PECVD and automatic feeding and discharging all-in-one machine

Abstract

The utility model relates to a PECVD (Plasma Enhanced Chemical Vapor Deposition) and automatic loading and unloading all-in-one machine which comprises a rack, a flower basket transmission unit, a silicon wafer transmission unit, a wafer inserting and taking unit, a boat circulation unit and a furnace tube unit, the rack is provided with a lower layer area and an upper layer area, the lower layer area is provided with a flower basket transmission area, a silicon wafer transmission area and a wafer inserting and taking area, and the upper layer area is provided with a process area. The boat circulation area is communicated with the upper-layer area and the lower-layer area; the flower basket conveying unit is arranged in the flower basket conveying area; the silicon wafer transmission unit is arranged in the silicon wafer transmission area; the sheet inserting and taking unit is arranged in the sheet inserting and taking area; the boat transfer unit is arranged in the boat transfer area; the furnace tube unit is arranged in the process area. The PECVD furnace tube unit and automatic feeding and discharging are integrally arranged, the occupied space is small, the device is exquisite and small, the cost performance is high, the automation degree is high, the stability is high, and meanwhile, a carrier boat can stably and reliably enter and exit from the furnace tube unit.

Description

Technical Field

[0001] The utility model belongs to the technical field of processing solar cell sheets, and specifically relates to a PECVD and automatic loading and unloading integrated machine. Background Art

[0002] At present, PECVD is a commonly used thin film deposition technology in the semiconductor industry. The thin films deposited by PECVD have excellent electrical properties, good substrate adhesion and excellent step coverage. Due to these advantages, it is widely used in very large-scale integrated circuits, optoelectronic devices, MEMS and other fields.

[0003] In the manufacturing process of crystalline silicon solar cells, the tubular PECVD process is usually used to make silicon wafers. Before the process, the silicon wafers from the previous process are taken out by the basket fixture and loaded into the boat slot of the graphite boat. After the silicon wafers are placed, the graphite boat is sent into the reaction chamber of the process equipment for the PECVD process. After the PECVD process is completed, the graphite boat is sent out, and after it is cooled, the silicon wafers after the PECVD process are taken out of the graphite boat, loaded into the basket, and sent to the next process.

[0004] Traditional tubular PECVD process equipment and front-end automation equipment adopt a linear layout, which results in large machines, large footprint, and much wasted space. Summary of the invention

[0005] The utility model aims to provide a PECVD and automatic loading and unloading integrated machine.

[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0007] A PECVD and automatic loading and unloading integrated machine, comprising:

[0008] Rack: The rack has a lower area and an upper area. The lower area is provided with a basket transmission area, a silicon wafer transmission area, and a wafer insertion and extraction area. The upper area is provided with a process area. The boat circulation area is connected with the upper area and the lower area.

[0009] Flower basket transmission unit: the flower basket transmission unit is arranged in the flower basket transmission area and is used for transmitting empty / full flower baskets;

[0010] Silicon wafer transfer unit: The silicon wafer transfer unit is arranged in the silicon wafer transfer area and is used to insert the silicon wafer into the flower basket or take it out from the flower basket;

[0011] Insertion and extraction unit: the insertion and extraction unit is arranged in the insertion and extraction area, and is used to insert the silicon wafer into the carrier boat or to remove it from the carrier boat;

[0012] Boat transfer unit: The boat transfer unit is arranged in the boat transfer area and is used to transport the boat loaded with silicon wafers;

[0013] Furnace tube unit: The furnace tube unit is arranged in the process area and is used to perform PECVD process on silicon wafers.

[0014] Preferably, in the above technical solution, the flower basket transmission unit comprises:

[0015] Flower basket conveying track: The flower basket conveying track is used to convey empty / full flower baskets;

[0016] Flower basket cache module: the flower basket cache module is used to store empty / full flower baskets. There are multiple flower basket cache modules, and each flower basket cache module can store an empty / full flower basket;

[0017] Flower basket switching module: the flower basket switching module is connected to the flower basket conveying track and the flower basket buffer module respectively, and is used to transfer the empty / full flower baskets on the flower basket conveying track to the flower basket buffer module.

