Chuck clamp for wafer cleaning

Abstract

The utility model discloses a chuck clamp for wafer cleaning, which comprises a bottom plate, four positioning columns are fixedly connected to the top of the bottom plate, two arc-shaped placing plates are placed on the outer wall of the bottom plate, a plurality of arc-shaped grooves are uniformly formed in the outer walls of the arc-shaped placing plates, L-shaped butt joint plates are fixedly connected to the tops of the arc-shaped placing plates, and the L-shaped butt joint plates are fixedly connected to the top of the bottom plate. The outer wall of the L-shaped butt joint plate is slidably sleeved with a top plate, four vertical rods are fixedly connected to the top of the bottom plate, four conical holes are formed in the outer wall of the top plate, and the inner walls of the four conical holes are slidably connected with the outer walls of the four vertical rods correspondingly. By arranging the rectangular blocks, the clamping blocks, the I-shaped sliding blocks, the springs and the concave holes, the two sides of the two arc-shaped placing plates are limited by the top plate and the bottom plate, the two arc-shaped placing plates, the bottom plate and the top plate form a whole to form the clamp, wafers are limited, a plurality of wafers can be conveniently cleaned at the same time, and the cleaning efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of round wafer cleaning equipment, in particular to a chuck fixture for round wafer cleaning. Background Art

[0002] A round wafer, also known as a wafer, refers to a silicon chip used to manufacture silicon semiconductor circuits. Its raw material is high-purity polycrystalline silicon, which is processed through a specific process to form cylindrical single-crystal silicon. This process involves dissolving high-purity polycrystalline silicon and doping it with seed crystals, and then slowly pulling it out to form single-crystal silicon. Next, the silicon crystal rod is ground, polished, and sliced ​​to eventually form a round silicon wafer, or wafer. In the process of continuous processing, shaping, and polishing of the wafer, the wafer will produce contaminants due to contact with various organic matter, particles, and metals. Therefore, a wafer cleaning machine is required to clean the wafer, which is also an important process step in the wafer manufacturing process.

[0003] After searching, the patent document with publication number: CN220774330U discloses a wafer clamping mechanism for a wafer cleaning machine, which can clamp and support the wafer by utilizing the wafer clamping center support seat and the wafer clamping outer edge support column when the wafer cleaning machine is used to perform the wafer cleaning operation, thereby ensuring the stability of the wafer clamping and rotation adjustment; however, when the above device is in use, due to the clamping and fixing of a single wafer, multiple clamping structures are required to fix multiple wafers when cleaning them, wherein the back and forth fixing is cumbersome, and causes the clamping structures to be mixed together during cleaning, resulting in the outer wall of the clamping structure easily colliding with the outer wall of other wafers, thereby reducing the cleaning efficiency of the wafer. Therefore, we propose a chuck fixture for wafer cleaning to solve the above problems. Utility Model Content

[0004] The utility model aims to solve the shortcomings in the prior art and provides a chuck fixture for cleaning wafers.

[0005] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0006] A chuck fixture for cleaning wafers comprises a base plate, four positioning columns are fixedly connected to the top of the base plate, two arc-shaped placement plates are placed on the outer wall of the base plate, a plurality of arc-shaped grooves are evenly opened on the outer wall of the arc-shaped placement plate, an L-shaped docking plate is fixedly connected to the top of the arc-shaped docking plate, a top plate is slidingly sleeved on the outer wall of the L-shaped docking plate, four vertical rods are fixedly connected to the top of the base plate, four tapered holes are opened on the outer wall of the top plate, the inner walls of the four tapered holes are respectively slidably connected to the outer walls of the four vertical rods, and a limiting mechanism is provided on the outer wall of the top plate.

[0007] Preferably, the limiting mechanism includes two rectangular blocks with hollow structures, the outer walls of the two rectangular blocks are fixedly connected to the top of the top plate, the outer wall of the rectangular block is provided with two sliding holes, the inner walls of the two sliding holes are slidably connected with a card block, one end of the card block is fixedly connected with an I-shaped slider, and a plurality of springs are fixedly connected between the two I-shaped sliders. The outer wall of the vertical rod is provided with a concave hole, and the inner wall of the concave hole is slidably connected to the outer wall of the card block, and the top plate is fixed to the four vertical rods by setting the card block.

[0008] Preferably, the outer walls of the two arc-shaped placement plates are each provided with two positioning holes, and the outer walls of the four positioning columns are slidably connected to the inner walls of the four positioning holes respectively, and the two arc-shaped placement plates are preliminarily limited by setting the positioning holes and the positioning columns.

