Silicon wafer cleaning flower basket with lengthened toothed bar
By designing adjustment and telescopic components with extended toothed rods in the silicon wafer cleaning basket, the problems of hard contact and size fixation of the silicon wafer cleaning basket in the prior art are solved, and uniform cleaning and convenience of use of silicon wafers of different sizes are achieved.
Patent Information
- Application Number
- CN202421614385.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-09
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2034-07-09
AI Technical Summary
The existing silicon wafer cleaning baskets have problems with hard contact and fixed size when used, which leads to unclean cleaning and easy damage to the wafer, which is inconvenient to use, and reduces the scope of application.
A silicon wafer cleaning flower basket with extended toothed rod is designed. By setting adjustment components and telescopic components in the device body, including anti-slip knobs, threaded rods, limit frames, support frames, threaded knobs, connecting rods, main gears and rack plates, the position adjustment of the contact plate and the extension of the toothed rods are achieved to adapt to silicon wafers of different sizes.
Through the design of adjustment and telescopic components, the silicon wafer is uniformly cleaned and easy to use, the scope of application of cleaning baskets is expanded, and the problems of unclean cleaning and wafer damage are avoided.
Smart Images
Figure CN222867640U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon wafer insert cleaning, in particular to a silicon wafer cleaning basket with an extended tooth rod. Background Art
[0002] When the existing silicon wafer cleaning basket is used, the role of the silicon wafer cleaning basket is to clean semiconductor silicon wafers, chips, glass, LCD screens, etc. Wafers are the basic core material of semiconductors. After cutting, organic matter, particles, metal impurities, natural oxide layers and pollutants in accessory containers such as quartz and plastic on the surface of the silicon wafer need to be ultrasonically cleaned to better improve the pass rate of the wafer in the subsequent process.
[0003] The existing silicon wafer cleaning basket has certain problems when in use. The cleaning contact surfaces of the silicon wafer cleaning basket and the silicon wafer are in hard contact, and the size is relatively fixed and cannot be adjusted, which easily causes unclean cleaning and damages the wafer. It is relatively inconvenient to use, which reduces the application scope of the cleaning basket. In view of the above problems, a silicon wafer cleaning basket with an extended tooth rod is proposed for improvement and upgrading. Utility Model Content
[0004] The utility model aims to provide a silicon wafer cleaning basket with an extended tooth rod to solve the problems raised in the above background technology.
[0005] In order to solve the above problems, the following technical solutions are provided:
[0006] A silicon wafer cleaning basket with an extended tooth rod is designed, comprising a device body, wherein the device body comprises a first side plate, a second side plate and a first contact plate, a telescopic component is arranged on the rear side of the first contact plate and both sides of the first contact plate are arranged between the first side plate and the second side plate, an adjustment component is arranged on one side of the first side plate and the second side plate, a third contact plate is arranged below the first contact plate and a second contact plate is arranged below the third contact plate.
[0007] Furthermore, the adjustment component includes an anti-slip knob, a threaded rod and a limit frame. The number of the anti-slip knobs is three and the anti-slip knob is fixedly connected to the threaded rod. The outer wall of the threaded rod is threadedly connected to the inside of the limit frame.
[0008] Furthermore, one end of the threaded rod is connected to the limit block and a notch is provided inside the limit block, and three groups of guide grooves are provided inside the first side plate and the second side plate.
[0009] Furthermore, the telescopic assembly includes a support frame, a threaded knob and a connecting rod. The support frame is fixedly arranged at the rear side of the first contact plate and there are two support frames. The threaded knob is fixedly connected to the connecting rod and the connecting rod runs through the inside of the support frame.
[0010] Furthermore, the connecting rod is fixedly connected to a main gear and the main gear is meshingly connected to two sets of rack plates, and the two sets of rack plates are respectively fixedly mounted on the first positioning plate and the second positioning plate.
[0011] Furthermore, a slide groove is provided inside the support frame, and the first positioning plate and the second positioning plate are both slidably arranged inside the slide groove, and one end of the first positioning plate and the second positioning plate are both fixedly connected to a limiting block.
