Rotary heating disc

Abstract

The utility model discloses a rotary heating plate, which comprises a heating plate, a hollow shaft, a heating pipe and a temperature sensor, a slip ring assembly is arranged on the outer wall of the hollow shaft; a positive cable and a negative cable of the heating pipe penetrate through the bottom end opening of the hollow shaft and then are connected with the slip ring assembly; the slip ring assembly comprises an insulating shaft sleeve, a positive slip ring, an insulating spacer bush, a negative slip ring and an insulating sleeve which are coaxially arranged on the hollow shaft in a sleeving manner; the insulating shaft sleeve is fixedly connected with the hollow shaft; the positive slip ring, the insulating spacer bush and the negative slip ring are coaxially sleeved on the insulating shaft sleeve in sequence, and are fixedly connected with the insulating shaft sleeve; the insulating sleeve penetrates through the cathode slip ring along the axis direction of the insulating shaft sleeve, the anode cable of the heating pipe sequentially penetrates through the insulating sleeve and the insulating spacer bush and then is connected with the anode slip ring, and the cathode cable of the heating pipe is connected with the cathode slip ring. According to the utility model, through the slip ring assembly, the technical problem that the power supply of a circuit is influenced because the wire is easy to wind when the heating disc rotates dynamically in the prior art is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a rotating heating disk. Background Art

[0002] Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD) are technologies widely used in the semiconductor industry for thin film deposition. For example, CVD equipment includes a reaction chamber and a wafer heating base. When two or more gaseous raw materials are introduced into the reaction chamber, the gaseous raw materials react chemically with each other to form a new material and deposit on the surface of the heating base wafer to form a deposited film.

[0003] The process of vapor deposition coating is complex and diverse. At the same time, various factors will affect the uniformity of coating thickness during coating. In order to meet higher coating process requirements, the existing wafer heating plate adopts the method of lifting and reciprocating rotation. Since the heating tube of the heating plate needs to be powered, the wires will be entangled during rotation, which limits the rotation angle of the heating plate and leads to poor adjustment ability of the heating plate. Therefore, how to achieve 360° rotation of the heating plate without damaging the power supply wire is an important problem that needs to be solved by technicians in this field. Utility Model Content

[0004] The utility model provides a rotating heating disc to solve the technical problem in the prior art that the heating disc is prone to cause the wires to be entangled during dynamic rotation, thereby affecting the power supply of the circuit.

[0005] In order to achieve the above purpose, the technical solution of the utility model is:

[0006] A rotating heating disk comprises: a disk, a hollow shaft, a heating tube and a temperature sensor; a slip ring assembly is arranged on the outer wall of the hollow shaft, and the positive cable and the negative cable of the heating tube are connected to the slip ring assembly after passing through the bottom opening of the hollow shaft; the slip ring assembly comprises: an insulating sleeve coaxially sleeved on the hollow shaft, a positive slip ring, an insulating spacer, a negative slip ring and an insulating sleeve; the insulating sleeve is fixedly connected to the hollow shaft; the positive slip ring, the insulating spacer and the negative slip ring are coaxially sleeved on the insulating sleeve in sequence, and the positive slip ring, the insulating spacer and the negative slip ring are all fixedly connected to the insulating sleeve; the insulating sleeve passes through the negative slip ring along the axial direction of the insulating sleeve, the positive cable of the heating tube passes through the insulating sleeve and the insulating spacer in sequence and is connected to the positive slip ring, and the negative cable of the heating tube is connected to the negative slip ring.

[0007] Furthermore, the positive cable of the heating tube is electrically connected to the positive slip ring through the positive connecting electrode; a first through hole coaxial with the insulating sleeve is opened on the insulating sleeve, one end of the positive connecting electrode is connected to the positive slip ring, and the other end passes through the first through hole and the insulating sleeve in sequence and then is electrically connected to the positive cable of the heating tube.

