Self-adaptive damping relative rotation vacuum sealing structure

Abstract

The utility model discloses a self-adaptive damping relative rotation vacuum sealing structure, which belongs to the technical field of vacuum air path sealing and particularly comprises an air pipe, a sealing gland and a sealing ring. The air pipe is movably inserted into the tail end of the sealing gland, and the air pipe is sleeved with a sealing gasket attached to the tail end of the sealing gland. And the sealing ring sleeves the outer side of the sealing gland in a sliding manner. The sealing gasket and the sealing gland are matched to achieve the plane sealing effect, and in the vacuum stage, the sealing ring at the air supply end moves in the extension direction of the compression spring in a self-adaptive mode under the change of internal and external air pressure, so that the compression spring is loosened, the pressure exerted on the sealing cover is reduced, and the sealing effect is improved. And the rotating resistance between the sealing gland and the sealing gasket is relatively reduced, and the structural design can reduce the rotating resistance under the condition of ensuring the vacuum sealing effect, so that the relative rotating vacuum sealing structure can be suitable for the field of high-precision control.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum air path sealing, and in particular relates to a relatively rotating vacuum sealing structure with adaptive damping. Background Art

[0002] The vacuum generator and the air path system require specific equipment and pipelines, and the equipment and pipelines can only be in fixed positions. In the field of wafer and chip mounting, the angle of the wafer and chip needs to be adjusted. Therefore, the end needs to be able to rotate and adjust the angle without changing the structural layout of the vacuum generator and the air path system. The vacuum air path rotating structure is mainly used in the scenario where the vacuum air path needs to rotate relatively while ensuring sealing. It is widely used in wafer and chip suction equipment, which requires a vacuum air path to absorb wafers and chips, and at the same time rotate and adjust the angle of the wafer and chip for alignment and mounting.

[0003] At present, O-rings and sealing bellows are used in the sealing joints connecting the vacuum generator and the air system to solve the problem of vacuum airway rotation. Among them, the O-ring is used as a rotating sealing structure. When it rotates, there is relative friction between the O-ring and the component. When improving the sealing performance, the rotational resistance will inevitably increase. However, the sealing bellows technology is rarely used in China, and it is difficult to find a supply chain for micro-precision sealing bellows processing in China. In the field of precision manufacturing, the R-axis micro motor with an angle adjustment at the front end has low power and very stringent requirements on the rotational resistance. It requires a vacuum airway rotating sealing structure with low resistance and high sealing performance. The two currently popular structures are not suitable for the field of precision manufacturing.

[0004] To this end, we propose a relative rotating vacuum sealing structure with adaptive damping. Utility Model Content

[0005] The utility model aims to provide a relatively rotating vacuum sealing structure with adaptive damping, so as to solve the above problems existing in the prior art.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A relative rotation vacuum sealing structure with adaptive damping, comprising an air pipe, a sealing gland and a sealing ring;

[0008] The air pipe is movably inserted into the tail end of the sealing gland, and the outside of the air pipe is covered with a sealing gasket that fits the tail end of the sealing gland;

[0009] The sealing ring is slidably sleeved on the outer side of the sealing gland.

[0010] Furthermore, the sealing ring is a Y-shaped sealing ring, and the V-shaped groove of the sealing ring is designed to face the rear end of the sealing gland.

[0011] Furthermore, a compression spring is sleeved on the sealing gland, and two ends of the compression spring are respectively in contact with the sealing ring and the rear end of the sealing gland.

[0012] Furthermore, the sealing gasket and the sealing gland are both made of any one of nylon, polytetrafluoroethylene or tin bronze.

[0013] Furthermore, the sealing gland comprises a butt-jointed tube, and the front end and the rear end of the butt-jointed tube are respectively integrally formed with a front end portion and a stop ring.

[0014] Furthermore, the front end portion and the stop ring form convex rings at both ends of the docking ring, and the sealing ring is slidably sleeved on the outside of the docking tube.

[0015] Furthermore, a tail end portion is integrally formed on the outer side of the stop ring.

[0016] Furthermore, the tail end portion is annular, and the inner diameter of the tail end portion is larger than the inner diameter of the butt tube, and the end of the trachea is movably inserted inside the tail end portion.

[0017] Furthermore, the bottom end of the air pipe is rotatably assembled inside the shell through a bearing, and a movable cabin for accommodating a sealing gland is integrally formed on the top of the shell, and an air nozzle is provided on the top of the movable cabin.

