Spraying device, reaction chamber and thin film deposition equipment

Abstract

The utility model discloses a spray device, reaction chamber and thin film deposition equipment, reaction chamber includes cavity, spray device and deformation detection device, spray device and deformation detection device are provided in the cavity, spray device includes spray plate, spray upper plate and at least one set of deformation compensation subassembly, spray upper plate is provided above spray plate, and the deformation detection device is provided with the deformation compensation subassembly. The deformation compensation assembly comprises a driving part and a deformation supporting part, the driving part is arranged above the upper spraying plate, the driving part penetrates through the upper spraying plate through the deformation supporting part and is connected with the edge of the lower spraying plate, and the deformation detection device detects the horizontal difference between the center and the edge of the spraying plate; the deformation supporting part is driven by the driving part to constantly pull upwards and / or abut downwards against the edge of the spraying plate, so that the edge of the spraying plate generates creep deformation, the level difference between the edge and the center of the spraying plate is compensated, a proper inter-electrode distance between the spraying plate and the heating disc is ensured in a process state, and the uniformity of film thickness is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly relates to a spraying device, a reaction chamber and a thin film deposition device. Background Art

[0002] In the field of semiconductor manufacturing, semiconductor process equipment used in the wafer processing process usually includes multiple key components, such as a heating plate, a spraying plate and a cavity, etc. These components together provide a necessary process environment for wafer processing. In this process, the wafer will be precisely placed on the heating plate and approach the spraying plate as the heating plate rises, forming a tiny gap for corresponding processing. To ensure the processing effect, the entire cavity is usually in a vacuum state. However, these key components for heating are mainly made of metal materials and work in a vacuum environment. When the metal materials are heated, they will expand, and when they are under the dual action of heating and vacuum force, they will deform. Among them, the deformation of the spraying plate is the most uncontrollable and has the greatest adverse effect on the process result of the wafer, because it directly affects the extremely small distance between the wafer and the spraying plate, thereby having a significant impact on the processing result of the wafer, resulting in uneven temperature distribution on the wafer surface and inconsistent thin film deposition thickness, and ultimately affecting the performance and yield of the device. Summary of the Utility Model

[0003] Embodiments of the utility model provide a spraying device, a reaction chamber and a thin film deposition device, aiming to solve the problem that the deformation of the existing spraying plate leads to uneven film thickness.

[0004] In a first aspect, the utility model provides a spraying device, including:

[0005] A spraying plate;

[0006] A spraying upper plate, arranged above the spraying plate;

[0007] At least one set of deformation compensation components, including a driving part and a deformation supporting part. The driving part is arranged above the spraying upper plate. One end of the deformation supporting part is connected to the driving part, and the other end of the deformation supporting part passes through the spraying upper plate and is connected to the edge of the spraying plate;

[0008] Wherein, the driving part is used to drive the deformation supporting part to continuously pull up and / or press down the edge of the spraying plate.

[0009] Further, the driving part includes a linear driving member, and the linear driving member is used to drive the deformation supporting part to move linearly in the up and down direction.

[0010] Further, the linear driving member is a cylinder, and the cylinder includes a cylinder block, a partition member, and a connecting member. The partition member is disposed inside the cylinder block to divide the cylinder block vertically into an upper layer and a lower layer. The partition member is connected to the deformation support portion through the connecting member, and the partition member is configured to move up and down inside the cylinder block under the driving of the air pressure difference between the upper layer and the lower layer.

[0011] Further, a plurality of groups of deformation compensation assemblies are provided, and the plurality of groups of deformation compensation assemblies are uniformly distributed along the edge of the spray plate.

[0012] Further, at least one through hole is formed in the upper spray plate along the edge of the spray plate. The deformation support portion includes a connecting rod, the connecting rod passes through the through hole, and one end thereof is connected to the driving portion, and the other end is connected to the edge of the spray plate.

