Purification table and processing equipment

Abstract

The utility model provides a purification table and machining equipment. The purification table comprises a machine shell, a purification table body and a purification table body, and a channel is formed in the machine shell; the first draught fan is arranged on the side edge of the machine shell, and an air outlet of the first draught fan faces the channel. By means of the air blowing and dust collecting functions of the first fan, most particles are concentrated in the channel, large-area diffusion of the particles in the machine shell is reduced, workers can conveniently conduct concentrated cleaning, the cleanliness in the machine shell is improved, and then the production quality is improved.

Description

Technical Field

[0001] The present application relates to the technical field of solar cell manufacturing, and particularly relates to a purification table and processing equipment. Background Art

[0002] Currently, semiconductor or photovoltaic materials are widely used in industries such as electronics and new energy. However, semiconductor or photovoltaic materials need to be chemically processed by processing equipment before they can be applied to products.

[0003] Processing equipment usually includes a furnace body and a purification table. Among them, the furnace body is used to provide certain temperature conditions and pressure conditions, and the purification table is used to reserve a clean space. In the processing process, it is usually necessary to transport sheet materials into the furnace body so that the sheet materials can be processed under temperature conditions and pressure conditions. Moreover, the sheet materials to be processed and the processed sheet materials can stay on the purification table for waiting for materials and cooling respectively, so as to prepare for the next action. Among them, the processed sheet materials may carry powders and cause pollution. Therefore, the purification table needs to be cleaned regularly.

[0004] However, the purification table in the related art is not easy to clean, resulting in a low cleanliness of the purification table and affecting the production quality. Summary of the Utility Model

[0005] In view of the above, it is necessary to provide a purification table and processing equipment to solve the above technical problems.

[0006] The first aspect of the present application provides a purification table, including: a casing, a channel is arranged inside the casing; a first blower, which is arranged on the side of the casing, and the air outlet of the first blower faces the channel.

[0007] In some embodiments, a cabinet door is arranged on the side of the casing.

[0008] In some embodiments, the first blower is fixed to the cabinet door.

[0009] In some embodiments, the purification table further includes a second blower, and the second blower and the first blower are spaced apart in the length direction of the casing.

[0010] In some embodiments, there are multiple second blowers, and the multiple second blowers are spaced apart in the length direction of the casing.

[0011] In some embodiments, there are multiple first blowers, and the multiple first blowers are spaced apart in the vertical direction.

[0012] In some embodiments, the purification table further includes a tray, the tray is arranged on the side of the casing close to the first blower, the tray has a first end, the first end is used to dock with the furnace opening of the furnace body, and the first blower is distributed at the first end.

[0013] In some embodiments, the lowest height of the air outlet of the first fan is greater than the lowest height of the tray.

[0014] In some embodiments, the purification table further includes a buffer rack, which is arranged on the side of the casing away from the tray, and there is a spacing between the buffer rack and the tray to form a channel.

[0015] The second aspect of the present application provides a processing device, including a furnace body and the purification table provided in the first aspect, and the purification table is arranged at one end of the furnace body.

[0016] For the purification table and the processing device provided in the present application, the first fan 40 blows air towards the channel inside the casing. Under the action of the wind, due to the fact that the particulate matter diffused by the rising hot air will generally gather towards the direction close to the channel, after the temperature cools down, the particulate matter can precipitate downwards and accumulate statically in the channel. In this way, most of the particulate matter in the casing is concentrated in the channel under the action of the wind, reducing the large-area diffusion of the particulate matter in the casing, facilitating the staff to carry out centralized cleaning, improving the cleanliness of the purification table, and further improving the production quality. Description of the Drawings

[0017] Figure 1 It is a schematic structural diagram of the processing device provided in the present application.

[0018] Figure 2 It is a schematic structural diagram of the purification table according to the first embodiment provided in the present application.

[0019] Figure 3 It is a schematic internal structure diagram of the purification table according to the first embodiment provided in the present application.

