Diffusion furnace with uniform diffusion

Abstract

The utility model relates to the technical field of diffusion furnaces, in particular to a uniform diffusion furnace which comprises a furnace body, a diffusion pipe and an air inlet mechanism, the diffusion pipe and the air inlet mechanism are both arranged in the furnace body, and the inlet end of the air inlet mechanism is communicated with the diffusion pipe. The air inlet mechanism comprises an air inlet main pipe, a connecting pipe and a plurality of air inlet branch pipes, the input end of the connecting pipe communicates with the air inlet main pipe, the input ends of the air inlet branch pipes communicate with the connecting pipe, the output ends of the air inlet branch pipes communicate with the diffusion pipe, the air inlet branch pipes are arranged in the axial direction of the diffusion pipe, and the output direction of the air inlet branch pipes is the tangential direction of the inner wall of the diffusion pipe. The gas inlet branch pipes are distributed at intervals along the axial direction of the diffusion pipe, so that the reaction raw materials in the diffusion pipe are uniformly distributed, and the uniformity of the generated protective layer is improved; by means of the mode that tangential gas inlet is achieved through the gas inlet branch pipes, the reaction raw materials can form circulation after being input, the distribution uniformity of the reaction raw materials is further improved, and therefore the uniformity of the generated protective layer is further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnaces, in particular to a diffusion furnace with uniform diffusion. Background Art

[0002] The diffusion furnace is one of the important process equipment in the front process of the semiconductor production line. It is mainly used for diffusion, oxidation, annealing, alloying and sintering in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers. As a part of the diffusion furnace, the air intake mechanism is used to provide reaction raw materials in the diffusion furnace. In the prior art, the air intake mechanism is arranged on one side of the furnace body, so that the concentration of the reaction raw materials entering from the input direction to the other end of the furnace body gradually decreases, so that the generated protective layer has a thickness difference. In addition, the air intake mechanism includes a linear injection method, and the reaction raw materials and the battery cells are not in uniform contact, so that the generated protective layer has a thickness difference. Utility Model Content

[0003] The technical problem to be solved by the utility model is: in order to overcome the problem that in the prior art the air intake mechanism is arranged on one side of the furnace body, so that the concentration of the incoming reaction raw materials gradually decreases from their input direction to the other end of the furnace body, resulting in a thickness difference in the generated protective layer, and the air intake mechanism includes a linear injection method, the contact between the reaction raw materials and the battery cells is uneven, resulting in a thickness difference in the generated protective layer, a diffusion furnace with uniform diffusion is provided.

[0004] The utility model solves the technical problem by adopting the following technical solution: a diffusion furnace with uniform diffusion, comprising a furnace body, a diffusion tube and an air intake mechanism, wherein the diffusion tube and the air intake mechanism are arranged in the furnace body, the diffusion tube is used to accommodate the battery sheet to be processed, and the inlet end of the air intake mechanism is connected with the diffusion tube;

[0005] The air intake mechanism includes an air intake main pipe, a connecting pipe and a plurality of air intake branch pipes. The input end of the air intake main pipe is connected to the air pump, the input end of the connecting pipe is connected to the air intake main pipe, the input end of the air intake branch pipe is connected to the connecting pipe, the output end of the air intake branch pipe is connected to the diffuser, the air intake branch pipes are arranged along the axial direction of the diffuser, and the output direction of the air intake branch pipes is tangential to the inner wall of the diffuser. The air intake branch pipes are spaced apart along the axial direction of the diffuser, so that the reaction raw materials in the diffuser are evenly distributed, thereby improving the uniformity of the generated protective layer; by realizing tangential air intake through the air intake branch pipes, the reaction raw materials can form a circulation after input, further increasing the uniformity of the distribution of the reaction raw materials, thereby further improving the uniformity of the generated protective layer.

[0006] It further comprises two air intake mechanisms arranged on the diffuser pipe, and the output direction of the air intake branch pipes of the air intake mechanisms is tangential to the inner wall of the diffuser pipe.