[0013] Further, the deformation support portion further includes a first sealing member, and the first sealing member is sleeved outside the connecting rod and passes through the through hole.

[0014] Further, the first sealing member is a corrugated pipe, and the corrugated pipe is integrally welded with the connecting rod.

[0015] Further, the deformation support portion further includes a second sealing member, and the second sealing member is disposed on the side of the upper spray plate facing away from the spray plate and sleeved outside the first sealing member.

[0016] In a second aspect, the present invention further provides a reaction chamber, including a cavity, a spray device, and a deformation detection device. The spray device is the above-mentioned spray device. The spray device and the deformation detection device are disposed in the cavity. The deformation detection device is used to detect the horizontal difference between the center and the edge of the spray plate, and the deformation compensation assembly is used to compensate the horizontal difference between the edge and the center of the spray plate.

[0017] In a third aspect, the present invention further provides a thin film deposition device, including the reaction chamber of the second aspect.

[0018] The present utility model provides a spraying device, a reaction chamber and a thin film deposition apparatus. The reaction chamber includes a cavity, a spraying device and a deformation detection device. The spraying device and the deformation detection device are disposed inside the cavity. The spraying device includes a spraying plate, a spraying upper plate and at least one set of deformation compensation components. The spraying upper plate is disposed above the spraying plate. The deformation compensation component includes a driving part and a deformation supporting part. The driving part is disposed above the spraying upper plate. The driving part passes through the spraying upper plate through the deformation supporting part and is connected to the edge of the lower spraying plate. The deformation detection device detects the horizontal difference between the center and the edge of the spraying plate. When there is a horizontal difference between the edge and the center of the spraying plate, the driving part drives the deformation supporting part to maintainably pull upward and / or press downward the edge of the spraying plate, so that the edge of the spraying plate generates creep deformation to compensate for the horizontal difference between the edge and the center of the spraying plate, ensuring a proper electrode spacing between the spraying plate and the heating plate during the process state, and improving the thickness uniformity and quality of the film. Description of the Drawings

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0020] Figure 1 Shows a cross-sectional schematic view of the spraying device according to an embodiment of the present utility model;

[0021] Figure 2 Shows Figure 1 a partial enlarged view of;

[0022] Reference Numerals:

[0023] 1. Spraying upper plate; 11. Through hole; 12. Installation step; 2. Deformation compensation component; 21. Driving part; 211. Cylinder body; 211a. Upper layer; 211b. Lower layer; 212. Partition member; 213. Connecting member; 22. Deformation supporting part; 221. Link rod; 222. First seal; 223. Second seal; 3. Spraying plate; 4. Cavity; 5. Heating plate. Detailed Embodiments

[0024] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0025] The directional terms mentioned in this utility model, such as "up", "down", "front", "back", "left", "right", "inside", "outside", "side", etc., are only references to the directions in the attached drawings. Therefore, the directional terms used are for explaining and understanding this utility model, rather than for limiting this utility model. In addition, in the drawings, structures that are similar or the same are denoted by the same reference numerals.

[0026] During the film deposition process, process gas is sent into the reaction chamber through a shower plate, and a film is formed by reaction deposition on the surface of the wafer. In the process state, the reaction chamber is in a vacuum state, and the shower plate is made of a metal material. Therefore, the shower plate made of the metal material is prone to deformation under the dual action of heating and vacuum force. Due to the deformation of the shower plate, the extremely small distance between the shower plate and the wafer is affected, resulting in uneven film deposition thickness and affecting the yield of the wafer.

[0027] Therefore, the embodiment of this utility model provides a shower device, a reaction chamber and a film deposition device, which solves the problem of uneven film thickness caused by the deformation of the existing shower plate, and compensates for the deformation of the shower plate through a deformation compensation component, improving the uniformity of the film thickness.

