Process cold and heat source control system

Abstract

The utility model discloses a process cold and heat source control system which comprises an air conditioning system, a process cooling system, a cooling tower and an air-cooled heat pump unit which are connected through pipelines. The cold storage water tank is arranged between the process cooling system and the magnetic suspension centrifugal unit, the temperature sensor is arranged on a water supply and return pipeline of the process cooling system, and the control unit controls the operation mode of the cold and heat source control system through an instruction. According to the process cold and heat source control system, the process cooling technology and an automatic control system are systematically integrated, the requirements of process production and an air conditioner tail end for cold and heat sources can be met at the same time, automatic allocation is achieved according to the actual requirements of the tail end, and automatic switching of the cold and heat modes of a unit is achieved.

Description

Technical Field

[0001] The utility model relates to a cold and heat source control system, in particular to a cold and heat source control system for a semiconductor factory equipment production process. Background Art

[0002] During the production process of semiconductor factory equipment, cooling water is needed to cool the production molds, and a cold and heat source control system that can provide the specified pressure and temperature needs to be designed.

[0003] Conventional cold and heat source systems cannot simultaneously meet the needs of process production and air-conditioning terminals for cold and heat sources, cannot automatically adjust according to the actual needs of the terminals, cannot achieve automatic switching of the unit's cold and hot modes, and cannot quickly adjust and stabilize operation of load changes. Utility Model Content

[0004] In view of the above-mentioned deficiencies in the current cold and heat source control systems, the utility model provides a process cold and heat source control system that can realize automatic switching of cold and hot modes and meet the needs of air-conditioning terminals for cold and heat sources.

[0005] In order to achieve the above object, the embodiment of the utility model adopts the following technical solution:

[0006] A process cold and heat source control system comprises an air conditioning system, a process cooling system, a cooling tower and an air-cooled heat pump unit connected by pipelines, and also comprises a control unit, a first magnetic levitation centrifugal unit and a second magnetic levitation centrifugal unit, wherein a water outlet of the first magnetic levitation centrifugal unit is connected to a water supply end of the air conditioning system through a switch valve V4 and is connected to the water supply end of the process cooling system through a switch valve V1, a water outlet of the second magnetic levitation centrifugal unit is connected to the water supply end of the process cooling system and is connected to the water supply end of the air conditioning system through switch valves V1 and switch valves V4 in sequence, a water inlet of the first magnetic levitation centrifugal unit is connected to the air-cooled heat pump unit and is connected to a water return end of the air conditioning system through a switch valve V3 and is connected to the water return end of the process cooling system through a switch valve V6, a water inlet of the second magnetic levitation centrifugal unit is connected to a water return end of the process cooling system and is connected to the water return end of the air conditioning system through switch valves V2 and V3 in sequence, and the air-cooled heat pump unit is connected to the water return end of the process cooling system through a switch valve V5.

[0007] According to one aspect of the utility model, a cold storage water tank is provided between the process cooling system and the first magnetic levitation centrifugal unit and the second magnetic levitation centrifugal unit.

[0008] According to one aspect of the utility model, a process cooling water pump is provided between the water supply end of the process cooling system and the cold storage water tank.

[0009] According to one aspect of the utility model, a third temperature sensor T3 is provided on the pipe at the water supply end of the process cooling system, and a fourth temperature sensor T4 is provided on the pipe at the return water end of the process cooling system. Both the third temperature sensor T3 and the fourth temperature sensor T4 are connected to the control unit.

[0010] According to one aspect of the utility model, the cooling tower has a cooling tower input end and a cooling tower output end, the cooling tower output end is connected to the first magnetic levitation centrifugal unit and the second magnetic levitation centrifugal unit respectively through a cooling water pump, and the cooling tower input end is connected to the first magnetic levitation centrifugal unit and the second magnetic levitation centrifugal unit respectively through a pipeline.

[0011] According to one aspect of the utility model, the water inlet end of the first magnetic levitation centrifugal unit and the water inlet end of the second magnetic levitation centrifugal unit are respectively connected to a chilled water pump and a chilled water pump.

[0012] According to one aspect of the utility model, the air-cooled heat pump unit has an air-cooled heat pump unit return water end and an air-cooled heat pump unit water supply end, and the air-cooled heat pump unit return water end is connected to a hot and cold water circulation pump.

