Vacuum coating cleaning device

Abstract

The utility model discloses a vacuum coating cleaning device, and relates to the technical field of vacuum coating. Wherein the device base comprises a bottom table and a stand column, the stand column is arranged on the bottom table, the cleaning mechanism comprises a mechanism body, a liquid cleaning assembly and a gas cleaning assembly, the liquid cleaning assembly is arranged on one side of the mechanism body, and the gas cleaning assembly is arranged on the other side of the mechanism body; the lifting assembly is arranged on the stand column, connected with the cleaning mechanism and used for driving the cleaning mechanism to move on the stand column. Residues in the coating machine are thoroughly removed through the cleaning device, the requirements for the vacuum degree and the cleanliness in the coating process can be met, then the uniformity, the adhesive force and other performance indexes of a coating layer are improved, and diversified cleaning modes can be provided for different coating residues in combination with the liquid cleaning assembly and the gas cleaning assembly. Consumption of water resources and generation of waste water are effectively reduced, and the cleaning efficiency and quality can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating cleaning device. Background Art

[0002] Vacuum coating machines generally refer to a type of coating that needs to be performed under a high vacuum degree. There are many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, etc. At present, the main types are divided into evaporation and sputtering.

[0003] After the vacuum coating machine has been used for a period of time, a lot of coating liquid will adhere to the inner wall of the coating machine, and the inside of the vacuum coating machine needs to be cleaned. At present, scratch-free polishing agents and cleaning agents are generally water to perform preliminary cleaning on the internal parts to remove most of the residual coating liquid. However, this type of cleaning device consumes a lot of water resources and the cleaning effect is still unsatisfactory. Utility Model Content

[0004] In order to solve at least one of the above technical problems, the utility model provides a vacuum coating cleaning device.

[0005] To achieve the above objectives, the embodiments of the present application adopt the following technical solutions:

[0006] The utility model provides a vacuum coating cleaning device, comprising:

[0007] A device base, the device base comprising a base and a column, the column being arranged on the base;

[0008] A cleaning mechanism, the cleaning mechanism comprising a mechanism body, a liquid cleaning component and a gas cleaning component, the liquid cleaning component being arranged on one side of the mechanism body, and the gas cleaning component being arranged on the other side of the mechanism body;

[0009] A lifting component is arranged on the column and connected to the cleaning mechanism, and is used to drive the cleaning mechanism to move on the column.

[0010] In a possible implementation of the present application, the liquid cleaning assembly includes a liquid cleaning tube and a first rotating member, wherein the first rotating member is connected to the liquid cleaning tube and is used to drive the liquid cleaning tube to rotate.

[0011] In a possible implementation of the present application, the liquid cleaning tube is arc-shaped or U-shaped.

[0012] In a possible implementation of the present application, the mechanism body includes at least two liquid tanks, and each of the liquid tanks is connected to the liquid cleaning assembly.

[0013] In a possible implementation of the present application, the liquid cleaning assembly further includes a first booster, and the first booster is connected to the liquid cleaning pipe.

[0014] In a possible implementation of the present application, the gas cleaning assembly includes a gas cleaning pipe and a second rotating member, and the second rotating member is connected to the gas cleaning pipe to drive the gas cleaning pipe to rotate.

[0015] In a possible implementation of the present application, the gas cleaning assembly further includes a gas inlet and a gas outlet, and the gas outlet is provided at one end of the gas cleaning pipe.

[0016] In a possible implementation of the present application, the gas cleaning assembly further includes a second booster, one end of the second booster is connected to the gas inlet, and the other end of the second booster is connected to the gas outlet.

[0017] In a possible implementation of the present application, the lifting assembly includes a liquid inlet pipe, and the liquid inlet pipe is connected to the liquid bin.