[0018] Beneficial effects:

[0019] The utility model is a valve core structure of a vacuum generating end of a vacuum generator, wherein an air pipe and a sealing gasket are installed on a pipeline at an air using end, and a sealing gland, a compression spring and a Y-shaped sealing ring are fixed to an air supply end, wherein the sealing gasket cooperates with the sealing gland to achieve a planar sealing effect, and the two can rotate relative to each other. In the vacuum stage, the sealing ring at the air supply end is adaptive under changes in internal and external air pressures, and moves in the elongation direction of the compression spring, causing the compression spring to relax, thereby reducing the pressure applied to the sealing cap, and the rotational resistance between the sealing gland and the sealing gasket is relatively reduced. This structural design can reduce the rotational resistance while ensuring the vacuum sealing effect, so that the relatively rotating vacuum sealing structure can be suitable for the field of high-precision control. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of a relative rotating vacuum seal structure with adaptive damping according to the utility model Figure 1 ;

[0021] Figure 2 A schematic diagram of a relative rotating vacuum seal structure with adaptive damping according to the utility model Figure 2 ;

[0022] Figure 3It is a half-section schematic diagram of a relative rotating vacuum sealing structure with adaptive damping according to the utility model;

[0023] Figure 4 This is an exploded schematic diagram of a relative rotating vacuum sealing structure with adaptive damping according to the utility model;

[0024] Figure 5 It is a schematic diagram of a half-section after decomposition of a relative rotating vacuum sealing structure with adaptive damping of the utility model;

[0025] Figure 6 It is a half-section schematic diagram of a relative rotation vacuum sealing structure with adaptive damping and a shell after being assembled in the utility model.

[0026] In the figure: 1, air pipe; 2, sealing gasket; 3, sealing cover; 301, front end; 302, tail end; 303, stop ring; 304, butt tube; 4, compression spring; 5, sealing ring; 6, bearing; 7, outer shell; 8, movable cabin; 9, air nozzle. DETAILED DESCRIPTION

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the utility model or the prior art, the utility model will be briefly introduced below in combination with the drawings and the description of the embodiments or the prior art. Obviously, the following description of the structure of the drawings is only some embodiments of the utility model. For ordinary technicians in this field, other drawings can also be obtained based on these drawings without creative work. It should be noted that the description of these embodiments is used to help understand the utility model, but does not constitute a limitation of the utility model.

[0028] Example

[0029] In view of the design of the vacuum suction nozzle air pipe 1 connection sealing structure currently used in the vacuum generator using an O-ring for rotational sealing, its sealing performance is achieved at the expense of the smoothness during the rotation operation, resulting in many inconveniences when fine-tuning the front end angle of the vacuum suction nozzle that uses the O-ring for sealing. We propose a relative rotation vacuum sealing structure for the vacuum suction nozzle air pipe 1 of the vacuum generator that can adaptively damp.

[0030] like Figure 1-5 As shown, this embodiment provides a relative rotation vacuum sealing structure with adaptive damping, including an air pipe 1, a sealing gland 3 and a sealing ring 5.

[0031] The trachea 1 is movably inserted into the tail end of the sealing gland 3, and the trachea 1 can be horizontally rotated at the tail end of the sealing gland 3. A sealing gasket 2 is sheathed on the outside of the trachea 1 and fits the tail end of the sealing gland 3 to achieve a planar sealing effect. At the same time, the sealing gasket 2 and the sealing gland 3 can rotate relative to each other.

[0032] In order to achieve adaptive pressure changes, while ensuring the sealing effect of the joint position, the rotation resistance can also be reduced. The sealing ring 5 is slidably sleeved on the outside of the sealing gland 3. The sealing ring 5 is a Y-shaped sealing ring, and the V-shaped groove of the sealing ring 5 is designed to be directed toward the tail end of the sealing gland 3. At the same time, a compression spring 4 is also sleeved on the sealing gland 3. The two ends of the compression spring 4 are respectively in conflict with the sealing ring 5 and the tail end of the sealing gland 3. The sealing gland 3 includes a butt joint 304. The front end and the tail end of the butt joint 304 are respectively integrally formed with a front end 301 and a stop ring 303. The front end 3 01 and the stop ring 303 form convex rings at both ends of the docking ring, and the sealing ring 5 slides on the outside of the docking tube 304. In the vacuum stage, the sealing ring 5 at the air supply end adapts itself to the changes in the internal and external air pressures and moves in the extension direction of the compression spring 4, causing the compression spring 4 to relax, thereby reducing the pressure applied to the sealing cover, and the rotational resistance between the sealing cover 3 and the sealing gasket 2 is relatively reduced. This structural design can reduce the rotational resistance while ensuring the vacuum sealing effect, so that the relative rotating vacuum sealing structure can be suitable for the field of high-precision control.