[0013] According to one aspect of the utility model, the control unit is configured to switch and execute one of the following modes according to a preset program logic: Mode 1, control the opening of the switch valves V1, V2, V3, V4, V5, and V6, so that the air-cooled heat pump unit and the second magnetic levitation centrifugal unit simultaneously provide a cold source for the process cooling system; Mode 2, control the opening of the switch valves V1 and V2, and control the closing of the switch valves V3, V4, V5, and V6, so that the air-cooled heat pump unit provides a cold and hot source for the air-conditioning system, and the first magnetic levitation centrifugal unit provides a cold source for the process cooling system; Mode 3, control the opening of the switch valves V3 and V4, and control the closing of the switch valves V1, V2, V5, and V6, so that the air-cooled heat pump unit and the first magnetic levitation centrifugal unit provide a cold source for the air-conditioning system, and the second magnetic levitation centrifugal unit provides a cold source for the process cooling system.

[0014] According to one aspect of the utility model, the water supply end of the air conditioning system includes hot and cold water supply for the air conditioning box and hot and cold water supply for the fan coil unit, and the return water end of the air conditioning system includes hot and cold water return water for the air conditioning box and hot and cold water return water for the fan coil unit.

[0015] According to one aspect of the utility model, the water supply end and the water return end of the air conditioning system are respectively provided with a first temperature sensor T1 and a second temperature sensor T2, and the first temperature sensor T1 and the second temperature sensor T2 are both connected to the control unit.

[0016] The beneficial effects of the implementation of the utility model are as follows:

[0017] 1. This solution improves the operation and control of the process cold and hot source control system. It uses a control unit for precise control and cooperates with temperature sensors to detect and control the operation of the system in real time. It also sets up a magnetic levitation unit, which has a much higher energy efficiency than ordinary centrifuges under partial load. It can automatically switch the unit's hot and cold modes according to the preset program logic, which helps to reduce system energy consumption.

[0018] 2. By equipping with appropriate refrigeration equipment and piping systems, the process cooling system has a certain ability to store cooling water, ensuring that the process cooling system has a continuous cooling source, strong compatibility and wide applicability.

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the connection structure of a process cold and hot source control system described in the utility model.

[0021] In the figure: 1-1, the first magnetic levitation centrifugal unit; 1-2, the second magnetic levitation centrifugal unit; 2, the air-cooled heat pump unit; 3, the cold storage water tank; 4, the process cooling system; 5, the process cooling water pump; 6, the second chilled water pump; 7, the second chilled water pump; 8, the hot and cold water circulation pump; 9, the cooling water pump; 10, the cooling tower; 11, the air conditioning system. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] Embodiment 1

[0024] like Figure 1As shown, a process cold and heat source control system includes an air conditioning system 11, a process cooling system 4, a cooling tower 10, an air-cooled heat pump unit 2, a PLC controller, a first magnetic levitation centrifugal unit 1-1 and a second magnetic levitation centrifugal unit 1-2 connected by pipelines, wherein the air-cooled heat pump unit 2, the magnetic levitation centrifugal unit 1 and the PLC controller are connected through the Modbus industrial bus protocol, the air conditioning system 11 is provided with an air conditioning system water supply end and an air conditioning system return end, the air conditioning system water supply end can provide cold and hot water to the air conditioning box and the fan coil, the air conditioning system return end can be used to receive cold and hot water return from the air conditioning box and the fan coil, the first magnetic levitation centrifugal unit 1-1 has a first magnetic levitation centrifugal unit water outlet end and a first magnetic levitation centrifugal unit water inlet end, the first magnetic levitation centrifugal unit water outlet end is connected to the air conditioning system 11 water supply end through a switch valve V4 and a pipeline, and is connected to the process cooling system 4 water supply end through a switch valve V1 and a pipeline, so that To provide hot and cold water to the air-conditioning system 11 or to supply water to the process cooling system 4 respectively; the second magnetic levitation centrifugal unit 1-2 has a second magnetic levitation centrifugal unit water outlet and a second magnetic levitation centrifugal unit water inlet, the second magnetic levitation centrifugal unit water outlet is directly connected to the process cooling system 4 water supply end, and is connected to the air-conditioning system 11 water supply end through the switch valve V1 and the switch valve V4 in sequence, so that it can be used to provide hot and cold water to the air-conditioning system 11 or to supply water to the process cooling system 4 respectively; the first magnetic levitation centrifugal unit water inlet is connected to the air-cooled heat pump unit 2 and is connected to the air-conditioning system 11 return water end through the switch valve V3 and is connected to the process cooling system 4 return water end through the switch valve V6, the second magnetic levitation centrifugal unit water inlet is connected to the process cooling system 4 return water end and is connected to the air-conditioning system 11 return water end through the switch valve V2 and the switch valve V3 in sequence, and the air-cooled heat pump unit 2 is connected to the process cooling system 4 return water end through the switch valve V5. The switch valve V1, switch valve V2, switch valve V3, switch valve V4, switch valve V5, switch valve V6, air conditioning system 11, process cooling system 4, cooling tower 10, air-cooled heat pump unit 2, first magnetic levitation centrifugal unit 1-1 and second magnetic levitation centrifugal unit 1-2 are all connected to the control unit and can be controlled by the control unit.

