Double-film attenuation sheet for eliminating ghost image, lens and exposure equipment

Abstract

The utility model discloses a double-film attenuation sheet for eliminating ghost images, a lens and exposure equipment, the double-film attenuation sheet comprises a main body light-transmitting layer, one side of the main body light-transmitting layer is provided with an incident light reflecting film, the other side of the main body light-transmitting layer is provided with an emergent light reflecting film, the transmittance of the incident light reflecting film is x, the transmittance of the emergent light reflecting film is y, x and y satisfy the following relations: 0.0001 < = xy < = 0.1, and 1 / (1 + xy-x-y) > = 100. According to the utility model, by selecting the reflecting film with proper transmittance and matching the two reflecting films, the laser power is attenuated to a range adapted to a camera, and meanwhile, the ghost image light power is inhibited, so that the ghost image is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of optical imaging, in particular to a double-film attenuation sheet, a lens and an exposure device for eliminating ghost images. Background Art

[0002] A ghost image refers to an additional image produced near the focal plane of an optical system due to reflection from the lens surface. It is generally darker and offset from the original image.

[0003] Generally, the uniformity of lens light output is tested by testing the lens projection brightness. When testing the uniformity of high-power laser projection lenses, attenuation sheets are used to attenuate the light to a suitable receiving power for the camera. Using existing attenuation sheets will produce ghost images, affecting the final uniformity test. Utility Model Content

[0004] In order to solve the above problems, the utility model provides a double-film attenuation sheet, a lens and an exposure device for eliminating ghost images, which can effectively eliminate ghost images.

[0005] In a first aspect, the utility model provides a double-film attenuation plate for eliminating ghost images, comprising a main light-transmitting layer, wherein an incident light reflecting film is arranged on one side of the main light-transmitting layer, and an outgoing light reflecting film is arranged on the other side, the transmittance of the incident light reflecting film is x, the transmittance of the outgoing light reflecting film is y, and x and y satisfy the following relationship: 0.0001≤xy≤0.1, 1 / (1+xy-xy)≥100.

[0006] In one embodiment of the present invention, the value of x is 0.99 to 0.9999, and the value of y is 0.001 to 0.1; or, the value of x is 0.001 to 0.1, and the value of y is 0.99 to 0.9999.

[0007] In one implementation manner of the present invention, the value of x is 0.01, and the value of y is 0.995.

[0008] In one implementation manner of the present invention, the value of x is 0.99, and the value of y is 0.02.

[0009] In one embodiment of the present invention, the incident light reflecting film is made of silicon dioxide or hafnium oxide.

[0010] In one embodiment of the present invention, the output light reflection film is made of silicon dioxide or hafnium oxide.

[0011] In one implementation of the present invention, the main light-transmitting layer is made of optical glass.

[0012] In a second aspect, the utility model provides a ghost image eliminating lens, which adopts the double-film attenuation plate, and the double-film attenuation plate is arranged on the output light path of the lens.

[0013] In a third aspect, the utility model provides an exposure device for eliminating ghost images, which adopts the lens.

[0014] Beneficial effects of the utility model:

[0015] Generally speaking, the exposure power of the exposure equipment is between 0.5W and 100W, while the detection limit of the detection camera is 0.05W.

[0016] Therefore, it is necessary to attenuate the exposure power of the exposure equipment. The utility model selects a reflective film with appropriate transmittance. The two reflective films cooperate with each other to attenuate the laser power to a range that the camera can adapt to. At the same time, the ghost image light power is suppressed, thereby eliminating the ghost image. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the optical path of the attenuation plate in Example 1 of the utility model;

[0018] Figure 2 This is a schematic diagram of the optical path of the attenuation plate in Example 2 of the utility model;

[0019] Figure 3 This is a schematic diagram of the optical path of the attenuation plate in Example 3 of the utility model;

[0020] Figure 4 Schematic diagram of the optical path of the attenuation plate in Comparative Example 1;

[0021] Figure 5 Schematic diagram of the optical path of the attenuation plate in comparative example 2.

[0022] As shown in the figure: 1. Main light-transmitting layer; 2. Incident light reflecting film; 3. Outgoing light reflecting film. DETAILED DESCRIPTION

[0023] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0025] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] Example 1

[0027] The double-film attenuation plate for eliminating ghost images in this embodiment includes a main light-transmitting layer 1. The transmittance inside the main light-transmitting layer is almost 1. The material can be selected from optical glass. In this embodiment, the H-KqL optical glass of Chengdu Guangming Optoelectronics Co., Ltd. is used. An incident light reflection film 2 is set on one side of the main light-transmitting layer, and an outgoing light reflection film 3 is set on the other side. The transmittance of the two reflective films is different, and the thickness is 10 to 100nm. The overall thickness of the attenuation plate is 5 to 10mm. The transmittance of the incident light reflection film 2 is 0.01, and the transmittance of the outgoing light reflection film 3 is 0.995. For reference Figure 1 In the figure, let the optical power incident on the attenuation plate be P, and let the transmittance of the optical glass be 1. Then the optical power of the target image is 0.00995P, which has a high attenuation effect on the laser energy, and the optical power of the ghost image is: 0.01×(1-0.995)×(1-0.01)×0.995P=0.0000492525P. The optical power of the target image differs from that of the ghost image by nearly 200 times, so the ghost image has less interference with the current image at this time.

