Dust removal device for polycrystalline silicon production

Abstract

The embodiment of the utility model provides a dust removal device for polycrystalline silicon production, and relates to the technical field of polycrystalline silicon production. The dust removal device comprises a sleeve, a dust removal barrel, a first pipeline, a second pipeline and a dust suction pump, the sleeve sleeves and is connected to the outer side of a discharging pipe of the silicon powder collecting tank, and a dust removal opening is formed in the sleeve; dust removal water is contained in the dust removal barrel; the first pipeline is communicated with the dust removal opening; the second pipeline extends into the dust removal water, and the dust suction pump is connected between the first pipeline and the second pipeline. In the discharging process of the silicon powder, the dust suction pump sucks the silicon powder dust between the sleeve and the discharging pipe through the first pipeline, the silicon powder dust can be mixed with dust removal water, and therefore leakage of the silicon powder dust at the tying position of the collecting bag can be reduced, environmental pollution is reduced, and health and safety of operators are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon production, in particular to a dust removal device used in polysilicon production. Background Art

[0002] Most domestic polysilicon manufacturers use the Siemens improved process, the main equipment of which is a reduction furnace. The working principle of the reduction furnace is to react a mixture of trichlorosilane and hydrogen through a high-temperature silicon core to generate polysilicon and deposit it on the silicon core. The final product is polysilicon deposited on the silicon core. The reduction process is very complicated. After the chemical reaction produces polysilicon, the tail gas after the reaction is discharged into the tail gas pipeline. The reduction tail gas mainly includes hydrogen, hydrogen chloride and silicon powder.

[0003] In the related technology, the reduced tail gas enters the silicon powder filter, where the silicon powder is filtered and intercepted on the surface of the filter element. After a certain period of time, the surface of the filter element is back-blown from the top with high-temperature and high-pressure gas to separate the silicon powder from the surface of the filter element and deposit at the bottom of the silicon powder filter. The silicon powder is regularly discharged to the silicon powder collection tank. The ton bag is tied to the discharge pipe of the silicon powder collection tank, and the silicon powder in the silicon powder collection tank is discharged to the ton bag.

[0004] However, during the discharge process of silicon powder, a lot of silicon powder dust will leak out from the tied mouth of the ton bag, causing serious environmental pollution and affecting the health and safety of operators. Utility Model Content

[0005] The embodiment of the utility model provides a dust removal device for polysilicon production to solve the problem that silicon powder and dust may leak out of the tied mouth of the ton bag during the silicon powder discharge process, causing serious environmental pollution and affecting the health and safety of operators.

[0006] The embodiment of the utility model provides a dust removal device for polysilicon production, comprising:

[0007] A sleeve, which is sleeved and connected to the outside of a feed pipe of a silicon powder collection tank, and is provided with a dust removal port. The sleeve is used to connect a collection bag, and the feed pipe extends into the collection bag;

[0008] A dust removal bucket containing dust removal water;

[0009] a first pipe, the first pipe being in communication with the dust removal port;

[0010] A second pipe extends into the dust removal water

[0011] A dust suction pump is connected between the first pipe and the second pipe, and is configured to suck the silicon powder and dust between the sleeve and the feed pipe through the first pipe, so that the silicon powder and dust enter the dust removal water through the first pipe, the dust suction pump and the second pipe.

[0012] In a possible implementation, the axis of the dust removal port extends along the radial direction of the discharge pipe, and the projection of the dust removal port in the radial direction of the discharge pipe is located on the discharge pipe.

[0013] In a possible implementation, the axis of the sleeve coincides with the axis of the feed tube, and in the axial direction of the sleeve, the length of the sleeve is less than or equal to the length of the feed tube.

[0014] In a possible implementation, the sleeve is provided with a limiting platform, and the limiting platform is provided with a fastener for fixing the opening of the collecting bag on one axial side of the sleeve.

[0015] In a possible implementation, each of the discharge pipes of the plurality of silicon powder collection tanks is provided with a sleeve, and a branch pipe is connected between the dust removal port of each sleeve and the first pipe.

