Coating device

Abstract

The utility model discloses a coating device. The coating device comprises an evaporation box body; the crucible is positioned in the inner cavity of the evaporation box body and is used for containing a coating material; the bearing mechanism is arranged in an inner cavity of the evaporation box and comprises a mechanical arm and a carrying block, a first driver is arranged at the tail end of the mechanical arm, the driving end of the first driver is connected with the top face of the carrying block, a containing groove is formed in one side of the carrying block, a through hole communicating with the containing groove is formed in the bottom face of the carrying block, and the containing groove is used for containing a substrate. The mechanical arm is used for driving the carrying block to move so that the distance between the bottom of the carrying block and an opening of the crucible can be smaller than a preset distance threshold value, the through hole is located over the crucible, the first driver is used for driving the carrying block to rotate so as to drive the base plate to rotate, and the base plate covers the through hole; and the heating module is positioned in the inner cavity of the evaporation box body and is used for heating the crucible. According to the embodiment provided by the invention, waste of coating materials can be avoided, and the film forming effect can be improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and particularly to a coating device. Background Art

[0002] With the progress of technology, coating technology plays an important role in many industrial fields. For example, in the semiconductor field, coating technology is a crucial step. Coating technology mainly relies on heating the coating material to evaporate it and condense on the surface of the substrate to form a thin film.

[0003] Currently, in traditional coating devices, the distance between the evaporation source and the substrate is too large, and the sublimated coating material is more likely to diffuse into the surrounding environment before reaching the substrate surface, which not only wastes the coating material but also results in a poor film-forming effect on the substrate surface, and even fails to form a film on the substrate surface. Summary of the Utility Model

[0004] The following is an overview of the subject matter described in detail in this article, and this overview is not intended to limit the scope of protection of the claims.

[0005] This application proposes a coating device that can avoid wasting coating materials and improve the film-forming effect.

[0006] This application provides a coating device, including: an evaporation chamber; a crucible located in the inner cavity of the evaporation chamber, the crucible being used to hold the coating material; a carrying mechanism arranged in the inner cavity of the evaporation chamber, the carrying mechanism including a robotic arm and a carrier block, a first driver being arranged at the end of the robotic arm, the driving end of the first driver being connected to the top surface of the carrier block, a receiving groove being arranged on one side of the carrier block, a through hole communicating with the receiving groove being arranged on the bottom surface of the carrier block, the receiving groove being used to place the substrate, the robotic arm being used to drive the carrier block to move so that the distance between the bottom of the carrier block and the opening of the crucible is less than a preset distance threshold, and the through hole being located directly above the crucible, the first driver being used to drive the carrier block to rotate to drive the substrate to rotate, wherein the substrate covers the through hole; a heating module located in the inner cavity of the evaporation chamber, the heating module being used to heat the crucible.

[0007] In some embodiments, it further includes a vacuum pump and a base, the evaporation chamber is fixed on the base, the heating module is arranged on the base, the evaporation chamber is provided with an air suction port, the vacuum pump is arranged outside the evaporation chamber, and the suction end of the vacuum pump is communicated with the air suction port.

[0008] In some embodiments, it further includes a controller, the controller is arranged in the base, and the robotic arm, the first driver, the vacuum pump and the heating module are respectively electrically connected to the controller.

[0009] In some embodiments, a control panel and a control switch are provided on a side surface of the base, and the control panel and the control switch are electrically connected to the controller respectively.

[0010] In some embodiments, a first position sensor is provided in the receiving groove, and a second position sensor is provided on a bottom surface of the load block. The first position sensor and the second position sensor are electrically connected to the controller respectively. The first position sensor is used to detect the position of the substrate, and the second position sensor is used to detect the position of the crucible.

[0011] In some embodiments, the heating module is a heating stage, and the crucible is placed at the center of the heating stage.

[0012] In some embodiments, when the substrate is located in the receiving groove, the through hole is directly below the center of the substrate, and the opening of the crucible is larger than the through hole.