[0018] Compared with the prior art, the utility model provides a vacuum coating cleaning device, which can thoroughly remove the residues inside the coating machine, and can ensure the vacuum and cleanliness requirements during the coating process, thereby improving the uniformity, adhesion and other performance indicators of the coating layer. Combined with the liquid cleaning component and the gas cleaning component, it can provide a variety of cleaning methods for different coating residues. It effectively reduces the consumption of water resources and the generation of wastewater, and can also improve the cleaning efficiency and quality. The lifting component enables the cleaning mechanism to move freely on the column, thereby achieving precise cleaning of different heights and positions inside the vacuum coating machine. Not only does it improve the cleaning coverage, but it also enables the device to adapt to vacuum coating machines of different models and specifications, enhancing its versatility and practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the implementation modes of the present application, the drawings required for use in the implementation modes of the present application will be described below.

[0020] Figure 1 It is a structural schematic diagram of a vacuum coating cleaning device provided by the utility model;

[0021] Figure 2 yes Figure 1 A top view of

[0022] Figure 3The utility model is a schematic diagram of the structure of a second booster in a vacuum coating cleaning device.

[0023] Description of reference numerals:

[0024] 10. Device base; 110. Bottom platform; 120. Column; 20. Cleaning mechanism; 210. Mechanism body; 220. Liquid cleaning assembly; 2210. Liquid cleaning pipe; 2220. First rotating member; 230. Gas cleaning assembly; 2310. Gas cleaning pipe; 2320. Second rotating member; 2330. Air inlet; 2340. Air outlet; 2350. Second supercharger; 30. Lifting assembly; 310. Liquid inlet pipe. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0026] The terms "first", "second", etc. in the embodiments of the utility model are only used to distinguish related technical features and do not represent the order of precedence. It should be understood that the data used in this way can be interchanged where appropriate, so as to describe the embodiments of the present application described herein. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0027] In the present application, the directions or positional relationships indicated by the terms "upper", "lower", "inner", "middle", "outer", "front", "back", etc. are based on the directions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific direction, or to be constructed and operated in a specific direction.

[0028] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0029] The utility model provides a vacuum coating cleaning device, through which the residues inside the coating machine are thoroughly removed, the vacuum and cleanliness requirements during the coating process can be ensured, thereby improving the uniformity, adhesion and other performance indicators of the coating layer. Combined with the liquid cleaning component and the gas cleaning component, it can provide a variety of cleaning methods for different coating residues. It effectively reduces the consumption of water resources and the generation of wastewater, and can also improve the cleaning efficiency and quality. The lifting component enables the cleaning mechanism to move freely on the column, thereby achieving precise cleaning of different heights and positions inside the vacuum coating machine. Not only does it improve the cleaning coverage, but it also enables the device to adapt to vacuum coating machines of different models and specifications, enhancing its versatility and practicality. Example

[0030] The utility model provides a vacuum coating cleaning device. Figures 1 to 3 As shown, the device base 10 includes a bottom platform 110 and a column 120, and the column 120 is arranged on the bottom platform 110; the cleaning mechanism 20 includes a mechanism body 210, a liquid cleaning component 220 and a gas cleaning component 230, the liquid cleaning component 220 is arranged on one side of the mechanism body 210, and the gas cleaning component 230 is arranged on the other side of the mechanism body 210; and the lifting component 30 is also provided on the column 120 and connected to the cleaning mechanism 20, and is used to drive the cleaning mechanism 20 to move on the column 120.

[0031] The device combines a liquid cleaning component 220 and a gas cleaning component 230, and can provide a variety of cleaning methods for different coating residues. The liquid cleaning component 220 is suitable for removing stubborn or highly adhesive coating liquid residues, while the gas cleaning component 230 (such as high-pressure gas jet or plasma cleaning) can be used to quickly remove surface dirt or perform deep cleaning, thereby significantly improving cleaning efficiency and quality. Compared with traditional cleaning methods that use a large amount of water resources, the device effectively reduces the consumption of water resources and the generation of wastewater by accurately controlling the amount of cleaning liquid and introducing gas cleaning technology. In addition, gas cleaning often produces no or very little waste liquid, which is beneficial to environmental protection and sustainable development.

