Spraying type semiconductor grade quartz ring cleaning equipment

Abstract

The utility model discloses spraying type semiconductor-level quartz ring cleaning equipment which comprises a box body, a water pump is arranged on the middle side of the rear end of the box body, a connecting pipe is connected to the lower side of the water pump, a connecting pipe is connected to the upper side of the water pump, a splitter plate is fixedly installed on the front side of the upper end of the connecting pipe, and a spraying head is connected to the lower side of the splitter plate. The guide plate is fixedly mounted on the lower side of the interior of the box body, a motor is fixedly mounted on the rear side of the interior of the box body, a filter screen is connected to the upper side of the guide plate, a mounting plate is fixedly connected to the middle side of the interior of the box body, a rotating disc is fixedly mounted on the upper side of a linkage wheel, and a clamping structure is connected to the upper side of the rotating disc; and the connecting plate is installed on the upper side of the front end of the box body, and the outer side of the connecting plate is connected with a connecting rod. According to the spraying type cleaning equipment for the semiconductor-grade quartz ring, the quartz ring can be conveniently clamped, the quartz ring can be conveniently sprayed and cleaned, and water flow can be conveniently recycled.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor-grade quartz rings, in particular to a spray-type semiconductor-grade quartz ring cleaning device. Background Art

[0002] Cleaning equipment refers to semiconductor-grade quartz rings, which are annular parts made of quartz material with electrical conductivity between that of conductors and insulators at room temperature. They are one of the basic components used to fix precision objects. Cleaning equipment is needed to clean the quartz rings during the processing of semiconductor-grade quartz rings. A spray structure is needed during the use of the cleaning equipment for semiconductor-grade quartz rings to improve the use effect of the cleaning equipment for semiconductor-grade quartz rings.

[0003] However, most of the existing technical solutions have the following defects: when the quartz ring is clamped, the clamping plate is driven by a cylinder to clamp it, the ordinary cleaning equipment has a poor spray cleaning effect on the quartz ring, and the recycling of water flow is not convenient enough. Therefore, the utility model provides a spray-type semiconductor-grade quartz ring cleaning equipment to solve the above-mentioned problems. Utility Model Content

[0004] The purpose of the utility model is to provide a spray-type semiconductor-grade quartz ring cleaning device to solve the problem proposed in the above-mentioned background technology that the quartz ring is clamped by a cylinder driving a clamping plate to clamp it, the ordinary cleaning equipment has a poor spray cleaning effect on the quartz ring, and the recycling of water flow is not convenient enough.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a spray-type semiconductor-grade quartz ring cleaning device, comprising a box body, a water pump is arranged at the middle side of the rear end thereof, and a connecting pipe is connected to the lower side of the water pump, a connecting pipe is connected to the upper side of the water pump, and a diverter plate is fixedly installed on the front side of the upper end of the connecting pipe, and a nozzle is connected to the lower side of the diverter plate;

[0006] Also includes:

[0007] A guide plate is fixedly mounted on the lower inner side of the box, and a motor is fixedly mounted on the inner rear side of the box, a filter is connected to the upper side of the guide plate, and a fixing rod is connected to the front side of the filter, a mounting plate is fixedly connected to the inner middle side of the box, and a motor is arranged on the front middle side of the box, a connecting rod is connected to the rear side of the motor, and a linkage wheel is connected to the left side of the connecting rod, a turntable is fixedly mounted on the upper side of the linkage wheel, and a clamping structure is connected to the upper side of the turntable;

[0008] A connecting plate is installed on the upper front end of the box body, and a connecting rod is connected to the outer side of the connecting plate.

[0009] Preferably, the filter screen is connected to the fixing rod by means of threads and serves to fix the filter screen.

[0010] Preferably, the filter screen and the guide plate are connected in a fitting manner, and the inner side of the guide plate is inclined.

[0011] Preferably, a worm gear structure is formed between the connecting rod and the linkage wheel, and the linkage wheel and the mounting plate are connected in a rotational manner.

[0012] Preferably, the connecting plate and the box body are connected by snap-fitting, and the vertical cross-section of the connecting plate is a "T"-shaped structure.

