Loading and unloading equipment for reactive test of IGBT module

Abstract

The utility model relates to the technical field of semiconductor production equipment, and discloses IGBT module reactive power test loading and unloading equipment, which comprises an assembly line, an industrial mechanical arm and a defective product conveying mechanism, the industrial mechanical arm and the defective product conveying mechanism are respectively arranged on two sides of the assembly line, and the defective product conveying mechanism comprises a belt conveyor, a bearing table and a linear sliding table. The multiple belt conveyors are distributed in the vertical direction, the bearing table ascends and descends through a linear sliding table, a U-shaped material receiving arm is installed on the bearing table in a sliding mode, and an air cylinder is further fixed to the bearing table and used for driving the material receiving arm to move. The beneficial effects of the utility model are that after the tray with the IGBT module is on line, the industrial mechanical arm grabs the IGBT module for testing, the tested defective products are placed on the material receiving arm through the industrial mechanical arm, and the material receiving arm places the defective products on different belt conveyors according to the specific defective items of the defective products and then sends the defective products to corresponding maintenance stations for maintenance. The working efficiency is improved, and the labor cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production equipment, in particular to IGBT module reactive power testing loading and unloading equipment. Background Art

[0002] IGBT is a composite fully controlled voltage-driven power semiconductor device composed of BJT (bipolar junction transistor) and MOS (insulated gate field effect transistor). It has the advantages of high input impedance of MOSFET and low on-state voltage drop of GTR. It is used in electronic circuits. When using IGBT, it is usually tested. Therefore, an IGBT test device is particularly needed.

[0003] The Chinese utility model patent (authorization announcement number: CN218727779U name: an IGBT test device) includes a device body. When in use, the intelligent touch digital display screen in front of the device body can perform intelligent control to detect the test situation. The IGBT chip is placed on the placement board. The silicone clamp clamps the IGBT chip through the slide groove and places it in the center for easy detection. The telescopic column rises and falls from the embedded barrel, and the height is adjusted to facilitate the ultrasonic scanner to scan and detect. The thickness, size area and pore texture of the chip are tested. Then the IGBT chip is placed on the IGBT chip placement layer for dynamic characteristics testing. The pressure device performs pressure testing on the chip through the pressure fixture. The pressure equalization device ensures pressure balance to ensure test accuracy. Then the heating plate heats the chip for thermal energy testing. The epoxy resin board controls the flow of heat to reduce the error of the chip junction temperature. If a fault occurs during the test, the warning light and buzzer sound an alarm, thereby completing the multi-function test and the role of intelligent early warning. However, when testing and loading, manual loading is relied on, which is inefficient, labor-intensive, and has a bad operating environment, which is not conducive to long-term manual operation. Utility Model Content

[0004] The utility model aims to provide IGBT module reactive power test loading and unloading equipment to overcome the shortcomings of the prior art.

[0005] The purpose of the utility model is achieved through the following technical solutions: IGBT module reactive power test loading and unloading equipment, including an assembly line, an industrial robot arm and a defective product conveying mechanism, the industrial robot arm and the defective product conveying mechanism are respectively installed on both sides of the assembly line, the assembly line is used to convey pallets, the IGBT module is placed in the pallet, the industrial robot arm is used to grab the IGBT module to the test equipment, the defective product conveying mechanism includes a belt conveyor, a bearing platform and a linear slide, the belt conveyor and the assembly line have the same conveying direction, the belt conveyor is several and distributed in the vertical direction, the bearing platform is lifted and lowered by the linear slide, the linear slide is fixed on the feeding end of the belt conveyor, a U-shaped receiving arm is slidably installed on the bearing platform, the receiving arm slides along the conveying direction of the assembly line, a cylinder is also fixed on the bearing platform, and the cylinder is used to drive the receiving arm to move.

[0006] Preferably, the assembly line is a belt conveyor, which consists of a feeding section, a stacking section and a discharging section. Blocking cylinders are installed between the feeding section and the stacking section, between the stacking section and the discharging section, and at the end of the discharging section. A stacking frame is fixed on the frame of the stacking section, and a slidable A top plate is installed in the stacking frame. The A top plate is used to carry the empty pallets. An A oil cylinder is fixed on the frame of the stacking section below the stacking frame, and the empty pallets on the A top plate are pushed into the stacking frame by the A oil cylinder. A limiting cylinder is also fixed on the frame of the stacking section, and a limiting plate is fixed on the piston rod of the limiting cylinder. The limiting plate is used to be stuck under the pallet that slides into the stacking frame.

[0007] Preferably, the industrial robot arm is slidably mounted on one side of the assembly line through a rodless cylinder, and the industrial robot arm slides along the conveying direction of the assembly line.

[0008] Preferably, the B cylinder is fixed on the frame of the feeding section, and a B positioning plate is fixed on the piston rod of the B cylinder, and the B positioning plate is used to position the tray at the end of the feeding section.