[0025] The control unit is configured to switch and execute one of the following modes according to a preset program logic:

[0026] Mode 1 is defined as a summer heat pump supplementary process cooling mode, in which the control unit executes a preset program to control the opening of the switch valves V1, V2, V3, V4, V5, and V6, so that the air-cooled heat pump unit 2 and the second magnetic suspension centrifugal unit 1-2 simultaneously provide a cold source for the process cooling system 4;

[0027] Mode 2 is defined as the first magnetic levitation centrifugal unit providing process cooling mode alone. The control unit executes a preset program to control the opening of the switch valves V1 and V2, and the closing of the switch valves V3, V4, V5, and V6, so that the air-cooled heat pump unit 2 provides a cold and hot source for the air-conditioning system 11, and the first magnetic levitation centrifugal unit 1-1 provides a cold source for the process cooling system 4;

[0028] Mode three is defined as the second magnetic levitation centrifugal unit providing process cooling mode alone. The control unit executes a preset program to control the opening of the switch valves V3 and V4, and the closing of the switch valves V1, V2, V5, and V6, so that the air-cooled heat pump unit 2 and the first magnetic levitation centrifugal unit 1-1 provide cold and heat sources for the air-conditioning system 11, and the second magnetic levitation centrifugal unit 1-2 provides a cold source for the process cooling system 4.

[0029] In actual application, a first temperature sensor T1 is provided on the pipe at the water supply end of the air conditioning system, and a second temperature sensor T2 is provided on the pipe at the water return end of the air conditioning system, and the first temperature sensor T1 and the second temperature sensor T2 are both connected to the control unit. The control unit automatically determines which of the above-mentioned operating modes to select according to the preset judgment logic based on the temperatures of the air conditioning box cold and hot water supply pipes and the fan coil cold and hot water supply pipes, the air conditioning box cold and hot water return pipes and the fan coil cold and hot water return pipes fed back by the first temperature sensor T1 and the second temperature sensor T2.

[0030] In practical applications, a third temperature sensor T3 is provided on the pipe at the water supply end of the process cooling system 4, and a fourth temperature sensor T4 is provided on the pipe at the water return end of the process cooling system, and both the third temperature sensor T3 and the fourth temperature sensor T4 are connected to the control unit. The control unit automatically determines which of the above-mentioned operating modes to select according to the preset judgment logic through the temperatures of the process cooling water supply pipe and the process cooling water return pipe fed back by the third temperature sensor T3 and the fourth temperature sensor T4.

[0031] In practical applications, the cooling tower 10 has a cooling tower input end and a cooling tower output end. The cooling tower output end is connected to the first magnetic levitation centrifugal unit 1-1 and the second magnetic levitation centrifugal unit 1-2 through a cooling water pump 9, and the cooling tower 10 input end is connected to the first magnetic levitation centrifugal unit 1-1 and the second magnetic levitation centrifugal unit 1-2 through a pipeline.

[0032] In practical applications, the water inlet end of the first magnetic levitation centrifugal unit 1-1 and the water inlet end of the second magnetic levitation centrifugal unit 1-2 are respectively connected to the second chilled water pump 7 and the first chilled water pump 6, so as to better provide power for the received return water, quickly return water, and improve the cooling return water efficiency.

[0033] In practical applications, the air-cooled heat pump unit 2 has an air-cooled heat pump unit return water end and an air-cooled heat pump unit water supply end, and the air-cooled heat pump unit return water end is connected to a hot and cold water circulation pump 8. The provided hot and cold water circulation pump 8 can provide driving force for the air-cooled heat pump unit to receive return water, and rapid return water improves the cooling return water efficiency.

