Heating source supply device

Abstract

The utility model provides a heating source supply device. The heating source supply device comprises a first input assembly, a second input assembly, a gasification assembly, a measurement assembly, a channel assembly and an output assembly. The first input assembly is used for inputting raw materials to be gasified into the gasification assembly, the second input assembly is used for inputting protective gas into a channel where gasified gas is located, and the measuring assembly is used for measuring the flow of the gasified gas. The measuring assembly comprises a flow meter, a flow meter containing cavity and a flow meter heating base, the flow meter containing cavity is used for containing the flow meter, the flow meter containing cavity is communicated with the flow meter heating base, and the flow meter heating base is used for heating the flow meter. Thus, through the structure, the durability of the flowmeter is remarkably improved, the requirement for manual operation is reduced through the automatic source adding function, the stability of tetraethoxysilane (TEOS) in the transportation process is guaranteed, and the efficiency and reliability of the whole production process are improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing, and in particular, to a heating source supply device. Background Art

[0002] Tetraethoxysilane, abbreviated as TEOS, is an organic silicon compound. In the semiconductor manufacturing industry, TEOS, as a key chemical vapor deposition (CVD) precursor, usually enters a vertical furnace or other reaction chamber in gaseous form, and has strict requirements on temperature and vacuum during its gaseous transportation. Flow meters are usually used to measure the flow of TEOS before TEOS enters a vertical furnace or other reaction chamber to ensure the stability of the TEOS reaction process. However, flow meters are susceptible to clogging by liquid TEOS, resulting in expensive flow meters that require professional maintenance and metering inspection, and maintenance resources are scarce. In addition, flow meter failures account for more than 70% of TEOS processes, resulting in long equipment downtime and serious chip line losses.

[0003] At the same time, when the original liquid in the equipment is insufficient, manual addition of the source is required, which is not only inefficient, but also may lead to risks such as operational errors or delays. Utility Model Content

[0004] In order to overcome the technical problems mentioned in the above technical background, an embodiment of the present application provides a heating source supply device, which includes a first input component, a second input component, a gasification component, a measurement component, a channel component and an output component;

[0005] The first input component, the second input component and the measuring component are connected to the gasification component through the channel component, and the measuring component is connected to the output component;

[0006] The first input component is used to input the raw material to be gasified into the gasification component, the second input component is used to input the protective gas into the channel where the gasified gas is located, and the measuring component is used to measure the flow rate of the gasified gas;

[0007] The measuring component comprises a flowmeter, a flowmeter accommodating cavity for placing the flowmeter, and a flowmeter heating base. The flowmeter accommodating cavity is communicated with the flowmeter heating base, and the flowmeter heating base is used to heat the flowmeter.

[0008] In a possible implementation, the channel assembly includes a first channel, a second channel, and a third channel, and the first channel is connected to the third channel;

[0009] Wherein, the first channel includes a first channel body and a channel heating layer covering the surface of the first channel body, and the channel heating layer is used to heat the gas in the first channel body.

[0010] In a possible implementation, the output component includes a first interface and a second interface, wherein the first interface is used to connect to a vertical furnace;

[0011] The measuring component includes a first end and a second end. The first end of the measuring component is connected to the second interface, and the second end is connected to the gasification component via the first channel.

[0012] In a possible implementation, the flow meter includes a measuring element and a measuring channel, the measuring element is arranged on one side of the measuring channel, and the measuring element is used to measure the flow rate of the gas flowing through the measuring channel;

[0013] The flow meter heating base includes a first side wall and a second side wall that are arranged opposite to each other, and a bottom wall for connecting the first side wall and the second side wall. The outer sides of the first side wall and the second side wall are respectively provided with a first accommodating groove and a second accommodating groove, and the outer side of the bottom wall is provided with a third accommodating groove. The first side wall, the second side wall and the bottom wall form a flow meter partial accommodating cavity for partially accommodating the flow meter.

[0014] In a possible implementation, the flow meter heating base further includes at least one heating rod, a first sensor and a second sensor, and at least one heating rod is evenly distributed in the first receiving groove, the second receiving groove and the third receiving groove;

[0015] The first sensor and the second sensor are disposed in the third containing groove, and the first sensor and the second sensor are connected to at least one of the heating rods.

[0016] In a possible implementation, the first input component includes a first input interface and a first output interface, the first input interface is used to connect to a source supply device, and the first output interface is connected to the gasification component via the second channel.