[0007] In order to solve the problem that the reaction raw materials retained in the air intake mechanism continue to be input after the input is stopped, affecting the accuracy of the production membrane, the air intake mechanism further includes a control component, the control component includes a driving member, a mounting plate and a plurality of plugs, the plugs and the air intake branch pipes correspond to each other one by one, the driving member and the connecting pipe are fixedly connected, and the driving member is located on the outside of the connecting pipe, the driving member is used to provide power for the plug to be away from or close to the input end of the air intake main pipe, the output end of the driving member is fixedly connected to the mounting plate, and the plug and the mounting plate are fixedly connected.

[0008] In order to solve the problem of poor sealing effect of the plug, the plug is further provided with a conical structure, and the plug shrinks inwardly from the input end to the output end of the intake branch pipe.

[0009] In order to solve the problem of poor sealing effect of the plug, a matching block is further installed in the air intake branch pipe, and the matching block has a through hole matching the plug.

[0010] It further comprises a filter screen installed at the output port of the air intake branch pipe.

[0011] The beneficial effects of the utility model are as follows: the utility model provides a diffusion furnace with uniform diffusion, which makes the reaction raw materials in the diffusion tube evenly distributed through the air intake branch pipes distributed at intervals along the axial direction of the diffusion tube, thereby improving the uniformity of the generated protective layer; by realizing tangential air intake through the air intake branch pipes, the reaction raw materials can form a circulation after being input, further increasing the uniformity of the distribution of the reaction raw materials, thereby further improving the uniformity of the generated protective layer. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0013] Figure 1 It is a structural schematic diagram of the utility model;

[0014] Figure 2 It is an enlarged structural schematic diagram of the diffusion pipe of the utility model;

[0015] Figure 3 This utility model Figure 2 A right view structural diagram of ;

[0016] Figure 4 This utility model Figure 2 Schematic diagram of the structure of the partial cross-section state of the central intake mechanism.

[0017] In the figure: 1, furnace body, 2, diffuser, 3, air intake mechanism, 31, air intake main pipe, 32, connecting pipe, 33, air intake branch pipe, 34, control component, 341, driving member, 342, mounting plate, 343, plug, 35, matching block, 351, through hole. DETAILED DESCRIPTION

[0018] Now the utility model is further described in detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, which only illustrate the basic structure of the utility model in a schematic manner, and therefore only show the components related to the utility model.

[0019] like Figure 1 : is a structural schematic diagram of the utility model, a diffusion furnace with uniform diffusion, comprising a furnace body 1, a diffusion tube 2 and an air intake mechanism 3, the diffusion tube 2 and the air intake mechanism 3 are both arranged in the furnace body 1, the diffusion tube 2 is used to accommodate the battery sheet to be processed, and the inlet end of the air intake mechanism 3 is connected to the diffusion tube 2;

[0020] like Figure 2 , Figure 3 , Figure 4 As shown, the air intake mechanism 3 includes an air intake main pipe 31, a connecting pipe 32 and a plurality of air intake branch pipes 33. The input end of the air intake main pipe 31 is connected to the air pump, the input end of the connecting pipe 32 is connected to the air intake main pipe 31, the input end of the air intake branch pipe 33 is connected to the connecting pipe 32, and the output end of the air intake branch pipe 33 is connected to the diffuser 2. The air intake branch pipes 33 are arranged along the axial direction of the diffuser 2. The air intake branch pipes 33 are spaced apart along the axial direction of the diffuser 2, so that the reaction raw materials in the diffuser 2 are evenly distributed, thereby improving the uniformity of the generated protective layer. The output direction of the air intake branch pipes 33 is tangential to the inner wall of the diffuser 2. By realizing tangential air intake through the air intake branch pipes 33, the reaction raw materials can form a circulation after input, further increasing the uniformity of the distribution of the reaction raw materials, thereby further improving the uniformity of the generated protective layer.

[0021] like Figure 2 , Figure 3 As shown, two air intake mechanisms 3 are arranged on the diffuser tube 2, and the output direction of the air intake branch pipe 33 of the air intake mechanism 3 is tangential to the inner wall of the diffuser tube 2. Increasing the input amount of the air intake mechanism 3 allows the reaction raw materials to be quickly distributed in the diffuser tube 2, so that the battery cells can react quickly and synchronously.