[0018] Further preferably, the number of the silicon wafer transfer units is consistent with the number of the flower basket cache modules, each of the flower basket cache modules is docked with a silicon wafer transfer unit, and each of the silicon wafer transfer units can transfer the silicon wafers in the flower basket on the flower basket cache module.

[0019] Further preferably, a plurality of flower basket conveying tracks are provided, so that empty flower baskets and full flower baskets can be conveyed separately.

[0020] Preferably, in the above technical solution, the silicon wafer transfer unit comprises:

[0021] Flower basket lifting module: the flower basket lifting module is connected to the flower basket transmission unit and is used to insert silicon wafers into the flower basket or take them out of the flower basket;

[0022] Silicon wafer conveying track: the silicon wafer conveying track is connected to the basket lifting module to convey the silicon wafers;

[0023] Silicon wafer cache module: The silicon wafer cache module is docked with the silicon wafer conveying track and is used to store silicon wafers.

[0024] Further preferably, the flower basket transmission units are provided in two groups, and the two groups of flower basket transmission units are arranged up and down.

[0025] Preferably, in the above technical solution, the insertion and extraction unit comprises:

[0026] Insertion and extraction sheet conveying module: the insertion and extraction sheet conveying module is docked with the boat circulation unit and is used to place and convey the carrier boat;

[0027] Wafer insertion and extraction robot: The wafer insertion and extraction robot is used to insert the silicon wafer sucked from the silicon wafer transfer unit into the carrier boat on the wafer insertion and extraction conveying module, or to transfer the silicon wafer sucked from the carrier boat on the wafer insertion and extraction conveying module to the silicon wafer transfer unit.

[0028] Further preferably, the wafer insertion and extraction conveying modules are respectively provided on the left and right sides of the wafer insertion and extraction robot, so that the wafers requiring PECVD process and the silicon wafers having completed PECVD process can be inserted and extracted respectively.

[0029] Preferably, in the above technical solution, the boat transfer unit comprises:

[0030] Boat carrier transport module: The boat carrier transport module is docked with the wafer insertion and extraction unit and is used to transport the boat carrier loaded with silicon wafers between the boat carrier transport module and the wafer insertion and extraction unit;

[0031] Boat cache module: used to store the boat loaded with silicon wafers;

[0032] Paddle transfer module: used to transfer the boat loaded with silicon wafers into or out of the furnace tube unit;

[0033] The boat carrier transport module is used to transport the boat carrier loaded with silicon wafers between the boat carrier conveying module, the boat carrier buffer module and the paddle transfer module.

[0034] Further preferably, the boat carrier conveying module, the boat carrier buffer module and the paddle transmission module are all arranged in two left and right columns, and each column of the boat carrier buffer module and the paddle transmission module is arranged with multiple upper and lower ones; the number of the boat carrier buffer modules and the paddle transmission modules is the same.

[0035] Further preferably, the boat carrying and transporting module comprises a pair of first guide rods, a pair of second guide rod assemblies, a boat moving assembly and a driving assembly, the pair of first guide rods extending in a vertical direction, the pair of second guide rod assemblies are respectively connected to the pair of first guide rods and can move on the pair of first guide rods, the boat moving assembly is connected between the pair of second guide rod assemblies and can move between the pair of second guide rod assemblies, and the driving assembly is used to drive the second guide rod assembly and the boat moving assembly to move.

[0036] Further preferably, the second guide rod assembly includes a second fixed guide rod and a second telescopic guide rod, the second fixed guide rod is movably connected to the first guide rod, the second telescopic guide rod is movably connected to the second fixed guide rod, the boat moving assembly is movably connected to a pair of second telescopic guide rods, the second telescopic guide rod can be moved on the second fixed guide rod, and the boat moving assembly can be moved on the second telescopic guide rod, so that the movement range of the boat moving assembly is larger.

[0037] More preferably, the boat moving assembly comprises a connecting rod and a hook, the connecting rod is movably connected between a pair of the second guide rod assemblies, the hook is connected to the connecting rod for hooking the boat carrier, the hooks are arranged in pairs, and a pair of the hooks hook the ears at both ends of the boat carrier.

