Device for monitoring whether boat entering position is abnormal or not

Abstract

The utility model belongs to the technical field of quartz boat conveying, and particularly relates to a device for monitoring whether a boat inlet position is abnormal or not, which comprises a frame plate, the frame plate is inverted L-shaped, at least two parallel slide rails are mounted at the top of the frame plate, a control box is arranged on the left side of the frame plate, and a push plate is arranged on the right side wall of the control box through a plurality of sections of electric push rods; a quartz boat is slidably placed on the slide rail, and the multi-section electric push rod drives the push plate to push the quartz boat to move at the position of the super-diffusion furnace. According to the quartz boat conveying device, in the quartz boat conveying process, after the quartz boat inclines, the side clamping plate on one side is pushed, the limiting spring is compressed, the sliding rod slides in the sleeve along with the limiting spring, the quartz boat can be conveniently straightened through the elastic force of the limiting spring, and when the inclination amplitude of the quartz boat is large, the sliding amplitude of the sliding rod is large, and the end of the sliding rod makes contact with the touch switch, the quartz boat can be conveyed. When the quartz boat tilts, the alarm gives an alarm so as to remind a user that the inclination amplitude of the quartz boat is large, and the silicon wafer in the quartz boat may deviate and topple.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz boat transportation, in particular to a device for monitoring whether a boat entry position is abnormal. Background Art

[0002] In the production process of crystalline silicon solar cells, the high-temperature diffusion process of silicon wafers is an important step. During the high-temperature diffusion, the silicon wafer is placed in a high-temperature diffusion furnace and passed with gases such as nitrogen and polonium trichloride. After decomposition at high temperature, a phosphorus-nitrogen junction is formed on the surface of the silicon wafer to complete the process. Existing high-temperature diffusion furnaces include horizontal diffusion furnaces, which are used to transport quartz boats in and out. The diffusion furnace system is divided into a cantilever paddle system and a soft landing system. When the existing cantilever paddle system diffusion furnace is in use, the quartz boat is set on the SIC paddle, and the movement of the SIC paddle brings the quartz boat and the silicon wafer inside the quartz boat into the high-temperature diffusion furnace.

[0003] The existing device lacks a fixed structure to limit the moving quartz boat. When the quartz boat is transported, once the quartz boat tilts, the silicon wafers inside it may shift and tip over, thereby causing damage to the silicon wafers. Therefore, it is necessary to develop a device to monitor whether the position of the boat is abnormal. Utility Model Content

[0004] The purpose of this section is to summarize some aspects of the embodiments of the utility model and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the abstract of the specification and the name of the utility model of this application to avoid blurring the purpose of this section, the abstract of the specification and the name of the utility model, and such simplifications or omissions cannot be used to limit the scope of the utility model.

[0005] In order to solve the above technical problems, according to one aspect of the present invention, the present invention provides the following technical solutions:

[0006] A device for monitoring whether a boat entry position is abnormal, comprising:

[0007] A rack plate, the rack plate is in an inverted "L" shape, and at least two parallel slide rails are installed on the top of the rack plate, a control box is arranged on the left side of the rack plate, and a push plate is arranged on the right side wall of the control box through a multi-section electric push rod;

[0008] A quartz boat is slidably placed on the slide rail, and the multi-section electric push rod drives the push plate to push the quartz boat to move to the position of the super diffusion furnace;

[0009] Spline rods, parallel spline rods are arranged on both sides of the slide rails on the frame plate, two spline rods are arranged and are rotatably arranged between the frame plate and the side wall of the control box, a horizontal spline sleeve is slidably arranged on the rod body of each spline rod, a limit spring is arranged on the top of the spline sleeve, and the other end of the limit spring is hingedly provided with a side clamping plate for clamping the side wall of the quartz boat;

[0010] A transmission rod, an installation cavity is provided inside the control box, and a transmission rod is arranged inside the installation cavity to rotate alternately up and down and front and back. The two transmission rods are respectively provided with gears that mesh with each other. The left end of each spline sleeve extends and rotates through the inner cavity of the control box and a first worm gear is provided at the end. The rod bodies of the two transmission rods are respectively provided with first worms that mesh with the first worm gears, and the lead angle of the first worm gear is smaller than the equivalent friction angle between the meshing gear teeth of the first worm gear.

