z direction; first direction). The first outflow guide path R1 and the second outflow guide path R2 are located at positions offset from the inflow guide path R0 in the horizontal direction (second direction) perpendicular to the height direction. After the processing liquid L is guided in the height direction (particularly upward) in the inflow guide path R0, it is guided in the horizontal direction and flows into the first outflow guide path R1 or the second outflow guide path R2.

[0092] exist Figure 6 In the example shown, the inflow portion 40 is connected to the inflow guide path R0 of the guide flow path R at the side wall portion 32 of the flow dividing body portion 30, and directs the flow of the processing liquid L supplied from the inflow line 19 so as to eject the processing liquid L into the inflow guide path R0 toward the guide dividing portion 31. The first outflow portion 41 is connected to the first outflow guide path R1 including the top of the guide flow path R at the top wall portion 33 of the flow dividing body portion 30. The second outflow portion 42 is connected to the second outflow guide path R2 including the bottom of the guide flow path R at the bottom wall portion 34 of the flow dividing body portion 30.

[0093] The flow dividing body portion 30 has a guide dividing portion 31 , a shoulder portion 35 , and a tapered portion 36 .

[0094] The guide partitioning portion 31 extends in the height direction (Z direction) and partitions at least a portion of the inflow guide path R0.

[0095] Figure 6 The guide dividing portion 31 shown extends from the bottom wall portion 34 toward the top wall portion 33, and forms a connecting guide path Rc between the top wall portion 33 and the top wall portion 33, through which the processing liquid L can flow. The space outside the guide dividing portion 31 in the guide flow path R is used to form at least a part of the inflow guide path R0. On the other hand, the space inside the guide dividing portion 31 in the guide flow path R is used to form at least a part of the second outflow guide path R2.

[0096] In addition, at least a portion of the first outflow guide path R1 (including at least a portion of the space divided by the tapered portion 36) is formed by utilizing the space in the guide flow path R that is opposite to the space on the inner side of the guide dividing portion 31 above (in the direction from the bottom wall portion 34 toward the top wall portion 33).

[0097] In this way, at least a portion of the inflow guide path R0 and at least a portion of the second outflow guide path R2 are separated by the guide partitioning portion 31 . Figure 6 The guide partitioning portion 31 shown has an annular shape in a plan view seen from above, and the portion of the inflow guide path R0 and the portion of the second outflow guide path R2 partitioned by the guide partitioning portion 31 are arranged concentrically.

[0098] The shoulder portion 35 forms a shoulder surface Ss, which divides a portion of the inflow guide path R0 and extends in a direction perpendicular to the height direction (i.e., in the horizontal direction). The tapered portion 36 forms a tapered surface St, which divides at least a portion of the first outflow guide path R1 and gradually decreases in diameter (i.e., in the horizontal direction) toward the first outflow portion 41. The shoulder surface Ss and the tapered surface St are connected to each other. Figure 6 In the example shown, they are directly connected to each other, but they may be indirectly connected via another surface (not shown).

[0099] In addition, the processing liquid L can also be guided toward the first outflow portion 41 in a vortex manner in at least a portion of the first outflow guide path R1 (for example, the portion divided by the tapered surface St). Such a vortex of the processing liquid L can be formed by any method. For example, by designing the structure of the guide flow path R (for example, the structure of the inflow guide path R0 and the first outflow guide path R1), the shape and state of the surface dividing the first outflow guide path R1, it is possible to form a vortex of the processing liquid L in the portion of the first outflow guide path R1 divided by the tapered surface St.

[0100] In the flow diversion unit 15 having the above-mentioned structure, the cross-sectional area in the horizontal direction of the portion divided by the guide dividing portion 31 in the second outflow guide path R2 is larger than the cross-sectional area in the horizontal direction of the portion divided by the guide dividing portion 31 in the inflow guide path R0. Therefore, compared with the upward movement speed (ascending speed) of the processing liquid L in the inflow guide path R0, the downward movement speed (descending speed) of the processing liquid L in the second outflow guide path R2 is slower. Thus, it is possible to effectively suppress the bubbles B in the processing liquid L that are buoyant upward from flowing out to the second circulation line 22 via the second outflow guide path R2.