[0020] Figure 4 It is a schematic distribution diagram of the tray, the first fan and the furnace tube according to the first embodiment provided in the present application.

[0021] Figure 5 It is a schematic structural diagram of the purification table according to the second embodiment provided in the present application.

[0022] Figure 6 It is a schematic distribution diagram of the tray, the first fan, the second fan and the furnace tube according to the second embodiment provided in the present application.

[0023] Description of the Main Component Symbols

[0024] 100, processing device; 200, purification table; 300, furnace body; 301, furnace tube; 302, furnace opening; 400, material; 10, casing; 11, cabinet door; 20, tray; 21, channel; 23, first end; 24, second end; 30, buffer rack; 40, first fan; 50, second fan. Detailed Embodiments

[0025] In the description of the embodiments of the present application, when an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be an intervening element therebetween. When an element is considered to be "disposed on" another element, it may be directly disposed on the other element or there may be an intervening element therebetween. In the present application, unless otherwise clearly defined and limited, the terms "mounted", "connected", "connected to", "fixed", etc. shall be construed in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application may be understood according to specific circumstances.

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the art to which this application belongs. The terms used in the description of the present application herein are only for the purpose of describing specific embodiments and are not intended to limit the present application. The terms "comprising" and "provided with" and any variations thereof in the description and claims of this application and the above drawings are intended to cover non-exclusive inclusion.

[0027] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in connection with the embodiments can be included in at least one embodiment of the present application. The phrase appears in various places in the specification and does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive of other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0028] Currently, semiconductor or photovoltaic materials usually need to be chemically processed before they can be applied to products. The chemical processing methods include chemical vapor deposition processes such as PECVD (Plasma Enhanced Chemical Vapor Deposition), LPCVD (Low Pressure Chemical Vapor Deposition System), APCVD (Atmospheric Pressure Chemical Vapor Deposition), etc., and also include diffusion processes such as phosphorus diffusion and boron diffusion. The above processes all need to be realized by the equipment of the present invention.

[0029] The processing equipment generally includes a furnace body, a purification table, and a conveying device. Among them, the furnace body is used to process sheet materials, the purification table is used to store sheet materials, and the conveying device is used to transport sheet materials.

[0030] Before the sheet material is processed, the conveyor can transport the sheet material to the clean bench for storage and waiting. After the sheet material is allowed to be processed, the conveyor can transport the sheet material from the clean bench to the furnace body, and the furnace body provides certain temperature and pressure conditions for the sheet material to be processed. After the sheet material is processed, the conveyor can transport the sheet material from the furnace body to the clean bench for storage and cooling.

[0031] The clean bench is equivalent to a space reserved for the storage of sheet materials to be processed and processed. If a certain degree of suspended particles, dust and other pollutants (hereinafter collectively referred to as particulate matter) are attached to the surface of the sheet material, it may cause black spots, hidden cracks and fragments in the sheet material during processing. Therefore, the cleanliness of the clean bench affects the processing quality of the sheet material. However, some processing processes themselves produce certain particulate matter, which causes contamination inside the clean bench and requires regular cleaning.

[0032] For example, in the LPCVD process, amorphous silicon will be deposited on the surface of the device inside the furnace tube, resulting in solid particles after silane decomposition attached to the processed sheet material and the carrier carrying the sheet material. The particles are diffused to multiple locations of the clean bench under the action of hot air and accumulate after cooling.

[0033] The clean bench in the related art usually includes a tray and a buffer rack. The tray is used to receive the sheet materials entering and exiting the furnace tube of the furnace body, and the buffer rack is used to store the sheet materials. The tray and the buffer rack are respectively located on both sides of the clean bench, and an intermediate passage is reserved between the tray and the buffer rack. A switch door is also provided on the side of the casing. When it is necessary to clean or repair the components inside the casing, the operator can open the switch door and enter the intermediate passage to operate.

