Magnetic control target gun

Abstract

The utility model relates to a magnetic control target gun which comprises a target material, a magnetic part, a first water path part and a second water path part, the first water path part is integrally formed, a first containing groove is formed in the top end of the first water path part, a second containing groove is formed in the bottom end of the first water path part, the second water path part is arranged in the second containing groove, and a water flow channel is formed in the bottom end of the second water path part. The water flow channel is communicated with the second accommodating groove; the top end of the first water path piece makes contact with the target material, part of the magnetic piece is arranged in the first containing groove, water can rush into the water flow channel through the second water path piece, flows between the first water path piece and the second water path piece and then flows out of the second water path piece, and then heat transmitted to the first water path piece by the target material can be taken away. Therefore, the number of parts can be reduced, the structure is simple, assembly is convenient, and cost can be reduced.

Description

Technical Field

[0001] The utility model relates to the field of magnetron sputtering, in particular to a magnetron target gun. Background Art

[0002] Magnetron sputtering is a commonly used physical vapor deposition method with many advantages, such as low deposition temperature, fast deposition speed, good uniformity of the deposited thin film, and composition close to the target material. In the coating process of vacuum coating equipment, the magnetron target gun is a key component in the coating system, and its performance directly determines the quality of the equipment. Existing magnetron target guns usually require multiple parts to be brazed, which is difficult to process, complex in structure, and high in manufacturing cost. Utility Model Content

[0003] Based on this, it is necessary to provide a magnetically controlled target gun, which has the advantages of simple structure and convenient assembly, while being able to reduce costs.

[0004] A magnetron target gun comprises a target material, a magnetic component, a first water path component and a second water path component, wherein the first water path component is integrally formed, a first receiving groove is formed at the top end of the first water path component, and a second receiving groove is formed at the bottom end, the second water path component is arranged in the second receiving groove, a water flow channel is opened at the bottom end of the second water path component, and the water flow channel is connected to the second receiving groove; the top end of the first water path component contacts the target material, and part of the magnetic component is arranged in the first receiving groove.

[0005] The magnetron target gun provided in the present application includes a target material, a magnetic component, a first water path component and a second water path component. The first water path component is integrally formed, and a first receiving groove is formed at the top end and a second receiving groove is formed at the bottom end. The second water path component is arranged in the second receiving groove. A water flow channel is opened at the bottom end of the second water path component, and the water flow channel is connected to the second receiving groove. The top end of the first water path component contacts the target material, and part of the magnetic component is arranged in the first receiving groove. Water can rush into the water flow channel through the second water path component, and after flowing between the first water path component and the second water path component, it flows out from the second water path component, thereby taking away the heat transferred from the target material to the first water path component. The magnetron target gun structure is integrally formed, which can reduce the number of parts, has the advantages of simple structure and convenient assembly, and can also reduce costs.

[0006] In one embodiment, the bottom edge of the second water channel member and the notch edge of the second accommodating groove are fixed by welding.

[0007] In one embodiment, a water inlet and a water outlet are formed at the bottom end of the second water channel member, and the water inlet, the water outlet and the second accommodating cavity together form the water flow channel.

[0008] In one embodiment, a water inlet guide groove and a water outlet guide groove are provided on the outer side of the second water path member, the water inlet is connected to the water inlet guide groove, the water outlet is connected to the water outlet guide groove, and a guide channel is formed between the top of the second water path member and the bottom of the second accommodating groove, and the guide channel connects the water inlet guide groove and the water outlet guide groove.

[0009] In one embodiment, a third accommodating groove is provided at the top of the second water channel member, the water inlet, the water outlet, the water inlet guide groove and the water outlet guide groove are all connected to the third accommodating groove, the bottom protrusion of the second accommodating groove forms an inner cylinder, the inner cylinder is placed in the third accommodating groove, the top edge of the inner cylinder forms a first inner groove and a second inner groove, the first inner groove connects the water inlet and the water inlet guide groove, and the second inner groove connects the water outlet and the water outlet guide groove.

