Liquid cooling plate and laser

Abstract

The utility model belongs to a liquid cooling plate area, and particularly relates to a liquid cooling plate and a laser, and the liquid cooling plate comprises a body and a pressure relief structure. A flow channel which extends in the preset direction and allows cooling water to circulate is formed in the body. The pressure relief structure is arranged at the position, close to the flow channel, in the body and comprises a containing cavity internally provided with gas, cooling water can enter the containing cavity from the flow channel through pressure in the condensation expansion process, and meanwhile the gas is compressed. The pressure relief structure is arranged in the liquid cooling plate, the cooling water in the water cooling plate can enter the pressure relief structure in the condensation expansion process and compress the gas in the pressure relief structure, so that the volume of the gas in the pressure relief structure is reduced, stress generated when the cooling water is frozen is buffered through the gas, and the cooling effect of the liquid cooling plate is improved. The pressure relief structure is adopted to absorb the volume increased by condensation expansion of the cooling water, so that cracking of the water-cooling plate body caused by condensation expansion of the cooling water is avoided.

Description

Technical Field

[0001] The present application relates to the field of liquid cooling plates, and in particular to a liquid cooling plate and a laser. Background Art

[0002] For medium and high power lasers, heat is always a key factor that restricts their stability and lifespan. Current medium and high power lasers usually dissipate heat through liquid cooling, that is, the heat in the laser is transferred to the liquid cooling medium through the heat conduction plate, and then the heat is taken away by circulating the cooling medium to achieve the purpose of cooling. The liquid cooling plate is the main component of liquid cooling technology, which has multiple flow channels inside for passing cooling water or other cooling media. Compared with air cooling or oil cooling, water cooling has the advantages of good cooling effect, can effectively reduce the temperature of the laser and ensure its stable operation.

[0003] However, the applicant has found that the liquid cooling plate in the prior art still has the following problems: in a low-temperature environment, when the coolant in the liquid cooling plate is below the freezing point, the coolant freezes and causes the plate to expand, deform, or even crack, causing damage to the laser.

[0004] Therefore, in order to solve the problem in the prior art that the liquid cooling plate freezes in a low temperature environment, causing the liquid cooling plate to expand and crack, thereby damaging the laser, it is necessary to provide a liquid cooling plate and a laser. Summary of the invention

[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the present application is to provide a liquid cooling plate and a laser, which are used to solve the problem in the prior art that the liquid cooling plate freezes in a low temperature environment, causing the liquid cooling plate to expand and crack, thereby damaging the laser.

[0006] To achieve the above purpose, the technical solution adopted in this application is:

[0007] A liquid cooling plate for a laser, comprising:

[0008] A main body, wherein the main body has a flow channel extending in a predetermined direction and for cooling water to flow;

[0009] The pressure relief structure is arranged in the main body near the flow channel, and includes a accommodating chamber with gas inside. Cooling water can enter the accommodating chamber from the flow channel through pressure during the condensation and expansion process, while compressing the gas.

[0010] As a preferred solution, at least one pressure relief structure is configured and distributed at the position where the cooling water pressure of the liquid cooling plate is the highest.

[0011] As a preferred embodiment, the pressure relief structure includes a partition wall, the flow channel and the accommodating chamber are separated by the partition wall, the accommodating chamber is formed by the partition wall and the inner wall of the main body, and an opening can be formed at the bottom of the partition wall under pressure, so that the flow channel and the accommodating chamber are connected.

[0012] As a preferred embodiment, the flow channel includes multiple unidirectional direct flow channels extending in the same direction, one of two adjacent unidirectional direct flow channels is configured as a forward flow channel, and the other is configured as a reverse flow channel, and the tail end of the forward flow channel and the head end of the reverse flow channel merge to form a confluence cavity.

[0013] As a preferred solution, the accommodating cavity is communicated with the confluence cavity.

[0014] As a preferred solution, the accommodating cavity includes a first cavity body and a first channel, and the first channel is located between the isolation wall and the first cavity body.

[0015] As a preferred solution, the accommodating cavity further includes a second cavity, and the first cavity is connected to the second cavity through a first channel.

[0016] As a preferred solution, the bottoms of the first cavity, the first channel and the second cavity are flush with each other.