[0034] However, the internal components of the clean bench are compactly distributed, and the interior of the equipment is relatively narrow, making it difficult for staff to fully clean multiple locations of the clean bench. The particles diffuse over a large area inside the clean bench under the action of hot air, greatly increasing the difficulty of cleaning the clean bench. It is not easy to clean, resulting in a low cleanliness of the clean bench, affecting production quality.

[0035] To this end, the present application provides a clean bench and processing equipment, which has the technical effect of being easy to clean and improving production quality.

[0036] Figure 1 This is a schematic diagram of the structure of the processing equipment provided in this application. Figure 2 This is a schematic diagram of the structure of the clean bench of the first embodiment provided in this application. Figure 3 This is a schematic diagram of the internal structure of the clean bench of the first embodiment provided by the present application, wherein the dotted arrow in the diagram indicates the blowing direction of the first fan.

[0037] Please refer toFigure 1 , Figure 2 and Figure 3 , the processing equipment 100 includes a purification table 200 and a furnace body 300. Among them, the purification table 200 is arranged at one end of the furnace body 300. The purification table 200 is used to store the material 400, and the furnace body 300 is used to provide a pressure environment and a high-temperature environment for the processing of the material 400. The material 400 includes a carrier and a sheet material loaded on the carrier.

[0038] Before the material 400 is processed, the material 400 is stored on the purification table 200 for waiting, waiting to enter the furnace body 300 for processing. After allowing the material 400 to be processed, the material 400 is transported from the purification table 200 to the furnace body 300 and processed inside the furnace body 300. After the material 400 is processed, the material 400 is transported from the furnace body 300 to the purification table 200 for storage and cooling, waiting to perform the next material receiving action. Among them, the transportation method of the material 400 is: reciprocating movement in the horizontal direction driven by a paddle.

[0039] It should be noted that the processing equipment 100 in this application can be applied to various processing processes. The specific types of the sheet material and the carrier can be configured according to the actual application scenario, and the structure of the furnace body 300 can also be adjusted adaptively. Exemplarily, the processing equipment 100 is applied to the LPCVD process; correspondingly, the sheet material can be a silicon wafer and the carrier can be a boat.

[0040] Figure 4 It is a distribution schematic diagram of the tray, the first fan and the furnace tube of the first embodiment provided by this application.

[0041] Please refer to Figure 3 and Figure 4 , in this embodiment, a plurality of furnace tubes 301 are arranged inside the furnace body 300, and the plurality of furnace tubes 301 are spaced apart in the vertical direction. The furnace tubes 301 extend in the horizontal direction, and one end of the furnace tube 301 is provided with a furnace opening 302, and the furnace opening 302 is the position where the material 400 enters and exits the furnace tube 301. The furnace opening 302 is an opening and closing structure. When the material 400 needs to enter or leave the furnace tube 301, the furnace opening 302 is opened, and when the material 400 is processed inside the furnace tube 301, the furnace opening 302 is sealed. Exemplarily, the number of furnace tubes 301 is 6. In other examples, the number of furnace tubes 301 can also be less than 6, and can be specifically configured according to actual needs. The side of the furnace body 300 is provided with an opening and closing door structure that can be opened or closed, and the staff can repair the components inside the furnace body 300 through the opening and closing door structure.

[0042] In this embodiment, the clean bench 200 includes a housing 10, a tray 20, a buffer rack 30 and a first fan 40, wherein the housing 10 is disposed at one end of the furnace body 300, and the housing 10 is connected to the furnace port 302 of the furnace tube 301. A clean space is formed inside the housing 10, the tray 20 and the buffer rack 30 are both disposed inside the housing 10, and the first fan 40 is disposed on the side of the housing 10.

[0043] In this embodiment, the housing 10 is in the shape of a rectangular parallelepiped as a whole, and the length direction of the housing 10 is consistent with the transportation direction of the material 400. The housing 10 is adjacent to the two sides of the furnace body 300 to form a front and a back, and the front and back of the housing 10 are both provided with cabinet doors 11.