[0034] In practical applications, a process cooling water pump 5 is provided in front of the water supply end of the process cooling system 4 to provide a stronger driving force for the water supply of the process cooling system.

[0035] Embodiment 2

[0036] like Figure 1As shown, a process cold and heat source control system includes an air conditioning system 11, a process cooling system 4, a cooling tower 10, an air-cooled heat pump unit 2, a PLC controller, a first magnetic levitation centrifugal unit 1-1 and a second magnetic levitation centrifugal unit 1-2 connected by pipelines, a cold storage water tank 3 is provided between the process cooling system 4 and the first magnetic levitation centrifugal unit 1-1 and the second magnetic levitation centrifugal unit 1-2, wherein the air-cooled heat pump unit 2, the magnetic levitation centrifugal unit 1 and the PLC controller are connected via the Modbus industrial bus protocol, The air conditioning system 11 is provided with an air conditioning system water supply end and an air conditioning system return end. The air conditioning system water supply end can provide hot and cold water to the air conditioning box and the fan coil unit, and the air conditioning system return end can be used to receive hot and cold water return from the air conditioning box and the fan coil unit. The first magnetic levitation centrifugal unit 1-1 has a first magnetic levitation centrifugal unit water outlet end and a first magnetic levitation centrifugal unit water inlet end. The first magnetic levitation centrifugal unit water outlet end is connected to the air conditioning system 11 water supply end through a switch valve V4 and a pipeline, and is connected to the process unit 11 through a switch valve V1, a cold water storage tank 3 and a pipeline in sequence. The cooling system 4 water supply end can be used to provide cold and hot water to the air-conditioning system 11 or to supply water to the process cooling system 4; the second magnetic levitation centrifugal unit 1-2 has a second magnetic levitation centrifugal unit water outlet and a second magnetic levitation centrifugal unit water inlet, the second magnetic levitation centrifugal unit water outlet is connected to the cold storage water tank 3 and then to the process cooling system 4 water supply end, and is connected to the air-conditioning system 11 water supply end through the switch valve V1 and the switch valve V4 in sequence, so that it can be used to provide cold and hot water to the air-conditioning system 11 or to supply water to the process cooling system 4. The water inlet of the first magnetic levitation centrifugal unit is connected to the air-cooled heat pump unit 2 and connected to the return water end of the air-conditioning system 11 through the switch valve V3, and connected to the return water end of the process cooling system 4 through the switch valve V6 and the cold storage water tank 3 in turn. The water inlet of the second magnetic levitation centrifugal unit is connected to the return water end of the process cooling system 4 after passing through the cold storage water tank 3 and connected to the return water end of the air-conditioning system 11 through the switch valve V2 and the switch valve V3 in turn. The air-cooled heat pump unit 2 is connected to the return water end of the process cooling system 4 through the switch valve V5 and the cold storage water tank 3 in turn. The switch valve V1, switch valve V2, switch valve V3, switch valve V4, switch valve V5, switch valve V6, air-conditioning system 11, process cooling system 4, cooling tower 10, air-cooled heat pump unit 2, first magnetic levitation centrifugal unit 1-1 and second magnetic levitation centrifugal unit 1-2 are all connected to the control unit and can be controlled by the control unit. A process cooling water pump 5 is provided between the water supply end of the process cooling system 4 and the cold water storage tank 3, which is used to extract the stored cooling water from the cold water storage tank 3 as the cooling water supply for the process cooling system 4. The provision of the cold water storage tank 3 enables the process cooling system 4 to have a certain ability to store cooling water sources, thereby ensuring that the cooling of the process cooling system 4 is uninterrupted, with strong compatibility and wide applicability.

[0037] The control unit is configured to switch and execute one of the following modes according to a preset program logic:

[0038] Mode 1 is defined as a summer heat pump supplementary process cooling mode, in which the control unit executes a preset program to control the opening of the switch valves V1, V2, V3, V4, V5, and V6, so that the air-cooled heat pump unit 2 and the second magnetic suspension centrifugal unit 1-2 simultaneously provide a cold source for the process cooling system 4;

[0039] Mode 2 is defined as the first magnetic levitation centrifugal unit providing process cooling mode alone. The control unit executes a preset program to control the opening of the switch valves V1 and V2, and the closing of the switch valves V3, V4, V5, and V6, so that the air-cooled heat pump unit 2 provides a cold and hot source for the air-conditioning system 11, and the first magnetic levitation centrifugal unit 1-1 provides a cold source for the process cooling system 4;

[0040] Mode three is defined as the second magnetic levitation centrifugal unit providing process cooling mode alone. The control unit executes a preset program to control the opening of the switch valves V3 and V4, and the closing of the switch valves V1, V2, V5, and V6, so that the air-cooled heat pump unit 2 and the first magnetic levitation centrifugal unit 1-1 provide cold and heat sources for the air-conditioning system 11, and the second magnetic levitation centrifugal unit 1-2 provides a cold source for the process cooling system 4.