[0011] As a preferred solution of the device for monitoring whether the position of the boat entry is abnormal described in the utility model, the quartz boat is provided with a positioning groove for positioning the silicon wafer, the upper end of the slide rail is protruding with a convex strip, the bottom of the quartz boat is concave to form a groove that slides on the convex strip, and the edges of the groove and the convex strip are smoothly arranged.

[0012] As a preferred solution of the device for monitoring whether the position of the boat entry is abnormal described in the utility model, there are two side clamps in total and they are symmetrically arranged about the front and rear of the quartz boat. When the two side clamps clamp the front and rear side walls of the quartz boat, the front and rear ends of the push plate respectively abut against the left ends of the two side clamps.

[0013] As a preferred solution of the device for monitoring whether the boat entry position is abnormal described in the utility model, wherein: mounting blocks are provided at both ends of the limit spring, the lower mounting block is fixed on the outer wall of the spline sleeve, and the upper mounting block is hinged on the side wall of the side clamp, and a telescopic rod is provided between the upper and lower mounting blocks, and the gap of the telescopic rod is located in the circle of the limit spring.

[0014] As a preferred solution of the device for monitoring whether the boat entry position is abnormal described in the utility model, the telescopic rod includes a hollow sleeve with an open end, and a sliding rod sliding in the inner cavity of the sleeve, a touch switch is provided on the end of the inner cavity side wall of the sleeve away from the sliding rod, and an alarm is provided on the side wall of the control box, and the touch switch is electrically connected to the alarm.

[0015] As a preferred solution of the device for monitoring whether the boat entry position is abnormal described in the utility model, a horizontal driving rod is rotatably arranged through the middle of the left side wall of the control box, a second worm gear is arranged on the rod body of the upper transmission rod, and a second worm gear meshing with the second worm gear is arranged on the right end rod body of the driving rod.

[0016] As a preferred solution of the device for monitoring whether the boat entry position is abnormal according to the utility model, the left end of the driving rod is located outside the control box and is provided with a turntable, and the outer side of the turntable is provided with anti-slip grooves.

[0017] Compared with the prior art, the beneficial effects of the utility model are as follows: the silicon wafer is placed in the positioning groove of the quartz boat, and then the quartz boat is placed on the slide rail and in contact with the right side of the push plate, and then the drive rod is driven to rotate by the turntable, and the upper transmission rod is driven to rotate by the second worm and the second worm gear, and then the gear makes the lower transmission rod rotate in the opposite direction to the upper transmission rod, and then the first worm and the first worm gear drive the two spline sleeves to rotate in the opposite direction at the same time, and the spline sleeve drives the side clamps to clamp the front and rear side walls of the quartz boat respectively, so that the moving quartz boat is more stable, and finally, the multi-section electric push rod is started to push the quartz boat and the two side clamps to gradually move to the position of the diffusion furnace through the push plate, and the spline sleeve slides along the spline rod.

[0018] During the transportation of the quartz boat, when the quartz boat tilts, it pushes the side clamp on one side to compress the limit spring, and the slide rod slides in the sleeve. The elastic force of the limit spring helps to straighten the quartz boat. When the quartz boat tilts to a large extent, the slide rod slides to a large extent. When the end touches the touch switch, the alarm will sound, thereby reminding the user that the quartz boat tilts to a large extent and the silicon wafers inside may shift and tip over. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solution of the implementation of the utility model, the utility model will be described in detail below in combination with the drawings and detailed implementation. Obviously, the drawings described below are only some implementations of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0020] Figure 1 It is a schematic diagram of the structure of the utility model;

[0021] Figure 2 This is a schematic diagram of the structure of the quartz boat of the utility model;

[0022] Figure 3 It is a structural schematic diagram of the spline sleeve and its mounting components of the utility model;

[0023] Figure 4 It is a structural schematic diagram of the sleeve cross section of the utility model;

[0024] Figure 5 For this utility model Figure 1 A schematic diagram of the structure of the side wall direction and the internal components of the control box;

[0025] Figure 6 This is a structural schematic diagram of the utility model after the quartz boat is placed on the slide rail;

[0026] Figure 7 For this utility model Figure 6 Schematic diagram of the structure after the two side clamps respectively clamp the front and rear side walls of the quartz boat.