[0016] In a possible implementation manner, the branch pipe is a transparent tube.

[0017] In a possible implementation manner, a regulating valve is provided on the first pipeline, and the regulating valve is used to adjust the suction force in the first pipeline.

[0018] In a possible implementation manner, the sleeve is further provided with a protection port, and the protection port is used to introduce nitrogen when the collecting bag is replaced.

[0019] In a possible implementation, a support frame is provided on the discharge pipe, and the collecting bag has a handle, and the handle can be hung on the support frame.

[0020] In a possible implementation, the dust suction pump is a water ring vacuum pump.

[0021] The dust removal device for polysilicon production provided by the embodiment of the utility model is characterized in that a sleeve is arranged on the outer side of the discharge pipe of the silicon powder collecting tank, and the dust removal port of the sleeve is connected with the dust removal bucket through a first pipe, a dust suction pump and a second pipe, and the second pipe extends into the dust removal water. During the silicon powder discharge process, the dust suction pump sucks the silicon powder dust between the sleeve and the discharge pipe through the first pipe, so that the silicon powder dust can enter the dust removal water through the first pipe, the dust suction pump and the second pipe, and the silicon powder dust is mixed with the dust removal water, thereby reducing the leakage of silicon powder dust at the tie mouth of the collection bag, thereby reducing environmental pollution and improving the health and safety of operators. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0023] Figure 1 A schematic diagram of the connection between a dust removal device and a feed pipe for polysilicon production provided in an embodiment of the utility model;

[0024] Figure 2 for Figure 1 A schematic diagram of the structure of the feed pipe and the sleeve;

[0025] Figure 3 for Figure 1 A schematic diagram of the structure of the feed pipe, sleeve, hook and collection bag;

[0026] Figure 4 for Figure 1 Schematic diagram of the structure of the feed tube, sleeve and hook.

[0027] Description of reference numerals:

[0028] 10- casing; 101- dust removal port;

[0029] 102-limiting platform; 103-protective opening;

[0030] 21-first pipeline; 211-pipeline support;

[0031] 212- regulating valve; 22- second pipeline;

[0032] 23- branch pipes; 30- dust pump;

[0033] 40-dust bucket; 50-collection bag;

[0034] 51-tray; 501-handle;

[0035] 60-fastener; 100-feeding tube;

[0036] 200-support frame; 201-fixed arm;

[0037] 202-movable arm; 203-hook. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0039] It should be noted that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0040] In the present invention, unless otherwise clearly specified and limited, the terms "installation", "connection", "fixation" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0042] In the above description, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0043] In the related art, the ton bag is tied to the discharge pipe of the silicon powder collection tank, and the silicon powder in the silicon powder collection tank is discharged into the ton bag. However, there will be a lot of silicon powder dust leakage at the tying point of the ton bag during the silicon powder discharge process, causing serious environmental pollution and affecting the health and safety of operators. The inventors have found that the reason for this problem is that 50Kpa of nitrogen will be filled into the silicon powder collection tank, and there will be a lot of silicon powder dust leakage at the tying point of the ton bag during the silicon powder discharge process, causing serious environmental pollution and affecting the health and safety of operators.

[0044] In order to solve the above problems, the dust removal device for polysilicon production provided in the embodiment of the utility model can reduce the leakage of silicon powder dust at the tie of the collection bag by sucking the silicon powder dust at the connection between the discharge pipe of the silicon powder collection tank and the ton bag, and mixing the silicon powder dust with dust removal water, thereby reducing environmental pollution and improving the health and safety of operators.

[0045] The dust removal device for polysilicon production provided by the utility model is described in detail below in conjunction with specific embodiments.

[0046] Figure 1 A schematic diagram showing the connection between the discharge pipe 100 of the silicon powder collection tank and the dust removal device used in the production of polysilicon is shown.

[0047] like Figure 1 and Figure 2 As shown, an embodiment of the utility model provides a dust removal device for polysilicon production, including a sleeve 10, a first pipeline 21, a second pipeline 22, a dust suction pump 30 and a dust removal bucket 40.

