Bar cross section inclination judgment structure

Abstract

The utility model relates to the technical field of semiconductors, in particular to a bar cross section inclination judging structure. The device comprises a servo sliding table used for driving a bar to move, connecting devices are arranged on the two sides of the servo sliding table respectively, two sensors are arranged on each connecting device, and the four sensors are located at the end points of the largest inscribed square of the section circle of the bar. The device solves the problem that the inclination condition of the end face of the bar is not accurately judged.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a structure for judging the inclination of a bar section. Background Art

[0002] During the loading process, the semiconductor loop-line wafer picking equipment needs to detect and judge the inclination state of the bar cross section, which is the basis for judging the subsequent cutting length and is the key detection process for achieving safe cutting of the first wafer.

[0003] Existing equipment uses a through-beam switch to detect the end face condition. By detecting the different occlusion positions of the sensor, the end face shape of the material is judged. When the tilt direction is perpendicular to the ray direction, the measurement requirements can be met. However, when the tilt direction is parallel to the ray direction, the measurement deviation is large, which will cause the calculated cutting length to be abnormal, and even cut other structural components, resulting in adverse effects such as increased equipment failure rate. Utility Model Content

[0004] In order to solve the problems in the related art, the utility model provides a structure for judging the inclination of a bar material cross section, and the device solves the problem of inaccurate judgment of the inclination of the bar material end surface.

[0005] In order to solve the above problems, the following technical solutions are provided:

[0006] The bar cross-section inclination judgment structure of the utility model comprises a servo slide for driving the bar to move, connecting devices are arranged on both sides of the servo slide, two sensors are arranged on the connecting devices, and the four sensors are located at the end points of the largest inscribed square of the bar cross-section circle.

[0007] In the above scheme, through the setting of sensors, after the bar is loaded onto the machine, it moves forward driven by the servo slide. Due to the different states of the end faces of the bar, the position where each sensor reaches zero is different. The sensors at the four points will appear zero value moments one after another. After the last sensor appears zero value, the equipment stops conveying the bar. The last zero value point is the lowest measured point of the current end face, which achieves the purpose of judging the inclination of the end face. The data can be used to guide the subsequent process to calculate and judge the cutting length, and achieve safe cutting, thereby solving the problem of inaccurate judgment of the inclination of the end face of the bar.

[0008] The connecting device comprises a connecting rod arranged vertically, and transverse rods arranged parallel and side by side are arranged at both ends of the connecting rod. The transverse rod is slidably connected to the connecting rod, and a fixing seat is arranged at one end of the transverse rod.

[0009] In the above scheme, the fixing seat is provided to fix the position of the structure.

[0010] Both ends of the connecting rod are provided with connecting parts, and the transverse rod is slidably matched with the connecting rod through the connecting parts. Two sensor supports are provided in the middle of the connecting rod. The sensor supports are connected to the connecting rod in an up and down sliding manner, and the sensors are rotatably matched with the connecting rod. Sensors are connected to the sensor supports.

[0011] By adopting the above solution, the direction of the structure can be rotated, and the height and length can be adjusted, so that the sensor installation and detection position can be flexibly adjusted, and the position state of a single sensor can be adjusted so that each sensor can be accurately aligned.

[0012] The connecting rod and the transverse rod are made of stainless steel, and the fixing seat and the sensor support are made of aluminum alloy.

[0013] In the above scheme, aluminum alloy and stainless steel are used, which have the effects of lightness and rust prevention.

[0014] The above solution has the following advantages:

[0015] 1. Since the bar cross-section inclination judgment structure of the utility model includes a servo slide for driving the movement of the bar, connecting devices are provided on both sides of the servo slide, and two sensors are provided on the connecting devices. The four sensors are located at the end points of the largest inscribed square of the bar cross-section circle. After the bar is loaded onto the machine, it moves forward under the drive of the servo slide. Due to the different states of the end face of the bar, the position where each sensor reaches zero is different. The sensors at the four points will successively appear zero value moments. After the last sensor appears zero value, the equipment stops conveying the bar. The last zero value point is the lowest measurement point of the current end face, thereby achieving the purpose of judging the inclination of the end face. The data can be used to guide the subsequent process to calculate and judge the cutting length, achieve safe cutting, and accurately judge the inclination of the end face of the bar.

[0016] 2. The connecting device contains a connecting rod arranged in a vertical position, and transverse rods arranged in parallel and side by side are provided at both ends of the connecting rod. A fixed seat is provided at one end of the transverse rod for fixing the position of the structure. The transverse rod is slidably matched with the connecting rod through the connecting part, and the sensor support is connected to the connecting rod in an up and down sliding manner, and the sensor and the connecting rod are rotatably matched, so that the direction of the structure can be rotated, and the height and length directions can be adjusted, so that the sensor installation and detection position can be flexibly adjusted, and the position state of a single sensor can be adjusted, so that each sensor can be accurately aligned. The material of the connecting rod and the transverse rod is stainless steel, and the material of the fixed seat and the sensor support is aluminum alloy, which has the effect of lightness and rust prevention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the structure for judging the inclination of the cross section of the bar;