[0027] In the figure: a frame plate 100, a slide rail 110, a control box 120, a multi-section electric push rod 130, a push plate 140, a quartz boat 200, a positioning groove 210, a slide groove 220, a spline rod 300, a spline sleeve 310, a limit spring 320, a side clamping plate 330, a mounting block 340, a slide rod 350, a sleeve 360, a touch switch 370, an alarm 380, a transmission rod 400, a gear 410, a first worm gear 420, a first worm 430, a second worm gear 440, a drive rod 450, a second worm 460, and a turntable 470. DETAILED DESCRIPTION

[0028] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below with reference to the accompanying drawings.

[0029] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific implementation methods disclosed below.

[0030] Secondly, the present invention is described in detail with reference to the schematic diagram. When describing the implementation of the present invention, for the sake of convenience, the cross-sectional diagram showing the device structure will not be partially enlarged according to the general proportion, and the schematic diagram is only an example, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0031] In order to make the purpose, technical solution and advantages of the present invention more clear, the implementation mode of the present invention will be further described in detail below with reference to the accompanying drawings.

[0032] See also Figure 1-Figure 7 , shows a schematic diagram of the structure of an implementation method of a device for monitoring whether the position of the boat is abnormal, please refer to Figure 1-Figure 7 , a device for monitoring whether the boat entry position is abnormal is introduced in detail.

[0033] A device for monitoring whether a boat inlet position is abnormal comprises a frame plate 100, the frame plate 100 is in an inverted "L" shape, and at least two parallel slide rails 110 are installed on the top of the frame plate 100, a control box 120 is arranged on the left side of the frame plate 100, and a push plate 140 is arranged on the right side wall of the control box 120 through a multi-section electric push rod 130;

[0034] A quartz boat 200 is slidably placed on the slide rail 110, and the multi-section electric push rod 130 drives the push plate 140 to push the quartz boat 200 to move to the position of the diffusion furnace, which is not shown in the figure;

[0035] Parallel spline rods 300 are arranged on both sides of the slide rail 110 on the frame plate 100. Two spline rods 300 are arranged and are rotatably arranged between the frame plate 100 and the side wall of the control box 120. A transverse spline sleeve 310 is slidably arranged on the rod body of each spline rod 300. A limit spring 320 is arranged on the top of the spline sleeve 310. The other end of the limit spring 320 is hingedly provided with a side clamping plate 330 for clamping the side wall of the quartz boat 200.

[0036] The control box 120 is provided with an installation cavity inside, and a transmission rod 400 is arranged inside the installation cavity to rotate alternately up and down and front and back. The two transmission rods 400 are respectively provided with gears 410 that mesh with each other. The left end of each spline sleeve 310 extends and rotates through the inner cavity of the control box 120 and a first worm gear 420 is provided at the end. The rod bodies of the two transmission rods 400 are respectively provided with a first worm 430 that meshes with the first worm gear 420. The lead angle of the first worm 430 is smaller than the equivalent friction angle between the meshing teeth of the first worm gear 420, and reverse self-locking can be achieved, that is, only the first worm 430 can drive the first worm wheel 420, but the first worm wheel 420 cannot drive the first worm 430, so that the side clamp 330 is more stable after the position is adjusted.

[0037] Furthermore, the quartz boat 200 is provided with a positioning groove 210 for positioning the silicon wafer, the upper end of the slide rail 110 is protruding with a convex strip, and the bottom of the quartz boat 200 is concave to form a groove 220 that slides on the convex strip. The edges of the groove 220 and the convex strip are smoothly arranged to reduce the friction resistance when the two move relative to each other.