[0028] The embodiment of this utility model solves the above problem of the deformation of the shower plate, and the specific solution idea is as follows:

[0029] A plurality of groups of deformation compensation components are arranged along the edge of the shower plate. The deformation compensation components are used to compensate for the horizontal difference between the edge of the shower plate and its center, so that each edge of the shower plate is horizontal with its center to ensure a constant extremely small distance between the shower plate and the wafer. Specifically, the deformation compensation component includes a driving part and a deformation supporting part. The driving part is arranged above the upper shower plate, and the driving part passes through the upper shower plate through the deformation supporting part and is connected to the edge of the lower shower plate. When the shower plate is deformed in the process state, if the edge of the shower plate is lower than its center, the driving part drives the deformation supporting part to continuously pull the edge of the shower plate upward, so that the edge of the shower plate generates creep deformation, that is, the edge of the shower plate is compensated to be as high as its center, ensuring that the edge of the shower plate is horizontal with its center. If the edge of the shower plate is higher than its center, the driving part drives the deformation supporting part to continuously press down the edge of the shower plate, so that the edge of the shower plate generates creep deformation, that is, the edge of the shower plate is compensated to be as high as its center, ensuring that the edge of the shower plate is horizontal with its center. In this way, the creep deformation of the edge of the shower plate is generated through the deformation compensation component, compensating for the horizontal difference between the edge of the shower plate and its center, ensuring that the edge of the shower plate is horizontal with its center, meeting the constant extremely small distance between the shower plate and the wafer, thereby improving the uniformity of the film thickness and the yield of the wafer.

[0030] To better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings of the specification and specific embodiments.

[0031] Please refer to Figure 1 - Figure 2 , an embodiment of the present utility model shows a spraying device, including: a spraying plate 3, a spraying upper plate 1 and at least one set of deformation compensation components 2. The spraying upper plate 1 is arranged above the spraying plate 3; at least one set of deformation compensation components 2 includes a driving part 21 and a deformation support part 22. The driving part 21 is arranged above the spraying upper plate 1. One end of the deformation support part 22 is connected to the driving part 21, and the other end of the deformation support part 22 passes through the spraying upper plate 1 and is connected to the edge of the spraying plate 3; wherein, the driving part 21 is used to drive the deformation support part 22 to continuously pull upward and / or press downward against the edge of the spraying plate 3.

[0032] Specifically, for the convenience of explaining the working principle of this embodiment, creep deformation is first explained. Creep deformation is a phenomenon in which a material gradually undergoes plastic deformation under long-term stress. This deformation occurs at a certain temperature and stress level and gradually accumulates over time. Creep usually occurs under high temperature and long-term loading conditions, especially in materials such as metals and alloys. Therefore, creep deformation can be defined as the slow and continuous plastic deformation of a material that occurs over time under a constant stress. This deformation is not completed instantaneously but gradually accumulates over time. The embodiment of the present utility model utilizes the principle of creep deformation to compensate for the deformation of the spray plate 3. Specifically, in order to compensate for the deformation of the spray plate 3, at least one set of deformation compensation components 2 is added in this embodiment. The number of deformation compensation components 2 can be one set or multiple sets. When the number of deformation compensation components 2 is multiple sets, from a top-down perspective, the multiple sets of deformation compensation components 2 are evenly arranged around the edge of the spray plate 3. Each set of deformation compensation components 2 includes a driving part 21 and a deformation support part 22. It should be noted that one driving part 21 can drive one deformation support part 22, or one driving part 21 can drive multiple deformation support parts 22, which is not limited herein. The driving part 21 is arranged above the upper spray plate 1, and the upper spray plate 1 is arranged above the spray plate 3. The deformation support part 22 passes through the upper spray plate 1. One end of the deformation support part 22 is connected to the driving part 21, and the other end is connected to the edge of the spray plate 3. Since when the spray plate 3 deforms, usually the edge of the spray plate 3 deforms, and the edge of the spray plate 3 is higher or lower than the center of the spray plate 3. Therefore, the deformation support part 22 is connected to the edge of the spray plate 3 and serves as a support element for compensating the deformation of the edge of the spray plate 3. And the driving part 21 serves as a power element for providing the deformation force of the deformation support part 22. The driving part 21 can sustainably provide the deformation force to the deformation support part 22. It should be noted that the term "sustainably" here means that the supply of the deformation force is persistent, long-lasting, and stable enough to cause the required creep deformation at the edge of the spray plate 3. In particular, the shapes and structures of the driving part 21 and the deformation support part 22 can be in various forms. No matter what the shape and structure are, as long as they can meet the conditions of providing a sustainably deformation force and supporting the deformation, it is not limited herein.