[0008] Furthermore, the aperture of the first through hole is equal to the inner aperture of the insulating sleeve, a first blind hole is opened at one end of the insulating spacer toward the negative electrode slip ring, the first blind hole is coaxial with the first through hole, the aperture of the first blind hole is equal to the outer diameter of the insulating sleeve, and the end of the insulating sleeve passes through the negative electrode slip ring and is inserted into the first blind hole.

[0009] Furthermore, the hollow shaft includes a first shaft section and a second shaft section from top to bottom, and the diameter of the second shaft section is smaller than the diameter of the first shaft section; the insulating sleeve is a T-shaped sleeve, the large diameter end of the insulating sleeve abuts against the end face of the first shaft section, and the small diameter end is pressed by an insulating pressure ring, and the insulating pressure ring is detachably fixedly connected to the second shaft section.

[0010] Furthermore, the outer diameters of the insulating sleeve, positive slip ring, insulating spacer, negative slip ring and insulating pressure ring are all equal to the diameter of the first shaft section; the positive cable of the heating tube passes through the insulating pressure ring and then into the insulating sleeve, and the negative cable of the heating tube passes through the insulating pressure ring and then connects to the negative slip ring.

[0011] Furthermore, the negative cable of the heating tube is electrically connected to the negative slip ring through the negative connecting electrode; a second through hole along the axial direction of the insulating sleeve is opened on the insulating pressure ring, one end of the negative connecting electrode is connected to the negative slip ring, and the other end passes through the second through hole and is electrically connected to the negative cable of the heating tube.

[0012] Furthermore, the insulating pressure ring includes a connecting section and a limiting section from top to bottom, the connecting section abuts the insulating sleeve and is connected to the second shaft section, the limiting section abuts the end surface of the second shaft section away from the first shaft section and the inner diameter of the limiting section is equal to the inner diameter of the second shaft section.

[0013] Furthermore, it also includes a protective cover, which is detachably connected to the insulating pressure ring, covers the insulating pressure ring and the end of the second shaft segment, and the temperature sensor passes through the protective cover.

[0014] Beneficial effects:

[0015] A rotating heating plate disclosed in the present application can contact the stator part for external power supply respectively through the positive slip ring and the negative slip ring of the slip ring assembly, so that the positive cable and the negative cable of the heating tube can rotate with the heating plate, avoiding the situation that the positive cable and the negative cable of the heating tube are connected to the external power supply line and get entangled during rotation; thereby solving the technical problem in the prior art that the heating plate is prone to cause the wires to get entangled during dynamic rotation and affect the power supply of the circuit; thereby realizing 360° rotation of the heating plate, improving the adjustment ability of the heating plate, and ensuring uniform deposition of the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0017] Figure 1 It is a structural schematic diagram of a rotating heating plate disclosed in the utility model;

[0018] Figure 2 for Figure 1 A partial enlarged view of middle A.