[0017] As a preferred solution, the cross-sectional shape of the flow channel along its radial direction is circular, U-shaped, trapezoidal, parabolic, rectangular or tooth-shaped.

[0018] As another aspect of the present application, a laser is also proposed, which adopts the liquid cooling plate in any of the above solutions.

[0019] Compared with the prior art, the liquid cooling plate and laser provided in this application have the following advantages:

[0020] On the first aspect, the present application provides a pressure relief structure in the liquid cooling plate, so that when the laser is in a low-temperature environment below the freezing point and the cooling water in the liquid cooling plate freezes and expands, a portion of the ice can enter the gas-containing cavity, and the gas is used to buffer the stress generated when the cooling water freezes, thereby preventing the liquid cooling plate from bursting due to the low-temperature freezing and expansion of the internal cooling water, and finally causing the laser to fail to work normally;

[0021] Secondly, the laser using the liquid cooling plate structure of the present application can adapt to a low-temperature environment below freezing point and continue to operate normally relying on the liquid cooling plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] One or more embodiments are exemplarily described by pictures in the corresponding drawings, and these exemplified descriptions do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings represent similar elements, and unless otherwise stated, the figures in the drawings do not constitute proportional limitations.

[0023] Figure 1 is a schematic diagram of a first embodiment of a liquid cooling plate of the present application;

[0024] Figure 2is a schematic diagram of a second embodiment of the liquid cooling plate of the present application;

[0025] Figure 3 is a cross-sectional view of a partial structure of a liquid cooling plate in the second embodiment of the present application;

[0026] Figure 4 is a first schematic diagram of the function of the cold plate structure in the second embodiment of the present application;

[0027] Figure 5 is a second schematic diagram of the structure and function of the liquid cooling plate in the second embodiment of the present application;

[0028] Figure 6 is a third schematic diagram of the structure and function of the liquid cooling plate in the second embodiment of the present application;

[0029] Figure 7 is a fourth schematic diagram of the structure and function of the liquid cooling plate in the second embodiment of the present application;

[0030] Explanation of the reference numerals: 100, pressure relief structure; 101, partition wall; 102, first cavity; 103, second cavity; 104, first channel; 105, first plug; 106, second plug; 200, bottom shell; 201, flow channel; 300, upper cover; 301, first partition plate; 302, second partition plate; 400, water inlet joint; 500, water outlet joint; 1a, cooling water; 1b, ice-water mixture; 1c, ice; 2a, air. DETAILED DESCRIPTION

[0031] In order to facilitate the understanding of the present application, the present application is described in more detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that when an element is described as "fixed to" another element, it can be directly on another element, or there can be one or more centered elements therebetween. When an element is described as "electrically connected" to another element, it can be directly connected to another element, or there can be one or more centered elements therebetween. The orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", "bottom", etc. used in this specification is based on the orientation or positional relationship shown in the accompanying drawings, only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0032] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in this specification includes any and all combinations of one or more of the related listed items.

[0033] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0034] Based on the background technology, it can be known that the existing liquid cooling plate of the laser has the problem of ice in the flow channel of the coolant in the low temperature environment, which can easily cause the liquid cooling plate body to expand or even break, and then cause damage to the laser. For lasers in low temperature environments, the anti-freezing and cracking of the liquid cooling plate is usually achieved by the following means: 1. Keep the chiller running so that the temperature of the coolant in the liquid cooling plate is always maintained at around 5°C (not suitable for environments with frequent power outages); 2. Drain the cooling water in the chiller (the process is complicated); 3. Add antifreeze to the cooling water (the cooling water needs to be replaced and the parameters need to be adjusted back when the temperature rises). In view of the shortcomings of the above methods, the present application specifically proposes a liquid cooling plate and a laser.

[0035] Please refer to Figures 1 to 3 The present application proposes a liquid cooling plate. The liquid cooling plate includes a body and a pressure relief structure 100. The body has a flow channel 201 extending in a predetermined direction and for cooling water to flow. The pressure relief structure 100 is arranged in the body near the flow channel 201, and includes a containing cavity with gas inside. The cooling water can enter the containing cavity from the flow channel 201 through pressure during the condensation expansion process, and compress the gas at the same time.

