Dust collection box of waste gas treatment equipment

Abstract

The utility model relates to the technical field of tail gas treatment, in particular to a dust collection box of waste gas treatment equipment, which does not need to mix waste gas with water and ensures that the waste gas can be smoothly treated, and comprises a box body, a gas inlet and a gas outlet are formed in the top of the box body, and the gas outlet is connected with an upper end outlet of a filter barrel. An inlet in the lower end of the filtering barrel extends into a tail gas channel, the tail gas channel is divided into a small-size upper-layer tail gas channel and a large-size lower-layer tail gas channel through a cooling water coil pipe, the lower-layer tail gas channel is tightly attached to the inner wall of the bottom of the box body, and one side of the lower-layer tail gas channel extends to the position below the gas inlet; and cooling water interlayers are arranged on the top and the peripheral side walls of the box body.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment, in particular to a dust collecting box for waste gas treatment equipment. Background Art

[0002] In the semiconductor industry, a variety of special gases, a large amount of chemicals such as acids and alkalis, as well as organic solvents and volatile liquids are needed. These industrial raw materials will produce waste gas in the semiconductor manufacturing process. The current common treatment method is to mix the waste gas with water and then perform electrical heating treatment, but some industrial waste gases cannot be treated with water, such as tetrakis(dimethylamino)tin, or TDMASn, which is commonly used in the semiconductor industry. TDMASn is a transparent gas that is sensitive to water. Summary of the invention

[0003] In order to solve the problem that some existing industrial waste gases cannot be heated and treated with water, the utility model provides a dust collecting box for waste gas treatment equipment, which does not require the waste gas to be mixed with water, thereby ensuring that the waste gas can be treated smoothly.

[0004] The technical solution is as follows: a dust collecting box for waste gas treatment equipment, characterized in that it includes a box body, the top of the box body is provided with an air inlet and an air outlet, the air outlet is connected to the upper end outlet of the filter barrel, the lower end inlet of the filter barrel extends into the exhaust gas channel, the exhaust gas channel is formed by a cooling water coil to form a small-sized upper exhaust gas channel and a large-sized lower exhaust gas channel, the lower exhaust gas channel is in close contact with the bottom inner wall of the box body and one side extends to below the air inlet, and the top and surrounding side walls of the box body are provided with a cooling water interlayer.

[0005] It is further characterized in that a flow dividing support plate is provided in the cooling water interlayer at the top of the box body;

[0006] The water inlet of the cooling water interlayer is opened at the lower end of the side of the box body, and the water outlet of the cooling water interlayer is opened at the top of the box body;

[0007] The water inlet and outlet of the cooling water coil respectively penetrate the cooling water interlayer on the side;

[0008] A detachable inspection door is provided on the front of the box;

[0009] A temperature measuring module and a pressure measuring module are installed on the top of the box.

[0010] After adopting the utility model, the exhaust gas enters from the air inlet, first enters the upper exhaust gas channel and the lower exhaust gas channel formed by the cold water cooling coil for cooling, and then cooperates with the cooling water interlayer of the entire box for cooling, so that the exhaust gas can be fully cooled, and finally filtered through the filter barrel and discharged from the air outlet. There is no need to mix the exhaust gas with water, ensuring that the exhaust gas can be smoothly processed. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is the axonometric drawing of the utility model;

[0012] Figure 2 This is a front sectional view of the utility model;

[0013] Figure 3 This is a rear view of the utility model;

[0014] Figure 4 This is a transverse cross-sectional view of the cooling water interlayer at the top of the utility model. DETAILED DESCRIPTION

[0015] See Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, a dust collecting box for waste gas treatment equipment includes a box body 1, an air outlet 2 and an air inlet 3 are opened on the top of the box body 1, the air outlet 2 is connected to the upper end outlet of the filter barrel 4 through a connecting plate 41, the lower end of the filter barrel 4 enters and extends into the exhaust gas channel, and the exhaust gas channel is formed by a cooling water coil 5 to form a small-sized upper exhaust gas channel 51 and a large-sized lower exhaust gas channel 52, the lower exhaust gas channel 52 is in close contact with the bottom inner wall of the box body 1 and one side extends to below the air inlet 3, and a cooling water interlayer 6 is provided on the top and surrounding side walls of the box body 1.

[0016] A flow dividing support plate 7 is arranged in the cooling water interlayer 6 at the top of the box body 1 , which can not only separate the cooling water but also enhance the strength of the top of the box body 1 .

[0017] The water inlet 61 of the cooling water interlayer 6 is opened at the lower end of the side of the box body 1 , and the water outlet 62 of the cooling water interlayer 6 is opened at the top of the box body 1 .

[0018] The water inlet 53 and the water outlet 54 of the cooling water coil 5 respectively penetrate the cooling water interlayer 6 at the side. The cooling water enters from the lower water inlet 53, flows through the lower exhaust gas channel 52 and the upper exhaust gas channel 51 in sequence, and finally flows out from the water outlet 54.

[0019] A detachable inspection door 8 is provided on the front of the box body 1 to facilitate inspection of the interior of the box body 1 .

[0020] A temperature measuring module 9 and a pressure measuring module 10 are installed on the top of the box 1, and a spare interface 11 is also reserved.

[0021] The exhaust gas enters from the air inlet 3, enters the lower exhaust gas channel 52 and the upper exhaust gas channel 51 for cooling, and at the same time the cooling water interlayer 6 can also play a double cooling effect, and then enters the filter barrel 4 for filtration, and finally discharged from the air outlet 3. The cooling water coil 5 and the cooling water interlayer 6 can have a good cooling effect on the exhaust gas.

Claims

1. A dust collecting box for waste gas treatment equipment, characterized in that: It includes a box body, the top of which is provided with an air inlet and an air outlet, the air outlet is connected to the upper outlet of the filter barrel, the lower inlet of the filter barrel extends into the exhaust gas channel, the exhaust gas channel is formed by a cooling water coil to form a small-sized upper exhaust gas channel and a large-sized lower exhaust gas channel, the lower exhaust gas channel is in close contact with the bottom inner wall of the box body and one side extends to below the air inlet, and the top and surrounding side walls of the box body are provided with a cooling water interlayer.

2. A dust collecting box for waste gas treatment equipment according to claim 1, characterized in that: A flow distribution support plate is arranged in the cooling water interlayer at the top of the box body.

3. The dust collecting box of the waste gas treatment equipment according to claim 1, characterized in that: The water inlet of the cooling water interlayer is opened at the lower end of the side of the box body, and the water outlet of the cooling water interlayer is opened at the top of the box body.

4. The dust collecting box of the waste gas treatment equipment according to claim 1, characterized in that: The water inlet and outlet of the cooling water coil penetrate the cooling water interlayer at the side respectively.

5. The dust collecting box of the waste gas treatment equipment according to claim 1, characterized in that: A detachable inspection door is arranged on the front of the box.

6. A dust collecting box for waste gas treatment equipment according to claim 1, characterized in that: A temperature measuring module and a pressure measuring module are installed on the top of the box.

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