[0048] See also Figure 1 and Figure 2 As shown, the sleeve 10 is sleeved and connected to the outside of the feed pipe 100 of the silicon powder collection tank, and a dust removal port 101 is provided on the sleeve 10. The dust removal port 101 may be cylindrical in shape.

[0049] The silicon powder collection tank is provided with a switch valve, and the feed pipe 100 is opened or closed by the switch valve.

[0050] The feed pipe 100 is cylindrical, and the opening of the feed pipe 100 is oriented vertically downward. Figure 2 In the figure, the opening of the feed tube 100 is oriented in the +K axis direction.

[0051] The sleeve 10 can be fixed to the outside of the feed pipe 100 by means of clamping, threading or welding.

[0052] The sleeve 10 is cylindrical, and in the radial direction of the sleeve 10 , there is a gap between the sleeve 10 and the feed pipe 100 , and silicon powder dust generated during the silicon powder discharge process can enter the gap.

[0053] In some examples, the axes of the sleeve 10 and the feed tube 100 coincide with each other, and the inner diameter of the sleeve 10 is greater than the outer diameter of the feed tube 100 , so that there is a gap between the sleeve 10 and the feed tube 100 .

[0054] See also Figure 1 and Figure 3 As shown, the sleeve 10 is used to connect the collection bag 50. The end of the collection bag 50 where the opening is located is fixed to the sleeve 10 by a fastener 60, and the feed pipe 100 extends into the collection bag 50. When the feed pipe 100 is opened by the switch valve of the silicon powder collection tank, the silicon powder in the silicon powder collection tank enters the collection bag 50 through the feed pipe 100.

[0055] The collecting bag 50 is a bag that can collect silicon powder. Exemplarily, the collecting bag 50 can be a ton bag.

[0056] See also Figure 1 As shown, dust removal water is contained in the dust removal bucket 40. The dust removal water may be production water used in the production of polysilicon.

[0057] See also Figure 1 and Figure 2 As shown, the first pipe 21 is connected to the dust removal port 101. The first pipe 21 is a stainless steel pipe. The first pipe 21 is provided with a pipe support 211, and the pipe support 211 is used to support the first pipe 21. The specific structure of the pipe support 211 is not specifically limited.

[0058] The second pipe 22 is a stainless steel pipe and extends into the dust removal water.

[0059] The dust suction pump 30 is connected between the first pipe 21 and the second pipe 22 .

[0060] The dust suction pump 30 is a pump that can suction the first pipe 21. In some examples, the dust suction pump 30 is a water ring vacuum pump. The first pipe 21 is provided with a regulating valve 212, which is used to adjust the suction force in the first pipe 21.

[0061] The suction force in the first pipeline 21 is regulated by adjusting the valve opening of the regulating valve 212 .

[0062] The dust suction pump 30 sucks the silicon powder dust between the sleeve 10 and the feed pipe 100 through the first pipe 21 , so that the silicon powder dust enters the dust removal water through the first pipe 21 , the dust suction pump 30 and the second pipe 22 .

[0063] During the silicon powder discharge process, the silicon powder enters the collecting bag 50 through the discharge pipe 100, and the silicon powder dust in the gap between the sleeve 10 and the discharge pipe 100 is sucked by the dust suction pump 30, so that the silicon powder dust can enter the dust removal water through the first pipe 21, the dust suction pump 30 and the second pipe 22. The silicon powder dust is mixed with the dust removal water, thereby reducing the leakage of silicon powder dust at the tie of the collecting bag 50, thereby reducing environmental pollution and improving the health and safety of operators.

[0064] In a possible embodiment, the axis of the dust removal port 101 extends along the radial direction of the feeding pipe 100, and the projection of the dust removal port 101 in the radial direction of the feeding pipe 100 is located on the feeding pipe 100. In this configuration, in the radial direction of the feeding pipe 100, the dust removal port 101 is not directly connected to the inside of the feeding pipe 100. It can be understood that in the radial direction of the feeding pipe 100, the dust removal port 101 is separated from the inside of the feeding pipe 100 by the pipe wall of the feeding pipe 100. When the dust suction pump 30 performs suction through the first pipeline 21, it is avoided that the silicon powder in the feeding pipe 100 is directly sucked in the radial direction of the feeding pipe 100 through the dust removal port 101, thereby reducing the silicon powder in the feeding pipe 100 from being sucked into the dust removal water of the dust removal bucket 40.