[0036] Optional, such as Figure 1 As shown, the flow channel 201 includes multiple unidirectional direct flow channels extending in the same direction, one of two adjacent unidirectional direct flow channels is configured as a forward flow channel, and the other is configured as a reverse flow channel, and the tail end of the forward flow channel and the head end of the reverse flow channel merge to form a confluence cavity.

[0037] Optional, such as Figure 2 As shown, the flow channel 201 is extended along a predetermined direction to form a series flow channel with a bending portion, such as an M-shape, an S-shape, a parallel or a corrugated shape, etc., which is specifically determined according to the structure of the laser and the flow characteristics of the cooling water, so as to provide a more efficient cooling effect for the laser.

[0038] Optionally, the cross-sectional shape of the flow channel 201 along its radial direction is circular, U-shaped, trapezoidal, parabolic, rectangular or toothed.

[0039] Optionally, the cooling water includes deionized water and purified water.

[0040] Optionally, the gas in the accommodating chamber is air.

[0041] In this way, the present application sets a pressure relief structure in the liquid cooling plate. When the ambient temperature of the laser is above the freezing point, the cooling water in the flow channel 201 flows normally and takes away part of the heat generated by the laser. When the ambient temperature of the laser drops to the freezing point or even below the freezing point, the cooling water in the flow channel 201 begins to freeze and expand. A part of the ice can enter the accommodating cavity with gas, and the stress generated when the cooling water freezes is buffered by the gas. The cooling water that has not frozen continues to flow in the flow channel 201 until it freezes and enters the nearby pressure relief structure 100, thereby avoiding the liquid cooling plate from bursting due to the low-temperature freezing and expansion of the internal cooling water, which finally causes the laser to fail to work normally.

[0042] Preferably, the pressure relief structure 100 is configured as at least one, which is distributed at the position where the cooling water pressure of the liquid cooling plate is the highest.

[0043] Specifically, the pressure relief structure 100 is distributed at a position in the water-cooled plate where the actual hydraulic pressure is greater than a hydraulic threshold. The hydraulic threshold refers to the maximum cooling water pressure that the structure forming the cooling water channel can withstand. The pressure relief structure is arranged at a position in the water-cooled plate where the actual hydraulic pressure is greater than the hydraulic threshold, which is further conducive to avoiding bulging and cracking of the water-cooled plate body.

[0044] In some embodiments, the pressure relief structure is distributed at the edge of the main heat dissipation area and / or the secondary heat dissipation area of ​​the liquid cooling plate.

[0045] In the embodiment of the present application, the primary heat dissipation area of ​​the liquid cooling plate is defined as the area covered by the flow channel 201 (ie, the main surface of the liquid cooling plate), and the secondary heat dissipation area is defined as the area not covered by the flow channel 201 (eg, the plug part).

[0046] When the pressure relief structure 100 is distributed at the edge of the main heat dissipation area of ​​the liquid cooling plate, that is, the gap between the flow channels 201 is directly used to achieve the antifreeze treatment of the liquid cooling plate, which is beneficial to improve the utilization rate of the unit area of ​​the liquid cooling plate and reduce the volume of the liquid cooling plate while ensuring the heat dissipation efficiency of the laser. When the pressure relief structure 100 is distributed at the edge of the secondary heat dissipation area of ​​the liquid cooling plate, it is beneficial to lay the flow channel over a large area at the main heating position, improve the cooling efficiency, and is particularly suitable for the heat dissipation of high-power lasers.

[0047] The technical solution of the present application is now further described in conjunction with specific embodiments. Example

[0048] Please continue to refer to Figure 1. The liquid cooling plate includes a first plug 105 and a second plug 106 for sealing the front end and the rear end of the body respectively. The two plugs are fixed to the body by welding, and the welding can be laser welding or argon arc welding. The inner cavity of the liquid cooling plate forms a plurality of one-way direct current channels extending in the same direction through the first partition plate 301 and a plurality of second partition plates 302, wherein the strength of the first partition plate is greater than the strength of any second partition plate, so that the water channel strength of the liquid cooling plate can be strengthened while achieving diversion, and the stress generated when the cooling water freezes can be taken, and the possibility of freezing and cracking of the liquid cooling plate can be further reduced. One of the two adjacent one-way direct current channels is configured as a forward flow channel, and the other is configured as a reverse flow channel. The tail end of the forward flow channel merges with the head end of the reverse flow channel to form a confluence cavity. The pressure relief structure 100 can be arranged at the edge of the secondary heating area of ​​the liquid cooling plate, or at the edge of the main heating area, and is connected to the confluence cavity. In this embodiment, the pressure relief structure can be regarded as an air trap hole. After the cooling water freezes, it extends into the air trap hole and compresses the gas inside it to relieve the stress caused by ice. The air trap hole can be understood as a pressure relief groove, which can form a blind hole structure or a through hole structure.

