Detection system for heating plate

Abstract

The utility model provides a detection system for a heating plate. The detection system integrates horizontal detection and centering detection functions of a heating plate, and comprises a base, a plurality of guide seats, a digital display meter, a connecting rod, a rotating handle, a rotating shaft, a sliding seat and a rotating seat, the plurality of guide seats are inserted into the plurality of guide grooves of the base along the circumference of the base, and the guide seats can slide along the guide grooves of the base; the rotating seat is rotationally connected with the guide seat; the digital display meter is mounted on the rotating seat; the rotating shaft is rotationally connected with the base at the central position of the base; the sliding seat is in threaded connection with the rotating shaft; one end of the connecting rod is hinged with the guide seat, and the other end of the connecting rod is hinged with the sliding seat; and the rotating handle is fixed at the tail end of the rotating shaft.

Description

Technical Field

[0001] The utility model relates to semiconductor process equipment, in particular to the field of thin film deposition. Background Art

[0002] In thin film deposition equipment, in order to ensure the uniformity and consistency of film thickness, uniform heating and exhaust are required. The heating plate is required to be horizontal after installation and relatively centered with the chamber. If this goal is not achieved, supporting tooling will often be used to measure and adjust the level and centering of the heating plate.

[0003] At present, the level and centering detection of the heating plate need to be measured by two separate devices. Both the level and centering detection devices require two matching tools for combined measurement. The measurement accuracy is greatly affected by the machining accuracy of the measuring tools. The centering measurement is measured by the combination of two tools installed on the cavity and the heating plate. Whether the coaxial pin can pass through the two tooling center holes at the same time and whether the plugging and unplugging are smooth is used to judge whether the heating plate is centered after installation. The centering deviation value cannot be read directly. The pin needs to be repeatedly plugged and unplugged to tentatively judge whether the heating plate is centered. The tooling is a one-time processing that can only meet the level and centering detection of the specified heating plate, and has poor adaptability. Utility Model Content

[0004] In order to overcome the defects in the prior art, the utility model provides a detection system for a heating plate, wherein the detection system integrates the horizontal detection and centering detection functions of the heating plate.

[0005] The detection system comprises: a base, a plurality of guide seats, a digital display, a connecting rod, a rotating handle, a rotating shaft, a sliding seat and a rotating seat.

[0006] The plurality of guide seats are inserted into the plurality of guide grooves of the base along the circumference of the base, and the guide seats are slidable along the guide grooves of the base.

[0007] The rotating seat is rotatably connected to the guide seat.

[0008] The digital display is installed on the rotating seat.

[0009] The rotating shaft is rotatably connected to the base at the center position of the base.

[0010] The sliding seat is threadedly connected to the rotating shaft.

[0011] One end of the connecting rod is hinged to the guide seat, and the other end is hinged to the sliding seat.

[0012] The rotating handle is fixed at the end of the rotating shaft.

[0013] In one embodiment, when the rotating handle is rotated, the sliding seat is driven to move up and down, thereby driving the guide seat to slide along the guide groove of the base.

[0014] In one embodiment, the detection system further includes a connecting pin, and the two ends of the connecting rod are respectively connected to the guide seat and the sliding seat through the connecting pin.

[0015] In one embodiment, the detection system further includes a boss, and the boss is located at the front end of the guide seat.

[0016] In one embodiment, when the rotating seat is horizontally connected to the guide seat, the digital display meter measures horizontally to detect the centering of the heating plate; when the rotating seat is vertically connected to the guide seat, the digital display meter measures vertically to detect the horizontality of the heating plate.

[0017] In one embodiment, the front end of the digital display has a retractable measuring head.

[0018] In one embodiment, the digital display is a fiber optic ranging sensor.

[0019] In one embodiment, the plurality of guide seats are evenly distributed along the circumference of the base.

[0020] The heating plate detection system of the utility model skillfully integrates the two functions of level detection and center detection. It has the following beneficial technical effects:

[0021] Firstly, the detection system can be placed on the heating plate to detect the centering of the heating plate, or it can be placed on the cavity to detect the level of the heating plate. It has both level and centering detection functions and has a higher degree of integration.

[0022] Secondly, the detection value can be read through a digital display, which can more intuitively and quickly determine the offset of the heating plate after installation. The heating plate can be dynamically adjusted and the value can be read while adjusting, which makes the adjustment more efficient.

[0023] Thirdly, the guide seat of the detection system can slide along the base and the front end probe of the digital display is an elastic telescopic pin. The system can adapt to heating plates and cavities of different diameters, has a wider range of uses, and is easy to operate.