[0038] Further preferably, the furnace tube unit includes a plurality of PECVD process furnaces, the PECVD process furnaces are provided with a plurality of horizontal furnaces, the PECVD process furnaces are provided with two left and right columns, and each column is provided with a plurality of upper and lower ones; each of the PECVD process furnaces corresponds to one of the paddle transfer modules.

[0039] Due to the application of the above technical solution, the utility model has the following advantages compared with the prior art:

[0040] The utility model has an integrated PECVD furnace tube unit and automatic loading and unloading arrangement, which occupies a small space, is exquisite and compact, has a high cost performance, a high degree of automation, and a high stability, and can realize the stable and reliable entry and exit of the carrier boat into and out of the furnace tube unit. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Attached Figure 1 It is a schematic diagram of the overall layout of the all-in-one machine of the utility model;

[0042] Attached Figure 2 It is a top view schematic diagram of the flower basket transmission unit of the utility model;

[0043] Attached Figure 3 This is a schematic diagram of the main view of the silicon wafer transfer unit of the utility model;

[0044] Attached Figure 4 It is a top view schematic diagram of the silicon wafer transfer unit of the utility model;

[0045] Attached Figure 5 It is a schematic diagram of the main view of the inserting and removing sheet unit of the utility model;

[0046] Attached Figure 6 It is a top view schematic diagram of the insertion and extraction sheet unit of the utility model;

[0047] Attached Figure 7It is a front view schematic diagram of the boat flow transfer unit of the utility model;

[0048] Attached Figure 8 It is a three-dimensional schematic diagram of the boat carrier and transport module of the utility model;

[0049] Attached Fig. 9 This is a schematic diagram of the main view of the boat carrier and transport module of the utility model;

[0050] Attached Fig.10 It is a front view schematic diagram of the furnace tube unit of the utility model.

[0051] In the above attached figure:

[0052] 1. Rack; 10. Flower basket transmission area; 11. Silicon wafer transmission area; 12. Wafer insertion and extraction area; 13. Process area; 14. Boat circulation area;

[0053] 2. Flower basket transmission unit; 20. Flower basket conveying track; 21. Flower basket buffer module; 22. Flower basket switching module; 220. Flower basket switching track; 221. Flower basket switching slide;

[0054] 3. Silicon wafer transmission unit; 30. Flower basket lifting module; 31. Silicon wafer conveying track; 32. Silicon wafer buffer module;

[0055] 4. Insertion and extraction unit; 40. Insertion and extraction conveying module; 41. Insertion and extraction robot;

[0056] 5. Boat circulation unit; 50. Boat transport module; 51. Boat buffer module; 52. Paddle transmission module; 53. Boat transport module; 530. First guide rod; 5310. Second fixed guide rod; 5311. Second telescopic guide rod; 5320. Connecting rod; 5321. Hook;

[0057] 6. Furnace tube unit. DETAILED DESCRIPTION

[0058] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0059] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0060] like Figure 1 The PECVD and automatic loading and unloading integrated machine shown includes a frame 1, a basket transmission unit 2, a silicon wafer transmission unit 3, a wafer insertion and extraction unit 4, a boat flow unit 5, and a furnace tube unit 6. Each unit is described in detail below.

[0061] In this embodiment, the rack 1 is Figure 1 The left side is defined as the front end, and the right side is defined as the back end; Figure 1 The surface on which it is located is defined as the left side, and the other surface is defined as the right side for explanation.

[0062] The rack 1 serves as the framework of the entire all-in-one machine, and has a lower area and an upper area. The lower area is provided with a flower basket transmission area 10, a silicon wafer transmission area 11, and an insertion and extraction area 12. The upper area is provided with a process area 13. The boat circulation area 14 connects the upper area and the lower area, that is, the flower basket transmission area 10, the silicon wafer transmission area 11, the insertion and extraction area 12, the boat circulation area 14, and the process area 13 are sequentially distributed along the process conveying path. Correspondingly, the flower basket transmission unit 2, the silicon wafer transmission unit 3, the insertion and extraction unit 4, the boat circulation unit 5, and the furnace tube unit 6 of the all-in-one machine are all arranged in the corresponding areas within the frame 1. It should be noted that each area is only a spatial division, and there is no structural separation. Figure 1 From the perspective of the present invention, these areas are distributed in a horizontal U-shape. In this way, the reduction of the overall size of the equipment also means the reduction of the size of the rack 1.