[0017] In a possible implementation, the second input component includes a second input interface and a second output interface, the second input interface is used to connect to the air supply device, and the second output interface is connected to the first channel via the third channel.

[0018] In a possible implementation, the gasification assembly includes a source bottle and a source bottle accommodating cavity that at least partially accommodates the source bottle, wherein a heating belt is provided between the source bottle and the source bottle accommodating cavity;

[0019] The heating belt includes a first heating belt and a second heating belt, the first heating belt wraps the bottom of the source bottle, and the second heating belt wraps the side wall of the source bottle.

[0020] In a possible implementation, the gasification component further includes a liquid level control unit, which is at least partially disposed in the source bottle, and is used to monitor the liquid level height in real time and provide a source addition signal.

[0021] In a possible implementation, the heating source supply device further includes a control component, and the control component includes a first control component, a second control component, a third control component, and a fourth control component;

[0022] The first control member is electrically connected to the channel heating layer of the channel assembly and is used to display and control the heating temperature of the channel heating layer;

[0023] The second control member is electrically connected to the first heating belt of the gasification assembly and is used to display and control the heating temperature of the first heating belt;

[0024] The third control member is electrically connected to the second heating belt of the gasification assembly and is used to display and control the heating temperature of the second heating belt;

[0025] The fourth control component is electrically connected to the first sensor and the second sensor of the measuring component, and is used to display and control the heating temperature of the heating rod of the measuring component.

[0026] Based on any of the above aspects, the heating source supply device provided in the embodiment of the present application significantly improves the durability of the flow meter, and reduces the need for manual operation through the automatic source addition function, thereby ensuring the stability of tetraethoxysilane (TEOS) during transportation and improving the efficiency and reliability of the entire production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 One of the partial structural schematic diagrams of a heating source supply device provided in this embodiment;

[0029] Figure 2 The second schematic diagram of a part of the structure of a heating source supply device provided in this embodiment;

[0030] Figure 3 The third schematic diagram of a part of the structure of a heating source supply device provided in this embodiment;

[0031] Figure 4 In this embodiment Figure 3 A partial structural diagram of

[0032] Figure 5 A fourth schematic diagram of a portion of the structure of a heating source supply device provided in this embodiment;

[0033] Figure 6 One of the schematic diagrams of a heating source supply device provided in this embodiment;

[0034] Figure 7 A second schematic diagram of a heating source supply device provided in this embodiment;

[0035] Figure 8 This is a third schematic diagram of a heating source supply device provided in this embodiment.

[0036] Icons: 10-heating source supply device, 20-first input component, 30-second input component, 40-gasification component, 50-measuring component, 60-channel component, 70-output component, 80-control component, 90-housing, 100-solid relay, 110-signal interface, 120-power interface, 200-first input interface, 210-first output interface, 300-second input interface, 310-second output interface, 400-source bottle, 410-source bottle accommodating chamber, 420-heating belt, 4201-first heating belt, 4202-second heating belt, 430-liquid level control unit, 500-flow meter, 5001-measuring piece, 5002-measuring channel, 510-flow meter accommodating chamber, 520-flow meter heating base, 5201-first side wall, 5202-second side wall, 5203-bottom wall, 5204-first accommodating groove, 5205-second accommodating groove, 5206-third accommodating groove, 5207-flow meter partial accommodating chamber, 5208-heating rod, 5209-first sensor, 5210-second sensor, 600-first channel, 6001-first channel body, 6002-channel heating layer, 6003-second pneumatic valve, 610-second channel, 630-third channel, 6301-first pneumatic valve, 700-first interface, 710-second interface, 800-first control element, 810-second control element, 820-third control element, 830-fourth control element. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0038] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0039] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0040] In the description of this application, it should be noted that the terms "upper", "lower", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of the application is usually placed when in use, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0041] It should be noted that, in the absence of conflict, different features in the embodiments of the present application may be combined with each other.

[0042] In order to solve the technical problems mentioned in the aforementioned background technology, the inventor innovatively designed the following technical solution, and the specific implementation solution of the present application will be described in detail below with reference to the accompanying drawings.

[0043] See also Figure 1 , Figure 1 The present invention provides a partial structural diagram of a heating source supply device 10 provided in this embodiment. The heating source supply device 10 includes a first input component 20, a second input component 30, a gasification component 40, a measurement component 50, a channel component 60 and an output component 70. The first input component 20, the second input component 30 and the measurement component 50 are connected to the gasification component 40 through the channel component 60, and the measurement component 50 is connected to the output component 70.

