Optical element surface detection device
By designing a six-axis adjustable optical element surface detection device, the problem of complex and low efficiency of optical element detection operations in the prior art is solved, and efficient and accurate detection effects are achieved.
Patent Information
- Application Number
- CN202421209870.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-30
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2034-05-30
AI Technical Summary
In the prior art, the detection operation of optical components is complex and inefficient. Especially in the detection of spherical large-diameter optical components, the center does not coincide with the rotation center of the rotation detection platform, resulting in the impact of measurement accuracy.
An optical element surface detection device is designed, adopting a six-axis adjustment design, including a first linear component, a second linear component, a first rotating component and a load bearing mechanism. Through adjustment and rotational adjustment of the X-axis, Y-axis and Z-axis directions, the detection accuracy of the detection device is achieved through accurate contact with the optical element surface, and the error compensation is improved.
It improves the efficiency and accuracy of optical component detection, reduces the complexity of error compensation, and simplifies detection operations.
Smart Images
Figure CN222866635U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of optical element detection, in particular to an optical element surface detection device. Background Art
[0002] With the rapid development of optical processing, the proportion of spherical large-aperture optical components is increasing. How to quickly and accurately detect surface damage or size of spherical large-aperture optical components has attracted much attention in recent years. In the prior art, a three-coordinate contact probe system is usually used and a surface detection mechanism and a rotating detection platform are added to the three-coordinate measuring instrument. In an ideal situation, it is relatively simple and fast to measure the axisymmetric spherical optical components by rotation. However, in actual measurement, the center of the optical component to be measured does not coincide with the rotation center of the rotating detection platform, resulting in a centering error, which affects the measurement accuracy. If you want to reduce the error, you must separate and compensate the error or add a centering device to the component to be measured, which greatly increases the difficulty of programming and measurement. Therefore, how to efficiently detect more spherical large-aperture optical components is a problem that technicians in this field need to consider. Utility Model Content
[0003] The utility model aims to provide an optical element surface detection device to solve the problems of complex optical element detection operation and low efficiency in the prior art.
[0004] The technical solution of the utility model is: an optical element surface detection device, comprising a detection mechanism and a bearing mechanism, the detection mechanism comprising a first linear component, a second linear component and a first rotating component, the first linear component can drive the second linear component to move along the X-axis; the second linear component can drive the first rotating component to move along the Z-axis; the first rotating component is connected to a detection device, which can drive the detection device to rotate with the Y-axis as the rotation axis;
[0005] The carrying mechanism includes a third linear component, a second rotating component connected to the third linear component, and the third linear component can drive the second rotating component to move along the Y-axis; the second rotating component is connected to the third rotating component, and the second rotating component can drive the third rotating component to rotate with the X-axis as the rotation axis; the third rotating component is connected to a stage component, and the stage component can carry the optical element and drive the optical element to rotate with the Z-axis as the rotation axis.
[0006] Preferably, the second rotating component includes a first base, a second base and a first driving device connected to the first base; the lower end of the first base is connected to the third linear component, and the upper end of the second base is connected to the third rotating component; the upper end of the first base is connected to the second base through an arc-shaped first guide rail; the lower end of the second base is connected to an arc-shaped rack with the same radius as the first guide rail; the first driving device is connected to a screw rod connected to the rack, and the first driving device drives the screw rod to rotate, and can drive the second base to move along the first guide rail through the rack.
[0007] Preferably, the first linear component includes a first bracket and at least two sets of second guide rails, the first bracket has an L-shaped cross-section, and the two sets of second guide rails are respectively connected to the two ends of the first bracket; the first bracket is also connected to a second driving device, and the second driving device can drive the first bracket to reciprocate along the second guide rails.
[0008] Preferably, the second linear component comprises a third driving device connected to the first bracket, and the driving movement direction of the third driving device is Z-axis profiling.
[0009] Preferably, the first rotating assembly comprises a second bracket connected to the third driving device, and a fourth driving device connected to the second bracket, and the driving motion direction of the fourth driving device is rotation with the Y axis as the axis;
[0010] The detection device is connected to the fourth driving device through the third bracket.