[0049] In some embodiments, the pressure relief structure in the form of air-trapping holes is relatively simple to process and has a relatively single arrangement position, so it is more suitable for scenarios where the water-cooling channel is extruded. It can also be used to protect the pump source cooling module from freezing. When the pressure relief structure is used for the pump source, the air-trapping holes are arranged on the surface of the pump source cooling module. For the pump source structure, heat-generating components such as chips and optical lenses are usually arranged inside. The heat generated by the pump source chip and the optical lens is directly transferred to the cooling water circulating in the cooling channel of the cooling module through the heat sink. Providing air-trapping holes on the surface of the pump source cooling module is conducive to alleviating its bulging phenomenon in a low-temperature environment. Example

[0050] Please refer to Figure 2 The liquid cooling plate includes a water inlet joint 400 and a water outlet joint 500 respectively arranged at the inlet and outlet of the m-shaped flow channel 201, the body includes a bottom shell 200 and an upper cover 300, and four accommodating chambers and correspondingly configured partition walls are correspondingly arranged at the turning points of the m-shaped flow channel. When the laser is in a low temperature environment, the partition walls and the accommodating chambers in the pressure relief structure 100 can quickly act on the ice position in the flow channel 201, quickly buffer the stress generated by the expansion of the ice, and prevent the cold plate from expanding and cracking.

[0051] Please refer to Figure 3 The pressure relief structure 100 includes a partition wall 101, which protrudes upward from the inner wall of the bottom shell 200 and is connected to the upper cover 300. The flow channel 201 is separated from the accommodating chamber by the partition wall 101. The accommodating chamber is formed by the partition wall 101 and the inner wall of the body. An opening can be formed at the bottom of the partition wall 101 under pressure, so that the flow channel 201 is connected to the accommodating chamber.

[0052] Please continue to refer to Figure 3 The accommodating cavity includes a first cavity 102 and a first channel 104, and the first channel 104 is provided between the partition wall 101 and the first cavity 102. The first cavity 102 is connected to the flow channel 201 through the first channel 104. Specifically, the first cavity 102 is used to receive the cooling water flowing in from the flow channel 201; the first channel 104 is used to introduce the liquid cooling water in the first cavity 102 into the liquid cooling plate flow channel 201 when the temperature of the cooling water rises from the freezing point or below the freezing point to above the freezing point. The accommodating cavity also includes a second cavity 103, and the first cavity 102 and the second cavity 103 are connected through the first channel 104.

[0053] Optionally, the first channel 104 and the second cavity 103 are located between the first cavity 102 and the partition wall 101; or, the first cavity 102 and the first channel 104 are located between the second cavity 103 and the partition wall 101. To facilitate better circulation of cooling water in the accommodating cavity and the flow channel 201, the bottom of the first channel 104, the bottom of the second cavity 103 and the bottom of the first cavity 102 are flush.

[0054] The accommodating cavity now includes a first cavity 102, a second cavity 103, and a first channel 104, and the first channel 104 and the second cavity 103 are located between the first cavity 102 and the isolation wall 101, that is, Figure 3 The cold plate structure shown is taken as an example to further illustrate the present application.