[0044] The first input component 20 is used to input the raw material to be gasified into the gasification component 40, the second input component 30 is used to input the protective gas into the channel where the gasified gas is located, and the measuring component 50 is used to measure the flow rate of the gasified gas, wherein the gasification component 40 is mainly used to heat and gasify the raw material.

[0045] The measuring component includes a flowmeter 500 , a flowmeter accommodating cavity 510 for placing the flowmeter 500 , and a flowmeter heating base 520 . The flowmeter accommodating cavity 510 is communicated with the flowmeter heating base 520 , and the flowmeter heating base 520 is used to heat the flowmeter 500 .

[0046] A flow meter is an instrument used to measure the flow of a fluid (liquid or gas) to ensure accurate distribution and control of the fluid. In this embodiment, the flow meter is mainly used to measure the flow of TEOS gas. The flow of TEOS gas is measured before it enters a vertical furnace or other chemical reaction chamber to ensure that the supply of TEOS during the reaction meets the process requirements, which helps to ensure the stability of the reaction process and avoid product quality problems caused by flow fluctuations.

[0047] In addition, in existing equipment, the flow meter is susceptible to clogging by liquid TEOS, resulting in expensive flow meters requiring professional repair and metering inspection. The flow meter heating base is used to heat the flow meter to prevent clogging caused by liquid in the flow meter's measurement channel, which also better extends the life of the flow meter and protects the flow meter from damage.

[0048] It is worth noting that the type and size of the flow meter 500 are not specifically limited in this embodiment, but need to be selected according to actual conditions.

[0049] Further, please see again Figure 1 , the channel assembly 60 includes a first channel 600, a second channel 610 and a third channel 620, and the first channel 600 is connected to the third channel 620;

[0050] Among them, see Figure 2 , Figure 2 Schematic diagram of the first channel 600 in this embodiment. The first channel 600 includes a first channel body 6001 and a channel heating layer 6002 covering the surface of the first channel body 6001 , and the channel heating layer 6002 is used to heat the gas in the first channel body 6001 .

[0051] In this embodiment, the first channel body 6001 carries vaporized TEOS. Heating the TEOS gas (that is, vaporized TEOS) can prevent TEOS from condensing in a low-temperature environment or forming droplets in the first channel body 6001, thereby ensuring that the gas reaches the reaction chamber smoothly and reducing its safety risks during transportation.

[0052] In this embodiment, the channel heating layer 6002 is wrapped around the outer wall of the first channel body 6001, and a heat-insulating sleeve can be provided outside the channel heating layer 6002 and fixed by a PVC raw plastic tape.

[0053] It is worth noting that the first channel 600, the second channel 610 and the third channel 620 can be made of white steel pipes (PE grade) to prevent the conveying medium from being contaminated.

[0054] For further information, please refer to Figure 1 The output assembly 70 includes a first interface 700 and a second interface 710. The first interface 700 is used to connect a vertical furnace or other reaction equipment. In this embodiment, the heating source supply device 10 can input TEOS gas to a vertical furnace, and can also provide TEOS gas to a vertical furnace of a non-TEOS process, which reflects the flexibility of the heating source supply device 10.

[0055] The measuring component 50 includes a first end and a second end, wherein the first end of the measuring component 50 is connected to the second interface 710, and the second end is connected to the gasification component 40 via the first channel 600. In this embodiment, the TEOS gas gasified in the gasification component 40 is transported to the first interface 700 via the first channel 600 and the measuring component 50.

[0056] For further information, please refer to Figure 1 and Figure 3 , Figure 3 Schematic diagram of the measuring assembly 50 in this embodiment. The flow meter 500 includes a measuring component 5001 and a measuring channel 5002. The measuring component 5001 is arranged on one side of the measuring channel 5002. The measuring component 5001 is used to measure the flow rate of the gas flowing through the measuring channel 5002. In this embodiment, the gasified gas in the gasification assembly 40 is transmitted to the measuring channel 5002 through the first channel 600, and the measuring component 5001 measures it. If the flow rate is too large, it may be due to improper process parameter settings, and it needs to be readjusted according to process requirements.