[0013] Preferably, the clamping structure includes a moving rod installed on the inner front side of the turntable, and clamping plates are installed on the rear side of the moving rod and the rear side of the upper end of the turntable, and the inner side of the clamping plate is connected to a protective plate.

[0014] Preferably, the clamping plate and the protective plate are connected by snapping, and the protective plate is symmetrically distributed front to back about the center line of the turntable.

[0015] Preferably, the moving rod is connected to the turntable by means of threads, and the moving rod is connected to the clamping plate via a bearing.

[0016] Compared with the prior art, the utility model has the following beneficial effects: the spray-type semiconductor-grade quartz ring cleaning device is convenient for clamping the quartz ring, convenient for spray cleaning the quartz ring, and convenient for recycling the water flow;

[0017] 1. By rotating the connecting rod, the connecting rod is threadedly connected to the outside of the connecting plate, so that the connecting rod is separated at the front side of the box, and then the quartz ring is placed on the upper side of the turntable, and the moving rod is rotated to make the moving rod threadedly connected to the inner front side of the turntable, so that the clamping plate connected to the moving rod through the bearing slides backward inside the turntable, and then the clamping plate drives the protective plate to clamp the quartz ring, which is convenient for clamping the quartz ring;

[0018] 2. Start the motor to drive the connecting rod to rotate on the right side of the mounting plate, so that the connecting rod forms a worm gear linkage wheel, and then the linkage wheel drives the turntable to rotate, and the turntable drives the quartz ring to rotate. Start the water pump, so that the water pump draws the water flow on the lower side of the box into the inside of the connecting pipe through the connecting pipe, and then enters the inside of the diverter plate through the connecting pipe, and then sprays out through the nozzle connected to the lower side of the diverter plate to clean the quartz ring on the upper side of the turntable, so as to facilitate the spray cleaning of the quartz ring;

[0019] 3. The filter screen arranged on the upper side of the guide plate is used to filter the water flow, thereby facilitating the recycling of the water flow. The fixing rod is then threadedly connected to the front middle side of the box by rotating the fixing rod, so that the fixing rod is separated at the front side of the filter screen. The filter screen is then pulled upward to separate the filter screen inside the box, making it convenient to replace the filter screen. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the overall cross-sectional structure of the connection between the box body and the guide plate of the utility model;

[0021] Figure 2 This is a schematic diagram of the overall cross-sectional structure of the connection between the water pump and the box body of the utility model;

[0022] Figure 3 For this utility model Figure 2 The enlarged structural diagram at A in the middle;

[0023] Figure 4 It is a schematic diagram of the overall cross-sectional structure of the connection between the connecting rod and the linkage wheel of the utility model.

[0024] In the figure: 1. box body; 2. water pump; 3. connecting pipe; 4. connecting pipe; 5. diverter plate; 6. nozzle; 7. guide plate; 8. filter screen; 9. mounting plate; 10. connecting rod; 11. linkage wheel; 12. turntable; 13. protective plate; 14. connecting plate; 15. clamping plate; 16. motor; 17. moving rod; 18. fixing rod; 19. connecting rod. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] See also Figure 1-4 The utility model provides a technical solution: a spray-type semiconductor-grade quartz ring cleaning device, comprising: a water pump 2 is arranged at the middle side of the rear end of a box body 1, and a connecting pipe 3 is connected to the lower side of the water pump 2, and a connecting pipe 4 is connected to the upper side of the water pump 2, and a diverter plate 5 is fixedly installed on the front side of the upper end of the connecting pipe 4, and a nozzle 6 is connected to the lower side of the diverter plate 5. When the water pump 2 is started, the water pump 2 absorbs the water flow on the lower side of the box body 1 into the inside of the connecting pipe 4 through the connecting pipe 3, and then enters the inside of the diverter plate 5 through the connecting pipe 4, and then sprays out through the nozzle 6 connected to the lower side of the diverter plate 5 to clean the quartz ring on the upper side of the turntable 12;

