Furnace door structure and vacuum furnace

Abstract

The utility model relates to the technical field of vacuum furnaces, and particularly discloses a furnace door structure and a vacuum furnace, the furnace door structure comprises a furnace door body, a rotating assembly, a supporting assembly and a pressing assembly, one end of the rotating assembly is connected with a furnace body, and the other end of the rotating assembly is connected with the furnace door body. The supporting assembly is arranged below the furnace door body, the supporting face of the supporting assembly abuts against the furnace door body, and when the furnace door body rotates around the rotating axis, the furnace door body moves on the supporting face. The pressing assembly is arranged on the furnace body and located on the peripheral side of the opening. According to the furnace door structure, the supporting assembly can abut against the furnace door body through the supporting face to bear the weight of the furnace door body no matter in the opening process of the furnace door body or when the furnace door body is static, meanwhile, when the opening of the furnace door body is closed (namely, the furnace door body is closed), the pressing assembly can press the furnace door body, and therefore the weight of the furnace door body is reduced. The sealing performance of the vacuum furnace can be improved, and stable reaction in the vacuum furnace is ensured.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum furnaces, and more specifically, to a furnace door structure and a vacuum furnace. Background Technology

[0002] The vacuum furnace uses a vacuum system to exhaust the gas in the furnace chamber to achieve a vacuum state, thereby meeting the needs of the process flow. Vacuum furnaces usually use hinged doors. However, with the continuous improvement of work efficiency requirements, the size of vacuum furnaces has become larger and heavier, resulting in the size and weight of the furnace door in the vacuum furnace. This makes it difficult for a single hinged support to support the furnace door, which can easily cause the furnace door to sag, causing deformation between the furnace body and the furnace door, making it difficult to form a good seal, and it is difficult to ensure the vacuum degree in the furnace. Contents of utility model

[0003] In view of this, the present application provides a furnace door structure and a vacuum furnace to improve the technical problem of poor sealing effect of the existing vacuum furnace.

[0004] An embodiment of the present application provides a furnace door structure, which includes a furnace door body, a rotating assembly, a supporting assembly and a pressing assembly. The furnace door body is arranged at the opening of the furnace body, one end of the rotating assembly is connected to the furnace body, and the other end is connected to the furnace door body. The furnace door body rotates around the rotation axis of the rotating assembly to close or open the opening. The supporting assembly is arranged below the furnace door body, and the supporting surface of the supporting assembly abuts against the furnace door body. When the furnace door body rotates around the rotation axis, the furnace door body moves on the supporting surface, and the extension direction of the rotation axis intersects with the supporting surface. The pressing assembly is arranged on the furnace body and is located on the peripheral side of the opening. The pressing assembly is configured to press the furnace door body when the furnace door body closes the opening.

[0005] In the above-mentioned furnace door structure, whether in the process of opening the furnace door body or when the furnace door body is stationary, the support component can support the furnace door body through the support surface to bear the weight of the furnace door body, thereby reducing the risk of deformation between the furnace door body and the furnace body due to excessive weight of the furnace door body. At the same time, when the furnace door body closes the opening (that is, the furnace door body is closed), the pressing component can press the furnace door body to further improve the sealing of the vacuum furnace. Obviously, compared with the furnace door structure of the existing vacuum furnace, the furnace door structure in the present application can press the furnace door body through the pressing component while the support component supports the furnace door body, thereby improving the sealing of the vacuum furnace, thereby ensuring the stable reaction in the vacuum furnace.

[0006] In some embodiments of the present application, the support assembly includes a support member and a support leg, the support member is connected to the furnace body, and the support member is provided with a support surface, and the support leg is installed on a side of the support member away from the support surface.

[0007] In some embodiments of the present application, the furnace door body is provided with a supporting pulley, and when the furnace door body rotates around the rotation axis, the supporting pulley rolls along the supporting surface.

[0008] In some embodiments of the present application, the support member is extended along an arc line, and the center of the support member is located on the rotation axis.

[0009] In some embodiments of the present application, the support assembly further includes a connecting member, the connecting member is detachably connected to the furnace body, and the support member is mounted on the connecting member.

[0010] In some embodiments of the present application, the clamping assembly includes a fixing seat and a clamping member, the fixing seat is installed on the furnace body, and the clamping member is installed on the fixing seat; the clamping member can move in a direction close to the opening, and at least part of the clamping member can extend out of the opening, and when the furnace door body closes the opening, at least part of the clamping member presses the side of the furnace door body.

