Air inlet structure and reaction furnace

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a gas inlet structure and a reaction furnace, and solves the problem of poor coating uniformity caused by non-uniform distribution of gas in the furnace in the prior art. The air inlet structure comprises at least one air inlet pipe set, the air inlet pipe set comprises a first air inlet pipe and a second air inlet pipe which extend in the first direction, and the first air inlet pipe and the second air inlet pipe are provided with a plurality of first air outlet hole sets and second air outlet hole sets which are arranged at intervals in the first direction respectively. A first plane formed by connecting the center line of the first air inlet pipe and the center line of the second air inlet pipe is parallel to the bearing face, and the second air inlet pipe is provided with a plurality of second air outlet hole sets arranged at intervals in the first direction. And the first air outlet hole group and the second air outlet hole group are not overlapped or partially overlapped. According to the gas inlet structure and the reaction furnace, the uniformity of a coating film can be improved.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor and photovoltaic technology, and in particular to an air intake structure and a reaction furnace. Background Art

[0002] With the development of photovoltaic technology, solar cells are widely used in various fields. The manufacture of solar cells includes depositing multiple materials onto a substrate in succession through chemical processing equipment to form different coating layers on the process surface of the substrate. Plasma Enhanced Chemical Vapor Deposition (PECVD) equipment is one of the more commonly used chemical processing equipment.

[0003] When PECVD equipment deposits materials such as silicon nitride, silicon oxynitride, and silicon oxide to form a film layer, it is necessary to set a lower temperature to complete the deposition of the film on the surface of the substrate. However, the lower temperature will cause the gas diffusion rate in the PECVD reactor of the PECVD equipment to be slower, and the gas distribution in the furnace will be uneven, which will lead to poor uniformity of the coating. Utility Model Content

[0004] In view of this, the embodiments of the present disclosure provide an air intake structure and a reaction furnace to solve the problems of uneven gas distribution in the reaction furnace and poor coating uniformity in the related art.

[0005] In a first aspect, an embodiment of the present disclosure provides an air intake structure, which is applied to a reaction furnace and is configured to deposit a thin film on a process surface of at least one substrate located on a carrier in the reaction furnace, wherein the carrier has a carrier surface parallel to the process surface of the substrate, and the reaction furnace comprises a furnace tube, wherein the furnace tube has a furnace cavity extending along a first direction, and a furnace mouth and a furnace tail located at both ends of the furnace cavity along the first direction; wherein the air intake structure comprises: at least one group of air intake pipe groups, which enter the furnace cavity from the furnace tail and extend toward the furnace mouth along the first direction; wherein the air intake pipe group comprises: a first air intake pipe, which extends along the first direction, and the first air intake pipe has a plurality of air intake pipes arranged at intervals along the first direction. The furnace chamber comprises a plurality of first air outlet groups arranged in a spaced relationship, and the gas of the first air inlet pipe enters the furnace chamber through the first air outlet group; the second air inlet pipe extends along the first direction, and the second air inlet pipe and the first air inlet pipe are respectively located on both sides of the furnace tube, and a first plane formed by connecting the center line of the first air inlet pipe and the center line of the second air inlet pipe is parallel to the bearing surface, and the second air inlet pipe has a plurality of second air outlet groups arranged at intervals along the first direction, and the gas of the second air inlet pipe enters the furnace chamber through the second air outlet group; wherein, in the orthographic projection of the second air inlet pipe onto the first air inlet pipe along the extension direction of the first plane, the first air outlet group and the second air outlet group have no overlap or partially overlap.

[0006] In some embodiments, the air intake structure includes a group of air intake pipes: a first air intake pipe and a second air intake pipe are symmetrically arranged on both sides of the carrier along an extension direction of a first plane, and the axis of the furnace pipe is located in the first plane.

[0007] In some embodiments, the first air outlet group includes at least one first air outlet, and the opening direction of the first air outlet has a non-zero angle with the extension direction of the first plane; and / or, the second air outlet group includes at least one second air outlet, and the opening direction of the second air outlet has a non-zero angle with the extension direction of the first plane.

[0008] In some embodiments, the center line of the first air inlet pipe is the first axis, the first air outlet group includes two first air outlets arranged in a circumferential direction around the first axis, the first air outlets are symmetrically arranged on both sides of the first plane, and there is a first angle between the direction of the first axis and the extension direction of the first plane; and / or, the center line of the second air inlet pipe is the second axis, the second air outlet group includes two second air outlets arranged in a circumferential direction around the second axis, the second air outlets are symmetrically arranged on both sides of the first plane, there is a second angle between the direction of the second axis and the extension direction of the first plane, and the first angle and the second angle are equal.