[0010] In one embodiment, an insulating plate is included, the bottom of the second water channel member is arranged on the insulating plate, a sealing ring is arranged between the bottom of the second water channel member and the insulating plate, and the sealing ring is located at the periphery of the water inlet and the water outlet.

[0011] In one embodiment, a flange base is included, the insulating plate is arranged on the flange base, and a sealing ring is arranged between the insulating plate and the flange base.

[0012] In one embodiment, the magnetic component includes a middle magnet and an external magnet, the middle magnet is arranged in the first receiving groove, the external magnet is located on the outside of the first water path component, the external magnet is spaced apart from the internal magnet through the first water path component, and the target material covers the first receiving groove.

[0013] In one embodiment, an anode cover is further included, wherein the anode cover covers the target material and the magnetic member.

[0014] In one embodiment, a base is included, the anode cover is fixed to the base, and the target material, the magnetic member, the first water channel member and the second water channel member are fixed between the anode cover and the base. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0016] Figure 1 A schematic diagram of a magnetically controlled target gun provided in one embodiment of the present application;

[0017] Figure 2 A first schematic diagram of a partial structure of a magnetically controlled target gun provided in one embodiment of the present application;

[0018] Figure 3 A second schematic diagram of a partial structure of a magnetically controlled target gun provided in one embodiment of the present application.

[0019] Reference numerals: magnetron target gun 10; target material 20; magnetic member 30; middle magnet 31; external magnet 32; first waterway member 40; first accommodating groove 41; second accommodating groove 42; inner cylinder 421; water flow channel 43; third accommodating groove 44; first inner groove 441; second inner groove 442; guide channel 45; second waterway member 50; water inlet 51; water outlet 52; water inlet guide groove 53; water outlet guide groove 54; insulating plate 60; sealing ring 61; flange base 70; anode cover 80; base 90 DETAILED DESCRIPTION

[0020] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0021] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0022] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0024] The principle of sputtering coating is to generate sputtering by bombarding the target material 20 with particles, and the target material 20 ejects atoms or ions toward the substrate, which are deposited on the substrate to form a film layer. Magnetron sputtering is to add a magnetic field during the bipolar glow discharge, and the electrons are accelerated by the electric field and bound by the magnetic field at the same time, and move in a cycloidal manner, which increases the collision frequency between the electrons and the target material 20 particles and the working gas ions, and the degree of ionization of the working gas is increased, and the working gas pressure is reduced accordingly, and the working gas ions are accelerated by the electric field, impacting the target material 20 and releasing energy, so that the target material 20 ejects target material 20 atoms or ions, and deposits a film layer on the surface of the substrate. Magnetron sputtering technology has become one of the most important deposition coating methods. It is widely used in industrial production and scientific research. For example, in the modern mechanical processing industry, magnetron sputtering technology is used to coat functional films, superhard films, and self-lubricating films on the surface of workpieces. In the field of optics, magnetron sputtering technology is used to prepare anti-reflection films, low-radiation films, transparent conductive films, thermal insulation films, etc. Magnetron sputtering technology also plays an important role in the fields of microelectronics and optical and magnetic recording. However, magnetron sputtering technology also has its own shortcomings, such as low utilization rate of target material 20, low deposition rate and low ionization rate. The utilization rate of target material 20 is due to the presence of the target surface runway, which constrains the plasma to a local area of ​​the target surface, resulting in regional sputtering of target material 20. The shape of the runway is determined by the magnetic field structure behind the target material 20. The key to improving the utilization rate of target material 20 is to adjust the magnetic field structure so that the plasma exists in a larger target surface range and achieve uniform sputtering of the target surface. For magnetron sputtering, the sputtering yield can be increased by increasing the target power, but due to the influence of thermal load, the target material 20 may melt and crack. Existing magnetron target guns usually require multiple parts to be brazed, which is difficult to process, complex in structure and high in manufacturing cost. Therefore, there is an urgent need for a magnetron target gun with a simple structure, easy to assemble and low manufacturing cost.