[0011] In some embodiments of the present application, the fixing seat is provided with a guide groove, and the clamping assembly further includes a limiter, which is slidably arranged in the guide groove; the clamping member is provided with a strip through hole, and the limiter penetrates the strip through hole and is connected to the fixing seat, wherein when the clamping member slides along the guide groove, the limiter and the clamping member move relative to each other.

[0012] In some embodiments of the present application, the rotating assembly includes a first hinge, a second hinge and a rotating shaft, the first hinge is fixedly mounted on the furnace body, the second hinge is fixedly mounted on the furnace door body, the rotating shaft passes through the first hinge and the second hinge, and the central axis of the rotating shaft is the rotating axis.

[0013] In some embodiments of the present application, the distance between the end of the furnace door body away from the rotating assembly and the rotation axis is defined as H, and the distance between the support surface and the rotation axis is greater than H / 2.

[0014] An embodiment of the present application further provides a vacuum furnace, which includes a furnace body and the above-mentioned furnace door structure, the furnace body is provided with an opening, and the furnace door structure is installed at the opening of the furnace body. Brief Description of the Figures

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and should not be regarded as limiting the scope.

[0016] Figure 1 It is a schematic diagram of the structure of the vacuum furnace and the furnace door provided in one embodiment of the present application, wherein part of the structure of the furnace body is omitted;

[0017] Figure 2 For Figure 1 Local enlarged view of point A in the middle;

[0018] Figure 3 Another structural schematic diagram of the cooperation between the vacuum furnace and the furnace door structure provided by an embodiment of the present application, in which part of the structure of the furnace body is omitted;

[0019] Figure 4 For Figure 3 The partial enlarged view at position B in

[0020] Figure 5 The front view of the cooperation between the vacuum furnace and the furnace door structure provided by an embodiment of the present application, in which part of the structure of the furnace body is omitted;

[0021] Figure 6 For Figure 1 The structural schematic diagram in the state where the pressing component does not press the furnace door in

[0022] Figure 7 For Figure 1 The structural schematic diagram in the state where the pressing component presses the furnace door in

[0023] Main element symbol description:

[0024] 1. Vacuum furnace;

[0025] 10. Furnace door structure; 11. Furnace door body; 111. Support pulley; 12. Rotating component; 121. First hinge; 122. Second hinge; 123. Rotating shaft; 13. Support component; 131. Support; 1311. Support surface; 132. Support foot; 133. Connecting piece; 14. Pressing component; 141. Fixed seat; 1411. Guide groove; 142. Pressing piece; 1421. Strip-shaped through hole; 143. Limiting piece;

[0026] 20. Furnace body; 21. Opening. Detailed implementation manners

[0027] Next, the technical solutions in the embodiments of the present application will be described with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art belonging to the field of the present application. The terms used in the description of the present application in this specification are only for the purpose of describing specific implementation manners, and are not intended to limit the present application.

[0029] Embodiments of the present application provide a furnace door structure, which includes a furnace door body, a rotating assembly, a supporting assembly, and a pressing assembly. The furnace door body is disposed at an opening of the furnace body. One end of the rotating assembly is connected to the furnace body, and the other end is connected to the furnace door body. The furnace door body rotates around the rotation axis of the rotating assembly to close or open the opening. The supporting assembly is disposed below the furnace door body, and the supporting surface of the supporting assembly abuts against the furnace door body. When the furnace door body rotates around the rotation axis, the furnace door body moves on the supporting surface, and the extending direction of the rotation axis intersects with the supporting surface. The pressing assembly is disposed on the furnace body and is located on the peripheral side of the opening. The pressing assembly is configured to press the furnace door body when the furnace door body closes the opening.

[0030] In the above furnace door structure, whether during the opening process of the furnace door body or when the furnace door body is stationary, the supporting assembly can abut against the furnace door body through the supporting surface to bear the weight of the furnace door body, reducing the risk of deformation between the furnace door body and the furnace body due to the excessive weight of the furnace door body. At the same time, when the furnace door body closes the opening (i.e., the furnace door is closed), the pressing assembly can press the furnace door body to further improve the sealing performance of the vacuum furnace. Obviously, compared with the furnace door structure of the existing vacuum furnace, the furnace door structure in the present application can, while the supporting assembly abuts against the furnace door body, press the furnace door body through the pressing assembly to improve the sealing performance of the vacuum furnace, thereby ensuring the stable progress of the reaction in the vacuum furnace.

