Heating assembly capable of supporting MOCVD (Metal Organic Chemical Vapor Deposition) axis

Abstract

The utility model discloses a supportable MOCVD (Metal Organic Chemical Vapor Deposition) axis heating assembly, which comprises a heating assembly, an electrode pin and a connecting assembly, the heating assembly comprises a heating part, a bending part and a connecting part, the upper ends of the bending part and the connecting part are flush with the upper end of the heating part, and the lower ends of the bending part and the connecting part extend to the lower side of the heating part to form fan blades; a pair of electrode pins is arranged, each of the pair of electrode pins comprises an electrode pin, and a supporting part is integrally formed on the side wall of each electrode pin. The omega-ring heating assembly is large in cross section area and small in power density, material aging is delayed, heating uniformity is improved, heat dissipation efficiency of the heating assembly is improved, and the omega-ring heating assembly is prevented from being heated to deform. The supporting parts are arranged on the electrode legs, so that the supporting area is increased, the heating assembly is effectively supported under the condition of high-temperature external expansion, the toppling risk is reduced, the fusing and collapsing conditions in the heating process are avoided, and the service life is better prolonged.

Description

Technical Field

[0001] The utility model belongs to the technical field of heating components, and in particular relates to an axial heating component capable of supporting MOCVD. Background Art

[0002] MOCVD is a new type of vapor phase epitaxial growth technology developed on the basis of vapor phase epitaxial growth, and the heating component is a commonly used device.

[0003] A MOCVD heating assembly disclosed in publication number CN215103543U includes a heating plate, two electrode pins and a fixing mechanism, wherein the heating plate includes a heating part and two connecting parts, the two connecting parts are respectively connected to the two ends of the heating part, and the connecting part and the heating part have a smooth transition; the two electrode pins are respectively connected to the two connecting parts; the fixing mechanism can fix the connecting part on the electrode pins; wherein the heating part is surrounded by a cylindrical structure with a notch, and the connecting part is a rectangular structure. The utility model avoids the occurrence of a local temperature accumulation area on the heating plate, improves the heating efficiency, and prolongs the service life of the heating plate.

[0004] However, the above utility model has the following problems when in use: the heating component is a bare plate type heating component with a small heat dissipation area and low heat dissipation efficiency. The temperature of the heating component is high during operation, and the heating component is prone to deformation; the supporting area of ​​the heating component is small, and there is a risk of tipping over at high temperature; the bottom support of the heating component is in a suspended state, and it is prone to melting and settling during the heating process.

[0005] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0006] The utility model aims to provide an axial heating component that can support MOCVD, which can solve the problems of easy deformation caused by low heat dissipation efficiency of the heating component, the risk of tipping due to small supporting area, and the risk of melting and collapse.

[0007] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0008] An axial heating assembly capable of supporting MOCVD, comprising:

[0009] The heating component includes a heating part, a bending part and a connecting part. The upper ends of the bending part and the connecting part are flush with the upper end of the heating part, and the lower ends of the bending part and the connecting part extend to the lower side of the heating part to form fan blades. By setting the fan blades, the downward extending area of ​​the bending part and the connecting part is increased, thereby increasing the supporting area and heat dissipation area of ​​the heating component.

[0010] Electrode pins, a pair of electrode pins are provided, each of the pair of electrode pins comprises an electrode foot, and a support portion is integrally formed on the side wall of the electrode foot; the support area can be increased on the support portion, thereby facilitating support of the mounting piece and ensuring stability during use.

[0011] The connecting assembly includes a pressing plate body and a screw rod.

[0012] In one or more embodiments of the utility model, the heating part, the bending part and the connecting part are combined to form a heating component, and the shape of the heating component is set to be an Ω circle. The Ω circle-shaped heating component has a large cross-sectional area and a low power density, which reduces the aging speed of the material and improves the uniformity of heating. At the same time, it also improves the heat dissipation efficiency of the heating component and prevents it from being deformed by heat.

[0013] In one or more embodiments of the present invention, a sandblasting layer is provided on the surface of the heating component, thereby increasing the surface roughness of the heating component, increasing the heat dissipation area, reducing power, and thus extending the service life.

[0014] In one or more embodiments of the present invention, the arc transition section of the bending portion is configured as a chamfer to avoid damage to the surface of the connecting component caused by a sharp angle.

[0015] In one or more embodiments of the present invention, the electrode foot is sleeved in the bending portion, and a side wall of the connecting portion abuts against a side wall of the electrode foot away from the heating portion, so that the fan blades can be wrapped around the side wall of the electrode foot, thereby increasing the stability and service life of the heating component during use.

[0016] In one or more embodiments of the utility model, the support portion is arranged on a side close to the inner side wall of the bending portion, and the lower end of the bending portion abuts against the support portion. The bending portion can be supported by the support portion, thereby facilitating the support of the heating component, so that the heating component can be effectively supported by the support portion when the high temperature expands outward, reducing the risk of tipping over and avoiding the situation of melting and settling during the heating process, thereby better extending the service life of the heating component.