[0009] In some embodiments, the first angle is between 40° and 80°.

[0010] In some embodiments, a cross-sectional area of ​​the first air outlet hole is the same as a cross-sectional area of ​​the second air outlet hole.

[0011] In some embodiments, the first air outlet includes a first hole segment and a second hole segment that are connected, the second hole segment is located on the side of the first hole segment facing the furnace cavity, and along the extension direction of the first air outlet, the cross-sectional area of ​​the second hole segment is larger than the cross-sectional area of ​​the first hole segment; and / or, the second air outlet includes a third hole segment and a fourth hole segment that are connected, the fourth hole segment is located on the side of the third hole segment facing the furnace cavity, and along the extension direction of the second air outlet, the cross-sectional area of ​​the fourth hole segment is larger than the cross-sectional area of ​​the third hole segment.

[0012] In some embodiments, multiple first air outlet groups are evenly arranged along the first direction, and there is a first distance between adjacent first air outlet groups, and / or, multiple second air outlet groups are evenly arranged along the first direction, and there is a second distance between adjacent second air outlet groups, and the first distance is equal to the second distance.

[0013] In some embodiments, the first distance is between 90 mm and 110 mm.

[0014] In some embodiments, in the orthographic projection of the second air inlet pipe along the extension direction of the first plane onto the first air inlet pipe, the second air outlet hole group is located at the center position of two adjacent first air outlet hole groups in the first direction.

[0015] In some embodiments, along the first direction, the bearing surface is located between two first air outlet groups at two ends of the first air inlet pipe, and / or, along the first direction, the bearing surface is located between two second air outlet groups at two ends of the second air inlet pipe.

[0016] In a second aspect, an embodiment of the present disclosure provides a reaction furnace configured to deposit a thin film on a process surface of at least one substrate located on a carrier within the reaction furnace, the reaction furnace comprising: a furnace tube having a furnace chamber extending along a first direction, and a furnace mouth and a furnace tail located at both ends of the furnace chamber along the first direction; an air intake structure described in any of the above items, entering the furnace chamber from the furnace tail and extending toward the furnace mouth along the first direction.

[0017] An air intake structure and a reaction furnace provided by the embodiments of the present disclosure allow air to enter a chamber in a relatively dispersed manner, thereby allowing the gas to be quickly and evenly distributed in the chamber, and thereby improving the uniformity of the coating, through a first air intake pipe and a second air intake pipe that are parallel to the supporting surface and are arranged on the first air intake pipe and the second air intake pipe in an extension direction of the first plane without overlapping or partially overlapping the first air outlet hole group. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and other purposes, features and advantages of the present disclosure will become more apparent by describing the embodiments of the present disclosure in more detail in conjunction with the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of the present disclosure and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure and do not constitute a limitation of the present disclosure. In the drawings, the same reference numerals generally represent the same components or steps.

[0019] Figure 1 Shown is a top view of an air intake structure provided in a reaction furnace according to an embodiment of the present disclosure.

[0020] Figure 2 Shown Figure 1 A partial enlarged view of area A in the air intake structure shown.

[0021] Figure 3 Shown Figure 2 A schematic diagram of an orthographic projection of a second air intake pipe onto the first air intake pipe along an extension direction of a first plane.

[0022] Figure 4 Shown Figure 2 A schematic diagram of another orthographic projection of the second air intake pipe onto the first air intake pipe along the extension direction of the first plane.

[0023] Figure 5 Shown is a left view of an air intake structure provided in an embodiment of the present disclosure in a reaction furnace.

[0024] Figure 6Shown is a left view of an air intake structure provided in another embodiment of the present disclosure in a reaction furnace.

[0025] Figure 7 Shown is a cross-sectional view of a group of intake pipes in an intake structure provided by an embodiment of the present disclosure.

[0026] Figure 8 Shown is a cross-sectional view of a group of intake pipes in another intake structure provided by an embodiment of the present disclosure.

[0027] Fig. 9 Shown is a cross-sectional view of a group of intake pipes in another intake structure provided by an embodiment of the present disclosure.

[0028] Fig.10 Shown is a cross-sectional view of a first air intake pipe in an air intake structure provided in an embodiment of the present disclosure.

