Vacuum coating equipment and carrier plate jacking mechanism thereof

Abstract

The utility model provides vacuum coating equipment and a carrier plate jacking mechanism thereof, and the carrier plate jacking mechanism of the vacuum coating equipment comprises an accommodating structure which is provided with a bottom wall and a side wall and forms a cavity, and the bottom wall is provided with a mounting hole; the lifting platform is arranged in the cavity; the transmission shaft penetrates through the mounting hole, the first end of the transmission shaft is connected with the driving mechanism, the second end of the transmission shaft is connected with the lifting platform, and the driving mechanism drives the lifting platform to ascend and descend through the transmission shaft; and the magnetic fluid sealing structure is arranged at the mounting hole and is sleeved outside the transmission shaft. In the structure, a lifting frame, a sliding rail and other mechanisms do not need to be arranged at the bottom of equipment, the transmission shaft can directly penetrate through the mounting hole to be connected with the lifting platform, and the occupied size and cost of the carrier plate jacking mechanism are reduced. According to the technical scheme of the utility model, the defects of large occupied space and higher cost of the lifting mechanism of the vacuum coating equipment in the prior art are overcome.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production equipment, in particular to vacuum coating equipment and a carrier plate lifting mechanism thereof. Background Art

[0002] In vacuum coating equipment, a lifting mechanism needs to be set up in the cavity, and the lifting mechanism is used to lift the carrier board with semiconductors. The vacuum cavity has high sealing requirements to prevent leakage of process gas and vacuum environment. Therefore, the lifting mechanism in the prior art is set up as follows: a guide rail is set at the bottom of the equipment, and a lifting frame is connected to the guide rail through a slider, and the lifting frame is driven by a motor to drive the lead screw. A lifting rod is set on the lifting frame, and the lifting rod passes through the through hole at the bottom of the equipment and is connected to the lifting platform in the cavity. A bellows is provided on the outer sleeve of the lifting rod to achieve the sealing of the cavity.

[0003] However, in the above structure, the bottom of the equipment needs to be provided with a slide rail, a lifting frame and other structures, so that the lifting mechanism as a whole occupies a large space. The cost of the bellows is high, and there is a risk of damage after multiple reciprocating expansion and contraction, and the service life is short. Utility Model Content

[0004] Therefore, the technical problem to be solved by the utility model is to overcome the defects of the lifting mechanism of the vacuum coating equipment in the prior art that it occupies a large space and has a high cost, thereby providing a vacuum coating equipment and its carrier lifting mechanism.

[0005] In order to solve the above problems, the utility model provides a carrier lifting mechanism of a vacuum coating equipment, including: a containing structure, the containing structure has a bottom wall and side walls, and forms a cavity, and a mounting hole is arranged on the bottom wall; a lifting platform is arranged in the cavity; a transmission shaft and a driving mechanism, the transmission shaft passes through the mounting hole, the first end of the transmission shaft is connected to the driving mechanism, and the second end of the transmission shaft is connected to the lifting platform, and the driving mechanism drives the lifting platform to rise and fall through the transmission shaft; a magnetic fluid sealing structure is arranged at the mounting hole and is sleeved outside the transmission shaft.

[0006] Optionally, the transmission shaft is rotatably arranged at the mounting hole, the first end of the transmission shaft is provided with an external thread, the lower side of the lifting platform is provided with a threaded hole, and the first end of the transmission shaft is inserted into the threaded hole.

[0007] Optionally, a connecting flange is provided on the lower side of the lifting platform, and the threaded holes are provided on the connecting flange.

[0008] Optionally, the driving mechanism includes a motor, and a motor shaft of the motor is drivingly connected to the transmission shaft.

[0009] Optionally, the carrier plate lifting device further includes a reduction mechanism, and the reduction mechanism is arranged between the motor shaft and the transmission shaft of the motor.

[0010] Optionally, there are multiple mounting holes, each of which is provided with a magnetic fluid sealing structure, and there are multiple transmission shafts, which are passed through the mounting holes in a one-to-one correspondence.

[0011] Optionally, the carrier plate lifting mechanism further includes a transmission structure, and the driving mechanism drives the multiple transmission shafts to rotate synchronously through the transmission structure.

[0012] Optionally, the transmission structure includes a gear transmission structure, a belt transmission structure or a sprocket transmission structure.

[0013] Optionally, the drive mechanism comprises a drive cylinder, a push rod of the drive cylinder forms a transmission shaft.

[0014] The utility model also provides a vacuum coating device, comprising the above-mentioned carrier plate lifting mechanism.