[0032] The lifting assembly 30 enables the cleaning mechanism 20 to move freely on the column 120, thereby achieving precise cleaning of different heights and positions inside the vacuum coating machine. This flexibility not only improves the coverage of cleaning, but also enables the device to adapt to vacuum coating machines of different models and specifications, enhancing its versatility and practicality. Through the automated control of the lifting assembly 30, the operator can easily adjust the position of the cleaning mechanism 20, reducing the complexity and labor intensity of manual operation. At the same time, the setting of the device can also take safety factors into consideration, such as using non-corrosive materials, setting safety protection devices, etc., to ensure the safety and reliability of the operation process.

[0033] Specifically, regular and effective cleaning can remove the coating liquid residue and other contaminants on the inner wall of the vacuum coating machine, reduce the corrosion and wear of these residues on the equipment materials, thereby extending the service life of the equipment and reducing maintenance costs.

[0034] A clean coating environment is one of the key factors to ensure coating quality. The cleaning device can completely remove the residue inside the coating machine, ensuring the vacuum and cleanliness requirements during the coating process, thereby improving the uniformity, adhesion and other performance indicators of the coating layer.

[0035] like Figure 1 and Figure 2 As shown, more specifically, the liquid cleaning assembly 220 includes a liquid cleaning tube 2210 and a first rotating member 2220. The first rotating member 2220 is connected to the liquid cleaning tube 2210 to drive the liquid cleaning tube 2210 to rotate.

[0036] like Figure 1 and Figure 2 As shown, the shape of the liquid cleaning tube 2210 is arc-shaped or U-shaped.

[0037] In this way, the shape of the liquid cleaning tube 2210 is set to an arc or U-shape, which can better fit the complex geometric shapes inside the vacuum coating machine, especially for those hard-to-reach corners and curved parts. The addition of the first rotating member 2220 enables the liquid cleaning tube 2210 to rotate during the cleaning process. This dynamic cleaning method can increase the contact area and frequency between the cleaning liquid and the coating residues, thereby more effectively removing the residues and improving the cleaning effect. Through rotational movement, the liquid cleaning tube 2210 can evenly spray or inject the cleaning liquid to various parts of the inner wall of the coating machine, avoiding the problems of uneven distribution of cleaning liquid and incomplete local cleaning that may occur in traditional cleaning methods. This uniform distribution not only improves the cleaning efficiency, but also ensures the consistency of cleaning quality.

[0038] Since the liquid cleaning pipe 2210 can accurately control the spraying or injection direction and range of the cleaning liquid, the waste of the cleaning liquid can be greatly reduced. Compared with the traditional spraying or immersion cleaning method, this structure is more resource-saving and conforms to the concept of green cleaning.

[0039] The rotating liquid cleaning tube 2210 can accelerate the flow and diffusion of the cleaning liquid, so that the cleaning liquid can penetrate into the coating residue faster and react or flush with it. This efficient cleaning process can significantly shorten the cleaning time and improve production efficiency.

[0040] The arc-shaped or U-shaped liquid cleaning pipe 2210 enables the cleaning assembly to adapt to the internal space of vacuum coating machines of different shapes and sizes. This flexibility enhances the versatility and adaptability of the equipment, allowing the same set of cleaning devices to be used in coating equipment of various models and specifications.

[0041] The main body 210 of the mechanism may include at least two liquid tanks, each of which is connected to the liquid cleaning component 220. More specifically, the liquid cleaning component 220 also includes a first booster, which is connected to the liquid cleaning pipe 2210. The main body 210 of the mechanism includes at least two liquid tanks, each of which can store different cleaning liquids or solvents. This structure allows the cleaning process to select a suitable cleaning liquid according to the specific properties of the coating residue, thereby improving the pertinence and effectiveness of the cleaning. In addition, the configuration of multiple liquid tanks also provides convenience for continuous operation. When one cleaning liquid is exhausted, it can be quickly switched to another cleaning liquid to reduce downtime. The structure of multiple liquid tanks can also make the replacement and replenishment of the cleaning liquid more convenient and quick, reducing the time and cost of downtime maintenance. At the same time, the introduction of the first booster also improves the stability and reliability of the cleaning system and reduces the risk of production interruption due to equipment failure.