[0031] The following will describe in detail some embodiments of the present application with reference to the accompanying drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0032] An embodiment of the present application provides a vacuum furnace 1, as Figure 1 shown. The vacuum furnace 1 includes a furnace body 20 and a furnace door structure 10. The furnace body 20 is provided with an opening 21, and the opening 21 is configured to allow a user to take or place a target object (not shown in the figure). The target object can be a workpiece such as a wafer or a silicon wafer that needs to be processed in the vacuum furnace 1, and the present application does not limit this. The user can be a person or a robot or a robotic arm, etc.

[0033] Among them, the furnace door structure 10 is installed at the opening 21 of the furnace body 20 to close or open the opening 21. It can be understood that when it is necessary to take the target object in the furnace body 20 or place the target object in the furnace body 20, the user only needs to open the furnace door structure 10, that is, open the opening 21. After the target object is placed or taken, the technician only needs to close the furnace door structure 10, that is, close the opening 21. Thus, it is not only convenient to take the material but also helps to ensure the stable progress of the reaction in the furnace body 20.

[0034] In some embodiments, as Figure 1 、 Figure 2 and Figure 3As shown, the furnace door structure 10 includes a furnace door body 11, a rotating assembly 12, a supporting assembly 13, and a pressing assembly 14. The furnace door body 11 is disposed at an opening 21 of the furnace body 20. One end of the rotating assembly 12 is connected to the furnace body 20, and the other end is connected to the furnace door body 11. The furnace door body 11 is configured to rotate about the rotation axis of the rotating assembly 12 to close or open the opening 21.

[0035] In some embodiments, the rotating assembly 12 includes a first hinge 121, a second hinge 122, and a rotating shaft 123. Defining the central axis of the rotating shaft 123 as the rotation axis, the first hinge 121 is fixedly installed on the furnace body 20, the second hinge 122 is fixedly installed on the furnace door body 11, and the rotating shaft 123 passes through the first hinge 121 and the second hinge 122 to achieve the relative rotation of the furnace door body 11 and the furnace body 20.

[0036] It can be understood that when it is necessary to take or place an object, the user applies a force to the furnace door body 11, and the furnace door body 11 rotates away from the furnace body 20 about the rotation axis to open the opening 21; after the object is placed or taken, the user applies a force in the opposite direction, and the furnace door body 11 rotates towards the furnace body 20 about the rotation axis to close the opening 21.

[0037] It should be noted that by adopting the hinge method, the furnace door structure 10 can facilitate the maintenance or replacement of the furnace door body 11 while realizing the rotation of the furnace door body 11 relative to the furnace body 20. That is to say, the user only needs to disassemble the rotating shaft 123 from the first hinge 121 and the second hinge 122 to separate the furnace body 20 from the furnace door body 11.

[0038] In other embodiments, other rotational connection structures can also be adopted, which are not limited in this application, and those skilled in the art can choose according to the actual situation.

[0039] In some embodiments, as Figure 1 、 Figure 3 and Figure 5 shown, defining the extending direction of the rotation axis intersects with the supporting surface 1311, the supporting assembly 13 is provided with a supporting surface 1311, and the supporting surface 1311 abuts against the furnace door body 11. It can be understood that during the process of rotating the furnace door body 11, the furnace door body 11 always abuts against the supporting surface 1311 of the supporting assembly 13. The supporting assembly 13 can bear the weight of the furnace door body 11, effectively reducing the force on the hinge joint (specifically the rotating assembly 12) between the furnace door body 11 and the furnace body 20, thereby reducing the risk of deformation at the hinge joint between the furnace door body 11 and the furnace body 20, contributing to ensuring the sealing performance of the vacuum furnace 1 and guaranteeing the stable progress of the reaction inside the vacuum furnace 1.

[0040] It should be noted that when the furnace door body 11 does not rotate (that is, the furnace door body 11 is in a stationary state), the support surface 1311 in the support assembly 13 is always against the furnace door body 11, bearing the weight of the furnace door body 11. In other words, whether the furnace door body 11 is opened or stationary, the support assembly 13 can bear the weight of the furnace door body 11 through the support surface 1311 to support the furnace door body 11, thereby reducing the risk of deformation between the furnace door body 11 and the furnace body 20 due to the excessive weight of the furnace door body 11.