[0015] The utility model has the following advantages:

[0016] In the technical solution of the utility model, a magnetic fluid sealing structure is provided on the mounting hole of the bottom wall of the containing structure, so that the transmission shaft can directly pass through the mounting hole to connect with the lifting platform. The magnetic fluid sealing structure ensures the sealing performance of the cavity. In the above structure, it is no longer necessary to set up a lifting frame, a slide rail and other mechanisms at the bottom of the equipment, and the transmission shaft can directly pass through the mounting hole to connect with the lifting platform, reducing the occupied volume and cost of the carrier plate lifting mechanism. Therefore, the technical solution of the utility model solves the defects of the lifting mechanism of the vacuum coating equipment in the prior art that the space occupied is large and the cost is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 A schematic diagram showing a bottom side view of a carrier plate lifting mechanism according to the present application;

[0019] Figure 2 Shows Figure 1 The enlarged schematic diagram at A in the middle;

[0020] Figure 3 Shows Figure 1 A schematic diagram of the middle loading plate lifting mechanism from an upper side perspective;

[0021] Figure 4 Shows Figure 3 The enlarged schematic diagram of point B in the middle;

[0022] Figure 5 Shows Figure 1 A cross-sectional view of the middle plate lifting mechanism; and

[0023] Figure 6 Shows Figure 5 Enlarged schematic diagram at point C in the middle.

[0024] Description of reference numerals:

[0025] 10. Containment structure; 11. Bottom wall; 12. Side wall; 13. Mounting hole; 20. Cavity; 30. Lifting platform; 31. Threaded hole; 32. Connecting flange; 40. Transmission shaft; 50. Driving mechanism; 60. Magnetic fluid sealing structure; 70. Speed ​​reduction mechanism. DETAILED DESCRIPTION

[0026] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0028] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0030] like Figures 1 to 6As shown, the carrier lifting mechanism of the vacuum coating equipment according to the present application includes a containing structure 10, a lifting platform 30, a transmission shaft 40, a driving mechanism 50 and a magnetic fluid sealing structure 60. Among them, the containing structure 10 has a bottom wall 11 and a side wall 12, and forms a cavity 20, and a mounting hole 13 is provided on the bottom wall 11. The lifting platform 30 is arranged in the cavity 20. The transmission shaft 40 passes through the mounting hole 13, the first end of the transmission shaft 40 is connected to the driving mechanism 50, and the second end of the transmission shaft 40 is connected to the lifting platform 30, and the driving mechanism 50 drives the lifting platform 30 to rise and fall through the transmission shaft 40. The magnetic fluid sealing structure 60 is arranged at the mounting hole 13 and is sleeved outside the transmission shaft 40.

[0031] In the technical solution of this embodiment, a magnetic fluid sealing structure 60 is provided on the mounting hole 13 of the bottom wall 11 of the containing structure 10, so that the transmission shaft 40 can directly pass through the mounting hole 13 to connect with the lifting platform 30. The magnetic fluid sealing structure 60 ensures the sealing performance of the cavity 20. In the above structure, it is no longer necessary to set up a lifting frame, a slide rail and other mechanisms at the bottom of the equipment, and the transmission shaft 40 can directly pass through the mounting hole 13 to connect with the lifting platform 30, reducing the occupied volume and cost of the carrier lifting mechanism. Therefore, the technical solution of this embodiment solves the defects of the lifting mechanism of the vacuum coating equipment in the prior art that the space occupied is large and the cost is high.

[0032] like Figure 1 and Figure 3 As shown, the containing structure 10 is generally a box-shaped structure, which includes a bottom wall 11 and a side wall 12, and the side wall 12 surrounds the edge of the bottom wall 11. Therefore, the containing structure 10 has a cavity 20 with an upward opening. The bottom wall 11 is provided with a mounting hole 13.

[0033] Furthermore, the lifting platform 30 is disposed in the containing structure 10 and is located in the cavity 20. The lifting platform 30 is used to place a carrier containing semiconductors.

[0034] like Figure 5 and Figure 6 As shown, the driving mechanism 50 is used to drive the transmission shaft 40 to move, and the transmission shaft 40 directly passes through the mounting hole 13 and is connected to the lifting platform 30. Therefore, when the transmission shaft 40 moves, it can drive the lifting platform 30 to move up and down, thereby realizing the lifting of the carrier plate.

[0035] like Figure 5 and Figure 6As shown, further, a magnetic fluid sealing structure 60 is provided at the mounting hole 13, and the magnetic fluid sealing structure 60 is used to seal the gap between the mounting hole 13 and the transmission shaft 40, thereby ensuring the sealing performance in the cavity 20. By providing the magnetic fluid sealing structure 60, the transmission shaft 40 can directly pass through the mounting hole 13 and connect with the lifting platform 30 in the cavity 20, that is, there is no need to provide structures such as slide rails and lifting frames at the bottom of the device.

[0036] In addition, in this embodiment, there is no need to provide a bellows structure, thereby reducing the cost of the carrier plate lifting mechanism and reducing the potential fault risk of cavity leakage.