[0063] The flower basket conveying unit 2 is disposed in the flower basket transmission area 10 and is used to convey empty / full flower baskets. Figure 2 As shown: In this embodiment: the flower basket transmission unit includes a flower basket conveying track 20, a flower basket buffer module 21, and a flower basket switching module 22. Among them:

[0064] The flower basket conveying track 20 is used to convey empty / full flower baskets, and the front end of the flower basket conveying track 20 is also the inlet and outlet of the entire integrated machine. The flower basket conveying track 20 extends horizontally in the front-to-back direction, and is provided with multiple tracks, at least two tracks, one for feeding and one for discharging, so that empty flower baskets and full flower baskets can be conveyed separately to meet the need for simultaneous conveying.

[0065] In one implementation of this embodiment: two groups of flower basket transmission units 2 are provided, and the two groups of flower basket transmission units 2 are arranged up and down, such that the lower flower basket transmission unit 2 is used for feeding full flower baskets, and the upper flower basket transmission unit 2 is used for discharging empty flower baskets.

[0066] The flower basket buffer module 21 is used to store empty / full flower baskets. There are multiple flower basket buffer modules 21, which are distributed in the left and right directions. Each flower basket buffer module 21 can store an empty / full flower basket. The figure shows five flower baskets as an example. In this embodiment: the flower basket buffer module 21 is also provided with a track, which can transport the full flower basket on the flower basket buffer module 21 to the silicon wafer transmission unit 3.

[0067] The flower basket switching module 22 is docked with the flower basket conveying track 20 and the flower basket buffer module 21 respectively, and is used to transfer the empty / full flower baskets on the flower basket conveying track 20 to the flower basket buffer module 21. In this embodiment: the flower basket switching module 22 includes a flower basket switching track 220 and a flower basket switching slide 221, the flower basket switching track 220 extends horizontally in the left and right directions, the flower basket switching slide 221 is arranged on the flower basket switching track 220, and the flower basket switching slide 221 is also provided with a track, and the flower basket switching slide 221 moves left and right on the flower basket switching track 220, when the flower basket switching slide 221 docks with the flower basket conveying track 20, the flower basket can be transported in, and when the flower basket switching slide 221 docks with the flower basket buffer module 21, the flower basket can be transported out, and vice versa.

[0068] The silicon wafer transfer unit 3 is disposed in the silicon wafer transfer area 11 and is used to insert the silicon wafer into the flower basket or take it out from the flower basket. Figure 3 , Figure 4 As shown: In this embodiment: the silicon wafer transmission unit includes a basket lifting module 30, a silicon wafer conveying track 31, and a silicon wafer buffer module 32. Among them:

[0069] The flower basket lifting module 30 is connected to the flower basket buffer module 21 of the flower basket transmission unit 2 to insert the silicon wafer into the flower basket or take it out from the flower basket.

[0070] The wafer conveying track 31 is connected to the basket lifting module 30 for conveying the wafers. The wafer conveying track 31 extends horizontally in the front-rear direction.

[0071] The silicon wafer buffer module 32 is connected to the silicon wafer conveying track 31 for storing silicon wafers.

[0072] The working process of the silicon wafer transfer unit 3 is as follows: the flower basket lifting module 30 takes out the silicon wafers in the flower basket and transports them out through the silicon wafer conveying track 31 while lifting it to the silicon wafer conveying track 31. The silicon wafer conveying track 31 transports the silicon wafers to the silicon wafer buffer module 32 for storage, and vice versa.

[0073] In one implementation of this embodiment: the number of silicon wafer transfer units 3 is consistent with the number of flower basket cache modules 21, each flower basket cache module 21 is connected to a silicon wafer transfer unit 3, and each silicon wafer transfer unit 3 can transfer silicon wafers in a flower basket on a flower basket cache module 21.