[0041] In some embodiments, the pressing assembly 14 is disposed on the furnace body 20 and is located on the peripheral side of the opening 21. The pressing assembly 14 is configured to hold the furnace door body 11 when the furnace door body 11 closes the opening 21. It can be understood that when the furnace door body 11 closes the opening 21, the pressing assembly 14 applies a force in a direction close to the furnace body 20 to hold the furnace door body 11, thereby helping to further improve the sealing of the vacuum furnace 1.

[0042] Compared with the existing vacuum furnace door structure, the furnace door structure 10 can press the furnace door body 11 through the pressing component 14 while the support component 13 abuts against the furnace door body 11, so as to improve the sealing of the vacuum furnace 1, thereby ensuring the stable reaction in the vacuum furnace 1.

[0043] In some embodiments, such as Figure 3 and Figure 5 As shown, the support assembly 13 includes a support member 131 and a support leg 132. The support member 131 is connected to the furnace body 20, and the support member 131 is provided with a support surface 1311. The support leg 132 is installed on the side of the support member 131 away from the support surface 1311. Specifically, one end of the support leg 132 is connected to the side of the support member 131 away from the support surface 1311, and the other end is against the support platform (not shown), and the support platform can be a suitable platform such as the ground, a workbench, etc.

[0044] During the process of rotating the furnace door body 11, or when the furnace door body 11 does not rotate, the support foot 132 abuts against the support member 131, and the support surface 1311 of the support member 131 abuts against the furnace door body 11 to bear the weight of the furnace door body 11. Thus, the force on the hinge of the furnace door body 11 and the furnace body 20 can be reduced, thereby reducing the risk of deformation at the hinge of the furnace door body 11 and the furnace body 20.

[0045] ​​In some embodiments, the support feet 132 are telescopic rods to improve the flexibility and versatility of the furnace door structure 10. Specifically, the user can adjust the height of the support feet 132 according to the height of the furnace door body 11 from the support platform. For example, when the height of the furnace door body 11 from the support platform is relatively low, the user can retract the support feet 132 to ensure that the support feet 132 stably support the support member 131; when the height of the furnace door body 11 from the support platform is relatively large, the user can extend the support feet 132 to ensure that the support feet 132 stably support the support member 131.

[0046] In other embodiments, the support feet 132 can also be rods with an integral structure to improve the strength of the structure of the support feet 132. This application does not make any limitations in this regard, and those skilled in the art can choose according to the actual situation.

[0047] In some embodiments, such as Figure 2 , Figure 4 and Figure 5 as shown, the furnace door body 11 is provided with support pulleys 111. When the furnace door body 11 rotates around the rotation axis, the support pulleys 111 roll along the support surface 1311 to facilitate the user to open or close the furnace door body 11. It can be understood that during the process of opening or closing the furnace door body 11, the user applies a force to the furnace door body 11, and the furnace door body 11 rotates around the rotation axis. At this time, the support pulleys 111 roll along the support plane.

[0048] By providing the support pulleys 111, rolling friction between the furnace door body 11 and the support surface 1311 can be achieved. Compared with the sliding friction between the furnace door body 11 and the support surface 1311, the rolling friction is more labor-saving and more conducive to the user to open or close the furnace door body 11.

[0049] In some embodiments, the support member 131 further includes a support slide rail (not shown in the figure), and the support slide rail is arranged on the support surface 1311. When the furnace door body 11 rotates around the rotation axis, the support pulleys 111 roll along the support slide rail. The support slide rail can play a guiding role for the support pulleys 111 to reduce the risk of pulley deviation, thereby improving the stability of the support component 13 in supporting the furnace door body 11.

[0050] In some embodiments, such as Figure 1 and Figure 2 as shown, the support member 131 extends along an arc line, and the center of the support member 131 is on the rotation axis. In other words, the support member 131 is configured to extend along the movement track of the rotation of the furnace door body 11.

[0051] In this way, it can not only ensure that the support member 131 always abuts against the furnace door body 11 during the rotation of the furnace door body 11 to bear the weight of the furnace door body 11, reduce the stress at the hinge joint between the furnace door body 11 and the furnace body 20, thereby reducing the risk of deformation at the hinge joint between the furnace door body 11 and the furnace body 20, but also simplify the structure of the support assembly 13 and reduce the manufacturing cost of the furnace door structure 10.