[0101] In addition, in order to suppress the bubbles B from flowing out to the second circulation line 22 via the second outflow guide path R2, it is preferred that the descending speed of the processing liquid L in the second outflow guide path R2 is as slow as possible. On the other hand, it is necessary to flow out the processing liquid L in an amount greater than the desired amount (for example, greater than the flow rate of the processing liquid L to be supplied to one or more processing units 90 connected to the second circulation line 22) from the second outflow guide path R2 to the second circulation line 22.

[0102] In addition, bubbles B with a larger diameter are more likely to induce particles than bubbles B with a smaller diameter. Therefore, in order to suppress the increase of particles, it is effective to prevent bubbles B with a larger diameter from flowing out to the second circulation line 22 via the second outflow guide path R2. By effectively suppressing the bubbles B from flowing out to the second circulation line 22 via the second outflow guide path R2 and flowing into the circulation pump (liquid delivery device) 25, the increase of particles can be effectively suppressed.

[0103] Furthermore, as the diameter of the air bubble B increases, the buoyancy on the air bubble B increases, and the air bubble B becomes more difficult to descend, and tends to be less likely to flow out to the second circulation line 22 via the second outflow guide path R2 .

[0104] Taking all these into consideration, in order to suppress the bubbles B having a diameter of about 5 mm or more from flowing out to the second circulation line 22 through the second outflow guide path R2, the processing liquid L may be made to flow downward in the second outflow guide path R2 at a speed slower than 0.0006 m / sec, for example.

[0105] According to the above Figure 6 In the flow dividing unit 15, when there are bubbles B in the processing liquid L in the guide flow path R, the volume of the bubbles B flowing out together with the processing liquid L through the second outflow portion 42 is smaller than the volume of the bubbles B flowing out together with the processing liquid L through the first outflow portion 41. In addition, there is a tendency that the number of bubbles B flowing out together with the processing liquid L through the second outflow portion 42 is smaller than the number of bubbles B flowing out together with the processing liquid L through the first outflow portion 41.

[0106] In this way, the flow dividing unit 15 guides a part of the processing liquid L supplied from the tank 11 through the inflow line 19 to the second circulation line 22 through the second outflow portion 42 in a state in which the amount of bubbles contained is reduced. Therefore, it is possible to effectively prevent the operation of the circulation pump 25 provided in the second circulation line 22 from being disturbed by the bubbles B, thereby increasing the operational stability of the circulation pump 25. In addition, in each processing unit 90 supplied with the processing liquid L from the second circulation line 22, the processing liquid L in a state in which the bubbles B are reduced is supplied, so that the generation of particles can be prevented, and high-quality processing using the processing liquid L can be performed.

[0107] In addition, the flow rate of the processing liquid L flowing out from the guide flow path R to the outside (first circulation line 21) via the first outflow portion 41 may be smaller than the flow rate of the processing liquid L flowing out from the guide flow path R to the outside (second circulation line 22) via the second outflow portion 42. In this case, it is possible to effectively prevent the bubbles B in the processing liquid L from flowing out to the second circulation line 22 via the second outflow portion 42.

[0108] In addition, in the flow dividing unit 15 , the flow of the processing liquid L is disturbed by causing the processing liquid L to flow toward the guide partitioning portion 31 and the shoulder portion 35 with a strong momentum, so that the gas (bubbles B) can be effectively separated from the processing liquid L.

[0109] Figure 7(a) to Figure 10(b) 1 is a diagram for explaining the gas-liquid separation function of the flow dividing unit 15 (particularly the guide dividing portion 31 and the shoulder portion 35), and shows an example of the state of the bubbles B in the processing liquid L near the guide dividing portion 31 and the shoulder portion 35 over time in this order. Figure 7(a) to Figure 10(b) In (a), it is shown Figure 6 (b) shows the second circulation line 22 (particularly the flow dividing unit 15 and the circulation pump 25 (see Figure 5 ) is an enlarged cross-sectional view of the area between ).