[0029] Fig.11 Shown is a cross-sectional view of a second air intake pipe in an air intake structure provided in an embodiment of the present disclosure.

[0030] Reference numerals:

[0031] 10. Air intake structure; 1. Air intake pipe group; 11. First air intake pipe; 111. First air outlet group; 1111. First air outlet; 1111a. First hole section; 1111b. Second hole section; 12. Second air intake pipe; 121. Second air outlet group; 1211. Second air outlet; 1211a. Third hole section; 1211b. Fourth hole section; 20. Furnace tube; 201. Furnace cavity; 202. Furnace mouth; 203. Furnace tail; 30. Carrier; 301. Carrier surface; M. First plane; X. First direction; L1. First distance; L2. Second distance; Q. First angle; O. First axis; N. Second axis. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0033] Figure 1 Shown is a top view of an air intake structure provided in a reaction furnace according to an embodiment of the present disclosure. Figure 2 Shown Figure 1 A partial enlarged view of area A in the air intake structure shown. Figure 3 Shown Figure 2 A schematic diagram of an orthographic projection of a second air intake pipe onto the first air intake pipe along an extension direction of a first plane. Figure 4 Shown Figure 2 A schematic diagram of another orthographic projection of the second air intake pipe onto the first air intake pipe along the extension direction of the first plane. Figure 5 Shown is a left view of an air intake structure provided in an embodiment of the present disclosure in a reaction furnace. Figure 6 The figure shows a left view of an air intake structure provided by another embodiment of the present disclosure in a reactor. The direction indicated by arrow X is the first direction, which is also the extension direction of the furnace tube 20. The plane indicated by M is the first plane. The extension direction of the first direction X is parallel to the first plane M. In addition, for the convenience of observation, Figure 1 , Figure 2 , Figure 5 and Figure 6 The first air outlet group 111 , the second air outlet group 121 , the first air outlet 1111 , and the second air outlet 1211 are indicated by black shadows.

[0034] The present disclosure provides an air intake structure, such as Figure 1 and Figure 2 The air intake structure 10 is applied to a reactor, which may be a PECVD reactor in a plasma enhanced chemical vapor deposition (PECVD) device. The PECVD reactor includes a furnace tube 20 having a furnace tube axis. The furnace tube 20 has a furnace chamber 201 extending along a first direction X and a furnace mouth 202 and a furnace tail 203 located at two ends of the furnace chamber 201. The PECVD reactor is configured to deposit a thin film on a process surface of at least one substrate located on a carrier 30 in the furnace chamber 201. The air intake structure 10 is used to introduce gas into the furnace chamber 201.

[0035] It can be understood that the reaction furnace can also be an LPCVD reaction furnace of a low pressure chemical vapor deposition (LPCVD) device, an ALD reaction furnace of an atomic layer deposition (ALD) device, etc., without specific limitation.

[0036] Optionally, the carrier 30 may be, for example, a boat structure (not shown) for carrying a plurality of substrates, the boat structure comprising two opposite side plates and a plurality of spaced support portions connecting the side plates, the upper surface of the support portion having a carrying surface 301 for carrying the substrates, the process surface of the substrates being parallel to the carrying surface 301. When the carrier 30 carrying the substrates is placed in the furnace chamber 201, the carrier 30 may be placed horizontally or vertically according to requirements, so that the substrates carried by the carrying surface 301 of the carrier 30 are parallel to or perpendicular to the horizontal plane.

[0037] It should be emphasized that the specific structure of the carrier 30 can be adaptively adjusted according to actual usage requirements and is not specifically limited.

[0038] Optionally, the gas introduced into the furnace chamber 201 by the air intake structure 10 may be, for example, silicon nitride, silicon oxynitride, silicon oxide, or the like, which requires low temperature deposition to form a thin film, so that a thin film of corresponding material is deposited on the process surface of the substrate. The gas introduced into the furnace chamber 201 by the air intake structure 10 may be selected according to actual needs without specific limitation.