[0025] refer to Figure 1 and Figure 2In order to solve the above problems, the embodiment of the present application provides a magnetron target gun 10, including a target material 20, a magnetic component 30, a first water channel component 40 and a second water channel component 50, wherein the first water channel component 40 is integrally formed, and the first water channel component 40 forms a first receiving groove 41 at the top and a second receiving groove 42 at the bottom, and the second water channel component 50 is arranged in the second receiving groove 42, and a water flow channel 43 is opened at the bottom of the second water channel component 50, and the water flow channel 43 is connected to the second receiving groove 42; the top of the first water channel component 40 contacts the target material 20, and part of the magnetic component 30 is arranged in the first receiving groove 41.

[0026] In the magnetron target gun 10, the magnetron target gun 10 includes a target material 20, a magnetic part 30, a first water channel part 40 and a second water channel part 50. The target material 20 is a sputtering source that forms various functional films on a substrate by sputtering under appropriate process conditions through magnetron sputtering, multi-arc ion plating or other types of coating systems. The target material 20 is the target material bombarded by high-speed energetic particles. When lasers of different power densities, different output waveforms, and different wavelengths interact with different target materials 20, different killing and destructive effects will be produced. For example: evaporation magnetron sputtering coating is heating evaporation coating, aluminum film, etc. Different film systems can be obtained by replacing different target materials 20, and a loop can be formed between the magnetic parts 30, thereby playing a role in confining electrons. The first water circuit member 40 is integrally formed, which is different from the brazing sealing of the connection between the power block and the water inlet pipe, the ceramic insulating block, and the water outlet pipe in the prior art. The brazing sealing method in the prior art is difficult to process, has a complex structure, and has a high manufacturing cost. The integrally formed first water circuit member 40 of the magnetron target gun 10 solves the problems of the prior art that the processing is difficult, the structure is complex, and the manufacturing cost is high. The integrally formed first water circuit member 40 has a simple structure and is easy to assemble, which can reduce the cost. The top of the first water circuit member 40 forms a first receiving groove 41, and the first receiving groove 41 can accommodate part of the magnetic member 30. In some embodiments, the magnetic member 30 can be a magnet, and an intermediate magnet 31 can be placed in the first receiving groove 41, and an external magnet 32 ​​can be placed outside the first receiving groove 41. The external magnet 32 ​​can form a loop with the intermediate magnet 31 in the first receiving groove 41, thereby playing a role in confining electrons. Correspondingly, the intermediate magnet 31 can form a loop with the external magnet 32, thereby playing a role in confining electrons. The first water path component 40 forms a second receiving groove 42 at the bottom end, and the second water path component 50 is arranged in the second receiving groove 42. A water flow channel 43 is opened at the bottom end of the second water path component 50, and the water flow channel 43 is connected with the second receiving groove 42. Water can rush into the water flow channel 43 through the second water path component 50, and after flowing in the water flow channel 43 between the first water path component 40 and the second water path component 50, it flows out from the second water path component 50, and then can take away the heat transferred from the target material 20 to the first water path component 40, which has the function of cooling the target material 20 and transferring high voltage electricity to the target material 20. In some embodiments, the first water circuit member 40 and the second water circuit member 50 are welded to form a cooling water loop between the first water circuit member 40 and the second water circuit member 50. The cooling water can enter the above-mentioned cooling device through the water inlet 51 and flow out from the water outlet 52. When the upper surface of the first water circuit member 40 contacts the target material 20, the cooling water can transfer the heat of the target material 20 to the outside of the magnetron target gun 10 through heat conduction, thereby achieving a cooling effect. At the same time, the magnetron target gun 10 is integrally formed, which can reduce the number of parts and has the advantages of simple structure and convenient assembly, while reducing costs.

