Improved ion neutralizer

Abstract

The utility model relates to the field of ion neutralizers, and discloses an improved ion neutralizer which comprises a metal body, a high-voltage module, a tungsten filament, an anti-ion gasket and a high-temperature metal ring, a mounting groove is formed in the top of the metal body, the front side of the mounting groove is of an opening structure, and the high-voltage module is arranged in the mounting groove; the tungsten filament and the anti-ion gasket are both arranged on the high-voltage module, an air inlet hole is formed in the inner wall of the bottom of the mounting groove, the high-temperature metal ring is fixedly mounted in the air inlet hole, a gas flow channel communicated with the air inlet hole is formed in the metal body, and the high-voltage module comprises two connectors, two discharging supports and an adjusting assembly. The two connectors are fixedly installed on the inner wall of the bottom of the installation groove, the two discharging supports are fixedly connected to the corresponding connectors respectively, and the front ends of the two discharging supports extend out of the installation groove. The ion neutralizer has the following advantages and effects that the service life of the ion neutralizer can be effectively prolonged, and the practical performance is improved.

Description

Technical Field

[0001] The present application relates to the technical field of ion neutralizers, and in particular to an improved ion neutralizer. Background Art

[0002] Ion neutralizer is the core component of chemical ion etching frequency correction machine, which is widely used in semiconductor manufacturing industry. The function of ion neutralizer is to remove impurity ions in ion beam by reacting with neutralizing gas to produce gaseous compounds. Ion neutralizer can effectively remove most impurity ions (such as electrons, hydrogen ions, oxygen ions, etc.) in ion beam, making the ion beam purer and the analysis results more accurate.

[0003] In the related art, an ion neutralizer is usually composed of a metal body, a high-voltage module, a tungsten wire, a metal ring and other components. However, when the ion neutralizer is in use, due to the high temperature and high voltage generated by the high-speed ion injection neutralization reaction, the metal body and the tungsten wire are easily melted by the high temperature, resulting in a reduction in the service life of the ion neutralizer.

[0004] Therefore, we propose an improved ion neutralizer to solve the above problems. Utility Model Content

[0005] The purpose of the present application is to provide an improved ion neutralizer, which can effectively extend the service life of the ion neutralizer and improve the practical performance.

[0006] The above technical purpose of the present application is achieved through the following technical solutions: an improved ion neutralizer, including a metal body, a high-voltage module, a tungsten wire, an anti-ion gasket and a high-temperature metal ring, the top of the metal body is provided with a mounting groove, the front side of the mounting groove is an open structure, the high-voltage module is arranged in the mounting groove, the tungsten wire and the anti-ion gasket are both arranged on the high-voltage module, an air inlet hole is provided on the bottom inner wall of the mounting groove, the high-temperature metal ring is fixedly installed in the air inlet hole, and a gas flow channel connected to the air inlet hole is provided in the metal body.

[0007] The present application is further configured as follows: the high-voltage module includes two connectors, two discharge brackets and an adjustment assembly, the two connectors are fixedly mounted on the bottom inner wall of the mounting groove, the two discharge brackets are rotatably connected to the corresponding connectors, the front ends of the two discharge brackets extend out of the mounting groove, the two discharge brackets are provided with adjustment holes, the adjustment assembly is arranged on the two discharge brackets, and the adjustment assembly is used to adjust the angle between the two discharge brackets.

[0008] The present application is further configured as follows: a positioning ring is fixedly installed on the bottom inner wall of the mounting groove, and the two connectors are distributed in the positioning ring.

[0009] The present application is further configured as follows: the adjustment assembly includes a convex seat, two threaded columns and two nuts, the top of the convex seat is in sliding contact with the lower surfaces of the two discharge brackets, the two threaded columns are fixedly installed on the top of the convex seat, the top ends of the two threaded columns respectively pass through the corresponding adjustment holes, the two nuts are respectively threadedly installed on the corresponding threaded columns, and the bottoms of the two nuts are in conflict with the upper surfaces of the corresponding discharge brackets.

[0010] The present application is further configured as follows: the two ends of the tungsten wire are detachably connected through two connectors, and the anti-ion gasket is detachably fixed on one of the connectors and mounted on the tungsten wire.

[0011] The present application is further configured as follows: the anti-ion gasket is made of insulating ceramic material.

[0012] The present application is further configured as follows: the gas flow channel includes an annular gas channel, two longitudinal gas channels and two transverse gas channels, the annular gas channel, the two longitudinal gas channels and the two transverse gas channels are interconnected, and the two longitudinal gas channels and the two transverse gas channels are vertically cross-distributed.