[0018] Figure 2 It is a schematic diagram of the working process of the bar section inclination judgment structure;

[0019] Figure 3 This is a schematic diagram of the position of the structural sensor for judging the inclination of the cross section of the bar;

[0020] Explanation of the reference numerals: 1. bar; 2. servo slide; 3. sensor; 4. connecting rod; 5. transverse rod; 6. fixing seat; 7. connecting part; 8. sensor support. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] like Figures 1 to 3 As shown, the bar cross-section inclination judgment structure of the utility model includes a servo slide 2 for driving the bar 1 to move, and connecting devices are arranged on both sides of the servo slide 2. Two sensors 3 are arranged on the connecting devices, and the four sensors 3 are located at the endpoints of the largest inscribed square of the cross-sectional circle of the bar 1. The servo slide 2 drives the bar 1 to move forward. Due to the different end surface states of the bar 1, the position where each sensor 3 reaches zero is different. The sensors 3 at the four points will successively appear zero value moments. After measuring and selecting the feedback of the sensor 3 that appears zero value last, the equipment is stopped from conveying. This point is the lowest position among the four measuring points. The basic data of the next step of the process is calculated thereby. This function is also the key to adjusting the damage or position change, which minimizes the impact on the accuracy of the equipment, reduces the difficulty of equipment debugging and adjustment, and realizes rapid and accurate recovery of the equipment state. The data is used to guide the subsequent process to calculate and judge the cutting length, thereby realizing safe cutting, and accurately judging the inclination of the end surface of the bar 1.

[0023] The connecting device comprises a connecting rod 4 arranged vertically, with transverse rods 5 arranged parallel and side by side at both ends of the connecting rod 4, the transverse rod 5 is slidably connected to the connecting rod 4, and a fixing seat 6 is arranged at one end of the transverse rod 5.

[0024] Connecting parts 7 are provided at both ends of the connecting rod 4, and the transverse rod 5 is slidably matched with the connecting rod 4 through the connecting part 7. Two sensor holders 8 are provided in the middle of the connecting rod 4, and the sensor holders 8 are connected to the connecting rod 4 in an up and down sliding manner, and the sensor 3 is rotatably matched with the connecting rod 4. The sensor holders 8 are connected to the sensors 3, so that the direction of the structure can be rotated, and the height and length directions can be adjusted, so that the installation and detection position of the sensor 3 can be flexibly adjusted, and the position state of a single sensor 3 can be adjusted, so that each sensor 3 is accurately positioned.

[0025] The connecting rod 4 and the transverse rod 5 are made of stainless steel, and the fixing seat 6 and the sensor support 8 are made of aluminum alloy. The use of aluminum alloy and stainless steel has the effects of lightness and rust resistance.

[0026] By adjusting the height and length direction of sensor 3, the position state of each sensor 3 is adjusted to make each sensor 3 accurately aligned. During the initial measurement, the sensor 3 is cleared through program control. After the bar 1 is loaded onto the machine, it moves forward driven by the servo slide 2. Due to the different conditions of the end face of the bar 1, the value of each sensor 3 is uncertain, and the position where each sensor 3 appears zero is different. The sensors 3 at the four points will appear zero value moments one after another. After the last sensor 3 appears zero value feedback, the equipment stops conveying the bar 1. The last zero value point is the lowest measurement position of the current end face. The data can be used to guide the subsequent process to calculate and judge the cutting length to achieve safe cutting.

[0027] In the description of the present utility model, it should be understood that the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In the description of the present utility model, unless otherwise specified and limited, it should be noted that the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, or it can be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0028] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. The bar section inclination judgment structure is characterized by: The invention comprises a servo slide (2) for driving a bar (1) to move, wherein connecting devices are arranged on both sides of the servo slide (2), and two sensors (3) are arranged on the connecting devices, wherein the four sensors (3) are located at the end points of the largest inscribed square of the cross-section circle of the bar (1).

2. The bar section inclination judgment structure according to claim 1, characterized in that: The connecting device comprises a connecting rod (4) arranged vertically, with transverse rods (5) arranged parallel and side by side at both ends of the connecting rod (4), the transverse rod (5) being slidably connected to the connecting rod (4), and a fixing seat (6) being provided at one end of the transverse rod (5).

3. The bar section inclination judgment structure according to claim 2, characterized in that: Both ends of the connecting rod (4) are provided with connecting parts (7), and the transverse rod (5) is slidably matched with the connecting rod (4) through the connecting parts (7).

4. The bar section inclination judgment structure according to claim 2, characterized in that: Two sensor supports (8) are arranged in the middle of the connecting rod (4); the sensor supports (8) are connected to the connecting rod (4) in an up-and-down sliding manner, and the sensor (3) and the connecting rod (4) are matched in a rotational manner; and the sensor supports (8) are all connected to the sensors (3).

5. The bar section inclination judgment structure according to claim 2, characterized in that: The connecting rod (4) and the transverse rod (5) are made of stainless steel, and the fixing seat (6) and the sensor support (8) are made of aluminum alloy.

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