[0027] refer to Figure 1 and Figure 2 The bottom edge of the second waterway member 50 and the notch edge of the second receiving groove 42 are fixed by welding, so that the bottom edge of the second waterway member 50 and the notch edge of the second receiving groove 42 can be sealed. In some embodiments, the bottom edge of the second waterway member 50 and the notch edge of the second receiving groove 42 can be connected by brazing. Brazing is a method of connecting two or more metal parts by heating the filler metal and the base material. After the brazing material below the melting point of the weldment and the weldment are heated to the melting temperature of the brazing material at the same time, the gap of the solid workpiece is filled with liquid brazing material to connect the metals. During the operation, when brazing, the oxide film and oil stains on the contact surface of the base material must be removed first, so as to facilitate the capillary to play a role after the brazing material melts, and increase the wettability and capillary fluidity of the brazing material. According to the different melting points of the brazing material, brazing is divided into hard soldering and soft soldering. In some embodiments, the bottom edge of the second water channel member 50 and the notch edge of the second receiving groove 42 can be connected by argon arc welding. Argon arc welding is a welding technique that uses electric arc to heat the filler metal and the base material to achieve welding. Based on the principle of ordinary arc welding, it uses argon gas to protect the metal welding material, and uses high current to melt the welding material into a liquid on the welded base material to form a molten pool, so that the welded metal and the welding material can achieve metallurgical bonding. Since argon gas is continuously supplied during high-temperature molten welding, the welding material cannot contact the oxygen in the air, thereby preventing the oxidation of the welding material, so stainless steel and iron hardware metals can be welded. Through the above-mentioned welding fixation, the second water channel member 50 can be sealed and connected with the second receiving groove 42, so that the cooling water in the magnetron target gun 10 can transfer the heat of the target material 20 to the outside of the magnetron target gun 10 through heat conduction, thereby achieving a cooling effect.

[0028] Continue to refer Figure 1 and Figure 2The bottom of the second water channel member 50 is provided with a water inlet 51 and a water outlet 52, and the water inlet 51, the water outlet 52 and the second accommodating chamber together form a water flow channel 43. The bottom of the second water channel member 50 is provided with a water inlet 51 for allowing water to enter the magnetron target gun 10, and the water outlet 52 opened at the bottom of the second water channel member 50 is used to discharge water to the outside of the magnetron target gun 10, wherein the water inlet 51, the water outlet 52 and the second accommodating chamber together form a water flow channel 43 to provide a flow space for water, and the water flow can The water flows through the water flow channel 43 in the magnetron target gun 10. In some embodiments, the water entering the magnetron target gun 10 can be cooling water. After the cooling water enters from the water inlet 51, it can flow in the water flow channel 43 in the magnetron target gun 10. The flowing cooling water can contact the target material 20. Through heat conduction, the heat of the target material 20 can be transferred to the flowing water through the flowing cooling water, and then the heat is discharged to the outside of the magnetron target gun 10 through the water outlet 52, thereby achieving a cooling effect. In some embodiments, a water inlet guide groove 53 and a water outlet guide groove 54 are formed on the outer side of the second water path member 50, the water inlet 51 is connected to the water inlet guide groove 53, and the water outlet 52 is connected to the water outlet guide groove 54. A guide channel 45 is formed between the top of the second water path member 50 and the bottom of the second accommodating groove 42, and the guide channel 45 connects the water inlet guide groove 53 and the water outlet guide groove 54. The water inlet guide groove 53 is used to guide the water entering from the water inlet 51, and the water outlet guide groove 54 is used to guide the water discharged from the water outlet 52. The water inlet guide groove 53 and the water outlet guide groove 54 enable the water flow to flow smoothly to the water outlet 52 after flowing in the magnetron target gun 10. The water inlet 51 is connected to the water inlet guide groove 53, the water outlet 52 is connected to the water outlet guide groove 54, and a guide channel 45 is formed between the top of the second water channel member 50 and the bottom of the second accommodating groove 42. The above structural arrangement can realize the process of water cooling in the magnetron target gun 10, and transfer the heat of the target material 20 through heat conduction of cooling water, thereby achieving a cooling effect.