[0009] Preferably, a C oil cylinder is fixed on the frame of the discharging section, a C positioning plate is fixed on the piston rod of the C oil cylinder, and the C positioning plate is used to position the tray at the end of the discharging section.

[0010] Compared with the prior art, the beneficial effects of the utility model are:

[0011] After the pallet with IGBT modules enters the assembly line, the IGBT modules are grabbed by an industrial robotic arm for testing. The defective products after testing are placed on the receiving arm by the industrial robotic arm. The receiving arm then places them on different belt conveyors according to the specific defective items of the defective products and sends them to the corresponding maintenance station for repair, which improves work efficiency and reduces labor costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 The structure of the utility model is shown in FIG. Figure 1 ;

[0013] Figure 2 The structure of the utility model is shown in FIG. Figure 2 ;

[0014] Figure 3 This is a schematic diagram of the structure of the defective product conveying mechanism;

[0015] Figure 4 It is a schematic diagram of the installation structure of the stacking frame;

[0016] In the figure, 1-industrial robot arm, 2-tray, 3-belt conveyor, 4-carrying platform, 5-linear slide, 6-receiving arm, 7-cylinder, 8-feeding section, 9-stacking section, 10-discharging section, 11-blocking cylinder, 12-stacking frame, 13-A top plate, 14-limiting cylinder, 15-limiting plate, 16-rodless cylinder. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical scheme and advantages of the embodiments of the present invention clearer, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. The components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0018] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present invention.

[0019] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features thereof may be combined with each other.

[0020] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0021] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the utility model product is usually placed when in use, or the positions or positional relationships commonly understood by those skilled in the art, which are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0022] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] like Figure 1-3 As shown, the IGBT module reactive power test loading and unloading equipment includes an assembly line, an industrial robot arm 1 and a defective product conveying mechanism. The industrial robot arm 1 and the defective product conveying mechanism are respectively installed on both sides of the assembly line. The assembly line is used to convey a tray 2. The IGBT module is placed in the tray 2. The industrial robot arm 1 is used to grab the IGBT module to the test equipment. The defective product conveying mechanism includes a belt conveyor 3, a bearing platform 4 and a linear slide 5. The belt conveyor 3 has the same conveying direction as the assembly line. The belt conveyor 3 is multiple and distributed in the vertical direction. The bearing platform 4 is lifted and lowered by the linear slide 5. The linear slide 5 is fixed Fixed at the feeding end of the belt conveyor 3, a U-shaped receiving arm 6 is slidably installed on the supporting platform 4, and the receiving arm 6 slides along the conveying direction of the assembly line. A cylinder 7 is also fixed on the supporting platform 4, and the cylinder 7 is used to drive the receiving arm 6 to move. After the tray 2 with the IGBT module enters the assembly line, the IGBT module is grabbed by the industrial robot arm 1 for testing. The defective products after the test are placed on the receiving arm 6 by the industrial robot arm 1. The receiving arm 6 is then placed on different belt conveyors 3 according to the specific defective items of the defective products, and then sent to the corresponding maintenance station for maintenance, which improves work efficiency and reduces labor costs.

[0024] In this embodiment, if Figure 1 , 2 As shown in , 4, the assembly line is a belt conveyor 3, which consists of a feeding section 8, a stacking section 9 and a discharging section 10. Blocking cylinders 11 are installed between the feeding section 8 and the stacking section 9, between the stacking section 9 and the discharging section 10, and at the end of the discharging section 10. A stacking frame 12 is fixed on the frame of the stacking section 9. The stacking frame 12 consists of four angle steels, which are distributed in a square and fixed on the frame. The inner corners of the angle steels face the inner side of the square. A slidable A top plate 13 is installed in the stacking frame 12. The A top plate 13 is used to carry empty pallets 2. An A oil cylinder is fixed on the frame of the stacking section 9 below the stacking frame 12. The empty pallet 2 on the A top plate 13 is pushed into the stacking frame 12 by the A oil cylinder. A limit cylinder is also fixed on the frame of the stacking section 9. 14. A limiting plate 15 is fixed on the piston rod of the limiting cylinder 14. The limiting plate 15 is used to be stuck under the pallet 2 that slides into the stacking frame 12. After the IGBT modules that fail the test on the assembly line are transferred to the defective product conveying mechanism, the pallets 2 will be empty and extra. In order to avoid affecting the operation of the subsequent stage, the excess pallets 2 are stacked. During stacking, the empty pallets 2 are blocked under the stacking frame 12 by the blocking cylinder 11 at the end of the stacking section 9, and then pushed into the stacking frame 12 by the A cylinder. When the empty pallet 2 at the bottom of the stacking frame 12 rises to the set position, the limiting cylinder 14 starts to insert and clamp the limiting plate 15 at the bottom of the empty pallet 2 at the bottom, thereby stacking the empty pallets 2 to avoid affecting the operation of the subsequent stage.