[0027] The guide plate 7 is fixedly mounted on the lower inner side of the box body 1, and a motor 16 is fixedly mounted on the inner rear side of the box body 1, a filter screen 8 is connected to the upper side of the guide plate 7, and a fixing rod 18 is connected to the front side of the filter screen 8, a mounting plate 9 is fixedly connected to the inner middle side of the box body 1, and a motor 16 is arranged on the front middle side of the box body 1, a connecting rod 10 is connected to the rear side of the motor 16, and a linkage wheel 11 is connected to the left side of the connecting rod 10, a turntable 12 is fixedly mounted on the upper side of the linkage wheel 11, and a clamping structure is connected to the upper side of the turntable 12, and then a quartz ring is placed on the upper side of the turntable 12, and the clamping structure is rotated so that the clamping structure clamps the quartz ring, which is convenient for clamping the quartz ring, and the motor 16 is started so that the motor 16 drives the connecting rod 10 The right side of the mounting plate 9 is rotated, so that the linkage wheel 11 connected to the connecting rod 10 is rotated, and then the linkage wheel 11 drives the turntable 12 to rotate, and the turntable 12 drives the quartz ring to rotate, so that the water flow is sprayed through the nozzle 6 to clean the quartz ring on the upper side of the turntable 12, which is convenient for spraying and cleaning the quartz ring, and the filter screen 8 provided on the upper side of the guide plate 7 is convenient for filtering the water flow, so as to facilitate the recycling of the water flow, and then by rotating the fixing rod 18, the fixing rod 18 is connected to the middle side of the front end of the box body 1, so that the fixing rod 18 is separated from the front side of the filter screen 8, and then the filter screen 8 is pulled upward to separate the filter screen 8 inside the box body 1, which is convenient for replacing the filter screen 8;

[0028] The connecting plate 14 is installed on the upper front side of the box body 1, and a connecting rod 19 is connected to the outer side of the connecting plate 14. The connecting rod 19 is rotated to make the connecting rod 19 threadedly connected to the outer side of the connecting plate 14, so that the connecting rod 19 is separated at the front side of the box body 1.

[0029] When using the spray type semiconductor grade quartz ring cleaning equipment, the specific Figure 1 , Figure 2 and Figure 3 In the process, the connecting rod 19 is rotated, and the connecting plate 14 is connected to the housing 1 by a snap-fitting manner, and the vertical cross-section of the connecting plate 14 is a "T"-shaped structure, so that the connecting rod 19 is threadedly connected to the outer side of the connecting plate 14, so that the connecting rod 19 is separated at the front side of the housing 1, and then the quartz ring is placed on the upper side of the turntable 12, and the moving rod 17 is connected to the turntable 12 by a threaded manner, and the moving rod 17 is connected to the clamping plate 15 through a bearing, and the moving rod 17 is rotated, so that the moving rod 17 is threadedly connected to the inner front side of the turntable 12, so that the clamping plate 15 connected to the moving rod 17 through the bearing slides backward inside the turntable 12, and the clamping plate 15 is connected to the protective plate 13 by a snap-fitting manner, and the protective plate 13 is symmetrically distributed front and back about the center line of the turntable 12, so that the clamping plate 15 drives the protective plate 13 to clamp the quartz ring, which is convenient for clamping the quartz ring;

[0030] Specific as Figure 1 , Figure 2 and Figure 4 In the process, the motor 16 is started, a worm gear structure is formed between the connecting rod 10 and the interlocking wheel 11, and the interlocking wheel 11 is connected to the mounting plate 9 in a rotational manner, so that the motor 16 drives the connecting rod 10 to rotate on the right side inside the mounting plate 9, thereby rotating the interlocking wheel 11 of the worm gear formed by the connecting rod 10, and then the interlocking wheel 11 drives the turntable 12 to rotate, and the turntable 12 drives the quartz ring to rotate, and the water pump 2 is started, so that the water pump 2 absorbs the water flow on the lower side of the inside of the box body 1 into the inside of the connecting pipe 4 through the connecting pipe 4, and then enters the inside of the diverter plate 5 through the connecting pipe 4, and then sprays out through the nozzle 6 connected to the lower side of the diverter plate 5 to clean the quartz ring on the upper side of the turntable 12, so as to facilitate the spray cleaning of the quartz ring;