[0028] The lens for eliminating ghost images in this embodiment uses the above-mentioned attenuation plate, wherein the attenuation plate is installed on the output light path of the lens and fixed on the lens by a clamp. Generally, when testing the uniformity of the light output of the lens, it is judged by testing the projection brightness of the lens. When testing the application of high-power laser projection lenses, the attenuation plate allows the light to attenuate to a suitable receiving power for the camera. In this embodiment, the optical power of the target image differs from the optical power of the ghost image by nearly 200 times, so the ghost image is eliminated.

[0029] In addition, the exposure device for eliminating ghost images in this embodiment adopts the above-mentioned lens. Ghost images of the images formed by the lens are eliminated.

[0030] Example 2

[0031] The structure of this embodiment is basically the same as that of embodiment 1, except that the transmittance of the incident light reflection film 2 and the outgoing light reflection film 3 is as follows: Figure 2 As shown, in this embodiment, the transmittance of the incident light reflection film 2 is 0.99, and the transmittance of the outgoing light reflection film 3 is 0.1. Assume that the light power incident on the attenuation plate is P, and the transmittance of the optical glass is 1. Then the light power of the target image is 0.099P, which attenuates the laser energy by about 90.1%, and the light power of the ghost image is: 0.99×(1-0.99)×(1-0.1)×0.1P=0.000891P. The light power of the target image is 111 times that of the ghost image, so the ghost image has less interference with the current image.

[0032] In this embodiment, compared with Embodiment 1, the transmittance of the incident light reflecting film is greater than the transmittance of the outgoing light reflecting film. Therefore, the transmittances of the upper and lower films can be swapped with each other, that is, the transmittances of the incident light reflecting film and the outgoing light reflecting film can be swapped with each other, both of which can achieve the effect of attenuation and elimination of ghost images.

[0033] Example 3

[0034] The structure of this embodiment is basically the same as that of embodiment 1, except that the transmittance of the incident light reflection film 2 and the outgoing light reflection film 3 is as follows: Figure 3 As shown, in this embodiment, the transmittance of the incident light reflection film 2 is 0.99, and the transmittance of the outgoing light reflection film 3 is 0.02. Assume that the light power incident on the attenuation plate is P, and the transmittance of the optical glass is 1. Then the light power of the target image is 0.0198P, which attenuates the laser energy by about 98%, and the light power of the ghost image is: 0.99×(1-0.99)×(1-0.02)×0.02P=0.00019404P. The light power of the target image is 100 times that of the ghost image, so the ghost image has less interference with the current image.

[0035] Comparative Example 1

[0036] like Figure 4 As shown, the main layer of the existing attenuation film is optical glass, with a transmittance of almost 1, and the two sides are reflective films with a transmittance of 0.5. Common materials for reflective films: Commonly used single-substance materials include gold, silver, platinum, aluminum, copper and other target materials, particles, silk, etc.; compound materials include magnesium fluoride, silicon monoxide, silicon dioxide, aluminum oxide target materials and particles; main layer material: optical glass, optical glass is a composite material, and the materials of each company are different. After the laser passes through attenuation, the optical power of the image is about 0.25P of the original power, and the optical power of the ghost image is: 0.5×(1-0.5)×(1-0.5)×0.5P=0.0625P. The optical power of the target image is nearly 4 times that of the ghost image, so the ghost image has a greater interference with the current image at this time.

[0037] Comparative Example 2

[0038] like Figure 5 As shown, the conditions are basically the same as those of comparative example 1, except that the transmittance of the reflective film is 0.1 transmittance on both sides. After the laser passes through attenuation, the optical power of the image is about 0.01 of the original power, while the optical power of the ghost image formed by reflection is about 0.0081 of the original power. The ghost image power is similar to the optical power of the image, which will affect the final uniformity test.

[0039] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A double-film attenuation sheet for eliminating ghost images, comprising a main light-transmitting layer, one side of the main light-transmitting layer is provided with an incident light reflecting film, and the other side of the main light-transmitting layer is provided with an outgoing light reflecting film, characterized in that: The transmittance of the incident light reflection film is x, the transmittance of the outgoing light reflection film is y, and x and y satisfy the following relationship: 0.0001≤xy≤0.1, 1 / (1+xy-xy)≥100.

2. The double-film attenuation sheet for eliminating ghost images according to claim 1, characterized in that: The value of x is 0.99 to 0.9999, and the value of y is 0.001 to 0.1; Alternatively, the value of x is 0.001 to 0.1, and the value of y is 0.99 to 0.9999.

3. The double-film attenuation sheet for eliminating ghost images according to claim 2, characterized in that: The value of x is 0.01, and the value of y is 0.

995.

4. The double-film attenuation sheet for eliminating ghost images according to claim 2, characterized in that: The value of x is 0.99, and the value of y is 0.

02.

5. The double-film attenuation sheet for eliminating ghost images according to claim 1, characterized in that: The incident light reflecting film is made of silicon dioxide or hafnium oxide.

6. The double-film attenuation sheet for eliminating ghost images according to claim 1, characterized in that: The output light reflection film is made of silicon dioxide or hafnium oxide.

7. The double-film attenuation sheet for eliminating ghost images according to claim 1, characterized in that: The main light-transmitting layer is made of optical glass.

8. A ghost image eliminating lens, characterized in that: A double-film attenuation sheet as described in any one of claims 1 to 7 is used, and the double-film attenuation sheet is arranged on the outgoing light path of the lens.

9. An exposure device for eliminating ghost images, characterized in that: A lens as claimed in claim 8 is used.

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