[0011] Preferably, the third linear assembly includes a fifth driving device and a fourth bracket connected to the fifth driving device; the driving direction of the fifth driving device is the Y-axis direction, and the lower end of the fourth bracket is connected to at least two sets of third guide rails whose movement direction is the Y-axis, and the two sets of the third guide rails are respectively arranged on both sides of the fifth driving device;
[0012] The first base is fixedly connected to the upper end of the fourth bracket.
[0013] Preferably, the upper end surface of the first base is a first arc surface, the lower end surface of the second base is a second arc surface, and the radii of the circles where the first arc surface, the second arc surface and the first guide rail are located are equal.
[0014] Preferably, the carrier assembly includes a chuck device, the chuck device is arranged at the upper end of the third rotating assembly, and the optical element is fixedly mounted on the chuck device.
[0015] Compared with the prior art, the advantages of the utility model are:
[0016] (1) A dedicated optical component detection device is provided, and the first linear component, the second linear component and the third linear component are used to realize the adjustment in the X-axis, Y-axis and Z-axis directions; the first rotation component and the third rotation component are used to realize the rotation adjustment with the Y-axis and the Z-axis as the rotation axes; the second rotation component is used to realize the rotation with the X-axis as the rotation axis to compensate for errors, etc. The six-axis adjustment design of three axes and three rotations greatly increases the efficiency and accuracy of optical component detection. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The utility model is further described below in conjunction with the accompanying drawings and embodiments:
[0018] Figure 1 It is a structural schematic diagram of the optical element surface detection device of the utility model;
[0019] Figure 2 It is a partial structural schematic diagram of the detection mechanism of the utility model;
[0020] Figure 3 It is a partial structural schematic diagram of the carrying mechanism of the utility model;
[0021] Figure 4 This is a schematic diagram of the structure of the first base of the utility model;
[0022] Figure 5 It is a structural schematic diagram of the second base of the utility model.
[0023] Wherein: a first linear component 1, a first bracket 11, a second guide rail 12, and a second driving device 13;
[0024] A second linear assembly 2, a third drive device 21;
[0025] A first rotating assembly 3, a second bracket 31, and a fourth driving device 32;
[0026] Detection device 4, third bracket 41;
[0027] A third linear assembly 5, a fifth driving device 51, a fourth bracket 52, and a third guide rail 53;
[0028] The second rotating assembly 6, the first base 61, the first arc surface 611, the first driving device 62, the screw rod 621, the second base 63, the second arc surface 631, the first guide rail 64, and the rack 65;
[0029] A third rotating assembly 7, a sixth driving device 71;
[0030] Stage assembly 8, chuck device 81. DETAILED DESCRIPTION
[0031] The following is a further detailed description of the present invention in conjunction with specific embodiments:
[0032] The present application is applied to the detection of optical elements, and can be used for large-diameter flat or spherical optical elements. During detection, the optical element is clamped and fixed by a chuck device; the third linear component moves the optical element to the bottom of the detection device; through the adjustment of the first linear component 1, the second linear component 2 and the third linear component 5 in the X-axis, Y-axis and Z-axis directions, and the rotation adjustment of the first rotating component 3, the second rotating component 6 and the third rotating component 7 with the X-axis, Y-axis and Z-axis as the rotation axis, the detection contact of the detection device is accurately contacted with the surface of the optical element. And when the optical element to be detected is a spherical surface, through the adjustment of the three linear axes and the three rotating axes, when the contact of the detection device contacts the spherical surface, its extension line always passes through the center of the circle where the spherical surface is located, which greatly improves the detection accuracy.
[0033] Specifically, Figure 1-3 As shown, the optical element surface detection device comprises a detection mechanism and a bearing mechanism. The detection mechanism is arranged on a gantry, and the bearing mechanism is arranged on a base below the gantry.
[0034] The detection mechanism includes a first linear component 1, a second linear component 2 and a first rotating component 3. The first linear component 1 can drive the second linear component 2 to move along the X-axis; the second linear component 2 can drive the first rotating component 3 to move along the Z-axis; the first rotating component 3 is connected to a detection device 4, which can drive the detection device 4 to rotate with the Y-axis as the rotation axis.