[0013] In some embodiments, a limiting portion is provided at the bottom of the receiving groove. The distance between the limiting portion and the top of the receiving groove is greater than the thickness of the substrate, and the distance between the limiting portion and a side of the receiving groove away from the groove opening is equal to the width of the substrate. The limiting portion is used to clamp the substrate.

[0014] In some embodiments, the evaporation box body is provided with a pick-and-place opening and a box door, and the box door is provided at the pick-and-place opening in a manner that can be opened and closed.

[0015] In some embodiments, the robotic arm includes an upper arm, a middle arm, and a lower arm. One end of the upper arm is fixed inside the evaporation box body, the other end of the upper arm is rotatably connected to one end of the middle arm, and the other end of the middle arm is rotatably connected to the lower arm. The robotic arm is provided with a second driver and a third driver. The second driver is used to drive the middle arm to rotate around the other end of the upper arm, and the third driver is used to drive the lower arm to rotate around the other end of the middle arm.

[0016] The embodiments of the present application at least include the following beneficial effects: By providing an evaporation box body, and arranging the crucible and the carrying mechanism in the inner cavity of the evaporation box body, the evaporation box body plays a role in blocking, avoiding the influence of the external environment on the coating process, and being able to improve the coating effect. By arranging a first driver at the end of the robotic arm, and connecting the driving end of the first driver to the top surface of the load block, the robotic arm can drive the load block to move so that the distance between the bottom of the load block and the opening of the crucible is less than a preset distance threshold, and the through hole of the load block is located directly above the crucible. At this time, the crucible is heated by the heating module, and the coating material in the crucible is heated and evaporated. Since the distance between the bottom of the load block and the opening of the crucible is less than the distance threshold, which is equivalent to a small distance between the bottom of the load block and the opening of the crucible, the sublimated coating material can pass through the through hole in a short time and condense on the surface of the substrate, realizing near-field coating of the substrate, being able to improve the film-forming effect on the surface of the substrate, ensuring that a film can be normally formed on the surface of the substrate, and moreover, the coating material usually only diffuses into the through hole of the load block after sublimation, being able to avoid the sublimated coating material from diffusing into the surrounding environment, thereby avoiding waste of the coating material; in addition, during the coating process, the first driver can drive the load block to rotate to drive the substrate to rotate, and the sublimated coating material located in the through hole can uniformly condense on the local area of the substrate covering the through hole, forming a thin film with a uniform thickness on the surface of the substrate, being able to further improve the film-forming effect.

[0017] Other features and advantages of the present application will be described in the subsequent description, and, in part, will be obvious from the description, or will be understood by implementing the present application. The objectives and other advantages of the present application can be achieved and obtained through the structures specifically pointed out in the description, claims, and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings are used to provide a further understanding of the technical solutions of the present application, and constitute a part of the description. They are used together with the embodiments of the present application to explain the technical solutions of the present application, and do not constitute a limitation to the technical solutions of the present application.

[0019] Figure 1 It is an optional structural schematic diagram of the coating device provided by the embodiment of the present application;

[0020] Figure 2 It is an optional structural schematic diagram of the carrying mechanism provided by the embodiment of the present application;

[0021] Figure 3 It is an optional cross-sectional schematic diagram of the load block provided by the embodiment of the present application;

[0022] Figure 4 It is an optional structural schematic diagram of the coating device when the cabinet door is hidden provided by the embodiment of the present application;

[0023] Figure 5 An optional structural schematic diagram of the coating device with a box door provided by an embodiment of the present application;

[0024] Figure 6 An optional system block diagram of the coating device provided by an embodiment of the present application;

[0025] Figure 7 An optional system block diagram of the controller provided by an embodiment of the present application;

[0026] Figure 8 An optional front view schematic diagram of the carrier block provided by an embodiment of the present application;

[0027] Figure 9 An optional cross-sectional schematic diagram of the carrier block in a top view provided by an embodiment of the present application;

[0028] Figure 10 An optional cross-sectional schematic diagram of the carrier block and the substrate in a top view provided by an embodiment of the present application.

