Ion source water cooling structure convenient to maintain

Abstract

The utility model particularly relates to the technical field of ion source water cooling, and discloses an ion source water cooling structure convenient to maintain, which comprises a base, a copper target seat and a water pipe, an eddy current disc is fixedly arranged in the middle of the base, two first clamping grooves are symmetrically formed in the surface of the base, and the copper target seat is fixedly connected with the base. The side walls, close to the two first clamping grooves, of the base are each provided with two second clamping grooves, the inner side walls, away from the first clamping grooves, of the second clamping grooves are each provided with a limiting hole, and two mounting bases are symmetrically and fixedly arranged on the side wall of the copper target base. The base, the copper target seat, the mounting seat and the pull ring are arranged, a second clamping groove and a limiting hole are communicated and are matched with the external size of the mounting seat, an operator can drive the mounting seat, the pull ring and an inserting rod to move synchronously by rotating the copper target seat, and the external size of the inserting rod is matched with the internal size of the limiting hole; therefore, the convenience of connection between the base and the copper target seat is improved, and the convenience of overhaul and maintenance of the eddy current disc is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of ion source water cooling, and in particular relates to an ion source water cooling structure which is easy to maintain. Background Art

[0002] Ion source is an applied science and technology with a wide range of uses, many types, many sciences involved, strong process technology, and very rapid development; Hall ion source, as a very commonly used type of ion source, is mostly used in the field of thin film deposition as a deposition auxiliary component to improve the physical properties of the film. The Hall ion source is a process gas that is plasmatized by the anode in the cooperation of a strong axial magnetic field. The plasmatized gas is accelerated by the anode to separate the gas ions and form an ion beam.

[0003] Existing technical solutions, such as announcement number: CN214361646U. The utility model discloses a water-cooling structure for a PVD ion source target, belonging to the field of PVD technology, including a copper target seat, a vortex disk, a target seat insulation pad and a back cover arranged in sequence, the target seat insulation pad is annular, the back cover is provided with a plug hole, one end of a water pipe passes through the plug hole of the back cover and is fixedly connected to the vortex disk; a first water flow channel is provided between the copper target seat and the vortex disk, the first water flow channel is composed of a vortex channel and a backflow channel connected to the vortex channel, a second water flow channel is provided between the vortex disk and the back cover, a water inlet hole and a water outlet hole are provided in the water pipe, the vortex disk is provided with a first connecting hole and a second connecting hole, the water inlet hole is connected to the vortex channel through the first connecting hole, the backflow channel is connected to the second water flow channel through the second connecting hole, and the water pipe is provided with a third connecting hole connecting the second water flow channel and the water outlet hole. The utility model is a water-cooling structure for a PVD ion source target with good cooling effect, easy processing, easy installation and easy disassembly.

[0004] The above technical solution has the following technical problems: during the use of this ion source water-cooling structure, scale may accumulate inside the vortex disk, and the operator needs to remove multiple sets of bolts to remove the copper target seat to clean the vortex disk, thereby affecting the maintenance efficiency of the water-cooling structure. Utility Model Content

[0005] The utility model provides an ion source water-cooling structure that is easy to maintain, aiming to solve the problem that scale may accumulate inside the eddy current disk during use of the ion source water-cooling structure, and operators need to disassemble multiple sets of bolts to remove the copper target seat to clean the eddy current disk, thereby affecting the maintenance efficiency of the water-cooling structure.

[0006] The utility model is achieved as follows: a water-cooling structure of an ion source that is easy to maintain comprises a base, a copper target base and a water pipe, wherein an eddy current disk is fixedly arranged at the middle position of the base, two card slots 1 are symmetrically provided at the surface position of the base, two card slots 2 are provided on the side walls of the base close to the two card slots 1, and limiting holes are provided on the inner side walls of the card slots 2 away from the card slots 1, two mounting seats are symmetrically provided and fixedly arranged on the side walls of the copper target base, one end of the two bases penetrates the side walls of the base and is adapted to the internal dimensions of the card slots 1 and 2, the ends of the two mounting seats are movably connected with pull rings, the ends of the pull rings are fixedly provided with plug rods, the other ends of the two plug rods penetrate the mounting seats, and the outer sides of the plug rods are adapted to the internal dimensions of the limiting holes.