[0019] 21. Disc; 22. Hollow shaft; 23. Heating tube; 231. Positive connecting electrode; 232. Negative connecting electrode; 24. Temperature sensor; 251. Insulating sleeve; 252. Positive slip ring; 253. Insulating spacer; 254. Negative slip ring; 255. Insulating sleeve; 26. Insulating pressure ring; 27. Protective cover. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] A rotating heating plate, combined with Figure 1 and Figure 2As shown, it includes: a disc 21, a hollow shaft 22, a heating tube 23 and a temperature sensor 24; a slip ring assembly is provided on the outer wall of the hollow shaft 22, and the positive and negative cables of the heating tube 23 are connected to the slip ring assembly after passing through the bottom opening of the hollow shaft 22; the slip ring assembly includes: an insulating sleeve 251, a positive slip ring 252, an insulating spacer 253, a negative slip ring 254 and an insulating sleeve 255 coaxially sleeved on the hollow shaft 22; the insulating sleeve 251 is fixedly connected to the hollow shaft 22; the positive slip ring 252, the insulating spacer 253 and the negative slip ring 254 are coaxially sleeved on the insulating sleeve 251 in sequence, and the positive slip ring 252, the insulating spacer 253 and the negative slip ring 254 are all fixedly connected to the insulating sleeve 251. In this embodiment, the positive slip ring 252, the insulating spacer 253 and the negative slip ring 254 are all interference fit with the insulating sleeve 251. The insulating sleeve 251 isolates the hollow shaft 22, and the insulating spacer 253 isolates the positive slip ring 252 and the negative slip ring 254 to prevent short circuit. The insulating sleeve 255 passes through the negative slip ring 254 along the axial direction of the insulating sleeve 251, and the positive cable of the heating tube 23 passes through the insulating sleeve 255 and the insulating spacer 253 in sequence and then connects to the positive slip ring 252. The insulating sleeve 255 protects the positive cable of the heating tube 23 to prevent the positive cable of the heating tube 23 from being short-circuited with the negative slip ring 254 after breakdown. The negative cable of the heating tube 23 is connected to the negative slip ring 254. The positive slip ring 252 and the negative slip ring 254 rotate with the hollow shaft 22, that is, the positive slip ring 252 and the negative slip ring 254 rotate synchronously with the heating plate. The positive cable and the negative cable of the heating tube 23 pass through the bottom opening of the hollow shaft 22 and are connected to the positive slip ring 252 and the negative slip ring 254 respectively. The positive cable and the positive slip ring 252 of the heating tube 23 rotate with the hollow shaft 22, and the negative cable and the negative slip ring 254 of the heating tube 23 rotate with the hollow shaft 22; the positive slip ring 252 and the negative slip ring 254 are in contact with the positive and negative stator parts of the external power supply respectively, ensuring that the heating tube 23 is powered while avoiding the occurrence of wire entanglement. Therefore, the rotating heating plate can solve the technical problem in the prior art that the heating plate is prone to wire entanglement during dynamic rotation, thereby affecting the power supply of the circuit. In addition, the heating plate can be rotated 360°, the adjustment ability of the heating plate is improved, and the uniform deposition of the wafer is ensured.

[0022] Preferably, the hollow shaft 22 includes a first shaft section and a second shaft section from top to bottom, the diameter of the second shaft section is smaller than the diameter of the first shaft section, so that the first shaft section and the second shaft section form a step; the insulating sleeve 251 is a T-shaped sleeve, the large diameter end of the insulating sleeve 251 abuts against the end face of the first shaft section, and the small diameter end is pressed by the insulating pressure ring 26, and the insulating pressure ring 26 presses the insulating sleeve 251 against the end face of the first shaft section to fix the insulating sleeve 251, ensuring that the insulating sleeve 251 rotates synchronously with the hollow shaft 22. The insulating pressure ring 26 is detachably fixedly connected to the second shaft section, which is convenient for installation and removal.

[0023] Preferably, the outer diameters of the insulating sleeve 251, the positive slip ring 252, the insulating spacer 253, the negative slip ring 254 and the insulating pressure ring 26 are all equal to the diameter of the first shaft section; the positive cable of the heating tube 23 passes through the insulating pressure ring 26 and then passes through the insulating sleeve 255, and the negative cable of the heating tube 23 passes through the insulating pressure ring 26 and then connects to the negative slip ring 254. The structural size of the slip ring assembly is reduced, and the radial size of the slip ring assembly is ensured to be consistent with that of the first shaft section, so as to facilitate the installation of the heating plate.

[0024] Preferably, the positive cable of the heating tube 23 is electrically connected to the positive slip ring 252 through the positive connection electrode 231; a first through hole coaxial with the insulating sleeve 255 is provided on the insulating spacer 253, one end of the positive connection electrode 231 is connected to the positive slip ring 252, and the other end passes through the first through hole and the insulating sleeve 255 in sequence and then electrically connected to the positive cable of the heating tube 23. The positive connection electrode 231 is convenient to penetrate the first through hole and the insulating sleeve 255, and is convenient to connect the positive connection electrode 231 to the positive slip ring 252 and to braze the positive cable of the heating tube 23 to the positive connection electrode 231.