[0037] like Figure 5 and Figure 6 As shown, in the technical solution of this embodiment, the transmission shaft 40 is rotatably arranged at the mounting hole 13, the first end of the transmission shaft 40 is provided with an external thread, the lower side of the lifting platform 30 is provided with a threaded hole 31, and the first end of the transmission shaft 40 is passed through the threaded hole 31.

[0038] like Figure 6 As shown, the outer peripheral surface of the upper end of the transmission shaft 40 (ie, the upper portion of the magnetic fluid sealing structure 60) is provided with an external thread.

[0039] Specifically, the driving mechanism 50 is used to drive the transmission shaft 40 to rotate. When the transmission shaft 40 rotates, the rotation of the transmission shaft 40 is converted into the up and down movement of the lifting platform 30 through the action of the external thread and the threaded hole, thereby driving the lifting platform 30 to rise or fall.

[0040] Those skilled in the art will appreciate that when the driving mechanism 50 drives the transmission shaft 40 to rotate forward or reverse, the lifting platform 30 can be driven to rise or fall.

[0041] Optionally, the magnetic fluid sealing structure 60 in this embodiment is a magnetic fluid sealed bearing.

[0042] like Figure 5 and Figure 6 As shown, in the technical solution of this embodiment, a connecting flange 32 is provided on the lower side of the lifting platform 30 , and a threaded hole 31 is provided on the connecting flange 32 .

[0043] Specifically, when the transmission shaft 40 rotates, the connection flange 32 is driven to rise or fall, thereby driving the lifting platform to rise or fall.

[0044] In some embodiments not shown, the threaded hole 31 may also be directly provided on the lower surface of the lifting platform 30 , and in this case, the connecting flange 32 may not be provided.

[0045] like Figure 6As shown, in the technical solution of this embodiment, the driving mechanism 50 includes a motor, and the motor shaft of the motor is transmission-connected to the transmission shaft 40 .

[0046] Specifically, when the motor shaft of the motor rotates, the transmission shaft 40 can be driven to rotate, thereby driving the lifting platform 30 to rise or fall.

[0047] When the motor shaft of the motor rotates in one direction, the drive shaft 40 rotates in a first direction and drives the lifting platform 30 to rise. When the motor shaft of the motor rotates in another direction, the drive shaft 40 rotates in a second direction and drives the lifting platform 30 to descend.

[0048] like Figure 5 and Figure 6 As shown, in the technical solution of this embodiment, the carrier plate lifting device also includes a speed reduction mechanism 70, and the speed reduction mechanism 70 is arranged between the motor shaft of the motor and the transmission shaft 40.

[0049] Specifically, the speed reduction mechanism 70 can change the transmission ratio between the motor shaft of the motor and the transmission shaft 40, thereby achieving a speed reduction effect, making the lifting of the lifting platform 30 more stable and the control more precise.

[0050] from Figure 6 It can also be seen that the input and output ends of the speed reduction mechanism 70 are arranged vertically, that is, the input of the speed reduction mechanism 70 is in the horizontal direction and the output is in the vertical direction. This arrangement allows the motor to be arranged horizontally, further reducing the space below the device occupied by the drive mechanism 50.

[0051] Optionally, the speed reduction mechanism 70 in this embodiment can be implemented by a helical gear or a worm gear mechanism.

[0052] like Figures 1 to 4 As shown, in the technical solution of this embodiment, there are multiple mounting holes 13, each mounting hole 13 is provided with a magnetic fluid sealing structure 60, and there are multiple transmission shafts 40, and the multiple transmission shafts 40 are passed through the mounting holes 13 in a one-to-one correspondence.

[0053] Specifically, in this embodiment, four mounting holes 13 are provided, and the four mounting holes 13 are located at the four vertex positions of the quadrilateral. A magnetic fluid sealing structure 60 and a transmission shaft 40 are provided at each mounting hole 13. The upper ends of the four transmission shafts 40 are connected to the lifting platform 30, and are connected at the four corners of the lifting platform 30.

[0054] Furthermore, the four transmission shafts 40 rotate synchronously, thereby controlling the synchronous lifting and lowering of the four corners of the lifting platform 30, making the lifting and lowering control of the lifting platform 30 more stable.

[0055] In some embodiments not shown, those skilled in the art may adjust the number of mounting holes 13, magnetic fluid sealing structures 60 and transmission shafts 40 according to actual needs, such as three, five or six.

[0056] In this embodiment, the number of the driving mechanisms 50 matches the number of the transmission shafts 40 . Therefore, four motors are provided, each of which drives a corresponding transmission shaft 40 , and a speed reduction mechanism 70 is provided between each motor and the corresponding transmission shaft 40 .

[0057] In this embodiment, each transmission shaft 40 is driven individually by a motor, and each transmission shaft can be driven to rotate synchronously by electronic control to maintain the same rotation speed and direction, thereby ensuring that the lifting platform 30 rises or falls smoothly.