[0041] In actual application, a first temperature sensor T1 is provided on the pipe at the water supply end of the air conditioning system, and a second temperature sensor T2 is provided on the pipe at the water return end of the air conditioning system, and the first temperature sensor T1 and the second temperature sensor T2 are both connected to the control unit. The control unit automatically determines which of the above-mentioned operating modes to select according to the preset judgment logic based on the temperatures of the air conditioning box cold and hot water supply pipes and the fan coil cold and hot water supply pipes, the air conditioning box cold and hot water return pipes and the fan coil cold and hot water return pipes fed back by the first temperature sensor T1 and the second temperature sensor T2.

[0042] In actual application, the third temperature sensor T3 is provided on the pipe in front of the cold storage water tank 3 at the water supply end of the process cooling system 4, and the fourth temperature sensor T4 is provided on the pipe after the cold storage water tank 3 at the water return end of the process cooling system, and both the third temperature sensor T3 and the fourth temperature sensor T4 are connected to the control unit. The control unit automatically determines which of the above-mentioned operation modes to select according to the preset judgment logic through the temperatures of the process cooling water supply pipe and the process cooling water return pipe fed back by the third temperature sensor T3 and the fourth temperature sensor T4.

[0043] In practical applications, the cooling tower 10 has a cooling tower input end and a cooling tower output end. The cooling tower output end is connected to the first magnetic levitation centrifugal unit 1-1 and the second magnetic levitation centrifugal unit 1-2 through a cooling water pump 9, and the cooling tower 10 input end is connected to the first magnetic levitation centrifugal unit 1-1 and the second magnetic levitation centrifugal unit 1-2 through a pipeline.

[0044] In practical applications, the water inlet end of the first magnetic levitation centrifugal unit 1-1 and the water inlet end of the second magnetic levitation centrifugal unit 1-2 are respectively connected to the second chilled water pump 7 and the first chilled water pump 6, so as to better provide power for the received return water, quickly return water, and improve the cooling return water efficiency.

[0045] In practical applications, the air-cooled heat pump unit 2 has an air-cooled heat pump unit return water end and an air-cooled heat pump unit water supply end, and the air-cooled heat pump unit return water end is connected to a hot and cold water circulation pump 8. The provided hot and cold water circulation pump 8 can provide driving force for the air-cooled heat pump unit to receive return water, and rapid return water improves the cooling return water efficiency.

[0046] Advantages of the utility model:

[0047] 1. This solution improves the operation and control of the process cold and hot source control system. It uses a control unit for precise control and cooperates with temperature sensors to detect and control the operation of the system in real time. It also sets up a magnetic levitation unit, which has a much higher energy efficiency than ordinary centrifuges under partial load. It can automatically switch the unit's hot and cold modes according to the preset program logic, which helps to reduce system energy consumption.

[0048] 2. By equipping with appropriate refrigeration equipment and piping systems, the process cooling system has a certain ability to store cooling water, ensuring that the process cooling system has a continuous cooling source, strong compatibility and wide applicability.

[0049] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any changes or substitutions that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed in the utility model should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model shall be based on the protection scope of the claims.