[0025] Preferably, the aperture of the first through hole is equal to the inner aperture of the insulating sleeve 255, and a first blind hole is opened at one end of the insulating spacer 253 toward the negative electrode slip ring 254. The first blind hole is coaxial with the first through hole, and the aperture of the first blind hole is equal to the outer diameter of the insulating sleeve 255. The end of the insulating sleeve 255 passes through the negative electrode slip ring 254 and then is inserted into the first blind hole. The butt joint position of the insulating sleeve 255 and the insulating spacer 253 is kept at a certain distance from the end face of the negative electrode slip ring 254, which can improve the protection of the positive electrode connection electrode 231 and avoid a short circuit between the positive electrode connection electrode 231 and the negative electrode slip ring 254.

[0026] Specifically, the insulating pressure ring 26 is provided with a third through hole coaxial with the insulating sleeve 255, and the insulating pressure ring 26 is provided with an arc groove at one end facing the negative slip ring 254. The arc groove is arranged around the central axis of the insulating pressure ring 26, and the arc groove corresponds to the third through hole and the width of the arc groove is equal to the outer diameter of the insulating sleeve 255. The end of the insulating sleeve 255 away from the insulating spacer 253 passes through the negative slip ring 254 and then inserts into the arc groove. The positive connection electrode 231 passes through the first through hole, the insulating sleeve 255 and the third through hole in sequence, and the positive connection electrode 231 is electrically connected to the positive cable. The docking position of the insulating sleeve 255 and the insulating pressure ring 26 is kept at a certain distance from the end face of the negative slip ring 254, which can improve the protection of the positive connection electrode 231 and avoid short circuit between the positive connection electrode 231 and the negative slip ring 254.

[0027] Preferably, the negative cable of the heating tube 23 is electrically connected to the negative slip ring 254 through the negative connection electrode 232; a second through hole along the axial direction of the insulating sleeve 251 is provided on the insulating pressure ring 26, one end of the negative connection electrode 232 is connected to the negative slip ring 254, and the other end passes through the second through hole and is electrically connected to the negative cable of the heating tube 23. The negative connection electrode 232 is convenient for penetrating into the second through hole, and convenient for connecting the negative slip ring 254 and the negative cable of the heating tube 23 to the negative connection electrode 232 for brazing connection.

[0028] Preferably, the insulating pressure ring 26 includes a connecting section and a limiting section from top to bottom, the connecting section abuts against the insulating sleeve 251 and is connected to the second shaft segment, the limiting section abuts against the end face of the second shaft segment away from the first shaft segment, and the inner diameter of the limiting section is equal to the inner diameter of the second shaft segment. The limiting section abuts against the end face of the second shaft segment away from the first shaft segment to limit the position of the insulating pressure ring 26, so as to prevent the insulating pressure ring 26 from exerting too much pressure on the insulating sleeve 251 and damaging the insulating sleeve 251.

[0029] Specifically, a first internal thread is provided in the connecting section, a first external thread is provided on the second shaft section, and the insulating pressure ring 26 is fixed on the hollow shaft 22 by tightening.

[0030] Preferably, a protective cover 27 is further included, and the protective cover 27 is detachably connected to the insulating pressure ring 26. In this embodiment, the protective cover 27 is provided with a second internal thread, and the outer periphery of the insulating pressure ring 26 is provided with a second external thread, and the protective cover 27 is screwed on the insulating pressure ring 26. The protective cover 27 covers the insulating pressure ring 26 and the end of the second shaft segment, and the protective cover 27 protects the positive connection electrode 231, the positive cable, the negative connection electrode 232 and the negative cable, and can prevent dust from entering the hollow shaft 22. The temperature sensor 24 passes through the protective cover 27 and is connected to a micro conductive slip ring to ensure that the signal line of the temperature sensor 24 is not entangled.

[0031] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model.