[0009] Preferably, two L-shaped grooves are provided at the bottom of the top plate, and the inner walls of the two L-shaped grooves are slidably connected to the outer walls of the two L-shaped docking plates respectively, and the arc-shaped placement plate is docked to the top plate by arranging the L-shaped docking plates and the L-shaped grooves.

[0010] Preferably, a handle is fixedly connected to the top of the top plate, and the handle is provided to facilitate carrying or hanging for cleaning.

[0011] Preferably, a sliding groove is provided on the outer wall of the rectangular block, and the inner wall of the sliding groove is slidably connected to the outer wall of the I-shaped slider, and the block is driven to move by providing the I-shaped slider.

[0012] Compared with the prior art, the advantages of the present invention are:

[0013] This solution places multiple wafers in the arc grooves of the two arc placement plates by setting a bottom plate, positioning columns, an arc placement plate, an arc groove, an L-shaped docking plate, a top plate, a handle, a vertical rod and a tapered hole, and fixes the position of the arc placement plates by the bottom plate and the top plate;

[0014] By setting rectangular blocks, card blocks, I-shaped sliders, springs and concave holes, the top plate and the bottom plate limit the two sides of the two arc-shaped placement plates, and an integral fixture is formed between the two arc-shaped placement plates, the bottom plate and the top plate to limit the wafers, facilitate the simultaneous cleaning of multiple wafers, and improve the cleaning efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solution of the present invention, the following is a brief introduction to the drawings required for use in the description of the specific implementation methods. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0016] Figure 1This is a schematic cross-sectional view of a chuck fixture for wafer cleaning proposed in the present invention;

[0017] Figure 2 This is a partial three-dimensional structural diagram of a chuck fixture for wafer cleaning proposed by the present invention;

[0018] Figure 3 This is a schematic structural diagram of the arc-shaped placement plate, arc-shaped groove and L-shaped docking plate of a chuck fixture for wafer cleaning proposed in the present invention;

[0019] Figure 4 A chuck fixture for cleaning a wafer proposed in this utility model Figure 1 A schematic diagram of the enlarged structure of part A in FIG.

[0020] In the figure: 1. Base plate; 2. Positioning column; 3. Arc-shaped placement plate; 4. Arc-shaped groove; 5. L-shaped docking plate; 6. Top plate; 7. Handle; 8. Vertical rod; 9. Conical hole; 10. Rectangular block; 11. Clamping block; 12. I-shaped slider; 13. Spring; 14. Concave hole. DETAILED DESCRIPTION

[0021] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] Depend on Figure 1-Figure 4 As shown, a chuck fixture for wafer cleaning is provided, comprising a base plate 1, four positioning posts 2 being fixedly connected to the top of the base plate 1, two arc-shaped placement plates 3 being placed on the outer wall of the base plate 1, two positioning holes being provided on the outer walls of the two arc-shaped placement plates 3, the outer walls of the four positioning posts 2 being slidably connected to the inner walls of the four positioning holes respectively, the base plate 1 being slid into one side of the two arc-shaped placement plates 3 through the positioning holes and the positioning posts 2, so that the two arc-shaped placement plates 3 are preliminarily positioned.

[0023] The outer wall of the arc-shaped placement plate 3 is evenly provided with multiple arc-shaped grooves 4, which support the wafer. The top of the arc-shaped placement plate 3 is fixedly connected with an L-shaped docking plate 5, and the outer wall of the L-shaped docking plate 5 is slidingly sleeved with a top plate 6. Two L-shaped grooves are provided at the bottom of the top plate 6. The inner walls of the two L-shaped grooves are respectively slidably connected to the outer walls of the two L-shaped docking plates 5, and the top plate 6 is docked with the two L-shaped docking plates 5 through the two L-shaped grooves.

[0024] A handle 7 is fixedly connected to the top of the top plate 6, and four vertical rods 8 are fixedly connected to the top of the bottom plate 1. Four conical holes 9 are opened on the outer wall of the top plate 6. The inner walls of the four conical holes 9 are slidably connected to the outer walls of the four vertical rods 8 respectively. The conical holes 9 facilitate the insertion of the vertical rods 8.

[0025] The outer wall of the top plate 6 is provided with a limiting mechanism, which includes two hollow rectangular blocks 10 . The outer walls of the two rectangular blocks 10 are fixedly connected to the top of the top plate 6 .