[0013] The present application includes at least one of the following beneficial technical effects:

[0014] The present application adopts a gas flow channel consisting of an annular gas channel, two longitudinal gas channels and two transverse gas channels, utilizes the high temperature resistance of the high temperature metal ring, and adds an anti-ion gasket to effectively protect the tungsten wire, which can effectively extend the service life of the ion neutralizer and improve practical performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the three-dimensional structure of this embodiment.

[0016] Figure 2 It is a schematic diagram of the main cross-sectional structure of this embodiment.

[0017] Figure 3 It is a schematic diagram of the top view structure of the high voltage module.

[0018] Figure 4 yes Figure 3 Schematic diagram of the cross-sectional structure of section AA.

[0019] Figure 5 It is a schematic diagram of the top-down cross-sectional structure of the metal body.

[0020] In the figure, 1. metal body; 2. high-voltage module; 21. connector; 22. discharge bracket; 23. adjustment hole; 3. tungsten wire; 4. gas flow channel; 41. annular gas channel; 42. longitudinal gas channel; 43. transverse gas channel; 5. anti-ion gasket; 6. high-temperature metal ring; 7. mounting groove; 8. convex seat; 9. threaded column; 10. nut; 11. positioning ring. DETAILED DESCRIPTION

[0021] The technical solution of the present application will be clearly and completely described below in conjunction with specific embodiments. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0022] See also Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 The present application provides an improved ion neutralizer, comprising a metal body 1, a high-voltage module 2, a tungsten wire 3, an ion-proof gasket 5 and a high-temperature metal ring 6, wherein:

[0023] A mounting groove 7 is provided on the top of the metal body 1, and the front side of the mounting groove 7 is an open structure. The high-voltage module 2 is arranged in the mounting groove 7. The high-voltage module 2 is used to provide the specific voltage required for ion neutralization. The tungsten wire 3 and the anti-ion gasket 5 are both arranged on the high-voltage module 2. The tungsten wire 3 is provided to play a role of neutralization and screening after ion injection. The anti-ion gasket 5 is provided to protect the tungsten wire 3 from bombardment and corrosion after ion injection. An air inlet is provided on the inner wall of the bottom of the mounting groove 7. A high-temperature metal ring 6 is fixedly installed in the air inlet. The high-temperature metal ring 6 is used to isolate the high temperature and effectively prevent the metal body 1 from melting due to the high temperature. It should be supplemented that the high-temperature metal ring 6 is made of existing high-temperature resistant metal materials. A gas flow channel 4 connected to the air inlet is provided in the metal body 1. The gas flow channel 4 is provided to provide a flow channel for special gases and provide an effective cooling effect after high-speed ion injection and neutralization.

[0024] In this embodiment, the high-voltage module 2 includes two connectors 21, two discharge brackets 22 and an adjustment component. The two connectors 21 are fixedly mounted on the bottom inner wall of the mounting groove 7. The two discharge brackets 22 are rotatably connected to the corresponding connectors 21. The front ends of the two discharge brackets 22 extend outside the mounting groove 7. Adjustment holes 23 are provided on the two discharge brackets 22. The two ends of the tungsten wire 3 are detachably passed through the two connectors 21. The anti-ion gasket 5 is detachably fixed on one of the connectors 21 and mounted on the tungsten wire 3. The adjustment component is arranged on the two discharge brackets 22. The adjustment component is used to adjust the angle between the two discharge brackets 22. The adjustment component includes a convex seat 8. , two threaded columns 9 and two nuts 10, the top of the convex seat 8 is in sliding contact with the lower surfaces of the two discharge brackets 22, the two threaded columns 9 are fixedly installed on the top of the convex seat 8, the top ends of the two threaded columns 9 respectively pass through the corresponding adjustment holes 23, the two nuts 10 are respectively threadedly installed on the corresponding threaded columns 9, the bottoms of the two nuts 10 are in conflict with the upper surfaces of the corresponding discharge brackets 22, by loosening the two nuts 10, the locking and fixing of the two discharge brackets 22 can be released, and the angle between the two discharge brackets 22 can be adjusted, and by tightening the two nuts 10, the two discharge brackets 22 with adjusted positions can be locked and fixed, thereby ensuring that the high-voltage module 2 can effectively release the required high voltage.

[0025] In this embodiment, the above-mentioned gas flow channel 4 includes an annular gas channel 41, two longitudinal gas channels 42 and two transverse gas channels 43. The annular gas channel 41, the two longitudinal gas channels 42 and the two transverse gas channels 43 are interconnected, and the two longitudinal gas channels 42 and the two transverse gas channels 43 are vertically cross-distributed, which can ensure the comprehensive flow of special gas in the annular gas channel 41, the two longitudinal gas channels 42 and the two transverse gas channels 43.