[0007] Preferably, a through groove 1 is provided at the middle position of the base, the water pipe passes through the bottom end of the base, and a water inlet channel is provided inside the water pipe and is connected to the through groove 1, thereby improving the convenience of water entry.

[0008] Preferably, a reflux groove is provided inside the base near the water pipe, a through groove 2 is provided at the inner top of the base away from the through groove 2 and connected to the reflux groove, and a water outlet channel is provided inside the water pipe near the water inlet channel and connected to the reflux groove, thereby improving the convenience of water discharge.

[0009] Preferably, a third card slot is provided at a surface position of the base close to the two first card slots, and the third card slot is in a circular ring shape to facilitate clamping and limiting.

[0010] Preferably, the inner dimensions of the copper target seat are matched with the outer dimensions of the top of the base, and a sealing ring is clamped on the inner side wall of the copper target seat. The sealing ring is made of rubber material and is matched with the inner dimensions of the slot three, thereby improving the sealing performance of the connection between the base and the copper target seat.

[0011] Preferably, the outer surfaces of the two connecting rods are sleeved with baffles, the baffles are in annular shape, and the outer surfaces of the connecting rods close to the baffles are wrapped with springs, and the two ends of the springs are fixed on the baffles and the inner side walls of the mounting seat in sequence, thereby improving the stability of the connecting rods.

[0012] Compared with the prior art, the embodiments of the present application have the following beneficial effects:

[0013] Firstly, by providing a base, a copper target seat, a mounting seat and a pull ring, the interconnection of the second card slot and the limiting hole are adapted to the external dimensions of the mounting seat, and the operator can drive the mounting seat, the pull ring and the plug-in rod to move synchronously by rotating the copper target seat, and the external dimensions of the plug-in rod are adapted to the internal dimensions of the limiting hole, thereby improving the convenience of connecting the base and the copper target seat, thereby improving the convenience of inspection and maintenance of the eddy current disk; secondly, by providing a baffle and a spring, the elastic force of the spring acting on the side wall of the baffle can improve the stability of the plug-in rod inserted into the limiting hole. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a front view three-dimensional structural schematic diagram of the utility model.

[0015] Figure 2 It is a schematic diagram of the three-dimensional structure of the base of the utility model from the front view.

[0016] Figure 3 It is a schematic diagram of the front cross-sectional structure of the base of the utility model.

[0017] Figure 4 It is a schematic diagram of the three-dimensional structure of the copper target seat of the utility model from a side view.

[0018] Figure 5 It is a schematic diagram of the side cross-sectional structure of the copper target holder of the utility model.

[0019] The accompanying drawings are marked as follows: 1. base; 2. copper target base; 3. water pipe; 4. mounting base; 5. pull ring; 6. slot one; 7. slot two; 8. limit hole; 9. vortex disk; 10. slot one; 11. slot three; 12. slot two; 13. reflux groove; 14. water inlet channel; 15. water outlet channel; 16. plug-in rod; 17. sealing ring; 18. baffle; 19. spring. DETAILED DESCRIPTION

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by technicians in the technical field of this application; the terms used in the specification of the application herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned drawings are intended to cover non-exclusive inclusions. The terms "first", "second", etc. in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, not to describe a specific order.