[0017] In one or more embodiments of the present invention, a base is integrally formed at the lower end of the electrode pin, and an assembly hole is provided on the base, and the base is used to install the electrode pin.

[0018] In one or more embodiments of the utility model, the pressing plate body is pressed on a side wall of the connecting part away from the electrode pin, and the screw is installed on the pressing plate body, the connecting part and the electrode pin. Under the action of the pressing plate body, the connecting part can be fixed by clamping the pressing plate body and the electrode pin, thereby fixing the heating component.

[0019] In one or more embodiments of the present invention, a mounting hole is provided on the connecting portion, a first threaded hole is provided on the electrode foot, a second threaded hole is provided on the pressure plate body, and the screw is threadedly connected to the pressure plate body, the connecting portion and the electrode foot through the second threaded hole, the mounting hole and the first threaded hole.

[0020] In one or more embodiments of the present invention, the pressing plate body and the screw are both made of pure tungsten material, so that the pressing plate body and the screw have a high melting point and good high-temperature performance, thereby extending their service life.

[0021] Compared with the prior art, the Ω-ring heating component provided by the utility model has a large cross-sectional area and a low power density, which delays material aging and improves heating uniformity, while also improving the heat dissipation efficiency of the heating component and preventing it from being deformed by heat; by arranging a support portion on the electrode leg and increasing the support area, the heating component can be effectively supported when it expands outward at high temperature, reducing the risk of tipping over and avoiding melting and sagging during the heating process, thereby better extending the service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 This is a front view of an axial heating assembly capable of supporting MOCVD in one embodiment of the utility model;

[0024] Figure 2 A three-dimensional structure that can support an MOCVD axial heating component in one embodiment of the utility model Figure 1 ;

[0025] Figure 3 A three-dimensional structure that can support an MOCVD axial heating component in one embodiment of the utility model Figure 2 ;

[0026] Figure 4 This is a schematic diagram of a heating component in one embodiment of the utility model;

[0027] Figure 5 A schematic diagram of an electrode pin in an embodiment of the utility model;

[0028] Figure 6 It is a schematic diagram of a connection component in one embodiment of the utility model.

[0029] Description of main reference numerals:

[0030] 1-heating component, 11-heating part, 12-bending part, 13-connecting part, 14-mounting hole, 15-fan blade, 2-electrode pin, 21-electrode leg, 22-supporting part, 23-base, 24-assembly hole, 25-first threaded hole, 3-connecting component, 31-pressing plate body, 32-second threaded hole, 33-screw. DETAILED DESCRIPTION

[0031] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0032] like Figure 1 to Figure 3 As shown, an MOCVD axial heating component that can support an embodiment of the utility model includes a heating component 1, an electrode pin 2 and a connecting component 3.

[0033] like Figure 1 to Figure 4 As shown, the heating component 1 includes a heating portion 11, a bending portion 12 and a connecting portion 13, the upper ends of the bending portion 12 and the connecting portion 13 are flush with the upper end of the heating portion 11, and the lower ends of the bending portion 12 and the connecting portion 13 extend to the lower side of the heating portion 11 to form fan blades 15; by providing the fan blades 15, the downward extending area of ​​the bending portion 12 and the connecting portion 13 is increased, thereby increasing the support area and heat dissipation area of ​​the heating component.

[0034] Specifically, the heating portion 11, the bending portion 12 and the connecting portion 13 are combined to form a heating component 1, and the shape of the heating component 1 is set to be an Ω circle. The Ω circle-shaped heating component 1 has a large cross-sectional area and a low power density, which reduces the aging speed of the material and improves the uniformity of heating. At the same time, it also improves the heat dissipation efficiency of the heating component 1 and prevents it from being deformed by heat.

[0035] Preferably, the surface of the heating component 1 is provided with a sandblasting layer, so as to increase the surface roughness of the heating component, increase the heat dissipation area, reduce the power, and thus extend the service life.

[0036] like Figure 4 As shown, the arc transition section of the bending portion 12 is configured as a chamfer to avoid damage to the surface of the connecting component due to sharp angles.

[0037] like Figure 1 to Figure 3 and Figure 5 As shown, a pair of electrode pins 2 are provided, each of which includes an electrode foot 21, and a support portion 22 is integrally formed on the side wall of the electrode foot 21; the support portion 22 can increase the support area of ​​the heating component 1, thereby facilitating the support of the mounting part and ensuring stability during use.

[0038] like Figure 1 to Figure 3 As shown, the electrode foot 21 is sleeved in the bending portion 12, and a side wall of the connecting portion 13 abuts against a side wall of the electrode foot 21 away from the heating portion 11, so that the fan blade 15 can be wrapped around the side wall of the electrode foot 21, thereby increasing the stability and service life of the heating component 1 during use.