[0058] In some embodiments not shown, the carrier lifting mechanism further includes a transmission structure, and the driving mechanism drives the multiple transmission shafts 40 to rotate synchronously through the transmission structure. In this embodiment, the multiple transmission shafts 40 can be controlled to rotate synchronously by a driving mechanism 50.

[0059] For example, the transmission structure may include a gear transmission structure, in which a plurality of gears are meshed for transmission, so that the transmission of a motor shaft of a motor can be transmitted to each transmission shaft 40 through the gears.

[0060] For another example, the transmission structure may include a belt transmission structure or a sprocket transmission structure. A pulley or a sprocket is connected to each transmission shaft 40, and multiple pulleys or sprockets are connected by a transmission belt or a transmission chain. When the driving wheel rotates, multiple pulleys or multiple sprockets can be driven to rotate synchronously, thereby realizing the rotation of the barrels of multiple transmission shafts 40.

[0061] In some embodiments not shown, the transmission shaft 40 may not be in a rotating form. For example, in an embodiment not shown, the driving mechanism includes a driving cylinder, and a push rod of the driving cylinder forms the transmission shaft 40. In this case, the movement of the transmission shaft 40 is telescopic movement along a straight line.

[0062] The present application also provides a vacuum coating device. According to an embodiment of the vacuum coating device of the present application, the vacuum coating device includes the above-mentioned carrier plate lifting mechanism.

[0063] According to the above content, this patent application has the following advantages:

[0064] 1. The lifting mechanism has a simple structure. The magnetic fluid sealing structure is used to seal the cavity inside and outside. The spiral pair is used to realize the rise and fall of the lifting platform, which greatly saves the space inside and outside the cavity.

[0065] 2. The lifting mechanism eliminates the bellows connection, which greatly reduces the cost;

[0066] 3. The lifting mechanism eliminates the bellows connection, reducing potential failures and maintenance costs.

[0067] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A carrier lifting mechanism for vacuum coating equipment, characterized in that: include: A containing structure (10), the containing structure (10) having a bottom wall (11) and a side wall (12) and forming a cavity (20), wherein a mounting hole (13) is provided on the bottom wall (11); A lifting platform (30) is arranged in the cavity (20); A transmission shaft (40) and a driving mechanism (50), wherein the transmission shaft (40) passes through the mounting hole (13), a first end of the transmission shaft (40) is connected to the driving mechanism (50), a second end of the transmission shaft (40) is connected to the lifting platform (30), and the driving mechanism (50) drives the lifting platform (30) to rise and fall through the transmission shaft (40); A magnetic fluid sealing structure (60) is arranged at the mounting hole (13) and sleeved outside the transmission shaft (40).

2. The carrier plate lifting mechanism according to claim 1, characterized in that: The transmission shaft (40) is rotatably arranged at the mounting hole (13), the first end of the transmission shaft (40) is provided with an external thread, the lower side of the lifting platform (30) is provided with a threaded hole (31), and the first end of the transmission shaft (40) is inserted into the threaded hole (31).

3. The carrier plate lifting mechanism according to claim 2, characterized in that: A connecting flange (32) is provided on the lower side of the lifting platform (30), and the threaded hole (31) is provided on the connecting flange (32).

4. The carrier plate lifting mechanism according to any one of claims 1 to 3, characterized in that: The driving mechanism (50) comprises a motor, the motor shaft of which is in driving connection with the transmission shaft (40).

5. The carrier plate lifting mechanism according to claim 4, characterized in that: The carrier plate lifting mechanism further comprises a speed reduction mechanism (70), and the speed reduction mechanism (70) is arranged between the motor shaft of the motor and the transmission shaft (40).

6. The carrier plate lifting mechanism according to any one of claims 1 to 3, characterized in that: There are a plurality of mounting holes (13), each of which is provided with the magnetic fluid sealing structure (60); there are a plurality of transmission shafts (40), and the plurality of transmission shafts (40) are passed through the mounting holes (13) in a one-to-one correspondence.

7. The carrier plate lifting mechanism according to claim 6, characterized in that: The carrier plate lifting mechanism also includes a transmission structure, and the driving mechanism drives the multiple transmission shafts (40) to rotate synchronously through the transmission structure.

8. The carrier plate lifting mechanism according to claim 7, characterized in that: The transmission structure includes a gear transmission structure, a belt transmission structure or a sprocket transmission structure.

9. The carrier plate lifting mechanism according to claim 1, characterized in that: The driving mechanism comprises a driving cylinder, a push rod of the driving cylinder forming the transmission shaft (40).

10. A vacuum coating device, characterized in that: It comprises a carrier plate lifting mechanism as claimed in any one of claims 1 to 9.

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