[0033] Exemplarily, if the edge of the spray plate 3 is higher than the center of the spray plate 3, it means that the edge of the spray plate 3 is warped upward. It is necessary to downwardly compensate the edge of the spray plate 3 and press the edge of the spray plate 3 downward to be level with its center. The driving part 21 can sustainably push the deformation support part 22 downward, so that the deformation support part 22 persistently and stably presses downward on the edge of the spray plate 3, causing the edge of the spray plate 3 to generate a downward creep deformation, compensating for the upward warping of the edge of the spray plate 3 and ensuring that the edge of the spray plate 3 is level with its center.

[0034] Exemplarily, if the edge of the spray plate 3 is lower than the center of the spray plate 3, it indicates that the edge of the spray plate 3 is sagging and deforming. It is necessary to compensate the edge of the spray plate 3 upward and pull up the edge of the spray plate 3 to be level with its center. The deformation support part 22 can be sustainably pulled up by the driving part 21, so that the deformation support part 22 pulls up the edge of the spray plate 3 persistently and stably, causing the edge of the spray plate 3 to have an upward creep deformation, compensating for the sag of the edge of the spray plate 3, and ensuring that the edge of the spray plate 3 is level with its center.

[0035] Through this embodiment, by driving the deformation support part 22 by the driving part 21 to sustainably pull up and / or press down the edge of the spray plate 3 to compensate for the deformation generated by the spray plate 3, the deformation of the spray plate 3 is compensated during the process state, ensuring a constant pole pitch between the spray plate 3 and the heating plate 5, improving the uniformity of the film deposition thickness, and improving the yield and quality of the wafer.

[0036] In one embodiment, the driving part 21 includes a linear driving member, and the linear driving member is used to drive the deformation support part 22 to move linearly in the up and down direction. Specifically, the driving part 21 includes a linear driving member. The linear driving member is installed on the upper spray plate 1, and one end of the deformation support part 22 is connected to the linear driving member. The linear driving member can drive the deformation support part 22 to move linearly upward or downward. The linear driving member can be various driving structures. For example, ball screw drive, synchronous belt drive, gear rack drive, electric cylinder drive, cam drive, and screw drive, etc., are not limited herein. The above linear driving member can sustainably provide a deformation force to the deformation support part 22.

[0037] In other embodiments, in order to maintain the stability of the deformation force, a structure for auxiliary limiting can also be provided to assist the deformation force output by the linear driving member to remain constant. For example, adding a gear and a limiting block to press down or push up the deformation support part 22 downward, thereby improving the stability of the deformation force. Another example is to add a clamping and fixing member to fix the deformation support part 22, maintaining a stable deformation force so that the deformation force will not weaken, thereby improving the stability of the deformation force. Of course, it can be understood that there can also be other structures, which are not limited herein.

[0038] Referring to Figure 2 , in one embodiment, the linear driving member is a cylinder. The cylinder includes a cylinder body 211, a partition member 212, and a connecting member 213. The partition member 212 is disposed inside the cylinder body 211 to divide the cylinder body 211 into an upper layer 211a and a lower layer 211b up and down. The partition member 212 is connected to the deformation support part 22 through the connecting member 213. The partition member 212 is configured to move up and down inside the cylinder body 211 under the driving of the air pressure difference between the upper layer 211a and the lower layer 211b.