[0029] Figure 11 An optional SEM morphology schematic diagram of the thin film provided by the related art;

[0030] Figure 12 An optional curve schematic diagram of the leakage current density of the thin film device provided by the related art;

[0031] Figure 13 An optional structural schematic diagram of the thin film device provided by an embodiment of the present application;

[0032] Figure 14 An optional SEM morphology schematic diagram of the thin film provided by an embodiment of the present application;

[0033] Figure 15 An optional curve schematic diagram of the leakage current density of the thin film device provided by an embodiment of the present application;

[0034] Figure 16 An optional curve schematic diagram of the capacitance density of the thin film device provided by an embodiment of the present application. Detailed implementation manners

[0035] The embodiments of the present application will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application and should not be construed as a limitation to the present application.

[0036] In the description of the present application, it should be understood that for the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc., is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present application.

[0037] In the description of the present application, the meaning of "a number of" is one or more, the meaning of "a plurality of" is two or more, "greater than", "less than", "exceeding", etc. are understood as not including the recited number, and "above", "below", "within", etc. are understood as including the recited number. If the first and the second are described, it is only for the purpose of distinguishing technical features and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or the sequence relationship of the indicated technical features.

[0038] In the description of the present application, unless otherwise clearly defined, terms such as "arrangement", "installation", "connection", etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present application in combination with the specific content of the technical solution.

[0039] Currently, in traditional coating devices, the distance between the evaporation source and the substrate is too large, and the sublimated coating material is more likely to diffuse into the surrounding environment before reaching the substrate surface, which not only wastes the coating material but also results in a poor film-forming effect on the substrate surface, or even fails to form a film on the substrate surface.

[0040] In view of the problems of waste of coating materials and poor film-forming effect, the present application provides a coating device, which includes: an evaporation box body; a crucible located in the inner cavity of the evaporation box body for containing coating materials; a carrying mechanism arranged in the inner cavity of the evaporation box body, the carrying mechanism includes a robotic arm and a carrier block, a first driver is arranged at the end of the robotic arm, the driving end of the first driver is connected to the top surface of the carrier block, a receiving groove is arranged on one side of the carrier block, a through hole communicating with the receiving groove is arranged on the bottom surface of the carrier block, the receiving groove is used for placing a substrate, the robotic arm is used to drive the carrier block to move so that the distance between the bottom of the carrier block and the opening of the crucible is less than a preset distance threshold, and the through hole is located directly above the crucible, the first driver is used to drive the carrier block to rotate to drive the substrate to rotate, wherein the substrate covers the through hole; a heating module located in the inner cavity of the evaporation box body for heating the crucible. According to the solution provided by the embodiments of the present application, by providing an evaporation box body and arranging the crucible and the carrying mechanism in the inner cavity of the evaporation box body, the evaporation box body plays a role in blocking, avoiding the influence of the external environment on the coating process, and can improve the coating effect. By arranging a first driver at the end of the robotic arm and connecting the driving end of the first driver to the top surface of the carrier block, the robotic arm can drive the carrier block to move so that the distance between the bottom of the carrier block and the opening of the crucible is less than the preset distance threshold, and the through hole of the carrier block is located directly above the crucible. At this time, the crucible is heated by the heating module, and the coating material in the crucible is heated and evaporated. Since the distance between the bottom of the carrier block and the opening of the crucible is less than the distance threshold, it is equivalent to that the distance between the bottom of the carrier block and the opening of the crucible is small. The sublimated coating material can pass through the through hole in a short time and condense on the surface of the substrate, realizing near-field coating of the substrate, which can improve the film-forming effect on the surface of the substrate, ensure normal film formation on the surface of the substrate, and moreover, the coating material usually only diffuses into the through hole of the carrier block after sublimation, which can avoid the sublimated coating material from diffusing into the surrounding environment, thus avoiding waste of coating materials; in addition, during the coating process, the first driver can drive the carrier block to rotate to drive the substrate to rotate, and the sublimated coating material located in the through hole can uniformly condense on the local area of the substrate covering the through hole, forming a film with uniform thickness on the surface of the substrate, which can further improve the film-forming effect.