Claims

1. A process cold and heat source control system, comprising an air conditioning system (11), a process cooling system (4), a cooling tower (10) and an air-cooled heat pump unit (2) connected by pipelines, characterized in that: The invention also comprises a control unit, a first magnetic levitation centrifugal unit (1-1) and a second magnetic levitation centrifugal unit (1-2), wherein a water outlet of the first magnetic levitation centrifugal unit (1-1) is connected to a water supply end of an air conditioning system (11) through a switch valve V4 and is connected to a water supply end of a process cooling system (4) through a switch valve V1, a water outlet of the second magnetic levitation centrifugal unit (1-2) is connected to a water supply end of the process cooling system (4) and is connected to a water supply end of the air conditioning system (11) through a switch valve V1 and a switch valve V4 in sequence, and the first magnetic levitation centrifugal unit (1-2) is connected to a water supply end of the process cooling system (4) and is connected to a water supply end of the air conditioning system (11) through a switch valve V1 and a switch valve V4 in sequence. The water inlet of the suspended centrifugal unit (1-1) is connected to the air-cooled heat pump unit (2) and is also connected to the water return end of the air-conditioning system (11) through a switch valve V3 and is also connected to the water return end of the process cooling system (4) through a switch valve V6; the water inlet of the second magnetic suspension centrifugal unit (1-2) is connected to the water return end of the process cooling system (4) and is connected to the water return end of the air-conditioning system (11) through a switch valve V2 and a switch valve V3 in sequence; the air-cooled heat pump unit (2) is connected to the water return end of the process cooling system (4) through a switch valve V5.

2. A process cold and hot source control system according to claim 1, characterized in that: A cold storage water tank (3) is provided between the process cooling system (4) and the first magnetic suspension centrifugal unit (1-1) and the second magnetic suspension centrifugal unit (1-2).

3. A process cold and hot source control system according to claim 2, characterized in that: A process cooling water pump (5) is provided between the water supply end of the process cooling system (4) and the cold storage water tank (3).

4. A process cold and hot source control system according to claim 1, characterized in that: A third temperature sensor T3 is provided on the pipe at the water supply end of the process cooling system (4), and a fourth temperature sensor T4 is provided on the pipe at the water return end of the process cooling system. Both the third temperature sensor T3 and the fourth temperature sensor T4 are connected to the control unit.

5. A process cold and hot source control system according to claim 1, characterized in that: The cooling tower (10) comprises a cooling tower input end and a cooling tower output end, wherein the cooling tower output end is respectively connected to the first magnetic levitation centrifugal unit (1-1) and the second magnetic levitation centrifugal unit (1-2) via a cooling water pump (9), and the cooling tower (10) input end is respectively connected to the first magnetic levitation centrifugal unit (1-1) and the second magnetic levitation centrifugal unit (1-2) via a pipeline.

6. A process cold and hot source control system according to claim 1, characterized in that: The water inlet end of the first magnetic levitation centrifugal unit (1-1) and the water inlet end of the second magnetic levitation centrifugal unit (1-2) are respectively connected to a second chilled water pump (7) and a first chilled water pump (6).

7. A process cold and hot source control system according to claim 1, characterized in that: The air-cooled heat pump unit (2) comprises an air-cooled heat pump unit water return end and an air-cooled heat pump unit water supply end, and the air-cooled heat pump unit water return end is connected to a hot and cold water circulation pump (8).

8. A process cold and hot source control system according to any one of claims 1 to 7, characterized in that: The control unit is configured to switch and execute one of the following modes according to a preset program logic: mode one, controlling the opening and closing of the switch valves V1, V2, V3, V4, V5, and V6, so that the air-cooled heat pump unit (2) and the second magnetic suspension centrifugal unit (1-2) simultaneously provide a cold source for the process cooling system (4); mode two, controlling the opening and closing of the switch valves V1 and V2, and controlling the closing of the switch valves V3, V4, V5, and V6, so that the air-cooled heat pump unit (2) provides a cold and hot source for the air conditioning system (11), and the first magnetic suspension centrifugal unit (1-1) provides a cold source for the process cooling system (4); mode three, controlling the opening and closing of the switch valves V3 and V4, and controlling the closing of the switch valves V1, V2, V5, and V6, so that the air-cooled heat pump unit (2) and the first magnetic suspension centrifugal unit (1-1) provide a cold source for the air conditioning system (11), and the second magnetic suspension centrifugal unit (1-2) provides a cold source for the process cooling system (4).

9. A process cold and hot source control system according to claim 8, characterized in that: The water supply end of the air conditioning system (11) includes hot and cold water supply for the air conditioning box and hot and cold water supply for the fan coil unit, and the water return end of the air conditioning system includes hot and cold water return for the air conditioning box and hot and cold water return for the fan coil unit.

10. A process cold and hot source control system according to claim 9, characterized in that: The water supply end of the air conditioning system and the water return end of the air conditioning system are respectively provided with a first temperature sensor T1 and a second temperature sensor T2, and the first temperature sensor T1 and the second temperature sensor T2 are both connected to the control unit.

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