[0038] Furthermore, there are two side clamps 330 and they are symmetrically arranged with respect to the front and rear sides of the quartz boat 200. When the two side clamps 330 clamp the front and rear side walls of the quartz boat 200, the front and rear ends of the push plate 140 respectively abut against the left ends of the two side clamps 330. When the multi-section electric push rod 130 is started, the push plate 140 pushes the quartz boat 200 and the two side clamps 330 to gradually move to the position of the super diffusion furnace.

[0039] Furthermore, mounting blocks 340 are provided at both ends of the limit spring 320, the lower mounting block 340 is fixed on the outer wall of the spline sleeve 310, and the upper mounting block 340 is hinged on the side wall of the side clamp 330, and a telescopic rod is provided between the upper and lower mounting blocks 340, and the gap of the telescopic rod is located in the circle of the limit spring 320. The overall bending resistance of the limit spring 320 is improved by the provision of the telescopic rod.

[0040] Furthermore, the telescopic rod includes a hollow sleeve 360 ​​with an open end, and a slide bar 350 sliding in the inner cavity of the sleeve 360. A touch switch 370 is provided at one end of the inner cavity side wall of the sleeve 360 ​​away from the slide bar 350. An alarm 380 is provided on the side wall of the control box 120. The touch switch 370 is electrically connected to the alarm 380. When the quartz boat 200 is tilted, the side clamp 330 on one side is pushed to compress the limit spring 320, and the slide bar 350 slides in the sleeve 360 ​​accordingly. The elastic force of the limit spring 320 is conducive to the straightening of the quartz boat 200. When the quartz boat 200 tilts to a large extent, the slide bar 350 slides to a large extent. After the end touches the touch switch 370, the alarm 380 will sound an alarm, thereby reminding the user that the quartz boat 200 tilts to a large extent and the silicon wafers in the quartz boat 200 may shift and tip over.

[0041] Furthermore, a horizontal driving rod 450 is rotatably provided in the middle of the left side wall of the control box 120, a second worm gear 440 is provided on the rod body of the upper transmission rod 400, and a second worm 460 meshing with the second worm gear 440 is provided on the right end rod body of the driving rod 450. The left end of the driving rod 450 is located outside the control box 120 and is provided with a turntable 470. The outer side of the turntable 470 is provided with anti-slip grooves. After the driving rod 450 is rotated by the turntable 470, the upper transmission rod 400 is driven to rotate by the second worm gear 460 and the second worm gear 440, and then the gear 410 makes the lower transmission rod 400 rotate in the opposite direction to the upper transmission rod 400.

[0042] During specific use, the silicon wafer is placed in the positioning groove 210 of the quartz boat 200, and then the quartz boat 200 is placed on the slide rail 110 and in contact with the right side of the push plate 140. After the drive rod 450 is driven to rotate by the turntable 470, the upper transmission rod 400 is driven to rotate by the second worm 460 and the second worm gear 440, and then the gear 410 makes the lower transmission rod 400 rotate in the opposite direction to the upper transmission rod 400, and then the first worm 430 and the first worm gear 420 drive the two spline sleeves 310 to rotate in the opposite direction at the same time, and the spline sleeves 310 drive the side clamps 330 to clamp the front and rear side walls of the quartz boat 200 respectively, so that the moving quartz boat 200 is more stable. Finally, the multi-section electric push rod 130 is started to push the quartz boat 200 and the two side clamps 330 to gradually move to the position of the diffusion furnace through the push plate 140, and the spline sleeves 310 slide along the spline rods 300.

[0043] During the transportation of the quartz boat 200, when the quartz boat 200 tilts, it pushes the side clamp 330 on one side, causing the limit spring 320 to be compressed, and the slide bar 350 slides in the sleeve 360. The elastic force of the limit spring 320 helps the quartz boat 200 to be straightened. When the quartz boat 200 tilts to a large extent, the slide bar 350 slides to a large extent, and after the end touches the touch switch 370, the alarm 380 will sound an alarm, thereby reminding the user that the quartz boat 200 tilts to a large extent and the silicon wafers therein may shift and fall over.