[0041] The following further elaborates on the embodiments of the present application in conjunction with the accompanying drawings.

[0042] Refer to Figures 1 to 3 , the embodiments of the present application provide a coating device, including:

[0043] An evaporation box body 100;

[0044] A crucible 200 located in the inner cavity of the evaporation box body 100 for containing coating materials;

[0045] The carrier mechanism 300 is disposed in the inner cavity of the evaporation box body 100. The carrier mechanism 300 includes a robotic arm 310 and a load block 320. A first driver 330 is disposed at the end of the robotic arm 310. The driving end of the first driver 330 is connected to the top surface of the load block 320. A receiving groove 321 is disposed on one side of the load block 320. A through hole 322 communicating with the receiving groove 321 is disposed on the bottom surface of the load block 320. The receiving groove 321 is used for placing the substrate 900. The robotic arm 310 is used to drive the load block 320 to move so that the distance between the bottom of the load block 320 and the opening of the crucible 200 is less than a preset distance threshold, and the through hole 322 is located directly above the crucible 200. The first driver 330 is used to drive the load block 320 to rotate to drive the substrate 900 to rotate, wherein the substrate 900 covers the through hole 322;

[0046] The heating module 400 is located in the inner cavity of the evaporation box body 100. The heating module 400 is used to heat the crucible 200.

[0047] It can be understood that by providing the evaporation box body 100, and disposing the crucible 200 and the carrier mechanism 300 in the inner cavity of the evaporation box body 100, the evaporation box body 100 plays a role in blocking, avoiding the influence of the external environment on the coating process, and can improve the coating effect. By disposing the first driver 330 at the end of the robotic arm 310, and connecting the driving end of the first driver 330 to the top surface of the load block 320, the robotic arm 310 can drive the load block 320 to move so that the distance between the bottom of the load block 320 and the opening of the crucible 200 is less than a preset distance threshold, and the through hole 322 of the load block 320 is located directly above the crucible 200. At this time, the crucible 200 is heated by the heating module 400, and the coating material in the crucible 200 is evaporated by heat. Since the distance between the bottom of the load block 320 and the opening of the crucible 200 is less than the distance threshold, it is equivalent to that the distance between the bottom of the load block 320 and the opening of the crucible 200 is small. The sublimated coating material can pass through the through hole 322 and condense on the surface of the substrate 900 in a short time, realizing near-field coating of the substrate 900, which can improve the film-forming effect on the surface of the substrate 900, ensure normal film formation on the surface of the substrate 900, and moreover, the coating material usually only diffuses into the through hole 322 of the load block 320 after sublimation, which can avoid the sublimated coating material from diffusing into the surrounding environment, thereby avoiding waste of the coating material; in addition, during the coating process, the first driver 330 can drive the load block 320 to rotate to drive the substrate 900 to rotate, and the sublimated coating material located in the through hole 322 can uniformly condense on the local area of the substrate 900 covering the through hole 322, forming a thin film with uniform thickness on the surface of the substrate 900, which can further improve the film-forming effect.

[0048] Among them, the first driver 330 can be an electric motor. The stator of the electric motor is fixed at the end of the robotic arm 310, and the rotor of the electric motor is connected to the top surface of the load block 320. The electric motor can drive the load block 320 to rotate. Since the substrate 900 is placed in the accommodation groove 321 of the load block 320, the electric motor can drive the substrate 900 to rotate. It should be noted that the rotation speed of the electric motor is high enough to improve the spin coating effect of the sublimated coating material on the surface of the substrate 900.

[0049] Among them, the coating material located in the crucible 200 is in powder form, and the coating material can sublimate quickly.