[0065] Among them, Figure 2 As shown, the axis of the sleeve 10 coincides with the axis of the feed tube 100. In the axial direction of the sleeve 10, the length of the sleeve 10 is less than or equal to the length of the feed tube 100.

[0066] The axial direction of the sleeve 10 is Figure 2 The K-axis direction in .

[0067] In one possible implementation, see Figure 2 and Figure 3As shown, the sleeve 10 is provided with a limiting platform 102, and the limiting platform 102 is provided with a fastener 60 for fixing the opening of the collecting bag 50 on one axial side of the sleeve 10. The limiting platform 102 can limit the fastener 60 in the axial direction of the sleeve 10 to prevent the fastener 60 from detaching from the sleeve 10 in the axial direction of the sleeve 10.

[0068] A tray 51 is provided below the collecting bag 50 (see Figure 1 As shown), the collecting bag 50 is placed on a tray 51.

[0069] The limiting platform 102 is cylindrical in shape and is disposed on the outer side of one end of the sleeve 10 facing the tray 51 .

[0070] The fastener 60 may be a clamp. The clamp is located on the side of the limiting platform 102 that is away from the tray 51 in the axial direction of the sleeve 10. When the clamp does not fix the opening of the collection bag 50, the inner diameter of the clamp is smaller than the outer diameter of the limiting platform 102, so that the clamp cannot be separated from the sleeve 10 in the axial direction of the sleeve 10, so that the limiting platform 102 can limit the clamp in the axial direction of the sleeve 10.

[0071] When the collecting bag 50 is installed, the collecting bag 50 wraps the limiting platform 102 of the sleeve 10, and the collecting bag 50 is partially located on the side of the limiting platform 102 that is away from the tray 51 in the axial direction of the sleeve 10. The part of the collecting bag 50 that is located on the side of the limiting platform 102 that is away from the tray 51 in the axial direction of the sleeve 10 is fixed by a clamp, so that the end of the collecting bag 50 where the opening is located can be fixed on the sleeve 10; when the collecting bag 50 is disassembled, the clamp is unlocked, so that the end of the collecting bag 50 where the opening is located can be separated from the sleeve 10. Such a configuration can facilitate the installation and disassembly of the collecting bag 50.

[0072] Figure 1 3 silicon powder collecting tanks have discharge pipes 100 shown in FIG.

[0073] In a possible implementation, the feed pipes 100 of the plurality of silicon powder collection tanks are each provided with a sleeve 10, and a branch pipe 23 is connected between the dust removal port 101 of each sleeve 10 and the first pipe 21. In this configuration, the dust removal ports 101 of the plurality of sleeves 10 are sucked by a dust suction pump 30 and a first pipe 21.

[0074] The number of silicon powder collection tanks may be 2, 3 or 4. For example, Figure 1 As shown, the number of silicon powder collecting tanks is 3. Each of the three silicon powder collecting tanks' feed pipes 100 is provided with a sleeve 10, that is, the three feed pipes 100 correspond to the three sleeves 10, and the dust removal ports 101 of the three sleeves 10 are connected to the first pipe 21 through the three branch pipes 23.

[0075] The branch pipe 23 may be a transparent pipe. For example, the transparent pipe is a polyvinyl chloride (PVC) transparent steel wire hose, and the PVC steel wire hose is a transparent hose with a threaded metal steel wire embedded in PVC. This arrangement makes it easy to observe the dust removal and exhaust effect, and it is easy to clean when silicon powder is blocked in the branch pipe 23.

[0076] In a possible implementation, Figure 2 As shown, the sleeve 10 is also provided with a protection port 103, and the protection port 103 is used to introduce nitrogen when replacing the collecting bag 50. The shape of the protection port 103 can be cylindrical.

[0077] The protection port 103 is connected to a device (not shown in the figure) that can provide nitrogen.