[0039] like Figures 1 to 4 The air intake structure 10 includes at least one group of air intake pipe groups 1, which enter the furnace cavity 201 from the furnace tail 203 and extend toward the furnace mouth 202 along the first direction X. The air intake pipe group 1 includes a first air intake pipe 11 and a second air intake pipe 12 extending along the first direction X, the first air intake pipe 11 has a plurality of first air outlet groups 111 arranged at intervals along the first direction X, and the gas of the first air intake pipe 11 enters the furnace cavity 201 through the first air outlet group 111, the second air intake pipe 12 and the first air intake pipe 11 are respectively located on both sides of the furnace tube 20, the second air intake pipe 12 has a plurality of second air outlet groups 121 arranged at intervals along the first direction X, and the gas of the second air intake pipe 12 enters the furnace cavity 201 through the second air outlet group 121. A first plane M formed by connecting the center line of the first air inlet pipe 11 and the center line of the second air inlet pipe 12 is parallel to the bearing surface 301. In the orthographic projection of the second air inlet pipe 12 along the extension direction of the first plane M onto the first air inlet pipe 11, the first air outlet group 111 and the second air outlet group 121 have no overlap or partially overlap.

[0040] Optionally, the first air outlet group 111 provided on the first air inlet pipe 11 and the second air outlet group 121 provided on the second air inlet pipe 12 are respectively located on a side of the air inlet pipe away from the inner side wall of the furnace pipe 20, that is, the first air outlet group 111 and the second air outlet group 121 are arranged opposite to each other in the extension direction of the first plane M, and the first air outlet group 111 and the second air outlet group 121 arranged opposite to each other, in the orthographic projection of the second air inlet pipe 12 along the extension direction of the first plane M onto the first air inlet pipe 11, the first air outlet group 111 and the second air outlet group 121 do not overlap (such as Figure 3 ), or, in the orthographic projection of the second air inlet pipe 12 along the extension direction of the first plane M onto the first air inlet pipe 11, the first air outlet group 111 and the second air outlet group 121 partially overlap (e.g. Figure 4), not specifically limited. The staggered first gas outlet group 111 and the second gas outlet group 121 enable the gas to diffuse quickly and evenly in the furnace chamber 201, reducing the impact force of the gas outlet group into the furnace chamber 201, thereby effectively improving the uniformity of the thin film deposited on the process surface of the substrate. For ease of understanding, the embodiment of the present disclosure describes the intake structure 10 in detail with the scheme that the first gas outlet group 111 and the second gas outlet group 121 do not overlap.

[0041] In some embodiments, Figure 2 and Figure 3 , a plurality of first gas outlet groups 111 are evenly arranged along the first direction X, and a first distance L1 is provided between adjacent first gas outlet groups 111; a plurality of second gas outlet groups 121 are evenly arranged along the first direction X, and a second distance L2 is provided between adjacent second gas outlet groups 121, and the first distance L1 is equal to the second distance L2. The first gas outlet groups 111 and the second gas outlet groups 121 evenly arranged along the first direction X enable the blown gas to be blown toward the substrate more quickly and evenly, thereby ensuring the uniformity of the thin film deposited on the substrate.

[0042] Optionally, the first distance L1 and the second distance L2 may also be set to be different. For example, the first distance L1 may be greater than 2 times the second distance L2, so that two first air outlet groups 111 are provided between each two adjacent first air outlet groups 111 in the orthographic projection of the second air inlet pipe 12 along the extension direction of the first plane M to the first air inlet pipe 11, or the second distance L2 may be greater than 2 times or 4 times the first distance L1, etc., and may be adaptively adjusted according to needs without specific limitation.

[0043] Optionally, the plurality of first air outlet groups 111 may be non-uniformly arranged on the first air inlet pipe 11, and the plurality of second air outlet groups 121 may be non-uniformly arranged on the second air inlet pipe 12. For example, in the orthographic projection of the first air inlet pipe 11 and the second air inlet pipe 12 along the extension direction of the first plane M onto the boat structure, the arrangement density of the plurality of first air outlet groups 111 that at least completely overlap or partially overlap with the substrate is greater than the density of the plurality of first air outlet groups 111 that do not overlap with the substrate, and the arrangement density of the plurality of second air outlet groups 121 that at least completely overlap or partially overlap with the substrate is greater than the density of the plurality of second air outlet groups 121 that do not overlap with the substrate. Alternatively, from the furnace opening 202 to the furnace tail 203, the arrangement density of the plurality of first air outlet groups 111 gradually decreases, and the arrangement density of the plurality of second air outlet groups 121 gradually decreases, and can be adaptively adjusted according to actual needs without specific limitation.

[0044] In some embodiments, in the orthographic projection of the second air inlet pipe 12 onto the first air inlet pipe 11 along the extension direction of the first plane M, the second air outlet group 121 is located at the center of two adjacent first air outlet groups 111 in the first direction X. By using this method of evenly staggered arrangement of the first air outlet group 111 and the second air outlet group 121 in the first direction X, the gas can quickly reach a uniform state when diffusing into the region of the carrier 30, thereby improving the uniformity of the coating.