[0042] The first booster is connected to the liquid cleaning pipe 2210 to provide additional pressure for the cleaning liquid. This boosting effect allows the cleaning liquid to be sprayed more strongly onto the inner wall of the coating machine, enhancing the ability to flush and strip stubborn residues. The high-pressure cleaning liquid can also better penetrate into tiny gaps and uneven surfaces, improving the thoroughness and uniformity of cleaning.

[0043] In this way, the combination of multiple liquid tanks and the first booster makes the cleaning process more flexible and efficient. According to different cleaning stages and needs, different liquid tanks can be activated in sequence or simultaneously and the output pressure of the booster can be adjusted to achieve fine control and optimization of the cleaning process. This helps to reduce cleaning time, reduce energy consumption and improve cleaning quality.

[0044] like Figure 1As shown, more specifically, the lifting assembly 30 includes a liquid inlet pipe 310, and the liquid inlet pipe 310 is connected to the liquid bin. In this way, the liquid inlet pipe 310 is arranged on the lifting assembly 30, which can ensure that the cleaning mechanism 20 can always maintain a connected state with the liquid bin during the process of moving up and down with the lifting assembly 30. This dynamic liquid supply capability enables the cleaning liquid to be continuously and stably supplied to the liquid cleaning assembly 220, without worrying about the interruption or insufficient liquid supply caused by position changes. Integrating the liquid inlet pipe 310 directly on the lifting assembly 30 can reduce the complexity of additional pipeline connections and layout. This not only reduces the manufacturing cost and installation difficulty of the equipment, but also improves the overall aesthetics and compactness of the equipment. At the same time, the simplified pipeline layout also helps to reduce the pressure loss and fluid resistance caused by the excessive length or excessive bending of the pipeline. Since the liquid inlet pipe 310 can move flexibly with the lifting assembly 30, it can ensure that the cleaning liquid can be provided to the liquid cleaning assembly 220 in a timely and accurate manner at any cleaning height. This instant liquid supply capability helps to shorten the cleaning cycle and improve the cleaning efficiency. At the same time, since the cleaning liquid can be supplied continuously and stably, it is also helpful to maintain the stability and consistency of the cleaning effect. The liquid inlet pipe 310 is arranged on the lifting assembly 30, which is also convenient for subsequent maintenance and repair work. When the cleaning liquid supply system needs to be inspected, cleaned or replaced, the liquid inlet pipe 310 can be directly operated through the lifting assembly 30 without disassembling or moving other parts. This structure reduces the difficulty and cost of maintenance and improves the maintainability of the equipment.

[0045] like Figure 1 and Figure 2 As shown, the gas cleaning assembly 230 includes a gas cleaning pipe 2310 and a second rotating member 2320. The second rotating member 2320 is connected to the gas cleaning pipe 2310 to drive the gas cleaning pipe 2310 to rotate.

[0046] like Figure 1 As shown, more specifically, the gas cleaning assembly 230 further includes a gas inlet 2330 and a gas outlet 2340 , and the gas outlet 2340 is disposed at one end of the gas cleaning pipe 2310 .

[0047] like Figure 3 As shown, more specifically, the gas cleaning assembly 230 further includes a second booster 2350 , one end of the second booster 2350 is connected to the gas inlet 2330 , and the other end is connected to the gas outlet 2340 .