[0052] In some embodiments, as Figure 4 shown, the support assembly 13 further includes a connecting member 133. The connecting member 133 is detachably connected to the furnace body 20, and the support member 131 is installed on the connecting member 133. Through the arrangement of the connecting member 133, an indirect connection between the support member 131 and the furnace body 20 can be achieved, thereby reducing the risk of damage to the support member 131 caused by repeated disassembly of the support member 131 and extending the service life of the support member 131. Specifically, when it is necessary to replace or repair the support member 131, the technician only needs to detach the connecting member 133 from the furnace body 20 (or install it on the furnace body 20), without repeatedly disassembling the support member 131.

[0053] In some embodiments, as Figure 3 、 Figure 5 、 Figure 6 and Figure 7 shown, the pressing assembly 14 includes a fixed seat 141 and a pressing member 142. The fixed seat 141 is installed on the furnace body 20, and the pressing member 142 is installed on the fixed seat 141. When observing in a direction perpendicular to the opening 21, the pressing member 142 is configured to be able to move to at least partially overlap with the furnace door body 11 to press the furnace door body 11. In other words, the pressing member 142 can move in a direction close to the opening 21, and at least part of the pressing member 142 can extend out of the opening 21. When the furnace door body 11 closes the opening 21, at least part of the pressing member 142 presses the side surface of the furnace door body 11.

[0054] It can be understood that after the furnace door body 11 closes the opening 21, the pressing member 142 first moves in a direction close to the opening 21 until at least part of the pressing member 142 overlaps with the furnace door body 11, that is, at least part of the pressing member 142 extends out of the opening 21. Subsequently, along a direction perpendicular to the opening 21, the pressing member 142 applies a pressure in a direction close to the furnace door body 11 to press the side surface of the furnace door body 11. Through the arrangement of the fixed seat 141 and the pressing member 142, the sealing performance of the vacuum furnace 1 in the closed state can be further improved, thereby ensuring the stable progress of the reaction in the vacuum furnace 1.

[0055] In some embodiments, as Figure 5 、 Figure 6 and Figure 7As shown, the fixing base 141 is provided with a guiding groove 1411, and the pressing component 14, the limiting member 143 and the pressing member 142 are slidably arranged in the guiding groove 1411. It can be understood that when the furnace door body 11 closes the opening 21, the pressing member 142 moves along the guiding groove 1411 towards the direction close to the opening 21 until at least part of the pressing member 142 overlaps with the furnace door body 11 to press the side surface of the furnace door body 11.

[0056] Through the arrangement of the guiding groove 1411, the guiding of the pressing member 142 can be realized, avoiding the problem that the pressing member 142 deviates during movement, resulting in poor pressing effect of the pressing member 142 on the furnace door body 11. Limiting member 143, guiding groove 1411, opening 21, pressing member 142, guiding groove 1411, opening 21, pressing member 142, guiding groove 1411, pressing member 142, pressing member 142, pressing member 142

[0057] In some embodiments, the fixing base 141 is provided with a rotating part (not shown in the figure), and the pressing member 142 is rotatably installed on the fixing base 141 through the rotating part. Among them, the pressing member 142 can rotate towards the direction close to the opening 21 to press the side surface of the furnace door body 11, or rotate towards the direction far from the opening 21 to release the pressing on the furnace door body 11.

[0058] In some embodiments, the pressing component 14 further includes a limiting member 143, the pressing member 142 is provided with a strip-shaped through hole 1421, and the limiting member 143 passes through the strip-shaped through hole 1421 and is connected to the fixing base 141. Among them, when the pressing member 142 slides along the guiding groove 1411, the limiting member 143 moves relative to the pressing member 142. When the pressing member 142 moves to overlap with the furnace door body 11, the limiting member 143 abuts against the hole wall of the strip-shaped through hole 1421 to restrict the position of the pressing member 142, thereby preventing the pressing member 142 from moving excessively and ensuring the stability and safety of the furnace door structure 10.

[0059] In some embodiments, the limiting member 143 is a threaded member (specifically, screws, bolts, etc.). The threaded member passes through the strip-shaped through hole 1421 of the pressing member 142 and is threadedly connected to the fixing base 141. The user can adjust the pressing force of the pressing member 142 on the furnace door body 11 by tightening or loosening the threaded member to ensure that the vacuum furnace 1 always remains sealed. In other embodiments, the limiting member 143 can also be other structures, and the present application does not limit this.