[0026] Two sliding holes are provided on the outer wall of the rectangular block 10, and the inner walls of the two sliding holes are slidably connected with a card block 11. One end of the card block 11 is fixedly connected with an I-shaped slider 12, and the I-shaped slider 12 drives the card block 11 to move. A plurality of springs 13 are fixedly connected between the two I-shaped sliders 12, and the plurality of springs 13 drive the card block 11 to extend out of the sliding hole through its own elastic force. A concave hole 14 is provided on the outer wall of the vertical rod 8, and the inner wall of the concave hole 14 is slidably connected to the outer wall of the card block 11. When the card block 11 is located in the concave hole 14, the top plate 6 is fixed to the four vertical rods 8. A sliding groove is provided on the outer wall of the rectangular block 10, and the inner wall of the sliding groove is slidably connected to the outer wall of the I-shaped slider 12.

[0027] Working principle: When in use, the two arc-shaped placement plates 3 are placed flat, and multiple wafers are placed in multiple arc-shaped grooves 4 in turn. The bottom plate 1 is slid into one side of the two arc-shaped placement plates 3 through the positioning holes and the positioning columns 2, and then the top plate 6 is slid into the vertical rod 8 through the tapered hole 9. The L-shaped docking plate 5 slides into the L-shaped groove, and the two I-shaped sliders 12 are pressed to move inward, so that the spring 13 contracts, driving the card block 11 to move inward. When the concave hole 14 on the vertical rod 8 slides out of the tapered hole 9, release the I-shaped slider 12 so that the elastic force of the spring 13 drives the card block 11 to slide into the concave hole 14, and fix the top plate 6 on the four vertical rods 8, so that the top plate 6 and the bottom plate 1 limit the two sides of the two arc-shaped placement plates 3, and the arc grooves 4 between the two arc-shaped placement plates 3 limit the wafers.

[0028] The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the present invention to specific embodiments. Obviously, numerous modifications and variations are possible based on the contents of this specification. These embodiments are selected and described in detail in this specification to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better understand and utilize the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A chuck fixture for cleaning a wafer, comprising a base plate (1), characterized in that: The top of the base plate (1) is fixedly connected with four positioning columns (2), the outer wall of the base plate (1) is provided with two arc-shaped placement plates (3), the outer wall of the arc-shaped placement plates (3) is evenly provided with a plurality of arc-shaped grooves (4), the top of the arc-shaped placement plates (3) is fixedly connected with an L-shaped docking plate (5), the outer wall of the L-shaped docking plate (5) is slidably sleeved with a top plate (6), the top of the base plate (1) is fixedly connected with four vertical rods (8), the outer wall of the top plate (6) is provided with four conical holes (9), the inner walls of the four conical holes (9) are respectively slidably connected with the outer walls of the four vertical rods (8), and the outer wall of the top plate (6) is provided with a limiting mechanism.

2. A wafer cleaning chuck fixture according to claim 1, characterized in that: The limiting mechanism comprises two rectangular blocks (10) of hollow structure, the outer walls of the two rectangular blocks (10) are fixedly connected to the top of the top plate (6), the outer wall of the rectangular block (10) is provided with two sliding holes, the inner walls of the two sliding holes are slidably connected with a clamping block (11), one end of the clamping block (11) is fixedly connected with an I-shaped sliding block (12), a plurality of springs (13) are fixedly connected between the two I-shaped sliding blocks (12), the outer wall of the vertical rod (8) is provided with a concave hole (14), and the inner wall of the concave hole (14) is slidably connected to the outer wall of the clamping block (11).

3. A wafer cleaning chuck fixture according to claim 1, characterized in that: The outer walls of the two arc-shaped placement plates (3) are each provided with two positioning holes, and the outer walls of the four positioning columns (2) are respectively slidably connected to the inner walls of the four positioning holes.

4. The wafer cleaning chuck fixture according to claim 1, characterized in that: The bottom of the top plate (6) is provided with two L-shaped grooves, and the inner walls of the two L-shaped grooves are respectively slidably connected to the outer walls of the two L-shaped docking plates (5).

5. The wafer cleaning chuck fixture according to claim 1, characterized in that: A handle (7) is fixedly connected to the top of the top plate (6).

6. The wafer cleaning chuck fixture according to claim 2, characterized in that: The outer wall of the rectangular block (10) is provided with a sliding groove, and the inner wall of the sliding groove is slidably connected to the outer wall of the I-shaped sliding block (12).

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