[0029] refer to Figure 1 , Figure 2 and Figure 3A third accommodating groove 44 is provided at the top of the second water channel member 50, and the water inlet 51, the water outlet 52, the water inlet guide groove 53 and the water outlet guide groove 54 are all connected to the third accommodating groove 44, which can ensure the circulation of water in the magnetron target gun 10. The bottom of the second accommodating groove 42 is convex to form an inner cylinder 421, and the inner cylinder 421 is placed in the third accommodating groove 44. The top edge of the inner cylinder 421 forms a first inner groove 441 and a second inner groove 442. The first inner groove 441 connects the water inlet 51 and the water inlet guide groove 53, and the second inner groove 442 connects the water outlet 52 and the water outlet guide groove 54, which can ensure the circulation of water in the magnetron target gun 10. The second accommodating groove 42 and the third accommodating groove 44 can be fixed in position, which is beneficial to the stability of the structure of the magnetron target gun 10, thereby ensuring the normal use of the magnetron target gun 10. The first inner groove 441 is connected to the water inlet 51 and the water inlet guide groove 53, so that the first inner groove 441, the water inlet 51 and the water inlet guide groove 53 are in a connected state. The second inner groove 442 is connected to the water outlet 52 and the water outlet guide groove 54, so that the second inner groove 442, the water inlet 51 and the water inlet guide groove 53 are in a connected state, thereby achieving the effect of cooling the inside of the magnetron target gun 10. In some embodiments, the water inlet guide groove 53 and the water outlet guide groove 54 may adopt different structures. Under different cooling structures during the water cooling process, the heat exchange efficiency of the magnetron target gun 10 may be different. Different structures can be set according to the requirements of the heat exchange efficiency of the magnetron target gun 10 during operation. In some embodiments, the cross-section of the water inlet guide groove 53 and the water outlet guide groove 54 can adopt a circular structure, that is, the water inlet guide groove 53 and the water outlet guide groove 54 can adopt a cylindrical structure. In some embodiments, the water inlet guide groove 53 and the water outlet guide groove 54 can be designed according to the heat dissipation requirements from the perspective of increasing the heat exchange area and increasing the turbulent effect of the water flow. At the same time, the cooling efficiency in the magnetron target gun 10 can be adjusted by changing the water flow inlet velocity. In some embodiments, the magnetron target gun 10 also includes an insulating plate 60, the bottom of the second water circuit component 50 is arranged on the insulating plate 60, and a sealing ring 61 is arranged between the bottom of the second water circuit component 50 and the insulating plate 60, and the sealing ring 61 is located at the periphery of the water inlet 51 and the water outlet 52. The insulating plate 60 can insulate the first water circuit component 40, the second water circuit component 50 and other structures from the flange base 70. In some embodiments, the insulating plate 60 can be made of a glue-like insulating material. The bottom of the second water circuit component 50 is arranged on the insulating plate 60, which can make the internal structure of the magnetron target gun 10 compact and simple in structure, which is conducive to reducing costs.The sealing ring 61 has the function of vacuum sealing. The sealing ring 61 is provided between the bottom of the second water channel member 50 and the insulating plate 60 to enable vacuum sealing between the bottom of the second water channel member 50 and the insulating member, which has the advantages of simple structure and convenient assembly. The sealing ring 61 is located at the periphery of the water inlet 51 and the water outlet 52 to prevent water from overflowing from the water inlet 51 and the water outlet 52 to the structure outside thereof, which is conducive to making the structural connection of the magnetron target gun 10 stable. At the same time, the sealing ring 61 is convenient to assemble and has low cost. In some embodiments, the sealing ring 61 can be a rubber sealing ring, such as a nitrile rubber sealing ring, which has the lowest cost and is conducive to reducing the manufacturing cost of the magnetron target gun 10.