[0057] Please refer to Figure 4 , Figure 4Schematic diagram of the flow meter heating base 520 in this embodiment. The flow meter heating base 520 includes a first side wall 5201 and a second side wall 5202 that are arranged opposite to each other, and a bottom wall for connecting the first side wall 5201 and the second side wall 5202. In this embodiment, the first side wall 5201 and the second side wall 5202 are perpendicular to the bottom wall 5203.

[0058] The first side wall 5201 and the second side wall 5202 are respectively provided with a first accommodating groove 5204 and a second accommodating groove 5205, and the outer side of the bottom wall 5203 is provided with a third accommodating groove 5206. The first side wall 5201, the second side wall 5202 and the bottom wall 5203 form a flow meter partial accommodating cavity 5207 for partially accommodating the flow meter 500.

[0059] Further, please refer again to Figure 4 The flow meter heating base 520 also includes at least one heating rod 5208, a first sensor 5209 and a second sensor 5210, and at least one heating rod 5208 is evenly distributed in the first receiving groove 5204, the second receiving groove 5205 and the third receiving groove 5206.

[0060] In this embodiment, the heating rod 5208 may be in the shape of an elongated strip. The specific shape of the heating rod 5208 is not limited herein and is determined according to the shapes of the first receiving groove 5204 , the second receiving groove 5205 and the third receiving groove 5206 .

[0061] The first sensor 5209 and the second sensor 5210 are disposed in the third containing groove 5206, and the first sensor 5209 and the second sensor 5210 are connected to at least one of the heating rods 5208. In this embodiment, the first sensor 5209 and the second sensor 5210 may be thermocouples, the first sensor 5209 is used to measure the temperature of the heating rod 5208, and the second sensor 5210 controls the temperature of the heating rod 5208 by setting a threshold value, so as to prevent the flow meter from being damaged due to excessive temperature and affecting the measurement effect.

[0062] For further information, please refer to Figure 1 The first input component 20 includes a first input interface 200 and a first output interface 210 , the first input interface 200 is used to connect to a source supply device, and the first output interface 210 is connected to the gasification component 40 via the second channel 610 .

[0063] In this embodiment, a manual valve or a pressure reducing valve is provided at the first input interface 200 to input liquid TEOS into the gasification component 40 .

[0064] Further, please refer again to Figure 1 The second input component 30 includes a second input interface 300 and a second output interface 310 , the second input interface 300 is used to connect to the air supply device, and the second output interface 310 is connected to the first channel 600 via the third channel 620 .

[0065] In this embodiment, a manual valve or a pressure reducing valve is provided at the second input interface 300 to input protective gas into the heating source supply device 10. The gas stored in the gas supply device connected to the second input interface 300 may be nitrogen, which acts on the channel of gasified TEOS (that is, the first channel), and the nitrogen is used to purge the residual TEOS gas in the pipeline or detect the accuracy of the flow meter 500, which can ensure that TEOS is smoothly delivered into the vertical furnace or other reaction chambers, thereby ensuring the stability of the process.

[0066] For further information, please refer to Figure 5 The gasification component 40 includes a source bottle 400 and a source bottle accommodating cavity 410 that at least partially accommodates the source bottle 400, wherein a heating belt 420 is arranged between the source bottle 400 and the source bottle accommodating cavity 410, and the heating belt 420 is used to heat the source bottle 400.

[0067] The heating belt 420 includes a first heating belt 4201 and a second heating belt 4202. The first heating belt 4201 wraps the bottom of the source bottle 400, and the second heating belt 4202 wraps the side wall of the source bottle 400. Such a structure can form all-round heating for the source bottle 400, ensure that TEOS is evenly heated in the source bottle 400, heat the transformation process of TEOS from liquid to gas, and improve the gasification efficiency.

[0068] Further, please refer again to Figure 5 The gasification group 40 further includes a liquid level control unit 430, which is at least partially disposed in the source bottle 400, and is used for real-time monitoring of the liquid level height and providing a source addition signal.

[0069] In this embodiment, the liquid level control unit 430 may be an ultrasonic sensor type liquid level meter, a part of which is located inside the source bottle 400, and transmits high-frequency ultrasonic pulses into the source bottle 400 through an ultrasonic transmitter inside the ultrasonic sensor type liquid level meter. The emitted ultrasonic pulses will be reflected back when encountering the liquid surface, and then the liquid level inside the source bottle 400 is calculated.