[0060] Exemplarily, when the furnace door body 11 closes the opening 21, the pressing member 142 is in a relaxed state and the threaded member is not tightened. The user moves the pressing member 142 along the guiding groove 1411 towards the direction close to the opening 21 until the limiting member 143 abuts against one end hole wall of the strip-shaped through hole 1421. At this time, at least part of the pressing member 142 overlaps with the furnace door body 11.

[0061] Then, the user tightens the screw to make the pressing member 142 apply pressure in the direction close to the furnace door body 11 to hold the furnace door body 11. When the furnace door body 11 needs to be opened, the user only needs to loosen the screw and move the pressing member 142 along the guide groove 1411 away from the opening 21 until the stop member 143 abuts against the other end of the strip through hole 1421.

[0062] In some embodiments, such as Figure 5 As shown, the distance between the end of the furnace door body 11 away from the rotating assembly 12 and the rotation axis is defined as H, and the distance between the support surface 1311 and the rotation axis is greater than H / , so as to ensure that the support assembly 13 can bear most of the weight of the furnace door body 11, improve the support effect of the support assembly 13 on the furnace door body 11, and further reduce the risk of the furnace door body 11 sagging.

[0063] In addition, those skilled in the art should recognize that the above implementation modes are only used to illustrate the present application, and are not used as limitations on the present application. As long as they are within the spirit of the present application, appropriate changes and modifications to the above embodiments are within the scope of the present application.

Claims

1. A furnace door structure, characterized in that: include: The furnace door body is arranged at the opening of the furnace body; A rotating assembly, one end of which is connected to the furnace body, and the other end of which is connected to the furnace door body, wherein the furnace door body rotates around the rotating axis of the rotating assembly to close or open the opening; A support assembly is disposed below the furnace door body, wherein a support surface of the support assembly abuts against the furnace door body, and when the furnace door body rotates around the rotation axis, the furnace door body moves on the support surface, wherein an extension direction of the rotation axis intersects with the support surface; A pressing assembly is arranged on the furnace body and located at the peripheral side of the opening. The pressing assembly is configured to press the furnace door body when the furnace door body closes the opening.

2. The furnace door structure according to claim 1, characterized in that: The support assembly comprises a support member and a support leg, wherein the support member is connected to the furnace body and is provided with the support surface, and the support leg is installed on a side of the support member away from the support surface.

3. The furnace door structure according to claim 2, characterized in that: The furnace door body is provided with a supporting pulley, and when the furnace door body rotates around the rotation axis, the supporting pulley rolls along the supporting surface.

4. The furnace door structure according to claim 3, characterized in that: The support member is extended along an arc line, and the center of the support member is located on the rotation axis.

5. The furnace door structure according to claim 2, characterized in that: The support assembly further comprises a connecting member, the connecting member is detachably connected to the furnace body, and the support member is mounted on the connecting member.

6. The furnace door structure according to any one of claims 1 to 5, characterized in that: The clamping assembly includes a fixing seat and a clamping member, wherein the fixing seat is mounted on the furnace body, and the clamping member is mounted on the fixing seat; the clamping member can move in a direction approaching the opening, and at least a portion of the clamping member can extend out of the opening, and when the furnace door body closes the opening, at least a portion of the clamping member presses the side of the furnace door body.

7. The furnace door structure according to claim 6, characterized in that: The fixing seat is provided with a guide groove, and the clamping assembly also includes a limiting piece, and the clamping piece is slidably arranged in the guide groove; the clamping piece is provided with a strip through hole, and the limiting piece passes through the strip through hole and is connected to the fixing seat, wherein when the clamping piece slides along the guide groove, the limiting piece and the clamping piece move relative to each other.

8. The furnace door structure according to claim 6, characterized in that: The rotating assembly includes a first hinge, a second hinge and a rotating shaft. The first hinge is fixedly installed on the furnace body, the second hinge is fixedly installed on the furnace door body, the rotating shaft passes through the first hinge and the second hinge, and the central axis of the rotating shaft is the rotating axis.

9. The furnace door structure according to claim 1, characterized in that: The distance between the end of the furnace door body away from the rotating assembly and the rotating axis is defined as H, and the distance between the supporting surface and the rotating axis is greater than H / 2.

10. A vacuum furnace, characterized in that: The invention comprises a furnace body and a furnace door structure according to any one of claims 1 to 9, wherein the furnace body is provided with an opening, and the furnace door structure is installed at the opening of the furnace body.

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