[0021] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0022] See also Figure 1-5 The utility model provides an embodiment: an ion source water cooling structure that is easy to maintain, including a base 1, a copper target seat 2 and a water pipe 3. The inner size of the copper target seat 2 is adapted to the outer size of the top of the base 1. The copper target seat 2 is clamped on the top of the base 1 to transfer heat. An eddy current plate 9 is fixed at the middle position of the base 1 to extend the circulation stroke of the water source, thereby increasing the contact time with the copper target seat 2, thereby improving the cooling efficiency. The base 1, the copper target seat 2 and the eddy current plate 9 are prior art and will not be repeated here. The base A through groove 10 is provided at the middle position of the base 1, a water pipe 3 runs through the bottom end of the base 1, a water inlet channel 14 is provided inside the water pipe 3 and is connected to the through groove 10, which improves the convenience of water source entry, a reflux groove 13 is provided inside the base 1 near the water pipe 3, a through groove 2 12 is provided at the inner top of the base 1 away from the through groove 2 12 and is connected to the reflux groove 13, a water outlet channel 15 is provided inside the water pipe 3 near the water inlet channel 14 and is connected to the reflux groove 13, which improves the convenience of water source discharge, and the base 1 Two card slots 6 are symmetrically provided at the surface position, two card slots 7 are provided on the side walls of the base 1 close to the two card slots 6, the card slots 6 and the card slots 7 are connected in sequence, and the inner wall of the card slots 7 away from the card slots 6 is provided with a limiting hole 8, and two mounting seats 4 are symmetrically provided on the side wall of the copper target base 2, one end of the two bases 1 penetrates the side wall of the base 1 and is adapted to the internal dimensions of the card slots 6 and the card slots 7, and the ends of the two mounting seats 4 are movably connected with pull rings 5, and the ends of the pull rings 5 ​​are fixed with plugs Rod 16, the other ends of the two plug-in rods 16 pass through the mounting seat 4, the outer sides of the plug-in rods 16 are adapted to the inner dimensions of the limiting hole 8, and the operator can pull the two plug-in rods 16 out of the limiting hole 8 in turn by lifting the two pull rings 5. At this time, the limit on the copper target seat 2 can be released, and the operator rotates the copper target seat 2 ninety degrees so that the mounting seat 4 is clamped in the inner part of the card slot 6, and then pulls upward to remove the copper target seat 2, so that the base 1 and the copper target seat 2 can be opened, thereby improving the convenience of overhauling the base 1 and the eddy current disk 9.

[0023] A clamping groove 3 11 is provided at a surface position of the base 1 near the two clamping grooves 1 6. The clamping groove 3 11 is in a circular ring shape, which is convenient for clamping and limiting. A sealing ring 17 is clamped on the inner wall of the copper target seat 2. The sealing ring 17 is made of rubber material and is compatible with the internal size of the clamping groove 3 11, thereby improving the sealing performance of the connection between the base 1 and the copper target seat 2.

[0024] The outer surfaces of the two connecting rods 16 are both sleeved with baffles 18, and the baffles 18 are both in the shape of a circular ring. The outer surfaces of the connecting rods 16 close to the baffles 18 are wrapped with springs 19, and the two ends of the spring 19 are fixed on the baffles 18 and the inner side walls of the mounting seat 4 in turn. The elastic force of the spring 19 acts on the side walls of the baffles 18 to improve the stability of the connecting rod 16 when inserted into the limiting hole 8.

[0025] Working principle: When using this ion source water cooling structure that is easy to maintain, the operator first connects the ion source through a pipeline, and the cold water source flows along the inside of the vortex disk 9 through the water inlet channel 14 and the through groove 10. The vortex disk 9 is spirally shaped to extend the circulation stroke of the cold water source, thereby increasing the contact time with the copper target seat 2, thereby improving the cooling efficiency. The reflux water is then discharged through the through groove 2 12, the reflux groove 13 and the water outlet channel 15. The base 1, the copper target seat 2 and the vortex disk 9 are prior art and will not be repeated here. When the accumulated water in the vortex disk 9 When the scale affects the heat conduction, the operator can pull the two plug-in rods 16 out of the limiting hole 8 in turn by pulling the two pull rings 5. At this time, the limit on the copper target seat 2 can be released. The operator rotates the copper target seat 2 ninety degrees to make the mounting seat 4 snap into the inside of the slot 6, and then pulls it upward to remove the copper target seat 2, so that the base 1 and the copper target seat 2 can be separated, thereby improving the convenience of maintenance of the base 1 and the eddy current disk 9. The elastic force of the spring 19 acts on the side wall of the baffle 18 to improve the stability of the plug-in rod 16 inserted into the limiting hole 8.

[0026] Secondly, when the inspection is completed, the two mounting seats 4 are clamped in turn on the inner bottom of the clamping slot 1 6, and after the copper target seat is rotated 2 degrees in the opposite direction, the two plug-in rods 16 can be clamped in turn inside the clamping slot 2 7, thereby limiting the rotation of the copper target seat 2 and improving the convenience of installing the base 1 and the copper target seat 2.