[0070] Also, please refer to Figure 1 and Figure 5The third channel 630 is provided with a first pneumatic valve 6301 close to the gasification component 40 , and the first channel 600 is provided with a second pneumatic valve 6003 close to the gasification component 40 .

[0071] In this embodiment, the first pneumatic valve 6301 is used in conjunction with the liquid level control unit 430 to realize automatic control of the liquid level and automatic source addition. When the liquid level control unit 430 detects that the liquid level in the source bottle 400 is lower than the set minimum value, it can send a signal to the first pneumatic valve 6301, and the first pneumatic valve 6301 opens to input raw materials (TEOS stock solution) into the source bottle 400, thereby improving the automation level and operation efficiency of the heating source supply device 10.

[0072] In addition, the second pneumatic valve 6003 is used in conjunction with the flow meter 500 to achieve the function of TEOS gas flow control. When the flow meter 500 measures that the flow rate of TEOS gas in the measuring channel 5002 is too large, the flow meter 500 can send a signal to the second pneumatic valve 6001, and the second pneumatic valve 6003 controls the output flow rate of TEOS gas. It is worth noting that in this embodiment, the temperature of the source bottle 400 is set at 60°C, and the saturated vapor pressure at this temperature is not large. Therefore, the gasified TEOS gas in the source bottle 400 is usually output at a suitable flow rate.

[0073] For further information, please refer to Figure 1 , Figure 2 , Figure 4 , Figure 5 and Figure 6 , Figure 6 A front view of a heating source supply device provided in this embodiment. The heating source supply device 10 also includes a control component 80, and the control component 80 includes a first control component 800, a second control component 810, a third control component 820 and a fourth control component 830. The first control component 800 is electrically connected to the channel heating layer 6002 of the channel component 60, and is used to display and control the heating temperature of the channel heating layer 6002. The second control component 810 is electrically connected to the first heating belt 4201 of the gasification component 40, and is used to display and control the heating temperature of the first heating belt 4201. The third control component 820 is electrically connected to the second heating belt 4202 of the gasification component 40, and is used to display and control the heating temperature of the second heating belt 4202. The fourth control component 830 is electrically connected to the first sensor 5209 and the second sensor 5210 of the measurement component 50, and is used to display and control the heating temperature of the heating rod 5208 of the measurement component 50.

[0074] In this embodiment, the heating source device 10 further includes a housing 90, and the control assembly 80 is disposed on the shell wall of the housing 90. The first control component 800, the second control component 810, the third control component 820, and the fourth control component 830 may be composed of a heating indicator light and a temperature control meter, wherein the heating indicator light is used to display whether the connected component is in a heating state, and the temperature control meter is used to display the temperature of the connected component and control the temperature thereof.

[0075] For example, the first control component 800 is electrically connected to the channel heating layer 6002, can display the heating condition and temperature condition of the channel heating layer 6002, and can control the temperature of the first channel heating layer 6002 to prevent the transmission of TEOS gas from being affected by excessively high or low temperature.

[0076] The control component 80 provides a more intuitive interactive method, which can display the heating and temperature conditions of each component of the heating source device 10. It is a key component to ensure the safe, efficient and stable operation of the heating source device 10.

[0077] Also, please refer to Figure 7 , Figure 7 The left side view of a heating source device 10 provided in this embodiment. A solid-state relay 100 (SSR) is also provided inside the heating source device 10. In this embodiment, the solid-state relay 100 is a part of the control circuit, receiving signals and controlling the electrical load at their output end.

[0078] Also, please refer to Figure 8 , Figure 8 This is a rear view of a heating source device 10 provided in this embodiment. A signal interface 110 and a power interface 120 are also provided on the shell wall of the shell 90 of the heating source device 10. The signal interface 110 enables the heating source device 10 to transmit control signals, status information, monitoring data, etc. with other devices or control systems. The power interface 120 can provide necessary power for the components in the heating source device 10, such as the solid-state relay 100.

[0079] In summary, an embodiment of the present application provides a heating source supply device. The heating source supply device includes a first input component, a second input component, a gasification component, a measuring component, a channel component and an output component. The first input component is used to input the raw material to be gasified into the gasification component, the second input component is used to input the protective gas into the channel where the gasified gas is located, and the measuring component is used to measure the flow rate of the gasified gas. The measuring component includes a flowmeter, a flowmeter accommodating chamber for placing the flowmeter, and a flowmeter heating base, the flowmeter accommodating chamber is connected to the flowmeter heating base, and the flowmeter heating base is used to heat the flowmeter. In this way, through the above structure, the durability of the flowmeter is significantly improved, and the need for manual operation is reduced through the automatic source addition function, thereby ensuring the stability of tetraethoxysilane (TEOS) during transportation and improving the efficiency and reliability of the entire production process.