[0012] Compared with the prior art, the beneficial effects of the utility model are:
[0013] 1. The utility model is provided with components such as an anti-skid knob, a threaded rod, a limit frame, a first contact plate, a guide groove, and a limit block. By rotating the anti-skid knobs on the outside of the first side plate and the second side plate, the anti-skid knobs drive the threaded rods to rotate out of the notches inside the limit blocks, and then the first contact plate and the third contact plate are moved closer to the inside, which is beneficial to position adjustment of the first contact plates on both sides, facilitates uniform cleaning of silicon wafers of different sizes, is easy to use, and has a simple structure.
[0014] 2. The utility model device is provided with components such as a support frame, a threaded knob, a connecting rod, a main gear, a rack plate, and a first positioning plate. The main gear at one end of the connecting rod is driven to rotate inside the support frame by rotating the threaded knob, and then the main gear meshes with the first positioning plate and the second positioning plate respectively fixed by the two sets of rack plates to move relative to each other, which can extend the gear rods on both sides of the contact plate, which is beneficial to improving the application range of the gear rods and is simple to operate.
[0015] With reference to the following description and drawings, specific embodiments of the present invention are disclosed in detail, indicating the manner in which the principles of the present invention can be adopted. It should be understood that the embodiments of the present invention are not limited in scope. Within the spirit and scope of the appended claims, the embodiments of the present invention include many changes, modifications and equivalents. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:
[0017] Figure 1 This is a schematic diagram of the overall structure of a silicon wafer cleaning basket with an extended gear rod according to the utility model;
[0018] Figure 2 This is a schematic diagram of the side structure of a silicon wafer cleaning basket with an extended gear rod according to the utility model;
[0019] Figure 3 for Figure 1 Schematic diagram of the split structure;
[0020] Figure 4 for Figure 3 Schematic diagram of local structure;
[0021] Figure 5 for Figure 4 Schematic diagram of the local split structure.
[0022] In the figure: 1. device body; 2. first side panel; 3. second side panel; 4. first contact plate; 5. adjustment assembly; 51. anti-slip knob; 52. threaded rod; 53. notch; 54. limit block; 55. limit frame; 6. telescopic assembly; 61. support frame; 62. slide groove; 63. first positioning plate; 64. second positioning plate; 65. threaded knob; 66. main gear; 67. connecting rod; 68. rack plate; 7. second contact plate; 8. third contact plate; 9. guide groove. DETAILED DESCRIPTION
[0023] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.
[0024] like Figure 1 - Figure 5 As shown, the present embodiment provides a design of a silicon wafer cleaning basket with an extended tooth rod, including a device body 1, the device body 1 includes a first side plate 2, a second side plate 3 and a first contact plate 4, a telescopic component 6 is arranged on the rear side of the first contact plate 4 and both sides of the first contact plate 4 are arranged between the first side plate 2 and the second side plate 3, an adjustment component 5 is arranged on one side of the first side plate 2 and the second side plate 3, a third contact plate 8 is arranged below the first contact plate 4 and a second contact plate 7 is arranged below the third contact plate 8.
[0025] Preferably, the adjustment assembly 5 includes an anti-slip knob 51, a threaded rod 52 and a limit frame 55. There are three anti-slip knobs 51 and the anti-slip knob 51 is fixedly connected to the threaded rod 52. The outer wall of the threaded rod 52 is threadedly connected to the inside of the limit frame 55. One end of the threaded rod 52 is connected to the limit block 54 and a slot 53 is provided inside the limit block 54. Three sets of guide grooves 9 are provided inside the first side panel 2 and the second side panel 3.
[0026] By rotating the anti-skid knobs 51 outside the first side plate 2 and the second side plate 3 , the anti-skid knobs 51 drive the threaded rod 52 to rotate out of the notch 53 inside the limit block 54 , and then the first contact plate 4 and the third contact plate 8 move closer to the inside.
[0027] Preferably, the telescopic assembly 6 includes a support frame 61, a threaded knob 65 and a connecting rod 67. The support frame 61 is fixedly arranged on the rear side of the first contact plate 4 and there are two support frames 61. The threaded knob 65 is fixedly connected to the connecting rod 67 and the connecting rod 67 runs through the inside of the support frame 61. The connecting rod 67 is fixedly connected to the main gear 66 and the main gear 66 is meshingly connected to two groups of rack plates 68. The two groups of rack plates 68 are respectively fixedly mounted on the first positioning plate 63 and the second positioning plate 64. A slide groove 62 is opened inside the support frame 61. The first positioning plate 63 and the second positioning plate 64 are both slidably arranged inside the slide groove 62. One end of the first positioning plate 63 and the second positioning plate 64 are both fixedly connected to the limiting block 54.