[0110] FIG. 7(a) and FIG. 7(b) show the following state: the processing liquid L is filled in the flow dividing unit 15 and the second circulation line 22, but does not flow downstream, but stagnates. As shown in FIG. 7(a) and FIG. 7(b), during the period when the processing liquid L does not flow, the processing liquid L in the flow dividing unit 15 will uniformly contain the bubbles B, and the processing liquid L in the second circulation line 22 will also uniformly contain the bubbles B.

[0111] Figure 8(a) to Figure 10(b) The state of the treatment liquid L filled in the flow dividing unit 15 and the second circulation line 22 flowing downstream is shown. At the beginning of the flow, the treatment liquid L in the flow dividing unit 15 flows downstream in a state of uniformly containing relatively small-diameter bubbles B as shown in FIG. 8(a). Then, the treatment liquid L in the flow dividing unit 15 continues to flow downstream, and as shown in FIG. 9(a) and FIG. 10(a), the bubbles B in the treatment liquid L gradually combine with each other, and the bubbles B grow to have a larger volume.

[0112] Such growth of the bubbles B is facilitated when the flow of the processing liquid L is disturbed and the contact between the bubbles B is promoted. Therefore, the combination and growth of the bubbles B are facilitated particularly near the guide partitioning portion 31 and the shoulder portion 35 .

[0113] In particular, relatively large bubbles B are easily retained on the shoulder surface Ss extending in the horizontal direction due to relatively large buoyancy. The bubbles B retained on the shoulder surface Ss further grow and become larger in size by collision and combination with subsequent bubbles B. Then, the bubbles B that have grown to a certain extent on the shoulder surface Ss move from the shoulder surface Ss by the subsequent processing liquid L flowing downstream, and move downstream via the connecting guide path Rc.

[0114] In this way, the air bubbles B moving downstream receive a large buoyancy according to their size (volume), and thus easily move toward the first outflow portion 41 via the first outflow guide path R1 located above.

[0115] In particular, Figure 6 to Figure 10(b) In the diverter unit 15 shown, the tapered surface St extends obliquely upward from the end of the shoulder surface Ss. Therefore, the bubble B can smoothly move from the shoulder surface Ss to the tapered surface St, and is guided by the tapered surface St toward the first outflow portion 41, thereby promoting outflow from the first circulation line 21. As a result, it is possible to further effectively prevent the bubble B from flowing out to the second circulation line 22 via the second outflow guide path R2 and the second outflow portion 42 (refer to Figures 8(b), 9(b) and 10(b)).

[0116] [First Modification]

[0117] Fig.11 FIG. 1 is an enlarged cross-sectional view showing an example of the flow dividing unit 15 according to the first modification. Fig.11 In the above Figure 6 to Figure 10(b) The same or corresponding elements of the diverting unit 15 are denoted by the same reference numerals, and detailed description thereof is omitted.

[0118] The flow dividing body portion 30 may include a protrusion 50 that protrudes downward from an inner wall surface that defines at least one of the inflow guide path R0 and the first outflow guide path R1 of the flow dividing body portion 30 .

[0119] exist Fig.11 In the example shown, a protrusion 50 having a triangular cross section is provided on the shoulder 35 of the flow dividing body 30 at a position opposite to the guide dividing portion 31 in the height direction (Z direction). Providing such a protrusion 50 can promote the retention and growth of the bubbles B in the processing liquid L, which is advantageous for causing a greater buoyancy to act on the bubbles B.

[0120] The bubble B grows to a certain size on the shoulder surface Ss. Fig.11 As shown by the dotted line in FIG. 2 , the subsequent processing liquid L that flows toward the downstream moves from the shoulder surface Ss to go over the protrusion 50 via the connection guide path Rc and moves toward the downstream.

[0121] In addition, the protrusion 50 is not limited to Fig.11 Example shown.

[0122] Fig.12 It is a perspective view showing another example of the flow dividing unit 15 according to the first modification, and shows a state where the flow dividing unit 15 is cut in half.