[0044] Although the present invention has been described above with reference to the embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed in the present invention may be used in combination with each other in any manner, and the fact that these combinations are not exhaustively described in this specification is only for the sake of omitting space and saving resources. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A device for monitoring whether the boat entry position is abnormal, characterized in that: include: A rack plate (100), the rack plate (100) being in an inverted "L" shape and having at least two parallel slide rails (110) installed on the top thereof, a control box (120) being arranged on the left side of the rack plate (100), and a push plate (140) being arranged on the right side wall of the control box (120) via a multi-section electric push rod (130); A quartz boat (200), the quartz boat (200) being slidably placed on the slide rail (110), and the multi-section electric push rod (130) driving the push plate (140) to push the quartz boat (200) to move to the position where the super diffusion furnace is located; Spline rods (300), wherein parallel spline rods (300) are arranged on both sides of the slide rail (110) on the frame plate (100), and two spline rods (300) are arranged in total and are rotatably arranged between the frame plate (100) and the side wall of the control box (120), and a transverse spline sleeve (310) is slidably arranged on the rod body of each spline rod (300), and a limit spring (320) is arranged on the top of the spline sleeve (310), and the other end of the limit spring (320) is hingedly provided with a side clamping plate (330) for clamping the side wall of the quartz boat (200); A transmission rod (400), wherein an installation cavity is provided inside the control box (120), and transmission rods (400) are arranged inside the installation cavity in an alternating manner up and down and forward and backward, and two transmission rods (400) are respectively provided with mutually meshing gears (410), and the left end of each spline sleeve (310) extends and rotates through the inner cavity of the control box (120) and a first worm gear (420) is provided at the end thereof, and first worms (430) meshing with the first worm gears (420) are respectively provided on the rod bodies of the two transmission rods (400), and the lead angle of the first worm gears (430) is smaller than the equivalent friction angle between the meshing gear teeth of the first worm gear (420).

2. The device for monitoring whether the boat entry position is abnormal according to claim 1, characterized in that: The quartz boat (200) is provided with a positioning groove (210) for positioning a silicon wafer, the upper end of the slide rail (110) is provided with a convex strip protruding therefrom, the bottom of the quartz boat (200) is concavely formed with a groove (220) that slides against the convex strip, and the edges of the groove (220) and the convex strip are smoothly arranged.

3. The device for monitoring whether the boat entry position is abnormal according to claim 1, characterized in that: Two side clamping plates (330) are provided in total and are symmetrically arranged front and rearwardly with respect to the quartz boat (200). When the two side clamping plates (330) clamp the front and rear side walls of the quartz boat (200), the front and rear ends of the push plate (140) respectively abut against the left ends of the two side clamping plates (330).

4. The device for monitoring whether the boat entry position is abnormal according to claim 1, characterized in that: Mounting blocks (340) are provided at both ends of the limit spring (320), the lower mounting block (340) being fixed on the outer side wall of the spline sleeve (310), and the upper mounting block (340) being hinged on the side wall of the side clamping plate (330), and a telescopic rod being provided between the upper and lower mounting blocks (340), and a gap of the telescopic rod being located within the circle of the limit spring (320).

5. The device for monitoring whether the boat entry position is abnormal according to claim 4, characterized in that: The telescopic rod comprises a hollow sleeve (360) with one end open, and a sliding rod (350) sliding in the inner cavity of the sleeve (360); a touch switch (370) is arranged at one end of the inner cavity side wall of the sleeve (360) away from the sliding rod (350); an alarm (380) is arranged on the side wall of the control box (120); and the touch switch (370) is electrically connected to the alarm (380).

6. The device for monitoring whether the boat entry position is abnormal according to claim 1, characterized in that: A horizontal driving rod (450) is rotatably provided in the middle of the left side wall of the control box (120), a second worm gear (440) is provided on the rod body of the transmission rod (400) above, and a second worm gear (460) meshing with the second worm gear (440) is provided on the rod body at the right end of the driving rod (450).

7. The device for monitoring whether the boat entry position is abnormal according to claim 6, characterized in that: The left end of the driving rod (450) is located outside the control box (120) and is provided with a rotating disk (470), and the outer side of the rotating disk (470) is provided with anti-slip grooves.

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