Claims

1. A rotating heating plate, comprising: A disc (21), a hollow shaft (22), a heating tube (23) and a temperature sensor (24); characterized in that a slip ring assembly is provided on the outer wall of the hollow shaft (22), and the positive and negative cables of the heating tube (23) are connected to the slip ring assembly after passing through the bottom opening of the hollow shaft (22); The slip ring assembly comprises: an insulating sleeve (251) coaxially sleeved on the hollow shaft (22), a positive slip ring (252), an insulating spacer (253), a negative slip ring (254) and an insulating sleeve (255); the insulating sleeve (251) is fixedly connected to the hollow shaft (22); the positive slip ring (252), the insulating spacer (253) and the negative slip ring (254) are coaxially sleeved on the insulating sleeve (251) in sequence; the positive slip ring (252) ), the insulating spacer (253), and the negative slip ring (254) are all fixedly connected to the insulating sleeve (251); the insulating sleeve (255) passes through the negative slip ring (254) along the axial direction of the insulating sleeve (251); the positive cable of the heating tube (23) passes through the insulating sleeve (255) and the insulating spacer (253) in sequence and is then connected to the positive slip ring (252); the negative cable of the heating tube (23) is connected to the negative slip ring (254).

2. A rotating heating plate according to claim 1, characterized in that: The positive cable of the heating tube (23) is electrically connected to the positive slip ring (252) via the positive connecting electrode (231); a first through hole coaxial with the insulating sleeve (255) is provided on the insulating spacer (253); one end of the positive connecting electrode (231) is connected to the positive slip ring (252), and the other end passes through the first through hole and the insulating sleeve (255) in sequence and then is electrically connected to the positive cable of the heating tube (23).

3. A rotating heating plate according to claim 2, characterized in that: The aperture of the first through hole is equal to the inner aperture of the insulating sleeve (255); a first blind hole is opened on one end of the insulating spacer (253) toward the negative electrode slip ring (254); the first blind hole is coaxial with the first through hole; the aperture of the first blind hole is equal to the outer diameter of the insulating sleeve (255); and the end of the insulating sleeve (255) passes through the negative electrode slip ring (254) and is inserted into the first blind hole.

4. The rotary heating plate according to claim 1, characterized in that: The hollow shaft (22) comprises a first shaft section and a second shaft section from top to bottom, the diameter of the second shaft section being smaller than the diameter of the first shaft section; the insulating shaft sleeve (251) is a T-shaped shaft sleeve, the large diameter end of the insulating shaft sleeve (251) abuts against the end surface of the first shaft section, and the small diameter end is pressed by an insulating pressure ring (26), and the insulating pressure ring (26) is detachably fixedly connected to the second shaft section.

5. A rotating heating plate according to claim 4, characterized in that: The outer diameters of the insulating sleeve (251), the positive slip ring (252), the insulating spacer (253), the negative slip ring (254) and the insulating pressure ring (26) are all equal to the diameter of the first shaft section; the positive cable of the heating tube (23) passes through the insulating pressure ring (26) and then passes into the insulating sleeve (255), and the negative cable of the heating tube (23) passes through the insulating pressure ring (26) and is connected to the negative slip ring (254).

6. A rotating heating plate according to claim 5, characterized in that: The negative cable of the heating tube (23) is electrically connected to the negative slip ring (254) via the negative connecting electrode (232); a second through hole is provided on the insulating pressure ring (26) along the axial direction of the insulating sleeve (251); one end of the negative connecting electrode (232) is connected to the negative slip ring (254), and the other end passes through the second through hole and is electrically connected to the negative cable of the heating tube (23).

7. The rotary heating plate according to claim 4, characterized in that: The insulating pressure ring (26) comprises a connecting section and a limiting section from top to bottom, the connecting section abuts against the insulating shaft sleeve (251) and is connected to the second shaft section, the limiting section abuts against the end surface of the second shaft section away from the first shaft section and the inner diameter of the limiting section is equal to the inner diameter of the second shaft section.

8. The rotary heating plate according to claim 4, characterized in that: It also comprises a protective cover (27), wherein the protective cover (27) is detachably connected to the insulating pressure ring (26), the protective cover (27) covers the insulating pressure ring (26) and the end of the second shaft section, and the temperature sensor (24) passes through the protective cover (27).

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