[0123] The protrusion 50 may not be opposite to the guide partitioning portion 31 in the height direction (Z direction). Fig.12 In the example shown, the protrusion 50 may be provided at a position where the distance from the first outflow portion 41 in the horizontal direction is greater than the distance from the guide partition portion 31 in the horizontal direction to the first outflow portion 41. Alternatively, the protrusion 50 may be provided at a position where the distance from the first outflow portion 41 in the horizontal direction is less than the distance from the guide partition portion 31 in the horizontal direction to the first outflow portion 41.

[0124] Furthermore, the protrusion 50 may be provided on at least a portion of the tapered surface St that defines the inflow guide path R0 and / or the first outflow guide path R1.

[0125] Furthermore, the protrusion 50 may have a cross-sectional shape other than a triangle, may have a symmetrical cross-sectional shape, or may have an asymmetrical cross-sectional shape.

[0126] [Second Modification]

[0127] Fig.13 An enlarged cross-sectional view showing an example of the flow dividing unit 15 according to the second modification. Fig.14 FIG. 2 is an enlarged cross-sectional view showing another example of the flow dividing unit 15 according to the second modification. Fig.13 and Fig.14 In the above Figure 6 to Figure 10(b) The same or corresponding elements of the diverting unit 15 are denoted by the same reference numerals, and detailed description thereof is omitted.

[0128] The flow dividing body portion 30 may include a first divided body portion 30A and a second divided body portion 30B which are separably attached to each other.

[0129] As an example, Fig.13 As shown, it is also possible to configure that the top wall portion 33 in the flow dividing body portion 30 can be separated from the side wall portion 32 and the bottom wall portion 34. Fig.14 As shown, the bottom wall portion 34 of the flow dividing body portion 30 may be separable from the side wall portion 32 and the top wall portion 33 .

[0130] The main body connecting portion 30C that fixes the first split main body portion 30A and the second split main body portion 30B to each other in a separable manner is not limited. Such a main body connecting portion 30C can be, for example, a fixing member having a threaded portion, or a fixing member that utilizes a concave-convex fitting other than a thread. The main body connecting portion 30C can be set as a part of the first split main body portion 30A and the second split main body portion 30B, or can include a member independent of the first split main body portion 30A and the second split main body portion 30B.

[0131] In addition, the flow dividing body portion 30 may include three or more divided body portions that are separably mounted together.

[0132] As in this modification, the split body 30 of the split unit 15 has a detachable structure, so the split unit 15 can be easily maintained, for example, it is convenient for cleaning the inner wall surface of the split body 30 and replacing the split body.

[0133] In addition, the properties such as the constituent material can be changed for each divided main body portion. For example, only the divided main body portion including the top wall portion 33 (in Fig.13 and Fig.14 In the embodiment, the first split body portion 30A is made of a transparent material (e.g., a transparent resin, quartz, etc.). In this case, the side wall portion 32 and / or the bottom wall portion 34 can have a structure (constituent material, etc.) with excellent strength, and the state of the bubbles B in the guide flow path R in the flow dividing body portion 30 can be visually confirmed through the top wall portion 33.

[0134] In addition, it is also possible to prepare a plurality of types of split main body parts with different structures for a specific split main body part, and select and use the most suitable type of split main body part according to the usage. For example, it is also possible to prepare a split main body part including the bottom wall part 34 (in Fig.13 and Fig.14 In the embodiment, the second divided main body 30B is prepared in advance, and the divided main body has different cross-sectional area ratios / volume ratios in the horizontal direction between the inflow guide path R0 and the second outflow guide path R2 divided by the guide dividing portion 31. In this case, the divided main body having the most suitable cross-sectional area ratio / volume ratio can be used according to the situation.

[0135] [Third Modification]

[0136] Fig.15 1 is a diagram schematically showing the structure of an example of a liquid processing system 80 according to the third modified example, and mainly shows the circulation structure of the processing liquid L. Fig.15 In the above Figure 5 The same or corresponding elements of the liquid processing system 80 shown are denoted by the same reference numerals, and detailed description thereof is omitted.