[0026] In this embodiment, a positioning ring 11 is fixedly mounted on the bottom inner wall of the mounting groove 7 , and the two connectors 21 are both distributed in the positioning ring 11 , which serves to limit the assembly positions of the two connectors 21 .

[0027] In this embodiment, the anti-ion gasket 5 is made of insulating ceramic material. By using the anti-ion gasket 5 made of insulating ceramic material, the tungsten filament 3 can be effectively protected in a high temperature environment, which greatly prolongs the time for the tungsten filament 3 to be corroded and melted by special gases, thereby improving the service life of the ion neutralizer.

[0028] Through the above structure, the improved ion neutralizer provided in the present application can effectively extend the service life of the ion neutralizer when in use. When in specific use, by adopting the gas flow channel 4 composed of the annular gas channel 41, two longitudinal gas channels 42 and two transverse gas channels 43, it is possible to effectively cool the high-speed ions after injection and neutralization, and can effectively prevent the metal body 1 from melting due to high temperature. By utilizing the high temperature resistance of the high-temperature metal ring 6, it is possible to further prevent the metal body 1 from melting due to high temperature. By adding the anti-ion gasket 5 to effectively protect the tungsten wire 3, the tungsten wire 3 can be effectively protected, which greatly extends the time for the tungsten wire 3 to be corroded and melted by special gases, thereby effectively extending the service life of the ion neutralizer and improving practical performance.

[0029] The above is a detailed introduction to an improved ion neutralizer provided by the present application. Specific embodiments are used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the method and its core idea of ​​the present application. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present application, several improvements and modifications can be made to the present application, and these improvements and modifications also fall within the scope of protection of the claims of the present application.

Claims

1. An improved ion neutralizer, characterized in that: The invention comprises a metal body (1), a high-voltage module (2), a tungsten wire (3), an ion-proof gasket (5) and a high-temperature metal ring (6); a mounting groove (7) is provided on the top of the metal body (1); the front side of the mounting groove (7) is an open structure; the high-voltage module (2) is arranged in the mounting groove (7); the tungsten wire (3) and the ion-proof gasket (5) are both arranged on the high-voltage module (2); an air inlet hole is provided on the inner wall of the bottom of the mounting groove (7); the high-temperature metal ring (6) is fixedly installed in the air inlet hole; and a gas flow channel (4) connected to the air inlet hole is provided in the metal body (1).

2. The improved ion neutralizer according to claim 1, characterized in that: The high-voltage module comprises two connectors (21), two discharge brackets (22) and an adjustment component. The two connectors (21) are fixedly mounted on the bottom inner wall of the mounting groove (7). The two discharge brackets (22) are rotatably connected to the corresponding connectors (21). The front ends of the two discharge brackets (22) extend outside the mounting groove (7). The two discharge brackets (22) are provided with adjustment holes (23). The adjustment component is arranged on the two discharge brackets (22). The adjustment component is used to adjust the angle between the two discharge brackets (22).

3. The improved ion neutralizer according to claim 2, characterized in that: A positioning ring (11) is fixedly mounted on the inner wall of the bottom of the mounting groove (7), and the two connectors (21) are both distributed inside the positioning ring (11).

4. The improved ion neutralizer according to claim 2, characterized in that: The adjustment assembly comprises a convex seat (8), two threaded columns (9) and two nuts (10); the top of the convex seat (8) is in sliding contact with the lower surfaces of the two discharge brackets (22); the two threaded columns (9) are fixedly mounted on the top of the convex seat (8); the top ends of the two threaded columns (9) respectively penetrate the corresponding adjustment holes (23); the two nuts (10) are respectively threadedly mounted on the corresponding threaded columns (9); and the bottom ends of the two nuts (10) are in contact with the upper surfaces of the corresponding discharge brackets (22).

5. The improved ion neutralizer according to claim 2, characterized in that: The two ends of the tungsten wire (3) are respectively detachably inserted through the two connectors (21), and the anti-ion gasket (5) is detachably mounted and fixed on one of the connectors (21) and sleeved on the tungsten wire (3).

6. The improved ion neutralizer according to claim 5, characterized in that: The ion-proof gasket (5) is made of insulating ceramic material.

7. The improved ion neutralizer according to claim 1, characterized in that: The gas flow channel (4) comprises an annular gas channel (41), two longitudinal gas channels (42) and two transverse gas channels (43); the annular gas channel (41), the two longitudinal gas channels (42) and the two transverse gas channels (43) are arranged to be interconnected, and the two longitudinal gas channels (42) and the two transverse gas channels (43) are arranged to be vertically cross-distributed.

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