[0030] Continue to refer Figure 1 , Figure 2 and Figure 3 The magnetron target gun 10 further includes a flange base 70, an insulating plate 60 is disposed on the flange base 70, a base flange is a component for connecting pipes and equipment, and is usually composed of two flanges and a sealing gasket, and the flange base 70 has a fixing function, and can fix the target gun head to the base 90. In some embodiments, the magnetic member 30 includes an intermediate magnet 31 and an external magnet 32, the intermediate magnet 31 is disposed in the first receiving groove 41, the external magnet 32 ​​is located outside the first water channel member 40, the external magnet 32 ​​is spaced apart from the internal magnet through the first water channel member 40, the target material 20 covers the first receiving groove 41, the external magnet 32 ​​can form a loop with the intermediate magnet 31 in the first receiving groove 41, thereby playing a role in confining electrons, and accordingly, the intermediate magnet 31 can form a loop with the external magnet 32, thereby playing a role in confining electrons. In some embodiments, the magnetron target gun 10 also includes an anode cover 80, which covers the target material 20 and the magnetic part 30. The anode cover 80 can shield the plasma and ensure the normal operation of the magnetron target gun 10. The magnetron target gun 10 also includes a base 90, and the anode cover 80 is fixed to the base 90. The target material 20, the magnetic part 30, the first water channel part 40 and the second water channel part 50 are fixed between the anode cover 80 and the base 90, which has the advantages of simple structure and convenient assembly.

[0031] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0032] The above embodiments only express several implementation methods of the utility model, and the descriptions are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A magnetic control target gun, characterized in that: It includes a target material, a magnetic component, a first water path component and a second water path component, the first water path component is integrally formed, the first water path component forms a first receiving groove at the top end, and forms a second receiving groove at the bottom end, the second water path component is arranged in the second receiving groove, and a water flow channel is opened at the bottom end of the second water path component, and the water flow channel is connected to the second receiving groove; the top end of the first water path component contacts the target material, and part of the magnetic component is arranged in the first receiving groove.

2. The magnetic control target gun according to claim 1, characterized in that: The bottom edge of the second water channel member and the notch edge of the second accommodating groove are fixed by welding.

3. The magnetic control target gun according to claim 1, characterized in that: A water inlet and a water outlet are formed at the bottom end of the second water channel member, and the water inlet, the water outlet and the second containing groove together form the water flow channel.

4. The magnetic control target gun according to claim 3, characterized in that: An inlet guide groove and an outlet guide groove are provided on the outer side surface of the second water path component, the water inlet is connected to the inlet guide groove, the water outlet is connected to the outlet guide groove, a guide channel is formed between the top of the second water path component and the bottom of the second accommodating groove, and the guide channel connects the inlet guide groove and the outlet guide groove.

5. The magnetic control target gun according to claim 4, characterized in that: A third accommodating groove is provided at the top of the second water channel member, the water inlet, the water outlet, the water inlet guide groove and the water outlet guide groove are all connected to the third accommodating groove, the bottom protrusion of the second accommodating groove forms an inner cylinder, the inner cylinder is placed in the third accommodating groove, the top edge of the inner cylinder forms a first inner groove and a second inner groove, the first inner groove connects the water inlet and the water inlet guide groove, and the second inner groove connects the water outlet and the water outlet guide groove.

6. The magnetic control target gun according to claim 3, characterized in that: It comprises an insulating plate, the bottom of the second water channel component is arranged on the insulating plate, a sealing ring is arranged between the bottom of the second water channel component and the insulating plate, and the sealing ring is located at the periphery of the water inlet and the water outlet.

7. The magnetic control target gun according to claim 6, characterized in that: It comprises a flange base, the insulating plate is arranged on the flange base, and a sealing ring is arranged between the insulating plate and the flange base.

8. The magnetic control target gun according to claim 1, characterized in that: The magnetic component includes a middle magnet and an external magnet. The middle magnet is arranged in the first receiving groove, and the external magnet is located outside the first water channel component. The external magnet is spaced apart from the middle magnet through the first water channel component, and the target material covers the first receiving groove.

9. The magnetic control target gun according to claim 1, characterized in that: Also included is an anode cover, which covers the target material and the magnetic member.

10. The magnetic control target gun according to claim 9, characterized in that: It comprises a base, the anode cover is fixed to the base, and the target material, the magnetic component, the first water channel component and the second water channel component are fixed between the anode cover and the base.

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