[0055] When the cooling water in the flow channel is deionized water or pure water, according to Figure 4-Figure 7 The working principle of the liquid cooling plate is described in more detail: when the temperature of the cooling water 1a in the flow channel 201 is above the freezing point, the first cavity 102 is filled with air 2a, and the cooling water 1a flows in the flow channel 201, as shown in FIG. Figure 4 As shown in the figure, when the temperature of the cooling water 1a in the flow channel 201 drops from above the freezing point to the freezing point or below the freezing point, the cooling water 1a in the flow channel 201 changes from liquid to ice-water mixture 1b, the volume increases, and the partition wall 101 is compressed and deformed. The liquid in the ice-water mixture 1b in the flow channel passes through the partition wall 101 into the second cavity 103, and then passes through the first channel 104 to reach the first cavity 102, as shown in the figure. Figure 5 As shown; when the water in the flow channel 201 is completely frozen and solidified, part of the water in the flow channel 201 enters the first cavity 102 and the second cavity 103 of the accommodating cavity during the freezing process, so the water will not squeeze the cold plate cover assembly to cause it to rupture after freezing and expanding, such as Figure 6As shown; when the water in the flow channel 201 is heated from the freezing point or below the freezing point to above the freezing point, the ice 1c begins to melt, and the formed water is pressed into the first channel 104 and the second cavity 103, and finally passes through the isolation wall 101 and returns to the flow channel 201, as shown Figure 7 shown.

[0056] Optionally, the isolation wall 101 may be a hard thin plate or an elastic wall plate.

[0057] Preferably, the wall thickness of the partition wall 101 is 1.0 mm-2.0 mm, and further, the wall thickness of the partition wall 101 can be selected to be 1.0 mm, 1.2 mm, 1.4 mm, 1.6 mm, 1.8 mm or 2.0 mm. The wall thickness of the partition wall 101 should be lower than the thickness of other wall panels of the water-cooled plate, thereby ensuring that the cooling water condenses and expands to first destroy the partition wall 101, so that the cooling water can enter the accommodating cavity.

[0058] When the isolation wall 101 adopts an elastic wall plate, in the initial state, the isolation wall 101 can seal and separate the accommodating chamber and the flow channel 201. The accommodating chamber is a closed air cavity, and its internal air pressure can be selected to be the same as the external atmospheric pressure. When the cooling water in the flow channel 201 condenses and expands, the cooling water can force the isolation wall 101 to produce elastic deformation, thereby realizing the connection between the accommodating chamber and the flow channel 201, so that the cooling water can enter the accommodating chamber and absorb the increased volume caused by the condensation and expansion of the cooling water, thereby avoiding the condensation and expansion of the cooling water causing the water-cooled plate body to crack.

[0059] When the partition wall 101 is made of a hard thin plate, the bottom of the hard thin plate has a first predetermined strength, and the top has a second predetermined strength, and the first predetermined strength is lower than the second predetermined strength. In this way, when the hard thin plate is subjected to hydraulic pressure, the bottom will rupture first, which is conducive to the liquid in the accommodating chamber flowing back to the flow channel 201 when the temperature is restored. Optionally, the partition wall 101 is a hard thin plate with a thicker upper part and a thinner lower part. The hard thin plate ruptures under pressure, and the cooling water passes through the ruptured partition wall 101 and flows between the flow channel and the accommodating chamber. At this time, the deformation is irreversible, but it does not affect the realization of the effect of preventing the cooling water in the liquid cooling plate from freezing and causing it to rupture.

[0060] It is understandable that the structure of the isolation wall and the sealed cavity is generally arranged inside the water-cooled plate, and is therefore more suitable for a split water-cooled plate or a pump source cooling module with a cover plate / bottom plate.

[0061] In summary, the pressure relief structures provided in this application include two types. Figure 1The pressure relief structure 100 is the storage cavity for storing gas. At this time, the pressure relief structure can be regarded as an air trap hole. After the cooling water freezes, it extends into the air trap hole and compresses the gas inside it, thereby relieving the stress caused by ice. In addition to the air trap hole structure, the present application also provides a pressure relief structure with a partition wall. Please refer to Figure 3 The function of the isolation wall is to isolate the gas in the accommodating chamber and the cooling water in the flow channel when the cooling water is not frozen, so as to ensure that the pressure relief structure only works when the cooling water is frozen.

[0062] According to another aspect of the present application, a laser is proposed. In one embodiment, the liquid cooling plate corresponds to the heating area of ​​the laser. It can be understood that the heating area of ​​the laser includes a primary heating area and a secondary heating area. The area covered by the flow channel 201 corresponds to the primary heating area of ​​the laser, and the area not covered by the flow channel 201 is the secondary heating area (such as the plug part). Since the laser includes the liquid cooling plate in the above scheme, it also has all the beneficial effects of the liquid cooling plate.