[0031] Specific as Figure 1 , Figure 2 and Figure 3 In the figure, since the filter screen 8 and the guide plate 7 are connected in a fitting manner, and the inner side of the guide plate 7 is inclined, the filter screen 8 set on the upper side of the guide plate 7 is convenient for filtering the water flow, thereby facilitating the recycling of the water flow. The filter screen 8 and the fixing rod 18 are connected in a threaded manner and fix the filter screen 8. The fixing rod 18 is then rotated to make the fixing rod 18 threadedly connected to the middle side of the front end of the box body 1, so that the fixing rod 18 is separated at the front side of the filter screen 8, and then the filter screen 8 is pulled upward to separate the filter screen 8 inside the box body 1, so that the filter screen 8 is convenient for replacement.

[0032] The standard parts used in the utility model can be purchased from the market, and special-shaped parts can be customized according to the description in the specification and the drawings. The specific connection methods of each part adopt the conventional means such as mature bolts, rivets, welding, etc. in the prior art. The machinery, parts and equipment all adopt the conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be described in detail here. The content not described in detail in this specification belongs to the prior art known to professional and technical personnel in this field.

[0033] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art may still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A spray-type semiconductor-grade quartz ring cleaning device, comprising a housing (1), a water pump (2) being arranged at the middle side of the rear end thereof, a connecting pipe (3) being connected to the lower side of the water pump (2), a connecting pipe (4) being connected to the upper side of the water pump (2), a flow divider plate (5) being fixedly mounted on the front side of the upper end of the connecting pipe (4), and a nozzle (6) being connected to the lower side of the flow divider plate (5); It is characterized in that Also includes: A guide plate (7) is fixedly mounted on the lower side of the interior of the box (1), and a motor (16) is fixedly mounted on the rear side of the interior of the box (1); a filter screen (8) is connected to the upper side of the guide plate (7), and a fixing rod (18) is connected to the front side of the filter screen (8); a mounting plate (9) is fixedly connected to the middle side of the interior of the box (1), and a motor (16) is arranged at the middle side of the front end of the box (1); a connecting rod (10) is connected to the rear side of the motor (16), and a linkage wheel (11) is connected to the left side of the connecting rod (10); a turntable (12) is fixedly mounted on the upper side of the linkage wheel (11), and a clamping structure is connected to the upper side of the turntable (12); A connecting plate (14) is installed on the upper front end of the box body (1), and a connecting rod (19) is connected to the outer side of the connecting plate (14).

2. The spray-type semiconductor-grade quartz ring cleaning device according to claim 1, characterized in that: The filter screen (8) and the fixing rod (18) are connected in a threaded manner and play a role in fixing the filter screen (8).

3. The spray-type semiconductor-grade quartz ring cleaning device according to claim 2, characterized in that: The filter screen (8) and the guide plate (7) are connected in a fitting manner, and the inner side of the guide plate (7) is inclined.

4. The spray-type semiconductor-grade quartz ring cleaning device according to claim 1, characterized in that: A worm gear structure is formed between the connecting rod (10) and the linkage wheel (11), and the linkage wheel (11) and the mounting plate (9) are connected in a rotational manner.

5. The spray-type semiconductor-grade quartz ring cleaning device according to claim 1, characterized in that: The connecting plate (14) and the box body (1) are connected in a snap-fitting manner, and the vertical cross-section of the connecting plate (14) is a "T"-shaped structure.

6. The spray-type semiconductor-grade quartz ring cleaning device according to claim 1, characterized in that: The clamping structure comprises a moving rod (17) which is mounted on the inner front side of the turntable (12), and a clamping plate (15) is mounted on the rear side of the moving rod (17) and the upper rear side of the turntable (12), and a protective plate (13) is connected to the inner side of the clamping plate (15).

7. The spray-type semiconductor-grade quartz ring cleaning device according to claim 6, characterized in that: The clamping plate (15) and the protection plate (13) are connected by snapping, and the protection plate (13) is symmetrically distributed front and back about the center line of the rotating disk (12).

8. The spray-type semiconductor-grade quartz ring cleaning device according to claim 6, characterized in that: The moving rod (17) is connected to the rotating disk (12) by means of threads, and the moving rod (17) is connected to the clamping plate (15) via a bearing.

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