[0078] When replacing the collecting bag 50, close the switch valve of the silicon powder collecting tank and the discharge pipe 100; the vacuum pump 30 sucks the silicon powder dust between the sleeve 10 and the discharge pipe 100 through the first pipe 21; nitrogen is provided through the protection port 103 for nitrogen protection to reduce the risk of dust explosion.

[0079] Figure 4 The state of the support frame 200 in FIG. 2 is a schematic diagram of a state when there is no collecting bag 50 on the support frame 200 .

[0080] In a possible implementation, Figure 4 As shown, a support frame 200 is provided on the feed pipe 100, and the collecting bag 50 has a handle 501, and the handle 501 can be hung on the support frame 200. Such a configuration can play a hanging support role for the collecting bag 50 to prevent the collecting bag 50 from falling over.

[0081] The support frame 200 can be fixed to the outside of the feed pipe 100 by means of clamping, threaded connection or welding.

[0082] The support frame 200 includes a fixed arm 201 , a movable arm 202 and a hook 203 . The fixed arm 201 is fixedly connected to the feeding tube 100 , the movable arm 202 can be movably connected to the fixed arm 201 , and the hook 203 is fixedly connected to the movable arm 202 .

[0083] When the collecting bag 50 is installed, the handle 501 of the collecting bag 50 is hung on the hook 203 of the supporting frame 200, and the movable arm 202 is fixedly connected to the fixed arm 201 by bolts.

[0084] When the collecting bag 50 is disassembled, the bolts used to fix the movable arm 202 and the fixed arm 201 are removed, so that the movable arm 202 can move relative to the fixed arm 201, thereby allowing the handle 501 of the collecting bag 50 to support the hook 203 of the frame 200.

[0085] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A dust removal device for polysilicon production, characterized in that: include; A sleeve, which is sleeved and connected to the outside of a feed pipe of a silicon powder collection tank, and is provided with a dust removal port. The sleeve is used to connect a collection bag, and the feed pipe extends into the collection bag; A dust removal bucket containing dust removal water; a first pipe, the first pipe being in communication with the dust removal port; A second pipe extends into the dust removal water A dust suction pump is connected between the first pipe and the second pipe, and is configured to suck the silicon powder and dust between the sleeve and the feed pipe through the first pipe, so that the silicon powder and dust enter the dust removal water through the first pipe, the dust suction pump and the second pipe.

2. The dust removal device for polysilicon production according to claim 1, characterized in that: The axis of the dust removal port extends along the radial direction of the feed tube, and the projection of the dust removal port in the radial direction of the feed tube is located on the feed tube.

3. The dust removal device for polysilicon production according to claim 1, characterized in that: The axis of the sleeve coincides with that of the feed tube, and in the axial direction of the sleeve, the length of the sleeve is less than or equal to the length of the feed tube.

4. The dust removal device for polysilicon production according to claim 1, characterized in that: The sleeve is provided with a limiting platform, and the limiting platform is provided with a fastener for fixing the opening of the collecting bag on one side of the axial direction of the sleeve.

5. The dust removal device for polysilicon production according to claim 1, characterized in that: A plurality of the silicon powder collecting tanks are each provided with a sleeve, and a branch pipe is connected between the dust removal port of each sleeve and the first pipe.

6. The dust removal device for polysilicon production according to claim 5, characterized in that: The branch pipe is a transparent pipe.

7. The dust removal device for polysilicon production according to claim 5, characterized in that: The first pipeline is provided with a regulating valve, and the regulating valve is used to adjust the suction force in the first pipeline.

8. The dust removal device for polysilicon production according to any one of claims 1 to 7, characterized in that: The sleeve is also provided with a protection port, and the protection port is used to introduce nitrogen when replacing the collecting bag.

9. The dust removal device for polysilicon production according to any one of claims 1 to 7, characterized in that: A support frame is arranged on the discharge pipe, and the collecting bag has a handle, and the handle can be hung on the support frame.

10. The dust removal device for polysilicon production according to any one of claims 1 to 7, characterized in that: The dust suction pump is a water ring vacuum pump.

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