[0080] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A heating source supply device, characterized in that: The heating source supply device includes a first input component, a second input component, a gasification component, a measurement component, a channel component and an output component; The first input component, the second input component and the measuring component are connected to the gasification component through the channel component, and the measuring component is connected to the output component; The first input component is used to input the raw material to be gasified into the gasification component, the second input component is used to input the protective gas into the channel where the gasified gas is located, and the measuring component is used to measure the flow rate of the gasified gas; The measuring component comprises a flowmeter, a flowmeter accommodating cavity for placing the flowmeter, and a flowmeter heating base. The flowmeter accommodating cavity is communicated with the flowmeter heating base, and the flowmeter heating base is used to heat the flowmeter.

2. The heating source supply device according to claim 1, characterized in that: The channel assembly includes a first channel, a second channel and a third channel, and the first channel is connected to the third channel; Wherein, the first channel includes a first channel body and a channel heating layer covering the surface of the first channel body, and the channel heating layer is used to heat the gas in the first channel body.

3. The heating source supply device according to claim 2, characterized in that: The output assembly includes a first interface and a second interface, wherein the first interface is used to connect to a vertical furnace; The measuring component includes a first end and a second end. The first end of the measuring component is connected to the second interface, and the second end is connected to the gasification component via the first channel.

4. The heating source supply device according to claim 2, characterized in that: The flow meter comprises a measuring member and a measuring channel, wherein the measuring member is arranged at one side of the measuring channel, and the measuring member is used to measure the flow rate of the gas flowing through the measuring channel; The flow meter heating base includes a first side wall and a second side wall that are arranged opposite to each other, and a bottom wall for connecting the first side wall and the second side wall. The outer sides of the first side wall and the second side wall are respectively provided with a first accommodating groove and a second accommodating groove, and the outer side of the bottom wall is provided with a third accommodating groove. The first side wall, the second side wall and the bottom wall form a flow meter partial accommodating cavity for partially accommodating the flow meter.

5. The heating source supply device according to claim 4, characterized in that: The flow meter heating base further comprises at least one heating rod, a first sensor and a second sensor, and at least one heating rod is evenly distributed in the first containing groove, the second containing groove and the third containing groove; The first sensor and the second sensor are disposed in the third containing groove, and the first sensor and the second sensor are connected to at least one of the heating rods.

6. The heating source supply device according to claim 5, characterized in that: The first input component includes a first input interface and a first output interface, the first input interface is used to connect to a source supply device, and the first output interface is connected to the gasification component via the second channel.

7. The heating source supply device according to claim 6, characterized in that: The second input component includes a second input interface and a second output interface, the second input interface is used to connect to the air supply device, and the second output interface is connected to the first channel via the third channel.

8. The heating source supply device according to claim 7, characterized in that: The gasification assembly comprises a source bottle and a source bottle accommodating cavity for at least partially accommodating the source bottle, wherein a heating belt is provided between the source bottle and the source bottle accommodating cavity; The heating belt includes a first heating belt and a second heating belt, the first heating belt wraps the bottom of the source bottle, and the second heating belt wraps the side wall of the source bottle.

9. The heating source supply device according to claim 8, characterized in that: The gasification assembly further includes a liquid level control unit, which is at least partially disposed in the source bottle and is used to monitor the liquid level in real time and provide a source addition signal.

10. The heating source supply device according to claim 9, characterized in that: The heating source supply device further comprises a control component, wherein the control component comprises a first control component, a second control component, a third control component and a fourth control component; The first control member is electrically connected to the channel heating layer of the channel assembly and is used to display and control the heating temperature of the channel heating layer; The second control member is electrically connected to the first heating belt of the gasification assembly and is used to display and control the heating temperature of the first heating belt; The third control member is electrically connected to the second heating belt of the gasification assembly and is used to display and control the heating temperature of the second heating belt; The fourth control component is electrically connected to the first sensor and the second sensor of the measuring component, and is used to display and control the heating temperature of the heating rod of the measuring component.

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