[0022] The air intake mechanism 3 includes a control component 34, which includes a driving member 341, a mounting plate 342 and a plurality of plugs 343. The plugs 343 correspond to the air intake branch pipes 33 one by one. The driving member 341 is fixedly connected to the connecting pipe 32, and the driving member 341 is located on the outside of the connecting pipe 32. The driving member 341 is used to provide power for the plug 343 to be away from or close to the input end of the air intake main pipe 31. The output end of the driving member 341 is fixedly connected to the mounting plate 342, and the plug 343 is fixedly connected to the mounting plate 342. The driving member 341 is a power element such as a cylinder or an electric push rod, which can be quickly cut off to prevent the residual reaction materials in the air intake mechanism 3 from continuing to be input.

[0023] like Figure 2 , Figure 3As shown, the plug 343 has a conical structure, and the plug 343 shrinks inward from the input end of the intake branch pipe 33 to the output end, and the sealing degree is increased by the conical structure; a matching block 35 is installed in the intake branch pipe 33, and the matching block 35 has a through hole 351 matching the plug 343, that is, the through hole 351 has a conical structure, which increases the fit between the plug 343 and the matching block 35, thereby further increasing the sealing degree.

[0024] A filter screen 331 is installed at the output port of the air inlet branch pipe 33, and the filter screen 331 is used to remove impurities in the reaction raw materials.

[0025] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A diffusion furnace with uniform diffusion, characterized in that: It comprises a furnace body (1), a diffusion pipe (2) and an air intake mechanism (3), wherein the diffusion pipe (2) and the air intake mechanism (3) are both arranged in the furnace body (1), the diffusion pipe (2) is used to accommodate battery cells to be processed, and the inlet end of the air intake mechanism (3) is connected to the diffusion pipe (2); The air intake mechanism (3) comprises an air intake main pipe (31), a connecting pipe (32) and a plurality of air intake branch pipes (33); the input end of the air intake main pipe (31) is connected to an air pump, the input end of the connecting pipe (32) is in communication with the air intake main pipe (31), the input end of the air intake branch pipe (33) is in communication with the connecting pipe (32), the output end of the air intake branch pipe (33) is in communication with the diffuser pipe (2), the air intake branch pipe (33) is arranged along the axial direction of the diffuser pipe (2), and the output direction of the air intake branch pipe (33) is tangential to the inner wall of the diffuser pipe (2).

2. A diffusion furnace with uniform diffusion as claimed in claim 1, characterized in that: Two air intake mechanisms (3) are arranged on the diffuser tube (2), and the output direction of the air intake branch pipe (33) of the air intake mechanism (3) is tangential to the inner wall of the diffuser tube (2).

3. A diffusion furnace with uniform diffusion as claimed in claim 1, characterized in that: The air intake mechanism (3) comprises a control assembly (34), the control assembly (34) comprises a driving member (341), a mounting plate (342) and a plurality of plugs (343), the plugs (343) and the air intake branch pipes (33) corresponding to each other one by one, the driving member (341) and the connecting pipe (32) are fixedly connected, and the driving member (341) is located outside the connecting pipe (32), the driving member (341) is used to provide power for the plug (343) to be away from or close to the input end of the air intake main pipe (31), the output end of the driving member (341) and the mounting plate (342) are fixedly connected, and the plug (343) and the mounting plate (342) are fixedly connected.

4. A diffusion furnace with uniform diffusion as claimed in claim 3, characterized in that: The plug (343) has a conical structure, and the plug (343) shrinks inwardly from the input end to the output end of the intake branch pipe (33).

5. A diffusion furnace with uniform diffusion as claimed in claim 4, characterized in that: A matching block (35) is installed in the air intake branch pipe (33), and the matching block (35) has a through hole (351) matching the plug (343).

6. A diffusion furnace with uniform diffusion as claimed in claim 1, characterized in that: A filter screen (331) is installed at the output port of the air intake branch pipe (33).

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