[0045] Optionally, the first distance L1 is between 90 mm and 110 mm, and the second distance L2 is between 90 mm and 110 mm. In the embodiment of the present disclosure, the equal first distance L1 and second distance L2 are set at 100 mm, which ensures a better gas diffusion effect.

[0046] Optionally, the first air intake pipe 11 and the second air intake pipe 12 can be configured as a structure with the same cross-sectional area inside the pipe, or can be configured as a structure with different cross-sectional areas inside the pipe, the shapes of the cross-sections of the first air intake pipe 11 and the second air intake pipe 12 can be the same or different, and the first air intake pipe 11 and the second air intake pipe 12 can be configured as a circular pipe, a square pipe, an elliptical pipe, etc., and can be adaptively adjusted according to actual needs. In the embodiment of the present disclosure, the first air intake pipe 11 and the second air intake pipe 12 are configured as circular pipes with the same inner diameter so that the air intake volumes of the two air intake pipes are the same.

[0047] It is understandable that the air intake structure 10 may further include an air intake main pipe (not shown) disposed at the furnace tail 203 and located outside the furnace cavity 201, and the air intake main pipe is divided into at least one group of branches at the furnace tail 203 as an air intake pipe group 1 extending from the furnace tail 203 into the furnace cavity 201. Figure 5 The air intake pipe group 1 can be provided as a plurality of groups, and the plurality of air intake pipe groups 1 are arranged at intervals in a direction perpendicular to the bearing surface 301, or as Figure 6 The air intake pipe group 1 can also be set as a group, without specific limitation. For ease of understanding, the embodiment of the present disclosure takes the air intake pipe group 1 set as a group as an example to describe the air intake structure 10 in detail.

[0048] In some embodiments, Figure 6, the first air inlet pipe 11 and the second air inlet pipe 12 are symmetrically arranged on both sides of the carrier 30 along the extension direction of the first plane M, and the furnace tube axis of the furnace tube 20 is located on the first plane M. That is, the first air inlet pipe 11 and the second air inlet pipe 12 are arranged left and right relative to the carrier 30 in the furnace chamber 201, and at this time, the substrate in the carrier 30 in the furnace chamber 201 is placed horizontally, and the carrying surface 301 is parallel to the horizontal plane. The symmetrical arrangement of the first air inlet pipe 11 and the second air inlet pipe 12 makes the first air outlet group 111 and the second air outlet group 121 also symmetrically arranged on both sides of the carrier 30 in the horizontal direction, so that the gas can be more quickly evenly distributed in the area of ​​the carrier 30.

[0049] It can be understood that the first air inlet pipe 11 and the second air inlet pipe 12 can also be set to be symmetrically arranged on the upper and lower sides of the carrier 30 along the extension direction perpendicular to the first plane M. At this time, the substrate in the carrier 30 located in the furnace cavity 201 is placed vertically, and the supporting surface 301 is perpendicular to the horizontal plane, without specific limitation.

[0050] In an optional embodiment, along the first direction X, the bearing surface 301 is located between the two first gas outlet groups 111 at the two ends of the first gas inlet pipe 11, and along the first direction X, the bearing surface 301 is located between the two second gas outlet groups 121 at the two ends of the second gas inlet pipe 12. That is, along the first direction X, at least the two edges of the substrate carried on the bearing surface 301 in the length direction are correspondingly provided with the first gas outlet group 111 and the second gas outlet group 121 arranged in a dispersed manner, so that the gas can be quickly and evenly diffused toward the substrate, thereby improving the uniformity of gas distribution within the region of the carrier 30, and further improving the uniformity of thin film deposition on the process surface of the substrate.

[0051] The disclosed embodiment allows gas to enter the chamber in a relatively dispersed manner by providing a first air inlet pipe 11 and a second air inlet pipe 12 that are parallel to the supporting surface 301 and intake air from the furnace tail 203 toward the furnace mouth 202, and arranging a first air outlet hole group 111 and a second air outlet hole group 121 that are non-overlapping or partially overlapping in the extension direction of the first plane M on the first air inlet pipe 11 and the second air inlet pipe 12, thereby allowing the gas to be quickly and evenly distributed in the furnace cavity 201, thereby improving the uniformity of the thin film deposited on the process surface of the substrate.