[0137] In one circulation structure, a plurality of branch flow units 15 may be provided for flowing out the processing liquid L in a state where the bubbles B are reduced through the second outflow portion 42 to the second circulation line 22 .

[0138] exist Fig.15 In the example shown, the first flow dividing unit 15A and the second flow dividing unit 15B are provided in series.

[0139] The first flow dividing unit 15A is connected to an inflow line 19 , and allows the treatment liquid L supplied from the tank 11 through the inflow line 19 to flow out to the first circulation line 21 and the second circulation line 22 .

[0140] The second flow dividing unit 15B is provided between the first flow dividing unit 15A and the circulation pump 25 in the second circulation line 22, and allows the treatment liquid L supplied from the upstream side of the second circulation line 22 to flow toward the first circulation line 21 and the second circulation line 22 (particularly the downstream side).

[0141] The first flow dividing unit 15A and the second flow dividing unit 15B can each have the same structure as the flow dividing unit 15 (see Figure 6 to Figure 14 That is, in the first flow distribution unit 15A and the second flow distribution unit 15B, the volume of the bubbles B flowing out together with the processing liquid L to the second circulation line 22 through the second outflow portion 42 is smaller than the volume of the bubbles B flowing out together with the processing liquid L to the first circulation line 21 through the first outflow portion 41.

[0142] like Fig.15 As shown, by providing a plurality of flow dividing units 15A and 15B, the processing liquid L with reduced bubbles B can be more efficiently supplied to the processing liquid supply portion 72 of each processing unit 90 .

[0143] [Other Modifications]

[0144] The specific structure of the guide flow path R in the flow dividing unit 15 (the first flow dividing unit 15A and the second flow dividing unit 15B) is not limited. Figure 6 In the embodiment of the present invention, at least a portion of the first outflow guide path R1 is divided by the tapered surface St, but at least a portion of the inflow guide path R0 and / or the second outflow guide path R2 may also be divided by the tapered surface.

[0145] It should be noted that the embodiments and variations disclosed in this specification are merely illustrative in all respects and are not to be construed restrictively. The above-mentioned embodiments and variations can be omitted, replaced, and changed in various forms without departing from the attached claims and their purport. For example, the above-mentioned embodiments and variations can also be combined in whole or in part, and in addition, embodiments other than the above-mentioned embodiments can also be combined with the above-mentioned embodiments or variations. In addition, the effects of the utility model described in this specification are merely illustrative, and other effects can also be produced.

[0146] The technical category that realizes the above-mentioned technical idea is not limited. For example, the above-mentioned technical idea can also be realized by a computer program that causes a computer to execute one or more processes (steps) included in the method of manufacturing the above-mentioned device or the method of using the above-mentioned device. In addition, the above-mentioned technical idea can also be realized by a non-transitory recording medium that can be read by a computer and records such a computer program.

Claims

1. A diversion unit, characterized in that: The splitter unit has: A flow-dividing main body having a flow-guiding path; an inflow portion that guides the liquid to the guide flow path; and a first outflow portion and a second outflow portion for causing the liquid to flow out from the guide flow path to the outside, The first outflow portion is located above the second outflow portion, The guide flow path includes: an inflow guide path into which the liquid from the inflow portion flows; a first outflow guide path located between the inflow guide path and the first outflow portion; and a second outflow guide path located between the inflow guide path and the second outflow portion. The flow dividing body has: a guide dividing portion extending along the first direction and dividing at least a portion of the inflow guide path; a shoulder portion forming a shoulder surface that partitions a portion of the inflow guide path and extends in a direction perpendicular to the first direction; and a tapered portion which forms a tapered surface that divides at least a portion of the first outflow guide path and whose diameter gradually decreases toward the first outflow portion, The shoulder surface and the tapered surface are directly or indirectly connected to each other.

2. The flow dividing unit according to claim 1, characterized in that: The inflow portion is configured to eject the liquid into the inflow guide path toward the guide partition portion.