[0024] Fourthly, the use of fiber optic ranging sensors can enable non-contact measurement, further protecting the workpiece being measured. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The above utility model content and the following specific embodiments of the utility model will be better understood when read in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are only examples of the utility model claimed for protection. In the accompanying drawings, the same reference numerals represent the same or similar elements.

[0026] Figure 1 A detection system according to an embodiment of the present utility model is shown;

[0027] Figure 2 A schematic diagram showing a digital display meter according to an embodiment of the utility model in vertical use;

[0028] Figure 3 A schematic diagram showing the horizontal use of a digital display according to an embodiment of the utility model;

[0029] Figure 4 A schematic diagram showing a digital display according to an embodiment of the utility model as an optical fiber distance measuring sensor;

[0030] Figure 5 A cross-sectional view showing a zero calibration tool used in conjunction with the detection system of the utility model;

[0031] Figure 6 A schematic diagram showing the centering detection and zeroing of the heating plate before the centering measurement according to an embodiment of the utility model is shown;

[0032] Figure 7 A schematic diagram showing centering detection of a heating plate according to an embodiment of the utility model is shown;

[0033] Figure 8 A schematic diagram showing a level detection zero calibration before level measurement of a heating plate according to an embodiment of the utility model is shown;

[0034] Fig. 9 A schematic diagram showing the level detection of a heating plate according to an embodiment of the utility model is shown. DETAILED DESCRIPTION

[0035] The detailed features and advantages of the utility model are described in detail in the specific implementation mode below, and the content is sufficient for any technical personnel in the field to understand the technical content of the utility model and implement it accordingly, and according to the specification, claims and drawings disclosed in this specification, the technical personnel in the field can easily understand the relevant purposes and advantages of the utility model. Although the description of the utility model will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this utility model are limited to this implementation mode. On the contrary, the purpose of introducing the utility model in conjunction with the implementation mode is to cover other options or modifications that may be extended based on the claims of the utility model. In order to provide an in-depth understanding of the utility model, the following description will include many specific details. The utility model can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the utility model, some specific details will be omitted in the description.

[0036] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] In addition, the terms "upper", "lower", "left", "right", "top", "bottom", "horizontal" and "vertical" used in the following description should be understood as the directions shown in the paragraph and the related drawings. Such relative terms are only used for the convenience of description and do not mean that the device described therein must be manufactured or operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0038] It is understood that although the terms "first", "second", "third", etc. may be used herein to describe various components, channels, components, regions, layers and / or parts, these components, channels, components, regions, layers and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, channels, components, regions, layers and / or parts. In addition, the terms "first", "second", "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0039] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not refer to the singular and may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0040] In some embodiments, numbers describing the number of components and attributes are used. It should be understood that such numbers used in the description of the embodiments are modified by the modifiers "about", "approximately" or "substantially" in some examples. Unless otherwise specified, "about", "approximately" or "substantially" indicate that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may change according to the required features of individual embodiments. In some embodiments, the numerical parameters should take into account the specified significant digits and adopt the general method of retaining digits. Although the numerical domains and parameters used to confirm the breadth of their range in some embodiments of the present application are approximate values, in specific embodiments, the setting of such numerical values ​​is as accurate as possible within the feasible range.

[0041] At the same time, the present application uses specific words to describe the embodiments of the present application. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in this specification does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0042] In thin film deposition equipment, in order to ensure the uniformity and consistency of film thickness, uniform heating and exhaust are required. The heating plate is required to be horizontal after installation and relatively centered with the chamber. If this goal is not achieved, supporting tooling will often be used to measure and adjust the level and centering of the heating plate.

[0043] At present, the level and centering detection of the heating plate need to be measured by two separate devices. Both the level and centering detection devices require two matching tools for combined measurement. The measurement accuracy is greatly affected by the machining accuracy of the measuring tools. The centering measurement is measured by the combination of two tools installed on the cavity and the heating plate. Whether the coaxial pin can pass through the two tooling center holes at the same time and whether the plugging and unplugging are smooth is used to judge whether the heating plate is centered after installation. The centering deviation value cannot be read directly, and the pin needs to be repeatedly plugged and unplugged to tentatively judge whether the heating plate is centered. The tooling is a one-time processing that can only meet the level and centering detection of the specified heating plate, and has poor adaptability.

[0044] In order to overcome the above problems, the utility model provides a detection system for a heating plate. The detection system integrates a level detection function and a centering detection function (centering detection function).

[0045] Figure 1The detection system according to an embodiment of the utility model is shown, which comprises a base 1, a plurality of guide seats 2, a digital display 3, a connecting rod 4, a rotating handle 5, a rotating shaft 6, a sliding seat 7, a connecting pin 8 and a rotating seat 9.