[0039] For the specific structure of the linear drive, this embodiment proposes a preferred implementation. The linear drive is a cylinder, which includes a cylinder block 211, a partition member 212, and a connecting member 213. The partition member 212 is disposed inside the cylinder block 211 to divide the cylinder block 211 vertically into an upper layer 211a and a lower layer 211b. The partition member 212 is connected to the deformation support portion 22 through the connecting member 213. The partition member 212 is configured to move up and down inside the cylinder block 211 under the drive of the air pressure difference between the upper layer 211a and the lower layer 211b. Specifically, the cylinder is installed on the upper side of the upper plate of the spray plate 3. There is an installation step 12 formed by a protrusion on the upper side of the upper plate of the spray plate 3. The cylinder is installed on this installation step 12, and the installation step 12 supports the cylinder at a certain height, facilitating the operation and installation of the cylinder. The cylinder includes a cylinder block 211, a partition member 212, and a connecting member 213. The partition member 212 is a partition plate, which is horizontally arranged inside the cylinder block 211, thereby dividing the cylinder block 211 into two independent upper and lower inner cavities, namely the upper layer 211a and the lower layer 211b. Compressed air is respectively introduced into the upper layer 211a and the lower layer 211b. When the pressures between the upper layer 211a and the lower layer 211b are different, the air pressure balance between the upper and lower layers 211b is broken. At this time, the partition member 212 will move up or down inside the cylinder block 211. One end of the connecting member 213 is connected to the partition member 212 inside the cylinder, and the other end of the connecting member 213 is connected to the deformation support portion 22 outside the cylinder. Therefore, when the partition member 212 inside the cylinder moves, it will drive the deformation support portion 22 to move. For example, when the pressure in the upper layer 211a is less than the pressure in the lower layer 211b, the partition member 212 will move upward, driving the deformation support portion 22 to move upward through the connecting member 213. The deformation support portion 22 pulls up the edge of the spray plate 3, and the deformation support portion 22 can sustainably provide an upward pulling force to the edge of the spray plate 3, so that the edge of the spray plate 3 can produce creep deformation. Another example is that when the pressure in the upper layer 211a is greater than the pressure in the lower layer 211b, the partition member 212 will move downward, driving the deformation support portion 22 to move downward through the connecting member 213. The deformation support portion 22 pushes down the edge of the spray plate 3, and the deformation support portion 22 can sustainably provide a downward pressure to the edge of the spray plate 3, so that the edge of the spray plate 3 can produce creep deformation. In actual operation, if you want to make the partition member 212 move upward, then reversely increase the pressure inside the cylinder, that is, introduce more compressed gas into the lower layer 211b to make the air pressure in the lower layer 211b greater than the air pressure in the upper layer 211a. Under the action of the pressure difference, the partition member 212 is pushed upward; on the contrary, if you want to make the partition member 212 move downward, then positively increase the pressure inside the cylinder, that is, introduce more compressed gas into the upper layer 211a to make the air pressure in the upper layer 211a greater than the air pressure in the lower layer 211b. Under the action of the pressure difference, the partition member 212 is pushed downward.It can be seen that the operation of deformation compensation only requires simple pressurization and depressurization operations, which are simple and convenient. Moreover, the pressurization can be quantified to accurately control the deformation compensation amount, avoiding over-compensation or insufficient compensation.