[0050] It should be noted that before coating, the robotic arm 310 can drive the load block 320 to move away from the crucible 200 to facilitate the relevant personnel to place the substrate 900 into the accommodation groove 321. Then, the robotic arm 310 can drive the load block 320 to move so that the through hole 322 is directly above the crucible 200, so that the distance between the bottom of the load block 320 and the opening of the crucible 200 is less than the distance threshold. For example, the distance threshold can be set to 0.5 mm, which can ensure that the distance between the bottom of the load block 320 and the opening of the crucible 200 is small enough. In special cases, the distance threshold can be set to 0 mm, which can ensure that the bottom of the load block 320 is flush with the opening of the crucible 200, improving the effect of near-field coating. During coating, the through hole 322 can remain directly above the crucible 200. By performing near-field coating on the substrate 900, the film-forming effect on the surface of the substrate 900 can be improved, ensuring that a film can be normally formed on the surface of the substrate 900. After coating, the robotic arm 310 can drive the load block 320 to move away from the crucible 200 to facilitate the relevant personnel to take out the substrate 900 from the accommodation groove 321. By setting the robotic arm 310 to drive the load block 320 to move, the processing efficiency can be improved.

[0051] Specifically, during the semiconductor chip packaging process, by coating a protective layer on the chip through a coating device, the chip can be protected from environmental factors. Here, the chip can be the substrate 900 of the chip, and the coating material can be an insulating material. For example, the coating material can include materials such as silicon dioxide, titanium dioxide, zirconium oxide, and organic compounds of zirconium. Other coating materials can also be used, and the embodiments of the present application do not limit this here.

[0052] In addition, referring to Figure 1 、 Figures 4 to 5 , some embodiments of the present application further include a vacuum pump 500 and a base 600. The evaporation chamber 100 is fixed on the base 600, the heating module 400 is arranged on the base 600, the evaporation chamber 100 is provided with an air inlet 110, the vacuum pump 500 is arranged outside the evaporation chamber 100, and the suction end of the vacuum pump 500 is communicated with the air inlet 110.

[0053] Among them, the suction end of the vacuum pump 500 can be communicated with the suction port 110 through a suction pipe.

[0054] Based on this, by setting the base 600, since the evaporation box body 100 is fixed on the base 600, the stability of the evaporation box body 100 can be improved. Since the heating module 400 is arranged on the base 600, the stability of the heating module 400 can also be improved. By arranging the suction port 110 on the evaporation box body 100 and setting the vacuum pump 500 for vacuum pumping, since the suction end of the vacuum pump 500 is communicated with the suction port 110, when processing some coating materials with special requirements, before coating, the vacuum pump 500 can be turned on, and the inner cavity of the evaporation box body 100 can be pumped out by the vacuum pump 500 to reduce the air pressure in the inner cavity of the evaporation box body 100 and form a vacuum environment, so that coating processing can be realized in a vacuum environment, thereby meeting the special requirements of the coating material and improving the coating effect.

[0055] In addition, when processing coating materials without special requirements, before coating, the vacuum pump 500 can be turned off, and coating processing can be carried out in a non-vacuum environment, which can improve the coating efficiency and reduce the processing cost.

[0056] In addition, referring to Figures 4 to 5 , in some embodiments of the present application, the evaporation box body 100 is provided with a loading and unloading port 120 and a box door 130, and the box door 130 is arranged at the loading and unloading port 120 in a manner that can be opened and closed.

[0057] Based on this, by arranging the box door 130 at the loading and unloading port 120 of the evaporation box body 100, after the box door 130 is opened, it is convenient to load and unload the processing materials through the loading and unloading port 120. When the box door 130 is closed, the vacuum environment in the inner cavity of the evaporation box body 100 can be ensured.

[0058] Specifically, before coating, first open the box door 130, then put the coating material into the crucible 200 and put the substrate 900 into the receiving groove 321 through the loading and unloading port 120, and then close the box door 130. Under the pumping action of the vacuum pump 500, the inner cavity of the evaporation box body 100 is in a vacuum environment; during coating, keep the box door 130 closed, and after coating, open the box door 130, and then take out the coated substrate 900 through the loading and unloading port 120.