[0063] Compared with the prior art, the liquid cooling plate and laser provided in this application have the following advantages:

[0064] 1. By setting a pressure relief structure in the liquid cooling plate, when the laser is in a low-temperature environment below the freezing point and the cooling water in the liquid cooling plate freezes and expands, part of the ice can enter the gas-containing cavity, and the gas can buffer the stress generated when the cooling water freezes, thereby preventing the liquid cooling plate from cracking due to the low-temperature freezing and expansion of the internal cooling water, and finally causing the laser to fail to work normally;

[0065] 2. When the pressure relief structure is distributed at the edge of the distribution area of ​​the flow channel 201, that is, the gap between the flow channels is directly used to achieve antifreeze treatment of the liquid cooling plate. Under the premise of ensuring the heat dissipation efficiency of the laser, it is beneficial to improve the utilization rate of the unit area of ​​the liquid cooling plate and reduce the volume of the liquid cooling plate;

[0066] 3. When the pressure relief structure is distributed at the edge of the area where the flow channel 201 is not distributed, it is conducive to laying the flow channel over a large area and improving the cooling efficiency, and is particularly suitable for heat dissipation of high-power lasers;

[0067] 4. The laser using the liquid cooling plate structure of the present application can adapt to low temperature environments below freezing point and continue to operate normally relying on the liquid cooling plate.

[0068] Therefore, the present invention effectively overcomes various shortcomings in the prior art and has high industrial utilization value.

[0069] The above embodiments are merely illustrative of the principles and effects of the present application and are not intended to limit the present application. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by a person of ordinary skill in the art without departing from the spirit and technical ideas disclosed in the present application shall still be covered by the claims of the present application.

Claims

1. A liquid cooling plate, characterized in that: include: A body, the body having a flow channel (201) extending in a predetermined direction and allowing cooling water to flow; A pressure relief structure (100), the pressure relief structure (100) being arranged in the main body at a position close to the flow channel (201), comprising a containing cavity with gas inside, wherein the cooling water can enter the containing cavity from the flow channel (201) by pressure during a condensation expansion process, while compressing the gas.

2. The liquid cooling plate according to claim 1, characterized in that: The pressure relief structure (100) is configured as at least one and is distributed at a position where the cooling water pressure of the liquid cooling plate is the highest.

3. The liquid cooling plate according to claim 2, characterized in that: The pressure relief structure (100) comprises a partition wall (101), the flow channel (201) and the accommodating chamber are separated by the partition wall (101), the accommodating chamber is formed by the partition wall (101) and the inner wall of the body, and an opening can be formed at the bottom of the partition wall (101) under the action of pressure, so that the flow channel (201) and the accommodating chamber are connected.

4. The liquid cooling plate according to claim 2, characterized in that: The flow channel (201) comprises a plurality of unidirectional direct flow channels extending in the same direction, one of two adjacent unidirectional direct flow channels being configured as a forward flow channel, and the other being configured as a reverse flow channel, and the tail end of the forward flow channel merges with the head end of the reverse flow channel to form a confluence cavity.

5. The liquid cooling plate according to claim 4, characterized in that: The accommodating cavity is communicated with the confluence cavity.

6. The liquid cooling plate according to claim 3, wherein the accommodating cavity comprises a first cavity (102) and a first channel (104), and the first channel (104) is located between the isolation wall (101) and the first cavity (102).

7. The liquid cooling plate according to claim 6, characterized in that: The accommodating cavity further comprises a second cavity (103), and the first cavity (102) and the second cavity (103) are connected via the first channel (104).

8. The liquid cooling plate according to claim 7, characterized in that: The bottoms of the first cavity (102), the first channel (104) and the second cavity (103) are arranged flush with each other.

9. The liquid cooling plate according to claim 1, characterized in that: The cross-sectional shape of the flow channel (201) along its radial direction is circular, U-shaped, trapezoidal, parabolic, rectangular or tooth-shaped.

10. A laser, characterized in that: A liquid cooling plate as described in any one of claims 1 to 9 is used.

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