[0074] It should be noted that the structure of the silicon wafer transmission unit 3 is not the invention of the present application, and an existing structure such as the transmission mechanism of CN217334037U may be adopted, which will not be described in detail here.

[0075] The inserting and removing unit 4 is arranged in the inserting and removing area 12, and is used to insert the silicon wafer into or remove it from the carrier boat, and the carrier boat can be a graphite boat. Figure 5 , Figure 6 As shown: In this embodiment: the sheet inserting and removing unit includes a sheet inserting and removing conveying module 40 and a sheet inserting and removing robot 41. Among them:

[0076] The insertion and extraction sheet conveying module 40 is docked with the boat circulation unit 5 for placing and conveying the carrier boat. In this embodiment, the insertion and extraction sheet conveying module 40 is also provided with a track, which can convey the carrier boat on the insertion and extraction sheet conveying module 40 to the boat circulation unit 5.

[0077] The wafer insertion and extraction robot 41 is used to insert the silicon wafer sucked from the silicon wafer buffer module 32 of the silicon wafer transfer unit 3 into the carrier boat on the wafer insertion and extraction conveying module 40, or to transfer the silicon wafer sucked from the carrier boat on the wafer insertion and extraction conveying module 40 to the silicon wafer buffer module 32 of the silicon wafer transfer unit 3.

[0078] In one implementation of the present embodiment: wafer insertion and extraction conveying modules 40 are respectively provided on the left and right sides of the wafer insertion and extraction robot 41, so that the silicon wafers requiring PECVD process and the silicon wafers having completed PECVD process can be inserted and extracted respectively.

[0079] The boat transfer unit 5 is disposed in the boat transfer area and is used to transfer the boat loaded with silicon wafers. Figure 7 As shown: In this embodiment: the boat circulation unit 5 includes: a boat carrying conveying module 50, a boat carrying buffer module 51, a paddle transmission module 52, and a boat carrying module 53. Among them:

[0080] The boat transport module 50 is docked with the wafer insertion and extraction conveying module 40 of the wafer insertion and extraction unit 4, and is used to transport the boat loaded with silicon wafers between the boat transport module 50 and the wafer insertion and extraction conveying module 40 of the wafer insertion and extraction unit 4. Similarly, the boat transport module 50 is also provided with a track, and the boat on the boat transport module 50 can be transported to the wafer insertion and extraction conveying module 40 of the wafer insertion and extraction unit 4.

[0081] The boat buffer module 51 is used to store boats loaded with silicon wafers, such as storing boats loaded with silicon wafers to be processed by PECVD, or cooling boats loaded with silicon wafers that have undergone PECVD.

[0082] The paddle transfer module 52 is used to transfer the boat loaded with silicon wafers into or out of the furnace tube unit.

[0083] In this embodiment: the boat transport module 50, the boat buffer module 51, and the paddle transmission module 52 are arranged in sequence from bottom to top, and the boat transport module 50, the boat buffer module 51, and the paddle transmission module 52 are all arranged in two left and right columns, with one boat transport module 50 arranged on each side, and multiple boat buffer modules 51 and paddle transmission modules 52 are arranged in each column. In the figure, three boat buffer modules 51 and paddle transmission modules 52 are arranged in each column, and the number of boat buffer modules 51 and paddle transmission modules 52 is the same.

[0084] The boat transport module 53 is used to transport the boat loaded with silicon wafers between the boat conveying module 50 , the boat buffer module 51 and the paddle transfer module 52 .

[0085] In one implementation of this embodiment: Figure 8 , 9 As shown: the boat carrying module 53 includes a pair of first guide rods 530, a pair of second guide rod assemblies, a boat carrying assembly and a driving assembly. Specifically:

[0086] A pair of first guide rods 530 are arranged on the frame 1 and extend in the vertical direction. The pair of first guide rods 530 are distributed front and back. A pair of second guide rod assemblies are respectively connected to the pair of first guide rods 530 and can move on the pair of first guide rods 530. The boat moving assembly is connected between the pair of second guide rod assemblies and can move between the pair of second guide rod assemblies. The driving assembly is used to drive the second guide rod assembly and the boat moving assembly to move. In this way, the second guide rod assembly moves up and down on the first guide rod 530, driving the boat moving assembly to move up and down, and at the same time, the assembly moves left and right between the pair of second guide rod assemblies, thereby realizing up, down, left and right transportation.