[0046] A plurality of guide seats 2 are inserted into the guide groove of the base 1 along the circumference of the base 1 and can slide along the guide groove of the base 1. The plurality of guide seats 2 are evenly distributed along the circumference of the base 1.

[0047] In one embodiment, each guide seat corresponds to a rotating seat, a digital display, and a connecting rod.

[0048] In one embodiment, the number of the plurality of guide seats may be three.

[0049] The rotating seat 9 is rotatably connected to the guide seat 2 .

[0050] The digital display 3 is mounted on the rotating seat 9.

[0051] The rotating shaft 6 is rotatably connected to the base 1 at the center position of the base 1 .

[0052] The sliding seat 7 is threadedly connected to the rotating shaft 6 .

[0053] The connecting rod 4 is hinged to the guide seat 2 at one end through the connecting pin 8, and is hinged to the sliding seat 7 at the other end, so that all the components are connected as a whole.

[0054] The rotating handle 5 is fixed at the end of the rotating shaft 6 . The rotating handle 5 can drive the sliding seat 7 to move up and down, thereby driving the guide seat 2 to slide along the guide groove of the base 1 .

[0055] In one embodiment, the detection system further includes a boss 2 - 1 , which is located at the front end of the guide seat 2 .

[0056] In one embodiment, the rotating seat 9 can be connected to the guide seat 2 horizontally or vertically, so that the digital display 3 can measure horizontally and vertically to achieve centering and horizontal detection.

[0057] Figure 2 A schematic diagram showing a digital display meter according to an embodiment of the utility model being used vertically.

[0058] Figure 3 A schematic diagram showing a digital display meter in horizontal use according to an embodiment of the utility model is shown, wherein the measuring unit is directly fixed for use.

[0059] In one embodiment, the digital display 3 is a micrometer or a dial indicator.

[0060] In one embodiment, the measuring head 3 - 1 at the front end of the digital display 3 is retractable, and may be an elastic retractable pin.

[0061] In one embodiment, the digital display 3 can also be a fiber optic distance measuring sensor, such as Figure 4 shown.

[0062] In one embodiment, the main body of the rotating shaft 6 is a screw rod, and the middle of the sliding seat 7 is a threaded hole.

[0063] Figure 5 The cross-sectional view of the zero calibration tool used in conjunction with the detection system of the utility model is shown. The zero calibration tool has an inner ring 501 and an outer ring 502.

[0064] Figure 6 A schematic diagram showing zeroing of centering detection before centering measurement of a heating plate according to an embodiment of the present invention is shown.

[0065] Before measuring the center of the heating plate, you need to first perform a centering test and zero calibration. The specific method is as follows:

[0066] Place the detection system on the inner ring 501 of the zeroing fixture 600, make the inner wall of the guide seat boss tangent to the outer wall of the inner ring of the zeroing fixture, place the digital display horizontally, and make the measuring head contact with the inner wall 601 of the outer ring of the zeroing fixture. Perform zero adjustment on the digital display to determine the measurement reference.

[0067] Figure 7 A schematic diagram of centering detection of a heating plate according to an embodiment of the utility model is shown. After zeroing and adjustment, the base of the entire detection system is placed on the upper surface 701 of the heating plate, and the handle is rotated to make all guide seats (3 groups are shown in the figure) slide inward along the guide groove of the base synchronously to make the inner surface of the guide seat boss tangent to the outer diameter of the heating plate, and the detection system and the heating plate are centered for measurement and positioning. The probe of the digital display meter can be pressed against the inner surface 702 of the cavity at this time due to its telescopic function, and three groups of digital display meter values ​​are read. If the three groups of values ​​are the same, it means that the heating plate is in a relatively centered position with the cavity after installation. If they are different, the heating plate can be installed and adjusted in the center until the digital display meter readings are the same, and then the detection system is taken out to complete a centering detection.

[0068] Figure 8 A schematic diagram showing zeroing of level detection before level measurement of a heating plate according to an embodiment of the utility model is shown.

[0069] Before measuring the level of the heating plate, you need to first perform a level detection and zero calibration. The specific method is as follows:

[0070] Place the detection system on the outer ring of the zeroing tool so that the outer wall of the guide seat boss is tangent to the inner wall 601 of the outer ring of the zeroing tool. Place the digital display vertically, and the measuring head contacts the upper surface 801 of the inner ring of the zeroing tool. Zero the digital display and determine the measurement reference.

