Temperature-adjustable special gas conveying cabinet

Abstract

The utility model relates to a special gas conveying cabinet with adjustable temperature, which structurally comprises a special gas conveying cabinet body, the interior of the special gas conveying cabinet body is divided into a temperature adjusting cavity and a pipeline valve disc cavity which are arranged left and right by a porous flow equalizing partition plate, and the side top of the temperature adjusting cavity is externally connected with an air outlet of an industrial hot-air blower through an air supply pipe; flow equalizing holes are evenly distributed in the porous flow equalizing partition plate. The conveying cabinet has the advantages that the structural design is reasonable, air can be heated to 40-45 DEG C through the industrial hot-air blower, then is fed into the temperature adjusting cavity partitioned in the conveying cabinet, and then is fed into a pipeline valve disc cavity where a gas cylinder, a valve piece and a pipeline are located through the flow equalizing holes in the partition plate, the environment temperature in the cavity is maintained to be 35-40 DEG C, heating and heat preservation can be effectively achieved, and the conveying cabinet is safe and reliable. Heat loss can be reduced, the overall heating effect in a pipeline valve disc cavity is improved, and then the use performance and reliability of valves and pipelines are improved.

Description

Technical Field

[0001] The utility model relates to a temperature-adjustable special gas delivery cabinet, belonging to the technical field of special gas delivery cabinets. Background Art

[0002] In the special gas supply system used in semiconductor production, most gas delivery cabinets need to heat the valve components and pipelines inside the gas delivery cabinet, especially for liquefied low vapor pressure gas and large flow gas delivery. After the gas in the gas cylinder evaporates, the evaporation heat absorption and throttling effect will produce a cooling effect, which will cause the temperature of the gas cylinder body and the delivery pipeline to drop sharply or even liquefy, resulting in insufficient evaporation of the gas cylinder and unstable pressure, which will lead to problems such as insufficient gas supply flow and damage to pipes due to low temperature.

[0003] The existing technical solution is generally to heat the gas cylinders, valves and gas pipelines to ensure the temperature of the gas pipelines. However, since the structure of the gas transmission cabinet is generally designed with a single layer of carbon steel plate, the thermal insulation effect is poor and the heat loss is large, resulting in low overall heating efficiency of the pipeline system and high cost of using gas equipment. Utility Model Content

[0004] The utility model provides a temperature-adjustable special gas delivery cabinet, which aims to overcome the above-mentioned deficiencies in the prior art, improve the heating efficiency of the cabinet structure, improve the heat preservation effect, and reduce heat loss.

[0005] The technical solution of the utility model is a temperature-adjustable special gas delivery cabinet, which includes a special gas delivery cabinet body, the interior of the gas delivery cabinet body is divided into a temperature adjustment chamber and a pipeline valve disc chamber arranged on the left and right by a porous flow-equalizing partition, the top of the temperature adjustment chamber is connected to the air outlet of an industrial hot air blower through an air supply pipe, and the porous flow-equalizing partition is evenly distributed with flow-equalizing holes. The air is heated to 40-45°C by the industrial hot air blower, enters the temperature adjustment chamber, and then passes through the porous flow-equalizing partition and enters the pipeline valve disc chamber to maintain a temperature of 35-40°C.

[0006] Preferably, the air inlet of the industrial hot air blower is provided with G4 filter cotton to filter the incoming air.

[0007] Preferably, the distribution range of the flow-balancing holes on the porous flow-balancing partition covers the gas cylinder, valve components and pipelines inside the pipeline valve disc cavity, thereby ensuring the heating effect.

[0008] Preferably, the outer side of the temperature regulating chamber except the porous flow-distributing baffle is covered with a heat-insulating layer, which can further reduce human consumption and improve the heating and heat-insulating effect.

[0009] The advantages of the utility model are as follows: the structure is reasonably designed. The air can be heated to 40-45°C by an industrial hot air blower, and then sent into the temperature regulating cavity separated in the conveying cabinet, and then sent into the pipeline valve disc cavity where the gas cylinder, valve parts and pipelines are located through the flow equalization holes on the partition plate, so that the ambient temperature in the cavity is maintained at 35-40°C, which can effectively achieve heating and heat preservation, reduce heat loss, improve the overall heating effect in the pipeline valve disc cavity, and thus improve the performance and reliability of valve parts and pipelines. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 The utility model is a structural schematic diagram of a temperature-adjustable special gas delivery cabinet.

[0011] Figure 2 yes Figure 1 Side view of.