[0087] In this embodiment, the second guide rod assembly includes a second fixed guide rod 5310 and a second telescopic guide rod 5311. The second fixed guide rod 5310 is movably connected to the first guide rod 530, the second telescopic guide rod 5311 is movably connected to the second fixed guide rod 5310, and the boat moving assembly is movably connected to a pair of second telescopic guide rods 5311. Since the second telescopic guide rod 5311 can move on the second fixed guide rod 5310, it can move left or right relative to the second fixed guide rod 5310. At the same time, the boat moving assembly can move left or right on the second telescopic guide rod 5311, so that the boat moving assembly has a larger range of movement in the left and right directions, which can meet the transportation requirements of various positions.

[0088] In this embodiment: the boat moving assembly includes a connecting rod 5320 and a hook 5321. The connecting rod 5320 is movably connected between a pair of second telescopic guide rods 5311 of the second guide rod assembly. The hook 5321 is connected to the connecting rod 5320 and is used to hook the boat. The hook 5320 is usually arranged in pairs, and a pair of hooks 5320 hook the hook ears at both ends of the boat. There are multiple groups of hooks 5321, so that multiple groups of boats can be moved on one connecting rod 5320 at the same time. In the figure, two groups of hooks 5321 are arranged, and two groups of boats can be moved at the same time.

[0089] The furnace tube unit 6 is arranged in the process area and is used to perform PECVD process on the silicon wafer. Fig.10 As shown: the furnace tube unit 6 includes multiple PECVD process furnaces, and the PECVD process furnaces are arranged in multiple and horizontal furnaces. The PECVD process furnaces are arranged in two left and right columns, and each column is arranged with multiple upper and lower ones. The figure takes 3 in each column as an example; each PECVD process furnace corresponds to a paddle transfer module 52.

[0090] Compared with the prior art in which six PECVD process furnaces are arranged up and down, the present application divides the six PECVD process furnaces into two rows, which reduces the height and integrates them into an all-in-one machine, thereby reducing the footprint of the equipment.

[0091] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A PECVD and automatic loading and unloading integrated machine, characterized in that: include: Rack: The rack has a lower area and an upper area. The lower area is provided with a basket transmission area, a silicon wafer transmission area, and a wafer insertion and extraction area. The upper area is provided with a process area. The boat circulation area is connected with the upper area and the lower area. Flower basket transmission unit: the flower basket transmission unit is arranged in the flower basket transmission area and is used for transmitting empty / full flower baskets; Silicon wafer transfer unit: The silicon wafer transfer unit is arranged in the silicon wafer transfer area and is used to insert the silicon wafer into the flower basket or take it out from the flower basket; Insertion and extraction unit: the insertion and extraction unit is arranged in the insertion and extraction area, and is used to insert the silicon wafer into the carrier boat or to remove it from the carrier boat; Boat transfer unit: The boat transfer unit is arranged in the boat transfer area and is used to transport the boat loaded with silicon wafers; Furnace tube unit: The furnace tube unit is arranged in the process area and is used to perform PECVD process on silicon wafers.

2. The PECVD and automatic loading and unloading integrated machine according to claim 1 is characterized in that: The flower basket transmission unit comprises: Flower basket conveying track: The flower basket conveying track is used to convey empty / full flower baskets; Flower basket cache module: the flower basket cache module is used to store empty / full flower baskets. There are multiple flower basket cache modules, and each flower basket cache module can store an empty / full flower basket; Flower basket switching module: the flower basket switching module is connected to the flower basket conveying track and the flower basket buffer module respectively, and is used to transfer the empty / full flower baskets on the flower basket conveying track to the flower basket buffer module.

3. The PECVD and automatic loading and unloading integrated machine according to claim 2 is characterized in that: The number of the silicon wafer transmission units is consistent with the number of the flower basket cache modules, and each of the flower basket cache modules is connected to a silicon wafer transmission unit.