[0044] For example, the cabinet door 11 is a rotating door structure, and a window adapted to the cabinet door 11 is reserved on the side of the housing 10. The cabinet door 11 is hinged to the corresponding window, and the cabinet door 11 is opened or closed by rotating. After opening the cabinet door 11, the operator outside the housing 10 can inspect and clean the components in the housing 10 through the cabinet door 11, and can close the cabinet door 11 after the operation is completed.

[0045] Exemplarily, six cabinet doors 11 are provided on the front and back of the housing 10, and the six cabinet doors 11 are distributed in a matrix of two rows and three columns. In other examples, the number and distribution of the cabinet doors 11 can be configured according to actual needs.

[0046] In this embodiment, the tray 20 is disposed on the back of the housing 10, and the tray 20 is extended in the horizontal direction. There are multiple trays 20, and the multiple trays 20 are spaced apart in the vertical direction, and the positions of the multiple trays 20 correspond to the multiple furnace tubes 301. Exemplarily, the number of trays 20 is 6, and the six trays 20 are located below the extension area of ​​the six furnace tubes 301; it can be understood that in other examples, if the actual distribution of the furnace tubes 301 is adjusted, the number and distribution of the trays 20 can also be adaptively adjusted.

[0047] When the material 400 enters and exits the furnace tube 301, the material 400 will pass over the corresponding tray 20. The tray 20 can receive the debris brought by the transportation of the material 400 to prevent contamination of the material 400 on the next layer.

[0048] In this embodiment, the tray 20 has a first end 23 and a second end 24, and the first end 23 is the end of the tray 20 close to the furnace tube 301. The distribution of the tray 20 corresponds to the distribution of the furnace tube 301. The first end 23 of the tray 20 is used to dock with the furnace port 302 of the corresponding furnace tube 301, and the tray 20 is located below the paddle corresponding to the furnace tube 301.

[0049] In actual work, the material 400 to be processed can pass over the tray 20 and enter the furnace port 302 of the furnace tube 301 under the drive of the paddle, and the processed material 400 can also be moved from the furnace port 302 of the furnace tube 301 to the top of the tray 20 under the drive of the paddle; and the material 400 coming out of the furnace tube 301 may carry debris such as fragments and slag, and the tray 20 can receive the debris falling from the material 400 to prevent the debris from affecting other components in the housing 10.

[0050] In this embodiment, the projection of the tray 20 in the horizontal direction overlaps with the area where the multiple cabinet doors 11 are distributed. In this way, the tray 20 as a whole passes through the area where the multiple cabinet doors 11 are distributed on the back of the casing 10, and the operator outside the casing 10 can check or repair the tray 20 through the corresponding cabinet door 11 on the back of the casing 10.

[0051] Please refer to Figure 2 and Figure 3 , in this embodiment, the cache rack 30 is used to store materials 400, and the stored materials 400 may be materials 400 that are not processed temporarily. The cache rack 30 is arranged on the front of the housing 10, that is, the cache rack 30 is arranged on the side of the housing 10 away from the tray 20, and the length direction of the cache rack 30 is parallel to the length direction of the tray 20.

[0052] There are multiple cache racks 30, which are spaced apart in the vertical direction and parallel to each other. Multiple cache racks 30 can store materials 400 at the same time. Exemplarily, the number of cache racks 30 is greater than the number of trays 20, for example, the number of cache racks 30 is 7. In other examples, the number of cache racks 30 can be configured according to actual needs.

[0053] In this embodiment, the horizontal projection of the cache rack 30 overlaps with the area where the multiple cabinet doors 11 are distributed. In this way, the cache rack 30 as a whole passes through the area where the multiple cabinet doors 11 are distributed on the front of the housing 10, and the operator outside the housing 10 can clean the cache rack 30 through the corresponding cabinet door 11 on the front of the housing 10.