[0052] In the following, in conjunction with the drawings and specific embodiments, the specific structures of the first intake pipe 11 and the second intake pipe 12 are described in detail by taking the intake pipe group 1 as a group as an example.

[0053] Figure 7 Shown is a cross-sectional view of a group of intake pipes in an intake structure provided by an embodiment of the present disclosure.

[0054] Figure 8 Shown is a cross-sectional view of a group of intake pipes in another intake structure provided by an embodiment of the present disclosure.

[0055] Fig. 9 Shown is a cross-sectional view of a group of intake pipes in another intake structure provided by an embodiment of the present disclosure.

[0056] Fig.10 Shown is a cross-sectional view of a first air intake pipe in an air intake structure provided in an embodiment of the present disclosure. Fig.11 Shown is a cross-sectional view of a second air intake pipe in an air intake structure provided in an embodiment of the present disclosure.

[0057] like Figures 6 to 9 The first gas outlet hole group 111 includes at least one first gas outlet hole 1111, and the opening direction of the first gas outlet hole 1111 has a non-zero angle with the extension direction of the first plane M. The second gas outlet hole group 121 includes at least one second gas outlet hole 1211, and the opening direction of the second gas outlet hole 1211 has a non-zero angle with the extension direction of the first plane M. By using the first gas outlet hole 1111 and the second gas outlet hole 1211 that have a non-zero angle with the extension direction of the first plane M, it is prevented that the gas blown out from the gas outlet hole directly blows onto the process surface of a certain layer of the substrate in a direction parallel to the bearing surface 301.

[0058] like Figure 7 The first air outlet group 111 may include a first air outlet 1111, the opening direction of which is inclined upward relative to the extension direction of the first plane M, and the second air outlet group 121 includes a second air outlet 1211, the opening direction of which is inclined downward relative to the extension direction of the first plane M, so that the first air outlet 1111 is mainly used to blow air toward the substrate in the upper half of the boat structure, and the second air outlet 1211 is mainly used to blow air toward the substrate in the lower half of the boat structure, thereby avoiding direct blowing of the boat structure in the horizontal direction and avoiding the collision of the gases blown out of the first air outlet 1111 and the second air outlet 1211.

[0059] It can be understood that the inclination angle of the opening direction of the first air outlet 1111 relative to the extension direction of the first plane M can be the same as the inclination angle of the opening direction of the second air outlet 1211 relative to the extension direction of the first plane M. The specific inclination angle can be, for example, 70°, 60°, 40°, etc., without specific limitation.

[0060] like Figure 8 and Fig. 9The center line of the first air inlet pipe 11 is the first axis O, the first air outlet hole group 111 includes a plurality of first air outlet holes 1111 arranged at intervals in the circumferential direction around the first axis O, the plurality of first air outlet holes 1111 are symmetrically arranged on both sides of the first plane M, and a first angle Q is formed between the direction of the first axis O and the extension direction of the first plane M; the center line of the second air inlet pipe 12 is the second axis N, the second air outlet hole group 121 includes a plurality of second air outlet holes 1211 arranged at intervals in the circumferential direction around the second axis N, the plurality of second air outlet holes 1211 are symmetrically arranged on both sides of the first plane M, and a second angle is formed between the direction of the second axis N and the extension direction of the first plane M, and the first angle Q is equal to the second angle.

[0061] It is understandable that the number of the first air outlet holes 1111 can be 6, 4, 2, etc., and the number of the second air outlet holes 1211 can be 6, 4, 2, etc., which can be adaptively adjusted according to needs without specific limitation. In the embodiment of the present disclosure, the number of the first air outlet holes 1111 and the second air outlet holes 1211 are both set to 2.

[0062] In an alternative embodiment, if Fig. 9 , two first air outlets 1111 are symmetrically arranged on both sides of the first plane M, two second air outlets 1211 are symmetrically arranged on both sides of the first plane M, the first angle Q and the second angle are equal, and the angle range is between 40°-80°. In the embodiment of the present disclosure, the first angle Q and the second angle are both set to 60° to prevent direct blowing of the boat structure.

[0063] In some embodiments, Fig. 9 The cross-sectional area of ​​the first gas outlet 1111 is the same as the cross-sectional area of ​​the second gas outlet 1211. The first gas outlet 1111 and the second gas outlet 1211 are set to be circular through-hole structures with the same diameter and passing through the inside of the gas outlet pipe and the furnace cavity 201, so that the gas output into the furnace cavity 201 is the same, thereby improving the uniformity of gas diffusion in the furnace cavity 201.