[0039] like Figure 1 to Figure 3 As shown, the support portion 22 is arranged on one side close to the inner wall of the bending portion 12, and the lower end of the bending portion 12 abuts against the support portion 22. The bending portion 12 can be supported by the support portion 22, so as to facilitate the support of the heating component 1, so that the heating component 1 can be effectively supported by the support portion 22 when it expands at high temperature, reducing the risk of tipping and avoiding the situation of melting and settling during the heating process, thereby better extending the service life of the heating component 1.

[0040] like Figure 1 to Figure 3 As shown, a base 23 is integrally formed at the lower end of the electrode pin 21 , and an assembly hole 24 is provided on the base 23 . The base 23 is used to install the electrode pin 2 .

[0041] like Figure 2 , Figure 3 and Figure 6 As shown, the connection assembly 3 includes a pressing plate body 31 and a screw 33. The pressing plate body 31 is pressed on a side wall of the connection portion 13 away from the electrode pin 21, and the screw 33 is installed on the pressing plate body 31, the connection portion 13 and the electrode pin 21. Under the action of the pressing plate body 31, by clamping the pressing plate body 31 and the electrode pin 21, the connection portion 13 can be fixed, thereby fixing the heating assembly 1.

[0042] like Figure 2 to Figure 6 As shown, a mounting hole 14 is provided on the connecting portion 13, a first threaded hole 25 is provided on the electrode foot 21, a second threaded hole 32 is provided on the pressing plate body 31, and the screw 33 is threadedly connected to the pressing plate body 31, the connecting portion 13 and the electrode foot 21 through the second threaded hole 32, the mounting hole 14 and the first threaded hole 25.

[0043] Preferably, the pressing plate body 31 and the screw rod 33 are both made of pure tungsten material, so that the pressing plate body 31 and the screw rod 33 have a high melting point and good high-temperature performance, thereby extending their service life.

[0044] When in use, a pair of bending parts 12 are respectively sleeved on the side walls of a pair of electrode pins 21, so that the fan blades 15 set at the lower end of the bending part 12 abut against the support part 22, and the pressing plate body 31 is pressed on the side wall of the connecting part 13 away from the electrode pin 21. The pressing plate body 31, the connecting part 13 and the electrode pin 21 are fixed together by the screw 33, so that the heating component 1 can be stably supported by the electrode pin 2. The Ω-ring-shaped heating component 1 has a large cross-sectional area and a low power density, which delays material aging and improves the uniformity of heating. At the same time, it also improves the heat dissipation efficiency of the heating component 1 and avoids its deformation due to heat; through the support part 21, the support area is increased, so that the heating component 1 can be effectively supported by the support part 21 when the heating component 1 expands outward at high temperature, reducing the risk of the heating component 1 tipping over and avoiding the situation of melting and settling during the heating process, and better extending the service life.

[0045] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-limiting from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0046] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A MOCVD axial heating assembly, characterized in that: include: The heating assembly comprises a heating portion, a bending portion and a connecting portion, wherein the upper ends of the bending portion and the connecting portion are flush with the upper end of the heating portion, and the lower ends of the bending portion and the connecting portion extend to the lower side of the heating portion to form fan blades; Electrode pins, wherein a pair of electrode pins are provided, each of the pair of electrode pins comprises an electrode foot, and a support portion is integrally formed on the side wall of the electrode foot; The connecting assembly includes a pressing plate body and a screw rod.

2. The MOCVD axial heating assembly according to claim 1, characterized in that: The heating portion, the bending portion and the connecting portion are combined to form a heating component, and the shape of the heating component is set to be an Ω circle.

3. The MOCVD axial heating assembly according to claim 1, characterized in that: The surface of the heating component is provided with a sandblasting layer.

4. The MOCVD axial heating assembly according to claim 1, characterized in that: The arc transition section of the bending portion is configured as a chamfer.

5. The MOCVD axial heating assembly according to claim 1, characterized in that: The electrode pin is sleeved in the bending portion, and a side wall of the connecting portion abuts against a side wall of the electrode pin away from the heating portion.

6. The MOCVD axial heating assembly according to claim 5, characterized in that: The support portion is arranged on one side close to the inner side wall of the bending portion, and the lower end of the bending portion abuts against the support portion.

7. The MOCVD axial heating assembly according to claim 1, characterized in that: The lower end of the electrode foot is integrally formed with a base, and the base is provided with an assembly hole.

8. The MOCVD axial heating assembly according to claim 1, characterized in that: The pressing plate body is pressed on a side wall of the connecting portion away from the electrode pin, and the screw rod is installed on the pressing plate body, the connecting portion and the electrode pin.

9. The MOCVD axial heating assembly according to claim 1, characterized in that: The connecting part is provided with a mounting hole, the electrode foot is provided with a first threaded hole, the pressing plate body is provided with a second threaded hole, and the screw is threadedly connected to the pressing plate body, the connecting part and the electrode foot through the second threaded hole, the mounting hole and the first threaded hole.

10. The MOCVD axial heating assembly according to claim 1, characterized in that: The pressing plate body and the screw rod are both made of pure tungsten material.

Images