[0059] In addition, referring to Figure 6 , in some embodiments of the present application, it further includes a controller 700. The controller 700 is arranged in the base 600, and the robotic arm 310, the first driver 330, the vacuum pump 500, and the heating module 400 are respectively electrically connected to the controller 700.

[0060] Based on this, by arranging a controller 700 inside the base 600 and then controlling the working states of the robotic arm 310, the first driver 330, the vacuum pump 500, and the heating module 400 through the controller 700, the cooperation degree among the robotic arm 310, the first driver 330, the vacuum pump 500, and the heating module 400 can be improved. Furthermore, the processing efficiency of the coating device can be enhanced, and the film-forming effect on the surface of the substrate 900 can be improved.

[0061] In addition, referring to Figure 1 and Figures 4 to 5 , in some embodiments of the present application, a control panel 610 and a control switch 620 are arranged on the side surface of the base 600, and the control panel 610 and the control switch 620 are electrically connected to the controller 700 respectively.

[0062] Based on this, by arranging the control panel 610 and the control switch 620, since the control panel 610 is electrically connected to the controller 700, it helps relevant personnel to intuitively adjust the controller 700 through the control panel 610, improving the work efficiency. Since the control switch 620 is electrically connected to the controller 700, it helps relevant personnel to turn on and off the controller 700 through the control switch 620, improving the work efficiency.

[0063] In addition, referring to Figure 7 , in some embodiments of the present application, a first position sensor 810 is arranged inside the receiving groove 321, and a second position sensor 820 is arranged on the bottom surface of the load block 320. The first position sensor 810 and the second position sensor 820 are electrically connected to the controller 700 respectively. The first position sensor 810 is used to detect the position of the substrate 900, and the second position sensor 820 is used to detect the position of the crucible 200.

[0064] Based on this, by arranging the first position sensor 810 inside the receiving groove 321, the position of the substrate 900 can be accurately detected through the first position sensor 810. Furthermore, during the coating process, it can be ensured that the substrate 900 is located inside the receiving groove 321, enabling effective coating of the substrate 900. In addition, by arranging the second position sensor 820 on the bottom surface of the load block 320, the position of the crucible 200 can be accurately detected through the second position sensor 820. Furthermore, during the coating process, it can be ensured that the load block 320 is located directly above the crucible 200, enabling effective coating of the substrate 900.

[0065] In addition, referring to Figure 1 and Figure 4 , in some embodiments of the present application, the heating module 400 is a heating table, and the crucible 200 is placed at the center of the heating table.

[0066] Based on this, the heating effect of the heating table is good, and the crucible 200 is placed at the center of the heating table. A tight fit and efficient heat transfer can be achieved between the crucible 200 and the heating table, ensuring rapid and uniform sublimation of the coating material.

[0067] In addition, referring to Figure 1 and Figure 4 , in some embodiments of the present application, when the substrate 900 is located in the receiving groove 321, the through hole 322 is located directly below the center of the substrate 900, and the opening of the crucible 200 is larger than the through hole 322.

[0068] Based on this, the through hole 322 is located directly below the center of the substrate 900, which can ensure that the sublimated coating material can uniformly condense in the central area of the substrate 900, obtaining a locally coated substrate 900. In addition, since the opening of the crucible 200 is larger than the through hole 322, it can ensure that the sublimated coating material can effectively diffuse into the through hole 322, and then fully contact the surface of the substrate 900 in the through hole 322, forming a thin film with a uniform thickness on the surface of the substrate 900, thereby improving the film-forming effect on the surface of the substrate 900 and ensuring normal film formation on the surface of the substrate 900.

[0069] In addition, referring to Figures 8 to 10 , in some embodiments of the present application, a limiting portion 323 is provided at the bottom of the receiving groove 321. The distance between the limiting portion 323 and the top of the receiving groove 321 is greater than the thickness of the substrate 900, and the distance between the limiting portion 323 and the side of the receiving groove 321 away from the groove opening is equal to the width of the substrate 900. The limiting portion 323 is used to hold the substrate 900 in place.