[0064] In some embodiments, Fig.10 and Fig.11The first air outlet 1111 includes a first hole segment 1111a and a second hole segment 1111b that are connected. The second hole segment 1111b is located on the side of the first hole segment 1111a facing the furnace cavity 201. Along the extension direction of the first air outlet 1111, the cross-sectional area of ​​the second hole segment 1111b is larger than the cross-sectional area of ​​the first hole segment 1111a. The second air outlet 1211 includes a third hole segment 1211a and a fourth hole segment 1211b that are connected. The fourth hole segment 1211b is located on the side of the third hole segment 1211a facing the furnace cavity 201. Along the extension direction of the second air outlet 1211, the cross-sectional area of ​​the fourth hole segment 1211b is larger than the cross-sectional area of ​​the third hole segment 1211a. By setting the hole segments with different cross-sectional areas, the range of the second hole segment 1111b and the fourth hole segment 1211b blowing into the furnace cavity 201 is increased, thereby improving the gas diffusion effect.

[0065] Optionally, the second hole segment 1111b and the fourth hole segment 1211b can be set to an inclined chamfered structure, and along the axial direction of the first gas outlet 1111 and the second gas outlet 1211, the cross-sectional area of ​​the second hole segment 1111b and the fourth hole segment 1211b gradually increases from the inside of the air inlet pipe to the furnace chamber 201, further improving the diffusion angle of the gas to the furnace chamber 201 and increasing the diffusion range. In other examples, the first gas outlet 1111 and the second gas outlet 1211 can also be directly set to a structure with a cross-sectional area gradually increasing toward the furnace chamber 201, without specific limitation.

[0066] The present disclosure also provides a reaction furnace, such as Figure 1 , configured to deposit a thin film on a process surface of at least one substrate located on a carrier 30 in a reaction furnace, the reaction furnace comprising: a furnace tube 20, having a furnace chamber 201 extending along a first direction X, and a furnace mouth 202 and a furnace tail 203 located at both ends of the furnace chamber 201 along the first direction X; the air intake structure 10 described in the above embodiment enters the furnace chamber 201 from the furnace tail 203 and extends along the first direction X toward the furnace mouth 202.

[0067] It can be understood that the reactor can be a PECVD reactor in a plasma enhanced chemical vapor deposition (PECVD) device. The PECVD reactor includes a furnace tube 20 having a furnace tube axis. The furnace tube 20 has a furnace chamber 201 extending along a first direction X and a furnace mouth 202 and a furnace tail 203 located at both ends of the furnace chamber 201. The PECVD reactor is configured to deposit a thin film on a process surface of at least one substrate located on a carrier 30 in the furnace chamber 201 in a low temperature environment (such as 180°-200°), and the air intake structure 10 is used to introduce gas into the furnace chamber 201.

[0068] Optionally, the reaction furnace may also be a LPCVD reaction furnace of a low pressure chemical vapor deposition (LPCVD) device, an ALD reaction furnace of an atomic layer deposition (ALD) device, etc., without specific limitation.

[0069] In the embodiments of the present disclosure, if not clearly defined, the connection form may be a detachable connection by means of bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the detachable form, a non-detachable connection may be made by means of welding, bonding, etc.

[0070] The basic principles of the present disclosure are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present disclosure are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present disclosure. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, and are not limitations. The above details do not limit the present disclosure to the necessity of adopting the above specific details to be implemented.

[0071] The block diagrams of the devices, apparatuses, equipment, and systems involved in this disclosure are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including," "comprising," "having," and the like are open words, referring to "including but not limited to," and can be used interchangeably therewith. The words "or" and "and" used herein refer to the words "and / or," and can be used interchangeably therewith, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to," and can be used interchangeably therewith.

[0072] It should also be noted that in the apparatus, device and method of the present disclosure, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present disclosure.