[0048] In this way, the connection between the second rotating member 2320 and the gas cleaning tube 2310 enables the gas cleaning tube 2310 to rotate during the cleaning process. This rotational motion not only increases the contact area between the gas and the coating residue, but also enhances the scouring force of the gas through the centrifugal force generated by the rotation. This enhanced scouring force can more effectively peel off and remove the residues on the inner wall of the coating machine, thereby improving the cleaning effect. Through the rotating gas cleaning tube 2310, the gas can be evenly ejected from the gas outlet 2340 to cover various parts of the inner wall of the coating machine. This evenly distributed gas flow can ensure that the residues in the entire cleaning area can be effectively treated, avoiding the problem of cleaning blind spots or dead corners. The introduction of the second supercharger 2350 provides a higher pressure for the gas cleaning process. This high-pressure gas can penetrate deeper into the interior of the coating residue, disintegrate its structure, and thus be more easily removed. This enhanced cleaning depth helps to thoroughly remove those difficult-to-reach or stubborn residues.

[0049] Compared with the prior art, the vacuum coating cleaning device provided by the embodiment of the utility model can thoroughly remove the residues inside the coating machine through the cleaning device, which can ensure the vacuum and cleanliness requirements during the coating process, thereby improving the uniformity, adhesion and other performance indicators of the coating layer. Combined with the liquid cleaning component and the gas cleaning component, it can provide a variety of cleaning methods for different coating residues. It effectively reduces the consumption of water resources and the generation of wastewater, and can also improve the cleaning efficiency and quality. The lifting component enables the cleaning mechanism to move freely on the column, thereby realizing precise cleaning of different heights and positions inside the vacuum coating machine. Not only does it improve the cleaning coverage, but it also enables the device to adapt to vacuum coating machines of different models and specifications, enhancing its versatility and practicality.

[0050] The above are only preferred specific implementation methods of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed in the present invention should be covered within the protection scope of the present invention.

Claims

1. A vacuum coating cleaning device, characterized in that: include: A device base (10), the device base (10) comprising a base (110) and a column (120), the column (120) being arranged on the base (110); A cleaning mechanism (20), the cleaning mechanism (20) comprising a mechanism body (210), a liquid cleaning component (220) and a gas cleaning component (230), the liquid cleaning component (220) being arranged on one side of the mechanism body (210), and the gas cleaning component (230) being arranged on the other side of the mechanism body (210); A lifting component (30) is disposed on the column (120) and connected to the cleaning mechanism (20), and is used to drive the cleaning mechanism (20) to move on the column (120).

2. The vacuum coating cleaning device according to claim 1, characterized in that: The liquid cleaning component (220) comprises a liquid cleaning pipe (2210) and a first rotating member (2220); the first rotating member (2220) is connected to the liquid cleaning pipe (2210) and is used to drive the liquid cleaning pipe (2210) to rotate.

3. The vacuum coating cleaning device according to claim 2, characterized in that: The shape of the liquid cleaning pipe (2210) is arc-shaped or U-shaped.

4. The vacuum coating cleaning device according to claim 2, characterized in that: The mechanism body (210) comprises at least two liquid tanks, each of which is connected to the liquid cleaning component (220).

5. The vacuum coating cleaning device according to claim 2, characterized in that: The liquid cleaning assembly (220) further comprises a first pressure booster, wherein the first pressure booster is connected to the liquid cleaning pipe (2210).

6. The vacuum coating cleaning device according to claim 1, characterized in that: The gas cleaning assembly (230) comprises a gas cleaning pipe (2310) and a second rotating member (2320), wherein the second rotating member (2320) is connected to the gas cleaning pipe (2310) and is used to drive the gas cleaning pipe (2310) to rotate.

7. The vacuum coating cleaning device according to claim 6, characterized in that: The gas cleaning component (230) further comprises a gas inlet (2330) and a gas outlet (2340), wherein the gas outlet (2340) is arranged at one end of the gas cleaning pipe (2310).

8. The vacuum coating cleaning device according to claim 7, characterized in that: The gas cleaning assembly (230) further comprises a second booster (2350), one end of the second booster (2350) being connected to the gas inlet (2330) and the other end of the second booster (2350) being connected to the gas outlet (2340).

9. The vacuum coating cleaning device according to claim 4, characterized in that: The lifting assembly (30) comprises a liquid inlet pipe (310), and the liquid inlet pipe (310) is connected to the liquid bin.

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