[0070] Based on this, since the distance between the limiting portion 323 and the top of the receiving groove 321 is greater than the thickness of the substrate 900, the substrate 900 can pass above the limiting portion 323 when placed in the receiving groove 321. Since the distance between the limiting portion 323 and the side of the receiving groove 321 away from the groove opening is equal to the width of the substrate 900, the substrate 900 can be clamped between the limiting portion 323 and the side of the receiving groove 321 away from the groove opening. Therefore, by setting the limiting portion 323 to hold the substrate 900 in place, the stability of the substrate 900 in the receiving groove 321 can be improved.

[0071] Specifically, the number of the limiting portions 323 can be multiple, and the limiting portions 323 can be protrusions. In addition to the limiting portion 323 whose distance from the side of the receiving groove 321 away from the groove opening is equal to the width of the substrate 900, another set of protrusions can be provided. Assuming that the other set of protrusions includes a first protrusion and a second protrusion, the distance between the first protrusion and the second protrusion is equal to the length of the substrate 900, and the first protrusion and the second protrusion can also hold the substrate 900 in place, further improving the stability of the substrate 900 in the receiving groove 321.

[0072] In addition, referring to Figure 2 , in some embodiments of the present application, the robotic arm 310 includes an upper arm 311, a middle arm 312, and a lower arm 313. One end of the upper arm 311 is fixed inside the evaporation box body 100, the other end of the upper arm 311 is rotatably connected to one end of the middle arm 312, and the other end of the middle arm 312 is rotatably connected to the lower arm 313. The robotic arm 310 is provided with a second driver 314 and a third driver 315. The second driver 314 is used to drive the middle arm 312 to rotate around the other end of the upper arm 311, and the third driver 315 is used to drive the lower arm 313 to rotate around the other end of the middle arm 312.

[0073] Based on this, by providing the upper arm 311, the middle arm 312, and the lower arm 313, driving the middle arm 312 to rotate around the other end of the upper arm 311 by the second driver 314, and driving the lower arm 313 to rotate around the other end of the middle arm 312 by the third driver 315, the degree of freedom of the robotic arm 310 can be increased, thereby improving the displacement accuracy of the robotic arm 310 for moving the load block 320, and ensuring that the through hole 322 of the load block 320 is located directly above the crucible 200.

[0074] It should be noted that both the second driver 314 and the third driver 315 are electrically connected to the controller 700.

[0075] Specifically, the substrate 900 can be a glass substrate or an ITO substrate. When vacuum coating is performed on the glass substrate, the optical properties can be measured; when vacuum coating is performed on the ITO substrate, the dielectric properties can be measured. The ITO substrate includes a glass substrate and an ITO (indium tin oxide) layer covering the surface of the glass substrate; vacuum coating can also be performed on other types of substrates 900, and the embodiments of the present application do not limit this here.

[0076] Next, the film formation effect of the coating device will be described in detail, and the thin film devices obtained by processing the embodiments of the present application and the thin film devices obtained by related technologies will be compared.

[0077] First, referring to Figure 11 and Figure 12 , Figure 11 is an optional SEM morphology schematic diagram of the thin film provided by the related technology, Figure 12 is an optional curve schematic diagram of the leakage current density of the thin film device provided by the related technology.

[0078] Among them, the related technology is a traditional coating device, and the traditional coating device does not provide the robotic arm 310, the first driver 330, and the load block 320 provided by the embodiments of the present application.

[0079] It can be seen that in the related technology, the film uniformity of the thin film device is poor and the leakage current density is unstable.