4. The PECVD and automatic loading and unloading integrated machine according to claim 1 or 3, characterized in that: The silicon wafer transfer unit comprises: Flower basket lifting module: the flower basket lifting module is connected to the flower basket transmission unit and is used to insert silicon wafers into the flower basket or take them out of the flower basket; Silicon wafer conveying track: the silicon wafer conveying track is connected to the basket lifting module to convey the silicon wafers; Silicon wafer cache module: The silicon wafer cache module is docked with the silicon wafer conveying track and is used to store silicon wafers.

5. The PECVD and automatic loading and unloading integrated machine according to claim 4 is characterized in that: The flower basket transmission units are provided in two groups, and the two groups of flower basket transmission units are arranged up and down.

6. The PECVD and automatic loading and unloading integrated machine according to claim 1 is characterized in that: The inserting and removing sheet unit comprises: Insertion and extraction sheet conveying module: the insertion and extraction sheet conveying module is docked with the boat circulation unit and is used to place and convey the carrier boat; Wafer insertion and extraction robot: The wafer insertion and extraction robot is used to insert the silicon wafer sucked from the silicon wafer transfer unit into the carrier boat on the wafer insertion and extraction conveying module, or to transfer the silicon wafer sucked from the carrier boat on the wafer insertion and extraction conveying module to the silicon wafer transfer unit.

7. The PECVD and automatic loading and unloading integrated machine according to claim 1 is characterized in that: The boat transfer unit comprises: Boat carrier transport module: The boat carrier transport module is docked with the wafer insertion and extraction unit and is used to transport the boat carrier loaded with silicon wafers between the boat carrier transport module and the wafer insertion and extraction unit; Boat cache module: used to store the boat loaded with silicon wafers; Paddle transfer module: used to transfer the boat loaded with silicon wafers into or out of the furnace tube unit; The boat carrier transport module is used to transport the boat carrier loaded with silicon wafers between the boat carrier conveying module, the boat carrier buffer module and the paddle transfer module.

8. The PECVD and automatic loading and unloading integrated machine according to claim 7, characterized in that: The boat carrier conveying module, boat carrier buffer module and paddle transmission module are all arranged in two left and right columns, and each column of the boat carrier buffer module and paddle transmission module is arranged with multiple upper and lower ones; the number of the boat carrier buffer modules and paddle transmission modules is the same.

9. The PECVD and automatic loading and unloading integrated machine according to claim 7, characterized in that: The boat carrying and transporting module includes a pair of first guide rods, a pair of second guide rod assemblies, a boat moving assembly and a driving assembly. The pair of first guide rods extend in a vertical direction. The pair of second guide rod assemblies are respectively connected to the pair of first guide rods and can move on the pair of first guide rods. The boat moving assembly is connected between the pair of second guide rod assemblies and can move between the pair of second guide rod assemblies. The driving assembly is used to drive the second guide rod assembly and the boat moving assembly to move.

10. The PECVD and automatic loading and unloading integrated machine according to claim 9, characterized in that: The second guide rod assembly includes a second fixed guide rod and a second telescopic guide rod. The second fixed guide rod is movably connected to the first guide rod, the second telescopic guide rod is movably connected to the second fixed guide rod, and the boat moving assembly is movably connected to a pair of second telescopic guide rods.

11. The PECVD and automatic loading and unloading integrated machine according to claim 9, characterized in that: The boat moving assembly comprises a connecting rod and a hook portion, wherein the connecting rod is movably connected between a pair of second guide rod assemblies, and the hook portion is connected to the connecting rod and is used for hooking the boat carrying assembly.

12. The PECVD and automatic loading and unloading integrated machine according to claim 7, characterized in that: The furnace tube unit includes a plurality of PECVD process furnaces, and the PECVD process furnaces are provided with a plurality of horizontal furnaces, and the PECVD process furnaces are provided with two left and right columns, and each column is provided with a plurality of upper and lower ones; Each of the PECVD process furnaces corresponds to one of the paddle transfer modules.

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