[0054] In this embodiment, a passage 21 is provided in the housing 10, and the passage 21 is a space reserved for the staff to clean the inside of the housing 10 or inspect and repair the internal components of the housing 10. Exemplarily, the cache rack 30 and the tray 20 are distributed in the horizontal direction, and a gap is left between the cache rack 30 and the tray 20 to form the passage 21. A switch door (not shown in the figure) is provided on the side of the housing 10, and the operator can enter and exit the passage 21 through the switch door.

[0055] In this embodiment, the first blower 40 is disposed on one side of the casing 10, and the air outlet of the first blower 40 faces the channel 21. Exemplarily, the first blower 40 is located on the back of the casing 10, and the air outlet of the first blower 40 faces the front of the casing 10 in the horizontal direction.

[0056] When the first blower 40 operates, the first blower 40 blows air towards the channel 21 inside the casing 10. Under the action of the wind force, due to the hot air rising and diffusing, the overall particulate matter will gather towards the direction close to the channel 21. After the temperature cools down, the particulate matter can precipitate and accumulate in the channel 21. In this way, most of the particulate matter in the casing 10 is concentrated in the channel 21 under the action of the wind force, reducing the large-area diffusion of the particulate matter in the casing 10, facilitating centralized cleaning by the staff. The cleaning method can be vacuuming with a vacuum cleaner or wiping with a cleaning agent (such as alcohol), improving the cleanliness inside the casing 10, and thus improving the production quality.

[0057] In one embodiment, the first blower 40 is fixed to the cabinet door 11. Exemplarily, the first blower 40 adopts a fan filter unit (FFU, Fan Filter Unit), and the fan filter unit is embedded in the cabinet door 11. One end of the fan filter unit with an air outlet passes through the cabinet door 11 and enters the inside of the casing 10, and the other end of the fan filter unit is exposed on the back of the casing 10.

[0058] It can be understood that the first blower 40 can rotate with the cabinet door 11. After the cabinet door 11 is rotated and opened, the corresponding first blower 40 is entirely exposed on the back of the casing 10, facilitating inspection and repair by the staff.

[0059] Please refer to Figure 3 and Figure 4 , in one embodiment, the first blowers 40 are distributed at the first end 23 of the tray 20. In practical applications, when the processed material 400 passes through the first end 23 from the furnace opening 302, the temperature is relatively high, resulting in a large temperature difference at the first end 23, and the particulate matter falling off and accumulating from the surface of the material 400 is relatively large. By using the first blower 40 to blow air at the position of the first end 23, most of the particulate matter can be blown towards and gathered in the channel 21, improving the dust collection efficiency.

[0060] In one embodiment, there are multiple first blowers 40, and the multiple first blowers 40 are spaced apart in the vertical direction. In this way, the multiple first blowers 40 can blow air at multiple positions at different heights, achieving a more comprehensive dust collection effect in the vertical direction.

[0061] Please refer to Figure 2 and Figure 3, Exemplarily, the number of the first blowers 40 is 4, and the number of the first blowers 40 provided on each cabinet door 11 is 2. The four first blowers 40 are provided on two cabinet doors 11 located in the same column; in other examples, the number and distribution of the first blowers 40 can be configured according to actual requirements.

[0062] In one implementation, the lowest height of the air outlet of the first blower 40 is greater than the lowest height of the tray 20. In this way, the first blower 40 can blow air from the upper space of the tray 20, reducing the obstruction of the wind by the tray 20 itself or the paddles, and enabling the air flow to effectively pass through the material 400, achieving a better blowing effect.

[0063] It can be understood that in the example of this embodiment, both the first blowers 40 and the trays 20 have multiple ones and are spaced apart in the vertical direction. Then, the height of the first blower 40 at the bottom layer is greater than the height of the tray 20 at the bottom layer. In other examples, if the number of the first blowers 40 or the trays 20 is 1, the only first blower 40 or tray 20 can be regarded as the first blower 40 or tray 20 at the bottom layer.