[0080] Then, referring to Figures 13 to 16 , Figure 13 which is an optional structural schematic diagram of the thin film device provided by the embodiment of the present application, Figure 14 which is an optional SEM morphology schematic diagram of the thin film provided by the embodiment of the present application, Figure 15 which is an optional curve schematic diagram of the leakage current density of the thin film device provided by the embodiment of the present application, Figure 16 which is an optional curve schematic diagram of the capacitance density of the thin film device provided by the embodiment of the present application.

[0081] Among them, taking the ITO substrate as an example, an aluminum electrode is arranged on the surface of the thin film formed by the coating material to form a thin film device. It can be seen that in the embodiment of the present application, the thin film of the thin film device has better uniformity, stable leakage current density and capacitance density, and better film formation effect.

[0082] The above has described the embodiments of the present application in detail with reference to the accompanying drawings. However, the present application is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present application within the scope of knowledge possessed by those of ordinary skill in the art.

Claims

1. A coating device, characterized in that: include: Evaporation box; A crucible, located in the inner cavity of the evaporation box, and used for containing coating materials; A carrying mechanism is arranged in the inner cavity of the evaporation box, the carrying mechanism comprises a mechanical arm and a carrier block, a first driver is arranged at the end of the mechanical arm, a driving end of the first driver is connected to the top surface of the carrier block, a receiving groove is arranged on one side of the carrier block, a through hole connected to the receiving groove is arranged on the bottom surface of the carrier block, the receiving groove is used to place a substrate, the mechanical arm is used to drive the carrier block to move so that the distance between the bottom of the carrier block and the opening of the crucible is less than a preset distance threshold, and the through hole is located directly above the crucible, the first driver is used to drive the carrier block to rotate so as to drive the substrate to rotate, wherein the substrate covers the through hole; A heating module is located in the inner cavity of the evaporation box, and the heating module is used to heat the crucible.

2. A coating device according to claim 1, characterized in that: It also includes a vacuum pump and a base, the evaporation box is fixed on the base, the heating module is arranged on the base, the evaporation box is provided with an air intake port, the vacuum pump is arranged outside the evaporation box, and the air intake end of the vacuum pump is connected to the air intake port.

3. A coating device according to claim 2, characterized in that: It also includes a controller, which is arranged in the base, and the robot arm, the first driver, the vacuum pump and the heating module are electrically connected to the controller respectively.

4. A coating device according to claim 3, characterized in that: A control panel and a control switch are arranged on the side of the base, and the control panel and the control switch are electrically connected to the controller respectively.

5. A coating device according to claim 3, characterized in that: A first position sensor is arranged in the receiving groove, and a second position sensor is arranged on the bottom surface of the carrier block. The first position sensor and the second position sensor are electrically connected to the controller respectively. The first position sensor is used to detect the position of the substrate, and the second position sensor is used to detect the position of the crucible.

6. A coating device according to claim 2, characterized in that: The heating module is a heating platform, and the crucible is placed at the center of the heating platform.

7. A coating device according to claim 6, characterized in that: When the substrate is located in the containing groove, the through hole is located directly below the center of the substrate, and the opening of the crucible is larger than the through hole.

8. A coating device according to claim 7, characterized in that: A limiting portion is provided at the bottom of the accommodating groove, the distance between the limiting portion and the top of the accommodating groove is greater than the thickness of the substrate, the distance between the limiting portion and a side of the accommodating groove away from the notch is equal to the width of the substrate, and the limiting portion is used to clamp the substrate.

9. The coating device according to claim 1, characterized in that: The evaporation box body is provided with a take-in and put-out opening and a box door, and the box door is arranged at the take-in and put-out opening in an openable and closable manner.

10. The coating device according to claim 1, characterized in that: The mechanical arm includes an upper arm, a middle arm and a lower arm, one end of the upper arm is fixed in the evaporator box, the other end of the upper arm is rotatably connected to one end of the middle arm, and the other end of the middle arm is rotatably connected to the lower arm. The mechanical arm is provided with a second driver and a third driver, the second driver is used to drive the middle arm to rotate around the other end of the upper arm, and the third driver is used to drive the lower arm to rotate around the other end of the middle arm.

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