[0071] Fig. 9A schematic diagram of horizontal detection of a heating plate according to an embodiment of the utility model is shown. After zeroing, the lower surface of the guide seat is in contact with the upper edge of the cavity. By rotating the handle, all guide seats (3 groups are shown in the figure) are synchronously slid outward along the guide groove of the base, so that the outer surface of the guide seat boss is tangent to the inner surface 702 of the cavity. Then, the heating plate is raised and lowered so that the upper surface 701 of the heating plate contacts the probe of the digital display, and the three groups of digital display values ​​are read. If the readings are the same or the difference is within a certain range, it proves that the heating plate is relatively horizontal. If the measurement requirements are not met, the heating plate needs to be adjusted until the requirements are met.

[0072] The heating plate detection system of the utility model skillfully integrates the two functions of level detection and center detection. It has the following beneficial technical effects:

[0073] Firstly, the detection system can be placed on the heating plate to detect the centering of the heating plate, or it can be placed on the cavity to detect the level of the heating plate. It has both level and centering detection functions and has a higher degree of integration.

[0074] Secondly, the detection value can be read through a digital display, which can more intuitively and quickly determine the offset of the heating plate after installation. The heating plate can be dynamically adjusted and the value can be read while adjusting, which makes the adjustment more efficient.

[0075] Thirdly, the guide seat of the detection system can slide along the base and the front end probe of the digital display is an elastic telescopic pin. The system can adapt to heating plates and cavities of different diameters, has a wider range of uses, and is easy to operate.

[0076] Fourthly, the use of fiber optic ranging sensors can enable non-contact measurement, further protecting the workpiece being measured.

[0077] Those skilled in the art will appreciate that the various illustrative components, modules, blocks, units, circuits, systems, and steps described in conjunction with the embodiments disclosed herein may be implemented by hardware, software (including firmware, resident software, microcode, etc.), or a combination of the two. To clearly illustrate this interchangeability of hardware and software, various illustrative components, modules, blocks, units, circuits, systems, and steps are described above in a generalized manner in terms of their functionality. Whether such functionality is implemented as hardware or software depends on the specific application and the design constraints imposed on the overall system. Technicians may implement the described functionality in different ways for each specific application, but such implementation decisions should not be interpreted as resulting in a departure from the scope of the present invention.

[0078] Flowcharts are used in the present application to illustrate the operations or steps performed by the system according to the embodiments of the present application. It should be understood that the preceding or following operations or steps are not necessarily performed accurately in order. On the contrary, various operations or steps may be processed in reverse order or simultaneously. At the same time, other operations or steps may be added to these processes, or one or more operations or steps may be removed from these processes.

[0079] Unless explicitly stated in the claims, the order of the processing elements and sequences, the use of alphanumeric characters, or the use of other names described in the present application are not intended to limit the order of the processes and methods of the present application.

[0080] Furthermore, aspects of the present application may take the form of a computer product embodied in one or more computer-readable media including computer-readable program code.

[0081] A computer readable signal medium may include a propagated data signal containing computer program code, such as in baseband or as part of a carrier wave. The propagated signal may have a variety of forms, including electromagnetic, optical, etc., or a suitable combination. A computer readable signal medium may be any computer readable medium other than a computer readable storage medium, which may be connected to an instruction execution system, device or apparatus to communicate, propagate or transmit a program for use. The program code on the computer readable signal medium may be propagated through any suitable medium, including radio, cable, fiber optic cable, RF, or similar media, or any combination of the above media.

[0082] The computer program coding required for the operation of each part of the application can be written in any one or more programming languages, including object-oriented programming languages ​​such as Java, Scala, Smalltalk, Eiffel, JADE, Emerald, C++, C#, VB.NET, Python, etc., conventional procedural programming languages ​​such as C language, Visual Basic, Fortran 2003, Perl, COBOL 2002, PHP, ABAP, dynamic programming languages ​​such as Python, Ruby and Groovy, or other programming languages, etc. The program coding can be run completely on the user's computer, or run on the user's computer as an independent software package, or run partly on the user's computer and partly on the remote computer, or run completely on the remote computer or server. In the latter case, the remote computer can be connected to the user's computer through any network form, such as a local area network (LAN) or a wide area network (WAN), or connected to an external computer (e.g., via the Internet), or in a cloud computing environment, or used as a service such as software as a service (SaaS).

[0083] Those skilled in the art will appreciate that information, signals, and data may be represented using any of a variety of different technologies and techniques. For example, data, instructions, commands, information, signals, bits, symbols, and chips cited throughout the above description may be represented by voltage, current, electromagnetic waves, magnetic fields or magnetic particles, optical fields or optical particles, or any combination thereof.