[0064] It should be noted that in the example of this embodiment, the first blowers 40 are provided on the cabinet doors 11 on the back of the casing 10; in other examples, the cabinet doors 11 on the front of the casing 10 can also be provided with the first blowers 40. In this way, the first blowers 40 are provided on both sides of the casing 10 and blow air into the channel 21 respectively, which can be specifically configured according to actual requirements, and the present application does not limit this.

[0065] Figure 5 It is a schematic structural diagram of the purification table according to the second embodiment provided by the present application. Figure 6 It is a schematic distribution diagram of the tray, the first blower, the second blower and the furnace tube according to the second embodiment provided by the present application.

[0066] Please refer to Figure 5 and Figure 6 , The difference between this embodiment and the first embodiment is that: the purification table 200 further includes a second blower 50, and the second blower 50 and the first blower 40 are spaced apart in the length direction of the casing 10. Exemplarily, the second blower 50 adopts a fan filter unit (FFU, Fan Filter Unit), and its installation method can be the same as that of the first blower 40, and the length direction of the casing 10 is consistent with the length direction of the tray 20.

[0067] It can be understood that the first fan 40 can blow air to the area close to the first end 23 of the tray 20, and the second fan 50 can blow air to other areas in the length direction of the tray 20 (such as the middle and the second end 24 of the tray 20), so as to extend the dust collection range of the air blowing horizontally, blow the particulate matters at various positions in the length direction of the tray 20 towards the channel 21, and achieve a more comprehensive dust collection effect in the horizontal direction.

[0068] In one embodiment, there are multiple second fans 50, and the multiple second fans 50 are spaced apart in the length direction of the casing 10. In this way, the areas in the length direction of the casing 10 can be covered by the multiple second fans 50, further improving the dust collection effect.

[0069] In one embodiment, the multiple second fans 50 are also spaced apart in the vertical direction. In this way, the multiple second fans 50 can blow air at multiple positions at different heights, achieving a more comprehensive dust collection effect in the vertical direction.

[0070] Exemplarily, the number of the second fans 50 is 8. The eight second fans 50 and the four first fans 40 form a matrix distribution of four rows and three columns, and correspond to the distribution positions of the cabinet doors 11. Among them, the four first fans 40 in the same column are arranged on the two cabinet doors 11 in the first column, the four second fans 50 in one column are arranged on the two cabinet doors 11 in the second column, and the four second fans 50 in another column are arranged on the two cabinet doors 11 in the third column.

[0071] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application and not to limit them. Although the present application has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present application can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present application.

Claims

1. A clean bench, characterized in that: include: a casing, wherein a passage is provided in the casing; The first fan is arranged on the side of the housing, and the air outlet of the first fan is arranged toward the passage.

2. The clean bench according to claim 1, characterized in that: A cabinet door is arranged on the side of the casing.

3. The clean bench according to claim 2, characterized in that: The first fan is fixed to the cabinet door.

4. The clean bench according to claim 1, characterized in that: The clean bench further includes a second fan, and the second fan and the first fan are spaced apart from each other in the length direction of the housing.

5. The clean bench according to claim 4, characterized in that: There are a plurality of the second fans, and the plurality of the second fans are distributed at intervals in the length direction of the casing.

6. The clean bench according to claim 1, characterized in that: There are a plurality of the first fans, and the plurality of the first fans are distributed at intervals in the vertical direction.

7. The clean bench according to claim 1, characterized in that: The clean bench further includes a tray, which is disposed on a side of the housing close to the first fan. The tray has a first end, which is used to connect to a furnace opening of a furnace body. The first fan is distributed at the first end.

8. The clean bench according to claim 7, characterized in that: The lowest height of the air outlet of the first fan is greater than the lowest height of the tray.

9. The clean bench according to claim 7, characterized in that: The clean bench further comprises a buffer rack, which is arranged on a side of the housing away from the tray, and a distance is provided between the buffer rack and the tray to form the channel.

10. A processing equipment, characterized in that: The invention comprises a furnace body and a clean bench as claimed in any one of claims 1 to 9, wherein the clean bench is arranged at one end of the furnace body.

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