[0028] By rotating the threaded knob 65, the main gear 66 at one end of the connecting rod 67 is driven to rotate inside the support frame 61, and then the main gear 66 engages with the two sets of rack plates 68 to respectively fix the first positioning plate 63 and the second positioning plate 64 to move relative to each other, so that the gear rods on both sides of the contact plate can be extended.
[0029] The use principle and use process of the utility model are as follows: first, the staff rotates the anti-skid knob 51 on the outer side of the first side plate 2 and the second side plate 3, so that the anti-skid knob 51 drives the threaded rod 52 to rotate out of the notch 53 inside the limit block 54, and then moves the first contact plate 4 and the third contact plate 8 closer to the inside, and clamps them according to the size of the silicon wafer, and then rotates the anti-skid knob 51 to use the limit frame 55 and the threaded rod 52 to fix them, so as to facilitate the adjustment of the position of the first contact plate 4 and the third contact plate 8 and improve its application range, and drives the main gear 66 at one end of the connecting rod 67 to rotate inside the support frame 61 by rotating the threaded knob 65, and then the main gear 66 engages with the two sets of rack plates 68 to respectively fix the first positioning plate 63 and the second positioning plate 64 to move relative to each other, so as to extend the rack rods on both sides of the contact plate, and adjust the size according to the distance between the two side plates, so as to facilitate the cleaning of the silicon wafer.
[0030] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0031] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.
Claims
1. A silicon wafer cleaning basket with an extended tooth rod, characterized in that: The invention comprises a device body (1), wherein the device body (1) comprises a first side plate (2), a second side plate (3) and a first contact plate (4); a telescopic component (6) is arranged on the rear side of the first contact plate (4) and both sides of the first contact plate (4) are arranged between the first side plate (2) and the second side plate (3); an adjustment component (5) is arranged on one side of the first side plate (2) and the second side plate (3); a third contact plate (8) is arranged below the first contact plate (4) and a second contact plate (7) is arranged below the third contact plate (8).
2. The silicon wafer cleaning basket with an extended tooth rod according to claim 1, characterized in that: The adjustment assembly (5) comprises an anti-slip knob (51), a threaded rod (52) and a limit frame (55); the number of the anti-slip knobs (51) is three and the anti-slip knob (51) is fixedly connected to the threaded rod (52); the outer wall of the threaded rod (52) is threadedly connected to the inside of the limit frame (55).
3. The silicon wafer cleaning basket with an extended tooth rod according to claim 2, characterized in that: One end of the threaded rod (52) is connected to a limit block (54) and a notch (53) is provided inside the limit block (54). Three groups of guide grooves (9) are provided inside the first side plate (2) and the second side plate (3).
4. The silicon wafer cleaning basket with an extended tooth rod according to claim 1, characterized in that: The telescopic assembly (6) comprises a support frame (61), a threaded knob (65) and a connecting rod (67); the support frame (61) is fixedly arranged on the rear side of the first contact plate (4) and there are two support frames (61); the threaded knob (65) is fixedly connected to the connecting rod (67) and the connecting rod (67) passes through the interior of the support frame (61).
5. The silicon wafer cleaning basket with an extended tooth rod according to claim 4, characterized in that: The connecting rod (67) is fixedly connected to a main gear (66), and the main gear (66) is meshingly connected to two sets of rack plates (68), and the two sets of rack plates (68) are respectively fixedly mounted on the first positioning plate (63) and the second positioning plate (64).
6. The silicon wafer cleaning basket with an extended tooth rod according to claim 5, characterized in that: A slide groove (62) is provided inside the support frame (61), and the first positioning plate (63) and the second positioning plate (64) are both slidably arranged inside the slide groove (62), and one end of the first positioning plate (63) and the second positioning plate (64) are fixedly connected to the limiting block (54).