[0084] The steps of the method or algorithm described in conjunction with the embodiments disclosed herein may be directly embodied in hardware, in a software module executed by a processor, or in a combination of the two. The software module may reside in a RAM memory, a flash memory, a ROM memory, an EPROM memory, an EEPROM memory, a register, a hard disk, a removable disk, a CD-ROM, or any other form of storage medium known in the art. An exemplary storage medium is coupled to a processor so that the processor can read and write information from / to the storage medium. In an alternative, a storage medium may be integrated into a processor. In an alternative, a processor and a storage medium may reside in a user terminal as discrete components.

[0085] In one or more exemplary embodiments, the functions described may be implemented in hardware, software, firmware, or any combination thereof. If implemented as a computer program product in software, each function may be stored on or transmitted by a computer-readable medium as one or more instructions or codes. Computer-readable media include both computer storage media and communication media, including any medium that facilitates the transfer of a computer program from one place to another. Storage media may be any available medium that can be accessed by a computer. As an example and not limitation, such a computer-readable medium may include RAM, ROM, EEPROM, CD-ROM or other optical disk storage, disk storage or other magnetic storage device, or any other medium that can be used to carry or store the desired program code in the form of an instruction or data structure and can be accessed by a computer. Any connection is also properly referred to as a computer-readable medium. For example, if the software is transmitted from a website, a server, or other remote source using a coaxial cable, a fiber optic cable, a twisted pair, a digital subscriber line (DSL), or wireless technologies such as infrared, radio, and microwaves, the coaxial cable, fiber optic cable, twisted pair, DSL, or wireless technologies such as infrared, radio, and microwaves are included in the definition of the medium. Disk and disc as used herein include compact disc (CD), laser disc, optical disc, digital versatile disc (DVD), floppy disk and Blu-ray disc, wherein disk often reproduces data magnetically, while disc reproduces data optically with lasers. Combinations of the above should also be included within the scope of computer-readable media.

[0086] The terms and expressions used above are for description only, and the present invention should not be limited to these terms and expressions. The use of these terms and expressions does not mean to exclude any equivalent features of the illustrations and descriptions (or parts thereof), and it should be recognized that various modifications that may exist should also be included in the scope of the claims. Other modifications, changes and substitutions may also exist. Accordingly, the claims should be deemed to cover all such equivalents.

[0087] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus facilitate the understanding of one or more utility model embodiments, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, drawing or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims.

[0088] Similarly, it should be pointed out that although the present invention has been described with reference to the current specific embodiments, ordinary technicians in this technical field should realize that the above embodiments are only used to illustrate the present invention, and various equivalent changes or substitutions can be made without departing from the spirit of the present invention. Therefore, as long as the changes and modifications to the above embodiments are within the scope of the essential spirit of the present invention, they will fall within the scope of the claims of this application.

Claims

1. A detection system for a heating plate, characterized in that: The detection system integrates the heating plate level detection and centering detection functions, and the detection system includes: A base, a plurality of guide seats, a digital display, a connecting rod, a rotating handle, a rotating shaft, a sliding seat and a rotating seat; The plurality of guide seats are inserted into the plurality of guide grooves of the base along the circumference of the base, and the guide seats are slidable along the guide grooves of the base; The rotating seat is rotatably connected to the guide seat; The digital display is installed on the rotating seat; The rotating shaft is rotatably connected to the base at the center of the base; The sliding seat is threadedly connected to the rotating shaft; One end of the connecting rod is hinged to the guide seat, and the other end is hinged to the sliding seat; The rotating handle is fixed at the end of the rotating shaft.

2. The detection system for a heating plate according to claim 1, characterized in that: When the rotating handle is rotated, the sliding seat is driven to move up and down, thereby driving the guide seat to slide along the guide groove of the base.

3. The detection system for a heating plate according to claim 1, characterized in that: It also includes a connecting pin, and the two ends of the connecting rod are respectively connected to the guide seat and the sliding seat through the connecting pin.

4. The detection system for a heating plate according to claim 1, characterized in that: It also includes a boss, which is located at the front end of the guide seat.

5. The detection system for a heating plate according to claim 1, characterized in that: When the rotating seat is horizontally connected to the guide seat, the digital display meter measures horizontally to detect the centering of the heating plate; when the rotating seat is vertically connected to the guide seat, the digital display meter measures vertically to detect the horizontality of the heating plate.

6. The detection system for a heating plate according to claim 1, characterized in that: The front end of the digital display meter is provided with a retractable measuring head.

7. The detection system for a heating plate according to claim 1, characterized in that: The digital display is an optical fiber distance measuring sensor.

8. The detection system for a heating plate according to claim 1, characterized in that: The plurality of guide seats are evenly distributed along the circumference of the base.

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