[0040] In one embodiment, multiple groups of the deformation compensation assemblies 2 are provided, and the multiple groups of the deformation compensation assemblies 2 are uniformly distributed along the edge of the spray plate 3. Specifically, the number of the deformation compensation assemblies 2 can be multiple groups. In this embodiment, the number of the deformation compensation assemblies 2 is three groups. The three groups of the deformation compensation assemblies 2 are uniformly distributed along the edge of the spray plate 3, and each group of the deformation compensation assemblies 2 is arranged at an interval of 120 degrees. That is to say, there are three driving parts 21 and three deformation supporting parts 22 in total. The three driving parts 21 respectively drive the three deformation supporting parts 22, and the three deformation supporting parts 22 form three connection points on the edge of the spray plate 3, and the three connection points are distributed at an interval of 120 degrees. Of course, it can be understood that the number of the deformation compensation assemblies 2 can also be other numbers. By using multiple groups of the deformation compensation assemblies 2 to respectively perform deformation compensation on multiple different positions on the edge of the spray plate 3, the effect and reliability of the deformation compensation can be improved.

[0041] In one embodiment, at least one through hole 11 is formed in the upper spray plate 1 along the edge of the spray plate 3. The deformation supporting part 22 includes a connecting rod 221. The connecting rod 221 passes through the through hole 11, and one end thereof is connected to the driving part 21, and the other end is connected to the edge of the spray plate 3.

[0042] Specifically, the number of the through holes 11 in this embodiment is three. The three through holes 11 are formed in the upper spray plate 1. The through holes 11 penetrate the upper spray plate 1 in the up and down direction and are uniformly distributed along the edge of the spray plate 3. The number of the deformation supporting parts 22 matches the number of the through holes 11. The deformation supporting part 22 includes a rigid connecting rod 221, and the number of the connecting rods 221 is also three. The three connecting rods 221 all pass through the three through holes 11, and the connecting rods 221 can move up and down along the through holes 11. Both ends of the three connecting rods 221 are respectively connected to the connecting member 213 of the cylinder and the edge of the spray plate 3. The connecting rod 221 serves as a supporting element for supporting the deformation of the edge of the spray plate 3. When pulling up the edge of the spray plate 3, the connecting rod 221 is equivalent to a pull rod and persistently pulls up the edge of the spray plate 3; when pressing down the edge of the spray plate 3, the connecting rod 221 is equivalent to a support rod and persistently presses down the edge of the spray plate 3. By forming the through holes 11 in the upper spray plate 1 for the connecting rods 221 to pass through and connect the cylinder and the edge of the spray plate 3, the deformation force output by the cylinder can directly act on the spray plate 3, the force transmission path is short and direct, and the connecting rod 221 has a large stiffness, strong and stable supporting force. Therefore, the structure of this embodiment can provide a good deformation force required for the creep deformation of the edge of the spray plate 3, and has a simple structure and is convenient for processing.

[0043] Continue to refer toFigure 2 , in this embodiment, the deformation support portion 22 further includes a first seal 222, and the first seal 222 is sleeved outside the connecting rod 221 and penetrates through the through hole 11. Specifically, since the process gas enters the shower plate 3 through the process gas inlet of the shower upper plate 1, and then the gas is introduced into the cavity 4 through a plurality of small holes inside the shower plate 3 for reaction, it is necessary to ensure the sealing performance of the shower upper plate 1 to prevent the process gas from leaking from the through hole 11 and affecting the deposition quality. Specifically, a first seal 222 is added for sealing. The first seal 222 is sleeved outside the connecting rod 221 and penetrates through the through hole 11 together with the connecting rod 221. The first seal 222 is used to close the gap between the outer wall of the connecting rod 221 and the inner wall of the through hole 11 on the premise of not affecting the up and down movement of the connecting rod 221 in the through hole 11, thereby preventing the process gas from leaking from the through hole 11. It should be noted that the first seal 222 can be various types of sealing structures, such as lip seals, diaphragm seals, and bellows seals, etc., which are not limited herein. By sleeving the first seal 222 outside the connecting rod 221, the sealing reliability of the shower upper plate 1 is ensured, the leakage of the process gas is avoided, and the deposition quality is improved.