[0025] In this embodiment, if Figure 1 and 2 As shown, the industrial robot arm 1 is slidably installed on one side of the assembly line through a rodless cylinder 16. The industrial robot arm 1 slides along the conveying direction of the assembly line. After the IGBT module that has passed the test is grabbed by the industrial robot arm 1, it is moved to the discharge section 10 and then placed in the tray 2, and then transported to the next workstation for operation.

[0026] In this embodiment, if Figure 1 , 2 As shown in Figure 4, a B cylinder is fixed on the frame of the feed section 8, and a B positioning plate is fixed on the piston rod of the B cylinder. The B positioning plate is used to position the pallet 2 at the end of the feed section 8. When the pallet 2 on the assembly line is transported to the end of the feed section 8, it is stopped by the blocking cylinder 11, and then lifted to separate from the assembly line by the action of the B cylinder to avoid wear on the belt after stopping the movement, and at the same time prevent the vibration of the pallet 2 from affecting the industrial robot arm 1 to grasp the IGBT module.

[0027] In this embodiment, if Figure 1 , 2As shown in FIG. 4 , a C oil cylinder is fixed on the frame of the discharging section 10, and a C positioning plate is fixed on the piston rod of the C oil cylinder. The C positioning plate is used to position the pallet 2 at the end of the discharging section 10. The empty pallet 2 coming down from the stacking section 9 is stopped at the end of the discharging section 10 by the blocking cylinder 11, and then is lifted to be separated from the assembly line by the action of the C oil cylinder to avoid wear of the belt after stopping the movement, and to prevent the vibration of the pallet 2 from affecting the industrial robot arm 1 to put the IGBT module that has been tested OK back into the pallet 2.

[0028] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art may still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. IGBT module reactive power test loading and unloading equipment, comprising an assembly line, an industrial robot arm (1) and a defective product conveying mechanism, wherein the industrial robot arm (1) and the defective product conveying mechanism are respectively installed on both sides of the assembly line, the assembly line is used to convey a tray (2), the IGBT module is placed in the tray (2), and the industrial robot arm (1) is used to grab the IGBT module to the test equipment, characterized in that: The defective product conveying mechanism comprises a belt conveyor (3), a supporting platform (4) and a linear slide (5); the belt conveyor (3) and the assembly line have the same conveying direction; the belt conveyor (3) is in a plurality and distributed in a vertical direction; the supporting platform (4) is raised and lowered by the linear slide (5); the linear slide (5) is fixed at the feeding end of the belt conveyor (3); a U-shaped receiving arm (6) is slidably mounted on the supporting platform (4); the receiving arm (6) slides along the conveying direction of the assembly line; a cylinder (7) is also fixed on the supporting platform (4); the cylinder (7) is used to drive the receiving arm (6) to move.

2. The IGBT module reactive power test loading and unloading equipment according to claim 1, characterized in that: The assembly line is a belt conveyor, and is composed of a feeding section (8), a stacking section (9), and a discharging section (10). Blocking cylinders (11) are installed between the feeding section (8) and the stacking section (9), between the stacking section (9) and the discharging section (10), and at the end of the discharging section (10). A stacking frame (12) is fixed on the frame of the stacking section (9). A slidable A top plate (13) is installed in the stacking frame (12). The A top plate (13) is used to support The empty pallet (2) is loaded, and an A oil cylinder is fixed on the frame of the stacking section (9) below the stacking frame (12), and the empty pallet (2) on the A top plate (13) is pushed into the stacking frame (12) by the A oil cylinder. A limit cylinder (14) is also fixed on the frame of the stacking section (9), and a limit plate (15) is fixed on the piston rod of the limit cylinder (14). The limit plate (15) is used to be stuck under the pallet (2) that slides into the stacking frame (12).

3. The IGBT module reactive power test loading and unloading equipment according to claim 1, characterized in that: The industrial robot arm (1) is slidably mounted on one side of the assembly line via a rodless cylinder (16), and the industrial robot arm (1) slides along the conveying direction of the assembly line.

4. The IGBT module reactive power test loading and unloading equipment according to claim 2, characterized in that: A B oil cylinder is fixed on the frame of the feeding section (8), and a B positioning plate is fixed on the piston rod of the B oil cylinder. The B positioning plate is used to position the tray (2) at the end of the feeding section (8).

5. The IGBT module reactive power test loading and unloading equipment according to claim 2 or 4, characterized in that: A C oil cylinder is fixed on the frame of the discharge section (10), a C positioning plate is fixed on the piston rod of the C oil cylinder, and the C positioning plate is used to position the tray (2) at the end of the discharge section (10).

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