[0012] In the figure, 1 is an industrial hot air blower, 2 is a G4 filter cotton, 3 is an air supply pipe, 4 is a porous flow-averaging baffle, 5 is a temperature regulating chamber, 6 is a pipeline valve disc chamber, 7 is a special gas delivery cabinet, and 8 is an insulation layer. DETAILED DESCRIPTION

[0013] The utility model is further described in detail below in conjunction with embodiments and specific implementation methods.

[0014] like Figure 1 , 2 As shown, a temperature-adjustable special gas delivery cabinet comprises a special gas delivery cabinet body 7, the interior of the gas delivery cabinet body 7 is divided into a temperature regulating chamber 5 and a pipeline valve disc chamber 6 arranged on the left and right by a porous flow-equalizing partition 4, the top of the temperature regulating chamber 5 is externally connected to the air outlet of an industrial hot air blower 1 through an air supply pipe 3, the air inlet of the industrial hot air blower 1 is provided with a G4 filter cotton 2, the porous flow-equalizing partition 4 is evenly distributed with flow-equalizing holes, the distribution range of the flow-equalizing holes covers the gas cylinders, valve components and pipelines inside the pipeline valve disc chamber 6, and the outer side of the temperature regulating chamber 5 except the porous flow-equalizing partition 4 is covered with a thermal insulation layer 8.

[0015] According to the above structure, the working process is: air passes through the air inlet of G4 filter cotton 2 → industrial hot air blower 1 (heating to 40-45℃) → temperature regulating chamber 5 → porous flow equalizing baffle 4 → pipeline valve disc chamber 6 (maintaining temperature 35-40℃).

[0016] Specifically, after the air is heated to 40-45°C by the industrial hot air blower 1, it is sent into the temperature regulating chamber 5 of the special gas delivery cabinet body 7, and then the hot air is sent into the pipeline valve disc cavity 6 through the flow equalizing holes of the porous flow equalizing baffle 4. A temperature sensor can be preferably configured inside the pipeline valve disc cavity 6 to detect the internal temperature of the pipeline valve disc cavity 6 in real time, and feed the signal back to the air volume regulating valve of the industrial hot air blower 1, thereby ensuring that the ambient temperature in the pipeline valve disc cavity 6 in the special gas delivery cabinet body 7 is maintained at 35-40°C. The hot air also heats and insulates the gas cylinders, valves, and pipelines in the cabinet as a whole and reduces heat loss, thereby improving the overall heating effect of the pipeline valve disc cavity 6.

[0017] The double cavity and the temperature regulating cavity 5 side adopts the insulation layer 8 design, which can ensure the stable operation of the pipeline and valve components in the set environment of 35-40°C, and improve the performance and reliability of the pipeline and valve components.

[0018] Industrial hot air blower 1 is an existing technology with an air volume of 5-9m³ / min, an adjustable temperature range of 0-80℃, a power of 3KW, and an air outlet diameter of 50mm. The working principle is: the industrial hot air blower 1 draws air into the heater, so that the air passes evenly from the inside and outside of the spiral heating wire. The heat generated by the heating wire after power is turned on exchanges heat with the cold air passing through, thereby increasing the air temperature at the air outlet. The K-type thermocouple at the air outlet promptly feeds back the detected air outlet temperature to the temperature controller. The instrument monitors the actual working temperature according to the set temperature, and transmits the relevant information back to the solid-state relay to control whether the heater is working. At the same time, the fan can use the air volume regulator (inverter, damper) to adjust the air volume of the blown air, thereby realizing the regulation of the working temperature and air volume.

[0019] All the components mentioned above are prior art, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0020] The above is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, and these modifications and improvements all fall within the protection scope of the present invention.

Claims

1. A temperature-adjustable special gas delivery cabinet, characterized in that: The invention comprises a special gas delivery cabinet body (7), wherein the interior of the gas delivery cabinet body (7) is divided into a temperature regulating chamber (5) and a pipeline valve disc chamber (6) arranged on the left and right by a porous flow balancing partition (4), the top of the temperature regulating chamber (5) is externally connected to the air outlet of an industrial hot air blower (1) through an air supply pipe (3), and the porous flow balancing partition (4) is evenly distributed with flow balancing holes.

2. A temperature-adjustable special gas delivery cabinet as claimed in claim 1, characterized in that: The air inlet of the industrial hot air blower (1) is provided with a G4 filter cotton (2).

3. A temperature-adjustable special gas delivery cabinet as claimed in claim 1, characterized in that: The distribution range of the flow balancing holes on the porous flow balancing partition (4) covers the gas cylinder, valve components and pipelines inside the pipeline valve disc cavity (6).

4. A temperature-adjustable special gas delivery cabinet as claimed in claim 1, characterized in that: The outer side surfaces of the temperature regulating chamber (5) except the porous flow-distributing baffle (4) are all covered with a thermal insulation layer (8).

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