[0044] Specifically, the first seal 222 is a bellows, and the bellows is welded to the connecting rod 221 as a whole. A bellows is a flexible pipe fitting with a corrugated structure. When it is necessary to establish a seal between relatively moving parts, the bellows can provide dynamic sealing through its expansibility, and can expand or contract with the change of the position of the moving part, so as to maintain the sealing effect. Therefore, by using the bellows to cooperate with the connecting rod 221 for sealing, a good sealing effect can be achieved. The bellows is welded to the connecting rod 221 by welding, eliminating the connection between the bellows and the connecting rod 221 and facilitating installation.

[0045] Continue to refer to Figure 2, in one embodiment, the deformation support portion 22 further includes a second seal 223, which is disposed on the side of the upper spray plate 1 facing away from the spray plate 3 and sleeved outside the first seal 222. In order to further improve the sealing effect of the upper spray plate 1, a second seal 223 is also provided. The second seal 223 can be an O-ring. The O-ring is installed on the side of the upper spray plate 1 facing away from the spray plate 3, that is, on the upper side of the spray plate 3. Specifically, the upper end of the connecting rod 221 passes through the upper end of the through hole 11 and is connected to the connecting member 213 of the cylinder. Since the first seal 222 is sleeved and fixed outside the connecting rod 221, a part of the first seal 222 is also exposed at the upper end of the through hole 11. The O-ring is sleeved outside the part of the first seal 222 exposed at the upper end of the through hole 11, and at the same time, the O-ring is in close contact with the upper side of the spray plate 3. The O-ring seals the upper end of the through hole 11 to prevent process gas from entering through the upper end of the through hole 11 and leaking to the outside. In addition, the O-ring can be pressed by a pressing block. A pressing block can be provided to press the O-ring against the upper side of the spray plate 3 to improve the sealing performance. Among them, the pressing block can be pressed by using the joint on the first seal 222, for example, by using the flange on the bellows. By providing the second seal 223, the sealing performance of the upper spray plate 1 is further improved, and the quality of thin film deposition is improved.

[0046] Referring to Figure 1 and Figure 2 , an embodiment of the present invention also provides a reaction chamber, which includes a cavity 4, a spraying device, and a deformation detection device. The spraying device is the spraying device of the above embodiment. The spraying device and the deformation detection device are disposed in the cavity 4. The deformation detection device is used to detect the horizontal difference between the center and the edge of the spray plate 3, and the deformation compensation assembly 2 is used to compensate for the horizontal difference between the edge and the center of the spray plate 3. Specifically, the spraying device has been described in detail in the above embodiment. For the sake of simplicity of the specification, it will not be repeated here.

[0047] Specifically, the deformation detection device is installed in the cavity 4 to detect whether the spray plate 3 is deformed and the degree of its deformation. The degree of deformation can be identified by detecting the horizontal difference between the center and the edge of the spray plate 3. The deformation detection device can be various types of sensors, such as distance sensors, photoelectric sensors, etc., which are not limited herein. The deformation detection device in this embodiment adopts AGS (Auto Gapping System, automatic gap measurement system). AGS can be installed on the spray plate 3 or other fixed positions in the cavity 4. AGS is mainly used to accurately measure the distance between the wafer and the spray plate 3 to ensure an ideal pole pitch between the wafer and the spray plate 3. The principle of AGS is to use a capacitance sensor to measure the gap between the wafer and the spray plate 3. When the distance between the wafer and the spray plate 3 changes, the capacitance between them will also change accordingly. AGS can indirectly determine the distance between the wafer and the spray plate 3 by accurately measuring this capacitance change. In practical applications, the data measured by AGS is the multi-point measurement distance from the spray plate 3 to the heating plate 5 or the wafer. By comparing the edge and the center, it is judged whether the edge deformation is upward warping or downward sagging, so as to drive the connecting rod 221 to pull upward or press downward. In particular, there is a corresponding relationship between the horizontal difference of the edge of the spray plate 3 and the air pressure increment in the cylinder. By pre-measuring the corresponding relationship between the two, after detecting the specific horizontal difference value of the edge of the spray plate 3, the air pressure increment required to supplement gas into the cylinder is obtained through this corresponding relationship, and the cylinder is pressurized according to the obtained air pressure increment, so that the deformation support part 22 obtains a corresponding deformation force, so as to reasonably control the creep deformation of the edge of the spray plate 3, ensure the horizontality of the edge of the spray plate 3 and its center, avoid over-compensation or under-compensation, and realize the quantitative control of deformation compensation.