3. The flow dividing unit according to claim 2, characterized in that: The inflow guide path extends along the first direction, The first outflow guide path and the second outflow guide path are located at positions offset from the inflow guide path in a second direction perpendicular to the first direction. The liquid is guided in the second direction after being guided in the first direction by the inflow guide path.

4. The flow dividing unit according to claim 1, characterized in that: At least a portion of the inflow guide path and at least a portion of the second outflow guide path are separated by the guide partitioning portion. A cross-sectional area of ​​a portion of the second outflow guide path partitioned by the guide partitioning portion in a direction perpendicular to the first direction is larger than a cross-sectional area of ​​a portion of the inflow guide path partitioned by the guide partitioning portion in a direction perpendicular to the first direction.

5. The flow dividing unit according to claim 1, characterized in that: The flow dividing unit includes a vortex forming portion that causes the liquid to flow toward the first outflow portion in the form of a vortex in at least a portion of the first outflow guide path.

6. The flow dividing unit according to claim 1, characterized in that: The inflow portion is connected to the inflow guide path of the guide flow path at the side wall portion of the flow dividing body portion, The first outflow portion is connected to the first outflow guide path including the top of the guide flow path at the top wall portion of the flow dividing body portion, The second outflow portion is connected to the second outflow guide path including the bottom of the guide flow path at the bottom wall portion of the flow dividing body portion. The flow dividing body has the guide dividing portion, which extends from the bottom wall toward the top wall and forms a connecting guide path for the liquid to flow between the guide dividing portion and the top wall. At least a part of the inflow guide path is formed by a space outside the guide partition portion in the guide flow path, At least a part of the second outflow guide path is formed by a space inside the guide partition portion in the guide flow path, At least a part of the first outflow guide path is formed by a space in the guide flow path that faces a space inside the guide partitioning portion in a direction from the bottom wall portion toward the top wall portion.

7. The flow dividing unit according to claim 1, characterized in that: The first outflow portion and the second outflow portion are configured such that a flow rate of the liquid flowing out from the guide flow path to the outside via the first outflow portion is smaller than a flow rate of the liquid flowing out from the guide flow path to the outside via the second outflow portion.

8. The flow dividing unit according to claim 1, characterized in that: The flow dividing body portion includes a protrusion portion that protrudes downward from an inner wall surface of the flow dividing body portion that defines at least one of the inflow guide path and the first outflow guide path.

9. The flow dividing unit according to claim 1, characterized in that: The flow dividing body portion includes a first divided body portion and a second divided body portion which are detachably mounted to each other.

10. The flow dividing unit according to claim 9, characterized in that: The first split main body portion and the second split main body portion are installed together in a threaded manner.

11. A liquid processing system, characterized in that: The liquid treatment system has: The flow dividing unit according to at least any one of claims 1 to 10, which guides the treatment liquid to the guide flow path through the inflow portion, and causes the treatment liquid to flow out from the guide flow path through the first outflow portion and the second outflow portion; a first outflow line connected to the first outflow portion; and a second outflow line connected to the second outflow portion, The second outflow line is further connected to a processing unit that performs a process using the processing liquid.

12. The liquid treatment system according to claim 11, characterized in that: The liquid processing system includes a liquid storage portion, the liquid storage portion being connected to the first outflow line and the second outflow line and being connected to the inflow portion via an inflow line. The liquid storage section is configured such that the treatment liquid is supplied from the liquid storage section to the flow diversion unit via the inflow line, and at least a portion of the treatment liquid flowing out from the flow diversion unit to the first outflow line is returned to the liquid storage section. At least part of the processing liquid that has flowed out from the flow branch unit to the second outflow line and is not supplied to the processing unit is returned to the liquid storage portion.

13. The liquid treatment system according to claim 12, characterized in that: The liquid storage section is provided with a discharge port for discharging the treatment liquid returned to the liquid storage section via the first outflow line at a position above the treatment liquid stored in the storage space of the liquid storage section.

14. The liquid treatment system according to claim 11, characterized in that: There are multiple diversion units.

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