[0033] like Figure 6 As shown, in order to form an effective fit between the air pipe 1 and the sealing gland 3, the bottom end of the air pipe 1 is rotatably assembled inside the shell 7 through a bearing 6, and the top of the shell 7 is integrally formed with a movable cabin 8 for accommodating the sealing gland 3, and the top of the movable cabin 8 is provided with an air nozzle 9, which is inclined toward the air outlet end of the vacuum generator, and the entire shell 7 is fixedly installed on the vacuum generator so that the air nozzle 9 is communicated with the airway of the vacuum generator.

[0034] In order to reduce the resistance caused by the relative rotation of the sealing gasket 2 and the sealing gland 3, the sealing gasket 2 and the sealing gland 3 are both made of any one of the self-lubricating materials such as nylon, polytetrafluoroethylene or tin bronze.

[0035] In order to facilitate the assembly between the air pipe 1 and the sealing cover 3, and to enable the compression spring 4 to play a corresponding compression role on the sealing ring 5, a tail end portion 302 is integrally formed on the outside of the stop ring 303. The tail end portion 302 is annular, and the inner diameter of the tail end portion 302 is larger than the inner diameter of the docking pipe 304, and the end of the air pipe 1 is movably inserted into the inner side of the tail end portion 302.

[0036] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the protection scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A relative rotation vacuum sealing structure with adaptive damping, characterized in that: It comprises an air pipe (1), a sealing gland (3) and a sealing ring (5); The air pipe (1) is movably inserted into the tail end of the sealing gland (3), and the outside of the air pipe (1) is covered with a sealing gasket (2) that fits the tail end of the sealing gland (3); The sealing ring (5) is slidably sleeved on the outside of the sealing gland (3).

2. The adaptive damping relative rotation vacuum sealing structure according to claim 1, characterized in that: The sealing ring (5) is a Y-shaped sealing ring, and the V-shaped groove of the sealing ring (5) is designed to face the tail end of the sealing gland (3).

3. The adaptive damping relative rotation vacuum sealing structure according to claim 1, characterized in that: The sealing gland (3) is also provided with a compression spring (4), and the two ends of the compression spring (4) are respectively in contact with the sealing ring (5) and the tail end of the sealing gland (3).

4. The adaptive damping relative rotation vacuum sealing structure according to claim 1, characterized in that: The sealing gasket (2) and the sealing gland (3) are made of any one of nylon, polytetrafluoroethylene or tin bronze.

5. The adaptive damping relative rotation vacuum sealing structure according to claim 1, characterized in that: The sealing gland (3) comprises a butt joint (304), and the front end and the rear end of the butt joint (304) are respectively integrally formed with a front end portion (301) and a stop ring (303).

6. The adaptive damping relative rotation vacuum sealing structure according to claim 5, characterized in that: The front end portion (301) and the stop ring (303) form convex rings at both ends of the docking ring, and the sealing ring (5) is slidably sleeved on the outside of the docking tube (304).

7. The adaptive damping relative rotation vacuum sealing structure according to claim 6, characterized in that: The outer side of the stop ring (303) is also integrally formed with a tail end portion (302).

8. The adaptive damping relative rotation vacuum sealing structure according to claim 7, characterized in that: The tail end portion (302) is annular, and the inner diameter of the tail end portion (302) is larger than the inner diameter of the butt joint (304), and the end of the trachea (1) is movably inserted into the inner side of the tail end portion (302).

9. The adaptive damping relative rotation vacuum sealing structure according to claim 1, characterized in that: The bottom end of the air pipe (1) is rotatably assembled inside the housing (7) via a bearing (6); a movable chamber (8) for accommodating the sealing gland (3) is integrally formed on the top of the housing (7); and a gas nozzle (9) is provided at the top of the movable chamber (8).

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