[0048] Through this embodiment, the deformation detection device is used to detect the horizontal difference between the center and the edge of the spray plate 3 to determine whether it is deformed upward or downward, and then the deformation compensation assembly 2 is used to compensate the edge of the spray plate 3 upward or downward to ensure the horizontality of the edge of the spray plate 3 and its center and improve the uniformity of the film thickness.

[0049] The embodiment of the present utility model also provides a thin film deposition device, including the reaction chamber of the above embodiment. Specifically, the reaction chamber has been described in detail in the above embodiment. For the sake of simplicity of the specification, it will not be repeated here.

[0050] Through this embodiment, the thin film deposition device adopting the reaction chamber of this embodiment can compensate for the deformation of the spray plate 3 during the process state, ensure the constant pole pitch between the spray plate 3 and the wafer, ensure the uniformity of the thin film deposition thickness, improve the yield of the wafer, and improve the product quality of the device.

[0051] The above are only specific embodiments of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.

Claims

1. A spray device, characterized in that: include: Sprinkler panels; A spray upper plate, arranged above the spray plate; At least one set of deformation compensation components, including a driving part and a deformation support part, wherein the driving part is arranged above the spray upper plate, one end of the deformation support part is connected to the driving part, and the other end of the deformation support part passes through the spray upper plate and is connected to the edge of the spray plate; Wherein, the driving part is used to drive the deformation support part to sustainably pull upwards and / or press downwards the edge of the spray plate.

2. The spray device according to claim 1, characterized in that: The driving part includes a linear driving member, and the linear driving member is used to drive the deformation support part to move linearly along the up and down directions.

3. The spray device according to claim 2, characterized in that: The linear drive member is a cylinder, which includes a cylinder body, a partition and a connecting member. The partition is arranged inside the cylinder body to separate the cylinder body into an upper layer and a lower layer. The partition is connected to the deformation support part through the connecting member. The partition is configured to move up and down inside the cylinder body driven by the air pressure difference between the upper layer and the lower layer.

4. The spray device according to claim 1, characterized in that: The deformation compensation components are provided in multiple groups, and the multiple groups of deformation compensation components are evenly distributed along the edge of the shower plate.

5. The spray device according to any one of claims 1 to 4, characterized in that: At least one through hole is opened on the spray upper plate along the edge of the spray plate, and the deformation support part includes a connecting rod, which passes through the through hole and has one end connected to the driving part and the other end connected to the edge of the spray plate.

6. The spray device according to claim 5, characterized in that: The deformation support portion further includes a first sealing member, which is sleeved on the outer side of the connecting rod and penetrates the through hole.

7. The spray device according to claim 6, characterized in that: The first sealing member is a bellows, and the bellows is welded to the connecting rod as a whole.

8. The spray device according to claim 6, characterized in that: The deformation support portion further includes a second sealing member, which is arranged on a side of the spray upper plate facing away from the spray plate and is sleeved on an outer side of the first sealing member.

9. A reaction chamber, characterized in that: It includes a cavity, a spray device and a deformation detection device, wherein the spray device is the spray device according to any one of claims 1 to 8, the spray device and the deformation detection device are arranged in the cavity, the deformation detection device is used to detect the horizontal difference between the center and the edge of the spray plate, and the deformation compensation component is used to compensate for the horizontal difference between the edge and the center of the spray plate.

10. A thin film deposition device, characterized in that: Comprising the reaction chamber as claimed in claim 9.

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