[0035] The first linear component 1 includes a first bracket 11 and at least two sets of second guide rails 12. The first bracket 11 has an L-shaped cross section, one end of which is connected to the top of the gantry through a set of second guide rails 12, and the other end is connected to the side of the gantry through another set of second guide rails 12. The two sets of second guide rails 12 provide support forces in two directions for the first bracket 11, further improving the stability of the movement of the detection mechanism. The first bracket 11 is also connected to a second drive device 13, which is also connected to the gantry, and its driving movement direction is the same as the movement direction of the second guide rail 12, both in the X-axis direction; the first bracket 11 can be driven to reciprocate along the second guide rail 12 by the second drive device 13. Among them, the second driving device 13 can be a linear motor, and of course it can also be driven by other methods according to actual usage; a grating scale and a grating sensor are respectively arranged on the first bracket 11 and the gantry to accurately control the moving distance of the first bracket 11, thereby improving the detection accuracy; sensors are arranged at both ends of the movement stroke of the first bracket 11 driven by the second driving device 13 to limit the maximum stroke of the first bracket 11.
[0036] The second linear component 2 includes a third driving device 21 connected to the first bracket 11, and the driving movement direction of the third driving device 21 is Z-axis profiling. The first rotating component 3 includes a second bracket 31 connected to the third driving device 21, and a fourth driving device 32 connected to the second bracket 31, and the driving movement direction of the fourth driving device 32 is rotation with the Y axis as the axis center; the detection device 4 is connected to the fourth driving device 32 through the third bracket 41. In this embodiment, the third driving device 21 adopts a servo motor to drive the screw rod, and then drives the third bracket 41 to move in the Z-axis direction. Of course, the third driving device 21 can also adopt other driving methods according to actual use requirements; and in order to ensure the driving stability of the third driving device 21, guide rails or guide columns and guide sleeves for movement in the Z-axis direction are also provided on both sides of the third driving device 21.
[0037] The carrying mechanism includes a third linear component 5, a second rotating component 6 connected to the third linear component 5, and the third linear component 5 can drive the second rotating component 6 to move along the Y-axis; the second rotating component 6 is connected to the third rotating component 7, and the second rotating component 6 can drive the third rotating component 7 to rotate with the X-axis as the rotation axis; the third rotating component 7 is connected to the stage component 8, and the stage component 8 can carry the optical element and can drive the optical element to rotate with the Z-axis as the rotation axis.
[0038] The third linear assembly 5 includes a fifth drive device 51, which is connected to the top of the base; a fourth bracket 52 connected to the upper end of the fifth drive device 51; the driving direction of the fifth drive device 51 is the Y-axis direction. To ensure the stability of the movement, at least two sets of third guide rails 53 with the movement direction of the Y-axis are connected to the fourth bracket 52, and the two sets of third guide rails 53 are respectively arranged on both sides of the fifth drive device 51. In this embodiment, the fifth drive device 51 can be a linear motor, and other driving modes can also be selected according to actual use requirements. A grating ruler and a grating sensor or other devices capable of detecting the travel distance can be set at the lower end of the fourth bracket 52 and the upper end of the base to detect the movement of the fourth bracket 52 in real time, thereby ensuring the accuracy of the movement in the Y-axis direction during the optical element detection. Corresponding sensors can be set at both ends of the movement travel of the fourth bracket 52 driven by the fifth drive device 51, and the maximum travel distance of the fourth bracket 52 is limited by the induction of the sensor.