[0027] It should be noted that, for the above-mentioned embodiments, for the sake of simplicity, they are all described as a series of action combinations, but those skilled in the art should know that the utility model is not limited by the described action sequence, because according to the utility model, some steps may be performed in other sequences or simultaneously. Secondly, those skilled in the art should also know that the embodiments described in the specification are all preferred embodiments, and the actions and modules involved are not necessarily required by the utility model.

[0028] In the several embodiments provided in the present application, it should be understood that the disclosed devices can be implemented in other ways. For example, the device embodiments described above are merely schematic, such as the division of the above-mentioned units. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or communication connection shown or discussed can be through some interfaces, and the indirect coupling or communication connection between devices or units can be in the form of telecommunication or other forms.

[0029] The units described above as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0030] The above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit the protection scope of the utility model. Obviously, the described embodiments are only some embodiments of the utility model, rather than all embodiments. Based on these embodiments, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Although the utility model has been described in detail with reference to the above embodiments, ordinary technicians in this field can still combine, add, delete or make other adjustments to the features in the various embodiments of the utility model according to the circumstances without conflict, without making creative work, so as to obtain different other technical solutions that do not deviate from the concept of the utility model in essence, and these technical solutions also belong to the scope of protection of the utility model.

Claims

1. An ion source water cooling structure that is easy to maintain, characterized in that: The invention comprises a base (1), a copper target seat (2) and a water pipe (3): a vortex disk (9) is fixedly arranged at the middle position of the base (1); two first card grooves (6) are symmetrically arranged at the surface position of the base (1); two second card grooves (7) are arranged on the side wall of the base (1) close to the two first card grooves (6); a limiting hole (8) is arranged on the inner side wall of the second card groove (7) away from the first card groove (6); and fixed holes (9) are symmetrically arranged on the side wall of the copper target seat (2). Two mounting seats (4) are provided, one end of each of the two bases (1) penetrates the side wall of the base (1) and is compatible with the internal dimensions of the first clamping slot (6) and the second clamping slot (7), the ends of the two mounting seats (4) are movably connected with pull rings (5), the ends of the pull rings (5) are fixed with plug rods (16), the other ends of the two plug rods (16) penetrate the mounting seats (4), and the outside of the plug rods (16) is compatible with the internal dimensions of the limiting hole (8).

2. The ion source water cooling structure that is easy to maintain according to claim 1, characterized in that: A through groove (10) is provided at the middle of the base (1), the water pipe (3) passes through the bottom end of the base (1), and a water inlet channel (14) is provided inside the water pipe (3) and is connected to the through groove (10).

3. The ion source water cooling structure that is easy to maintain according to claim 2, characterized in that: A reflux groove (13) is provided inside the base (1) near the water pipe (3); a second through groove (12) is provided at the inner top of the base (1) away from the second through groove (12) and is connected to the reflux groove (13); and a water outlet channel (15) is provided inside the water pipe (3) near the water inlet channel (14) and is connected to the reflux groove (13).

4. The ion source water cooling structure that is easy to maintain according to claim 3, characterized in that: The base (1) is provided with a third card slot (11) at a surface position close to the two first card slots (6), and the third card slot (11) is in a circular ring shape.

5. The ion source water cooling structure that is easy to maintain according to claim 1, characterized in that: The inner dimensions of the copper target seat (2) are matched with the outer dimensions of the top of the base (1); a sealing ring (17) is clamped on the inner side wall of the copper target seat (2); the sealing ring (17) is made of rubber material and is matched with the inner dimensions of the clamping groove three (11).

6. The ion source water cooling structure that is easy to maintain according to claim 1, characterized in that: The outer surfaces of the two plug-in rods (16) are sleeved with baffles (18), and the baffles (18) are both annular. The outer surfaces of the plug-in rods (16) close to the baffles (18) are wound with springs (19), and the two ends of the springs (19) are fixed to the baffles (18) and the inner side walls of the mounting seat (4) in sequence.

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