[0073] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0074] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present disclosure to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. An air intake structure, characterized in that: The invention is applied to a reaction furnace and is configured to deposit a thin film on a process surface of at least one substrate located on a carrier in the reaction furnace, wherein the carrier has a carrying surface parallel to the process surface of the substrate, and the reaction furnace comprises a furnace tube, wherein the furnace tube has a furnace cavity extending along a first direction, and a furnace mouth and a furnace tail located at two ends of the furnace cavity along the first direction; Wherein, the air intake structure comprises: At least one group of air inlet pipes, entering the furnace cavity from the furnace tail and extending toward the furnace mouth along the first direction; Wherein, the air intake pipe group includes: a first air inlet pipe extending along the first direction, the first air inlet pipe having a plurality of first air outlet groups arranged at intervals along the first direction, and the gas in the first air inlet pipe enters the furnace cavity through the first air outlet groups; a second air inlet pipe extending along the first direction, the second air inlet pipe and the first air inlet pipe being respectively located on both sides of the furnace pipe, a first plane formed by connecting the center line of the first air inlet pipe and the center line of the second air inlet pipe being parallel to the bearing surface, the second air inlet pipe having a plurality of second air outlet groups arranged at intervals along the first direction, and the gas of the second air inlet pipe entering the furnace cavity through the second air outlet groups; Wherein, in the orthographic projection of the second air inlet pipe onto the first air inlet pipe along the extension direction of the first plane, the first air outlet group and the second air outlet group have no overlap or partially overlap.

2. The air intake structure according to claim 1, characterized in that: The air intake structure comprises a group of air intake pipe groups; The first air inlet pipe and the second air inlet pipe are symmetrically arranged on both sides of the carrier along the extension direction of the first plane, and the axis of the furnace tube is located on the first plane.

3. The air intake structure according to claim 2, characterized in that: The first air outlet group includes at least one first air outlet, and an opening direction of the first air outlet has a non-zero angle with an extension direction of the first plane; and / or, The second air outlet group includes at least one second air outlet, and an opening direction of the second air outlet has a non-zero angle with an extension direction of the first plane.

4. The air intake structure according to claim 3, characterized in that: The center line of the first air inlet pipe is a first axis, the first air outlet group includes two first air outlets spaced apart in a circumferential direction around the first axis, the first air outlets are symmetrically arranged on both sides of the first plane, and a first angle is formed between the direction of the first axis and the extension direction of the first plane; and / or, The center line of the second air inlet pipe is the second axis, the second air outlet group includes two second air outlets arranged at intervals in the circumferential direction around the second axis, the second air outlets are symmetrically arranged on both sides of the first plane, and there is a second angle between the direction of the second axis and the extension direction of the first plane, and the first angle is equal to the second angle.

5. The air intake structure according to claim 4, characterized in that: The first angle is between 40° and 80°.

6. The air intake structure according to claim 3, characterized in that: The cross-sectional area of ​​the first air outlet hole is the same as the cross-sectional area of ​​the second air outlet hole.

7. The air intake structure according to claim 3, characterized in that: The first air outlet hole comprises a first hole segment and a second hole segment which are connected to each other, wherein the second hole segment is located on a side of the first hole segment facing the furnace cavity, and along the extension direction of the first air outlet hole, the cross-sectional area of ​​the second hole segment is larger than the cross-sectional area of ​​the first hole segment; and / or, The second air outlet includes a third hole segment and a fourth hole segment that are connected. The fourth hole segment is located on the side of the third hole segment facing the furnace cavity. Along the extension direction of the second air outlet, the cross-sectional area of ​​the fourth hole segment is larger than the cross-sectional area of ​​the third hole segment.

8. The air intake structure according to claim 1, characterized in that: A plurality of the first air outlet hole groups are evenly arranged along the first direction, and a first distance exists between adjacent first air outlet hole groups, and / or, A plurality of the second air outlet hole groups are evenly arranged along the first direction, a second distance is provided between adjacent second air outlet hole groups, and the first distance is equal to the second distance.

9. The air intake structure according to claim 8, characterized in that: The first distance is between 90 mm and 110 mm.

10. The air intake structure according to claim 8, characterized in that: In the orthographic projection of the second air inlet pipe onto the first air inlet pipe along the extension direction of the first plane, the second air outlet hole group is located at the center position of two adjacent first air outlet hole groups in the first direction.

11. The air intake structure according to claim 1, characterized in that: Along the first direction, the bearing surface is located between the two first air outlet groups at two ends of the first air inlet pipe. and / or, Along the first direction, the bearing surface is located between two second air outlet groups at two ends of the second air inlet pipe.

12. A reaction furnace, characterized in that: The device is configured to deposit a thin film on a process surface of at least one substrate located on a carrier in the reaction furnace, and the reaction furnace comprises: A furnace tube, comprising a furnace cavity extending along a first direction, and a furnace mouth and a furnace tail located at two ends of the furnace cavity along the first direction; The air intake structure according to any one of claims 1 to 11 enters the furnace cavity from the furnace tail and extends toward the furnace mouth along the first direction.

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