[0039] like Figure 3-5As shown, the second rotating assembly 6 includes a first base 61, a second base 63 and a first driving device 62 connected to the first base 61; the lower end of the first base 61 is connected to the fourth bracket 52, and the upper end of the second base 63 is connected to the third rotating assembly 7; the upper end of the first base 61 is connected to the second base 63 through an arc-shaped first guide rail 64. The upper end surface of the first base 61 is a first arc surface 611, and the lower end surface of the second base 63 is a second arc surface 631, and the radii of the circles where the first arc surface 611, the second arc surface 631 and the first guide rail 64 are located are equal. The lower end of the second base 63 is connected to an arc-shaped rack 65 with the same radius as the first guide rail 64; the first driving device 62 is connected to a screw rod 621 connected to the rack 65, and the first driving device 62 drives the screw rod 621 to rotate, and can drive the second base 63 to move along the first guide rail 64 through the rack 65. The third rotating device 7 includes a sixth driving device 71, and the stage assembly 8 includes a chuck device 81. The sixth driving device 71 is arranged at the upper end of the second base 63, and the chuck device 81 is arranged at the upper end of the sixth driving device 71. In this embodiment, the first driving device 62 is a servo motor and a screw rod 621 driven by the servo motor. Of course, other driving modes can also be used according to actual needs. The chuck device 81 can adopt a three-jaw chuck, and the optical element is fixedly mounted on the chuck device 81.
[0040] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with this technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description, so it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model.
Claims
1. An optical element surface detection device, characterized in that: The invention comprises a detection mechanism and a bearing mechanism, wherein the detection mechanism comprises a first linear component, a second linear component and a first rotating component, wherein the first linear component can drive the second linear component to move along the X-axis; the second linear component can drive the first rotating component to move along the Z-axis; the first rotating component is connected with a detection device, which can drive the detection device to rotate with the Y-axis as the rotation axis; The carrying mechanism includes a third linear component, a second rotating component connected to the third linear component, and the third linear component can drive the second rotating component to move along the Y-axis; the second rotating component is connected to the third rotating component, and the second rotating component can drive the third rotating component to rotate with the X-axis as the rotation axis; the third rotating component is connected to a stage component, and the stage component can carry the optical element and drive the optical element to rotate with the Z-axis as the rotation axis.
2. The optical element surface detection device according to claim 1, characterized in that: The second rotating component includes a first base, a second base and a first driving device connected to the first base; the lower end of the first base is connected to the third linear component, and the upper end of the second base is connected to the third rotating component; the upper end of the first base is connected to the second base through an arc-shaped first guide rail; the lower end of the second base is connected to an arc-shaped rack with the same radius as the first guide rail; the first driving device is connected to a screw connected to the rack, and the first driving device drives the screw to rotate, and can drive the second base to move along the first guide rail through the rack.
3. The optical element surface detection device according to claim 1, characterized in that: The first linear component includes a first bracket and at least two sets of second guide rails. The cross-section of the first bracket is L-shaped, and the two sets of second guide rails are respectively connected to the two ends of the first bracket. The first bracket is also connected to a second driving device, and the second driving device can drive the first bracket to reciprocate along the second guide rails.
4. The optical element surface detection device according to claim 3, characterized in that: The second linear assembly includes a third driving device connected to the first bracket, and the driving motion direction of the third driving device is Z-axis profiling.
5. The optical element surface detection device according to claim 4, characterized in that: The first rotating assembly includes a second bracket connected to the third driving device, and a fourth driving device connected to the second bracket, wherein the driving motion direction of the fourth driving device is rotation with the Y axis as the axis; The detection device is connected to the fourth driving device through the third bracket.
6. The optical element surface detection device according to claim 2, characterized in that: The third linear assembly includes a fifth driving device and a fourth bracket connected to the fifth driving device; the driving direction of the fifth driving device is the Y-axis direction, and the lower end of the fourth bracket is connected to at least two sets of third guide rails with the moving direction of the Y-axis, and the two sets of the third guide rails are respectively arranged on both sides of the fifth driving device; The first base is fixedly connected to the upper end of the fourth bracket.
7. The optical element surface detection device according to claim 2, characterized in that: The upper end surface of the first base is a first arc surface, the lower end surface of the second base is a second arc surface, and the radii of the circles where the first arc surface, the second arc surface and the first guide rail are located are equal.
8. The optical element surface detection device according to claim 2, characterized in that: The stage assembly includes a chuck device, which is arranged at the upper end of the third rotating assembly, and the optical element is fixedly mounted on the chuck device.